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SG11201802852RA - Ultrasound transducer and method of forming the same - Google Patents

Ultrasound transducer and method of forming the same

Info

Publication number
SG11201802852RA
SG11201802852RA SG11201802852RA SG11201802852RA SG11201802852RA SG 11201802852R A SG11201802852R A SG 11201802852RA SG 11201802852R A SG11201802852R A SG 11201802852RA SG 11201802852R A SG11201802852R A SG 11201802852RA SG 11201802852R A SG11201802852R A SG 11201802852RA
Authority
SG
Singapore
Prior art keywords
forming
same
ultrasound transducer
ultrasound
transducer
Prior art date
Application number
SG11201802852RA
Inventor
Xing Haw Marvin Tan
Yuandong Alex Gu
Liang Lou
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Publication of SG11201802852RA publication Critical patent/SG11201802852RA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/064—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface with multiple active layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/003—Cutting
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
SG11201802852RA 2015-10-21 2016-10-13 Ultrasound transducer and method of forming the same SG11201802852RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201508703U 2015-10-21
PCT/SG2016/050504 WO2017069701A1 (en) 2015-10-21 2016-10-13 Ultrasound transducer and method of forming the same

Publications (1)

Publication Number Publication Date
SG11201802852RA true SG11201802852RA (en) 2018-05-30

Family

ID=58557545

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201802852RA SG11201802852RA (en) 2015-10-21 2016-10-13 Ultrasound transducer and method of forming the same

Country Status (3)

Country Link
US (1) US11229927B2 (en)
SG (1) SG11201802852RA (en)
WO (1) WO2017069701A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016115260B3 (en) * 2016-08-17 2018-02-08 Infineon Technologies Ag SOUND WAVE SENSOR
CN110636421A (en) * 2019-09-09 2019-12-31 安徽奥飞声学科技有限公司 A kind of MEMS structure and manufacturing method thereof
WO2021095311A1 (en) * 2019-11-13 2021-05-20 株式会社村田製作所 Transducer
CN112261562A (en) * 2020-09-29 2021-01-22 瑞声科技（南京）有限公司 MEMS loudspeaker
CN118678257B (en) * 2024-08-23 2024-11-01 成都纤声科技有限公司 Acoustic function chip and microphone

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3007834A1 (en) * 1980-02-29 1981-09-17 Siemens AG, 1000 Berlin und 8000 München ELECTROACOUSTIC CONVERTER
US6359367B1 (en) 1999-12-06 2002-03-19 Acuson Corporation Micromachined ultrasonic spiral arrays for medical diagnostic imaging
GB0126372D0 (en) 2001-11-02 2002-01-02 1 Ltd Curved electro-active actuators
ITPR20020064A1 (en) * 2002-10-31 2004-05-01 Aeb Srl EQUALIZER, OR PHASE PLUG, FOR ELECTROACOUSTIC TRANSDUCERS.
CA2627927A1 (en) * 2005-11-02 2007-06-14 Visualsonics Inc. Arrayed ultrasonic transducer
CN101645484B (en) 2009-03-02 2011-01-05 中国科学院声学研究所 Soft support bridge type silicon micro-piezoelectric ultrasonic transducer chip and prepration method thereof
JP5491080B2 (en) * 2009-06-18 2014-05-14 国立大学法人 東京大学 microphone
DE102010009453A1 (en) * 2010-02-26 2011-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sound transducer for insertion in an ear
JP4924853B1 (en) * 2011-02-23 2012-04-25 オムロン株式会社 Acoustic sensor and microphone
SG10201407632UA (en) * 2013-11-26 2015-06-29 Agency Science Tech & Res Transducer and method for forming the same
EP3201122B1 (en) 2014-10-02 2022-12-28 InvenSense, Inc. Micromachined ultrasonic transducers with a slotted membrane structure
CN105170435B (en) 2015-09-23 2017-12-22 深圳先进技术研究院 High-frequency transducer and preparation method thereof

Also Published As

Publication number Publication date
US20180304309A1 (en) 2018-10-25
WO2017069701A1 (en) 2017-04-27
US11229927B2 (en) 2022-01-25

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