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SG2013062120A - A system and method for inspection - Google Patents

A system and method for inspection

Info

Publication number
SG2013062120A
SG2013062120A SG2013062120A SG2013062120A SG2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A SG 2013062120 A SG2013062120 A SG 2013062120A
Authority
SG
Singapore
Prior art keywords
inspection
Prior art date
Application number
SG2013062120A
Inventor
Ah Kow Chin
Choong Fatt Ho
Victor Vertoprakhov
Soon Wei Wong
Original Assignee
Saedge Vision Solutions Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saedge Vision Solutions Pte Ltd filed Critical Saedge Vision Solutions Pte Ltd
Priority to SG2013062120A priority Critical patent/SG2013062120A/en
Priority to PCT/SG2014/000381 priority patent/WO2015023231A1/en
Publication of SG2013062120A publication Critical patent/SG2013062120A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
SG2013062120A 2013-08-14 2013-08-14 A system and method for inspection SG2013062120A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG2013062120A SG2013062120A (en) 2013-08-14 2013-08-14 A system and method for inspection
PCT/SG2014/000381 WO2015023231A1 (en) 2013-08-14 2014-08-13 A system and method for inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG2013062120A SG2013062120A (en) 2013-08-14 2013-08-14 A system and method for inspection

Publications (1)

Publication Number Publication Date
SG2013062120A true SG2013062120A (en) 2015-03-30

Family

ID=55167934

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2013062120A SG2013062120A (en) 2013-08-14 2013-08-14 A system and method for inspection

Country Status (2)

Country Link
SG (1) SG2013062120A (en)
WO (1) WO2015023231A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114153001B (en) * 2021-12-30 2024-02-06 同方威视技术股份有限公司 Inspection system and inspection method for inspecting frozen products in goods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172005A (en) * 1991-02-20 1992-12-15 Pressco Technology, Inc. Engineered lighting system for tdi inspection comprising means for controlling lighting elements in accordance with specimen displacement
US5909302A (en) * 1996-08-02 1999-06-01 Guissin; Rami Staring scanner
IL149587A (en) * 2001-05-11 2005-11-20 Orbotech Ltd Optical inspection system employing a staring array scanner

Also Published As

Publication number Publication date
WO2015023231A1 (en) 2015-02-19

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