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SG77617A1 - A system for removing surface contaminants on moulds used in semiconductor packaging tools - Google Patents

A system for removing surface contaminants on moulds used in semiconductor packaging tools

Info

Publication number
SG77617A1
SG77617A1 SG1997004554A SG1997004554A SG77617A1 SG 77617 A1 SG77617 A1 SG 77617A1 SG 1997004554 A SG1997004554 A SG 1997004554A SG 1997004554 A SG1997004554 A SG 1997004554A SG 77617 A1 SG77617 A1 SG 77617A1
Authority
SG
Singapore
Prior art keywords
semiconductor packaging
removing surface
surface contaminants
moulds used
packaging tools
Prior art date
Application number
SG1997004554A
Inventor
Lu Yong Feng
Song Wen Dong
Gow Cheng Pak
Chen Qiong
Tay Huck Wee
Hwa Teik Hing Thomas
Lim Lui Chin Dawn
Jason Ngin Yan Koon
Jason Sim Yak Hui
Original Assignee
Advanced Systems Automation
Inst Data Storage
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Systems Automation, Inst Data Storage filed Critical Advanced Systems Automation
Priority to SG1997004554A priority Critical patent/SG77617A1/en
Priority to PCT/SG1998/000057 priority patent/WO1999030844A1/en
Publication of SG77617A1 publication Critical patent/SG77617A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Laser Beam Processing (AREA)
SG1997004554A 1997-12-18 1997-12-18 A system for removing surface contaminants on moulds used in semiconductor packaging tools SG77617A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG1997004554A SG77617A1 (en) 1997-12-18 1997-12-18 A system for removing surface contaminants on moulds used in semiconductor packaging tools
PCT/SG1998/000057 WO1999030844A1 (en) 1997-12-18 1998-07-06 A system for removing surface contaminants on moulds used in semiconductor packaging tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG1997004554A SG77617A1 (en) 1997-12-18 1997-12-18 A system for removing surface contaminants on moulds used in semiconductor packaging tools

Publications (1)

Publication Number Publication Date
SG77617A1 true SG77617A1 (en) 2001-01-16

Family

ID=20429814

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997004554A SG77617A1 (en) 1997-12-18 1997-12-18 A system for removing surface contaminants on moulds used in semiconductor packaging tools

Country Status (2)

Country Link
SG (1) SG77617A1 (en)
WO (1) WO1999030844A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG96648A1 (en) * 2001-10-01 2003-06-16 Inst Data Storage Method and apparatus for deflashing of integrated circuit packages
DE102010025403A1 (en) 2009-07-23 2011-01-27 Luk Lamellen Und Kupplungsbau Beteiligungs Kg Method for producing a friction lining and friction lining
AT513222B1 (en) * 2012-08-03 2016-11-15 Haas Food Equipment Gmbh Method and device for cleaning baking surfaces
CN108856174A (en) * 2018-06-26 2018-11-23 苏州百旺模具模型有限公司 A kind of to maintain equipment for mold

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD242760A1 (en) * 1985-11-19 1987-02-11 Akad Wissenschaften Ddr METHOD FOR TESTING THE PURITY OF SUBSTRATE SURFACES AND CLEANING THE SAME
DE3721940A1 (en) * 1987-07-02 1989-01-12 Ibm Deutschland REMOVAL OF PARTICLES FROM SURFACES OF SOLID BODY BY LASER Bombardment
US5023424A (en) * 1990-01-22 1991-06-11 Tencor Instruments Shock wave particle removal method and apparatus
US5373140A (en) * 1993-03-16 1994-12-13 Vernay Laboratories, Inc. System for cleaning molding equipment using a laser
IT1282722B1 (en) * 1996-03-01 1998-03-31 Pirelli METHOD AND APPARATUS FOR THE CLEANING OF VULCANIZATION MOLDS OF ELASTOMERIC MATERIAL ARTICLES

Also Published As

Publication number Publication date
WO1999030844A1 (en) 1999-06-24

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