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SG11201911657PA - Floor-to-floor transport system and floor-to-floor transport method - Google Patents

Floor-to-floor transport system and floor-to-floor transport method

Info

Publication number
SG11201911657PA
SG11201911657PA SG11201911657PA SG11201911657PA SG11201911657PA SG 11201911657P A SG11201911657P A SG 11201911657PA SG 11201911657P A SG11201911657P A SG 11201911657PA SG 11201911657P A SG11201911657P A SG 11201911657PA SG 11201911657P A SG11201911657P A SG 11201911657PA
Authority
SG
Singapore
Prior art keywords
floor
transport
transport system
transport method
floor transport
Prior art date
Application number
SG11201911657PA
Inventor
Toshihiro Maeda
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201911657PA publication Critical patent/SG11201911657PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/56—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from inclined or vertical conveyor sections
    • B65G47/57—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from inclined or vertical conveyor sections for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66B—ELEVATORS; ESCALATORS OR MOVING WALKWAYS
    • B66B9/00—Kinds or types of lifts in, or associated with, buildings or other structures
    • B66B9/10—Kinds or types of lifts in, or associated with, buildings or other structures paternoster type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Structural Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
SG11201911657PA 2017-06-06 2018-05-07 Floor-to-floor transport system and floor-to-floor transport method SG11201911657PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017111474 2017-06-06
PCT/JP2018/017621 WO2018225435A1 (en) 2017-06-06 2018-05-07 Floor-to-floor transport system and floor-to-floor transport method

Publications (1)

Publication Number Publication Date
SG11201911657PA true SG11201911657PA (en) 2020-01-30

Family

ID=64567171

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201911657PA SG11201911657PA (en) 2017-06-06 2018-05-07 Floor-to-floor transport system and floor-to-floor transport method

Country Status (8)

Country Link
US (1) US11319153B2 (en)
EP (1) EP3636562B1 (en)
JP (1) JP6822562B2 (en)
KR (1) KR20200003104A (en)
CN (1) CN110740952B (en)
SG (1) SG11201911657PA (en)
TW (1) TW201902803A (en)
WO (1) WO2018225435A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3561517B1 (en) * 2018-04-25 2021-04-21 Aoi Seiki Co., Ltd. Holder transport apparatus
CN114787068B (en) * 2019-12-17 2024-01-30 现代木伟斯株式会社 Circulating type vertical conveying system for robot
CN115610914A (en) * 2020-05-26 2023-01-17 顾添裕 Multi-storey building material conveying device
JP7409284B2 (en) * 2020-10-22 2024-01-09 株式会社ダイフク Conveyance system
KR102869754B1 (en) * 2020-11-25 2025-10-10 세메스 주식회사 Transfer apparatus
JP7255615B2 (en) 2021-01-29 2023-04-11 村田機械株式会社 conveyor system
KR102859155B1 (en) 2021-09-23 2025-09-11 삼성전자주식회사 Interlayer transfer apparatus and physical distribution system including the same
JP7740155B2 (en) * 2022-07-28 2025-09-17 株式会社ダイフク Goods transport equipment
JP7704127B2 (en) * 2022-11-08 2025-07-08 株式会社ダイフク Goods handling equipment
JP2024124194A (en) * 2023-03-02 2024-09-12 株式会社ダイフク Goods handling equipment
WO2024262082A1 (en) * 2023-06-21 2024-12-26 村田機械株式会社 Inter-floor conveyance device and inter-floor conveyance system including the same

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135010A (en) 1982-02-02 1983-08-11 Daifuku Co Ltd Lift conveyer device
JPS61148875U (en) * 1985-03-05 1986-09-13
WO2004001582A1 (en) 2002-06-19 2003-12-31 Brooks Automation, Inc. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
JP2004059223A (en) * 2002-07-29 2004-02-26 Murata Mach Ltd Article containing device
US20040101386A1 (en) * 2002-11-22 2004-05-27 Bellheimer Metallwerk Gmbh Vertical carousel with top and side access stations
JP2006111421A (en) * 2004-10-15 2006-04-27 Toyo Kanetsu Solutions Kk Conveyor system between floors
JP4910385B2 (en) * 2005-12-16 2012-04-04 ムラテックオートメーション株式会社 Vertical transfer device
JP2008120586A (en) * 2006-11-15 2008-05-29 Daifuku Co Ltd Article storage device
US7708135B2 (en) * 2007-10-25 2010-05-04 Restaurant Technology, Inc. Food transport system and method
JP5093586B2 (en) * 2007-12-04 2012-12-12 株式会社ダイフク Transport equipment
JP2010013250A (en) * 2008-07-04 2010-01-21 Asyst Technologies Japan Inc Conveyance system and computer program
NL1036672C2 (en) * 2009-03-06 2010-09-07 Nedpack Patenten B V DEVICE AND METHOD FOR TRANSFERRING GOODS.
US8977387B2 (en) 2009-10-29 2015-03-10 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for overhead cross-system transportation
ITMI20131763A1 (en) 2013-10-23 2015-04-24 Inpeco Holding Ltd DEVICE FOR THE TRANSFER OF SAMPLES OF BIOLOGICAL MATERIAL BETWEEN LABORATORY AUTOMATION PLACES PLACED AT DIFFERENT HEIGHTS.
JP2016204154A (en) * 2015-04-28 2016-12-08 村田機械株式会社 Lifting conveyance system, and transfer device
JP2017111474A (en) 2015-12-14 2017-06-22 大日本印刷株式会社 Information recording medium, network device control apparatus, and network device control system

Also Published As

Publication number Publication date
US11319153B2 (en) 2022-05-03
JP6822562B2 (en) 2021-01-27
CN110740952A (en) 2020-01-31
EP3636562A4 (en) 2021-05-26
US20200115160A1 (en) 2020-04-16
KR20200003104A (en) 2020-01-08
TW201902803A (en) 2019-01-16
EP3636562A1 (en) 2020-04-15
CN110740952B (en) 2021-11-23
WO2018225435A1 (en) 2018-12-13
EP3636562B1 (en) 2023-05-03
JPWO2018225435A1 (en) 2020-04-02

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