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SG11201605180TA - Transfer device and control method of transfer device - Google Patents

Transfer device and control method of transfer device

Info

Publication number
SG11201605180TA
SG11201605180TA SG11201605180TA SG11201605180TA SG11201605180TA SG 11201605180T A SG11201605180T A SG 11201605180TA SG 11201605180T A SG11201605180T A SG 11201605180TA SG 11201605180T A SG11201605180T A SG 11201605180TA SG 11201605180T A SG11201605180T A SG 11201605180TA
Authority
SG
Singapore
Prior art keywords
transfer device
control method
transfer
control
Prior art date
Application number
SG11201605180TA
Inventor
Junichi Ito
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201605180TA publication Critical patent/SG11201605180TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Control And Safety Of Cranes (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
SG11201605180TA 2014-01-07 2014-10-29 Transfer device and control method of transfer device SG11201605180TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014000964 2014-01-07
PCT/JP2014/078748 WO2015104887A1 (en) 2014-01-07 2014-10-29 Transfer device and control method of transfer device

Publications (1)

Publication Number Publication Date
SG11201605180TA true SG11201605180TA (en) 2016-08-30

Family

ID=53523729

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201605180TA SG11201605180TA (en) 2014-01-07 2014-10-29 Transfer device and control method of transfer device

Country Status (9)

Country Link
US (1) US9881824B2 (en)
EP (1) EP3093258B1 (en)
JP (1) JP6160711B2 (en)
KR (1) KR101829650B1 (en)
CN (1) CN105899444B (en)
IL (1) IL246504B (en)
SG (1) SG11201605180TA (en)
TW (1) TWI630166B (en)
WO (1) WO2015104887A1 (en)

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EP3460834B1 (en) * 2016-05-20 2020-08-05 Murata Machinery, Ltd. Transport vehicle and transport method
JP6620707B2 (en) * 2016-09-09 2019-12-18 株式会社ダイフク Goods transport equipment
DE102016121778A1 (en) * 2016-11-14 2018-05-17 Cl Schutzrechtsverwaltungs Gmbh Plant for the additive production of three-dimensional objects
JP6946965B2 (en) * 2017-11-22 2021-10-13 村田機械株式会社 Transport system
US10418263B2 (en) * 2018-01-20 2019-09-17 Boris Kesil Overhead transportation system for transporting objects between multiple work stations
EP3875332B1 (en) * 2018-10-29 2023-10-25 Murata Machinery, Ltd. Ceiling carrier and ceiling carrier system
JP7224728B2 (en) * 2019-04-23 2023-02-20 株式会社ディスコ Conveyor system
US11545379B2 (en) 2020-07-31 2023-01-03 Nanya Technology Corporation System and method for controlling semiconductor manufacturing equipment
CN112027542B (en) * 2020-08-21 2023-07-14 上海新创达半导体设备技术有限公司 Material clamping device of track trolley
KR102816212B1 (en) * 2020-11-02 2025-06-09 삼성디스플레이 주식회사 Window manufacturing system
KR102879574B1 (en) * 2022-08-09 2025-10-31 무라다기카이가부시끼가이샤 Ceiling carrier
CN116344423B (en) * 2023-05-29 2023-08-11 上海新创达半导体设备技术有限公司 Material handling crown block based on wireless power supply and control method thereof
JP2025009152A (en) * 2023-07-07 2025-01-20 株式会社ディスコ Transport vehicle

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Also Published As

Publication number Publication date
TW201540641A (en) 2015-11-01
IL246504B (en) 2020-06-30
US9881824B2 (en) 2018-01-30
WO2015104887A1 (en) 2015-07-16
KR101829650B1 (en) 2018-02-19
KR20160095062A (en) 2016-08-10
EP3093258A4 (en) 2017-08-09
EP3093258B1 (en) 2020-10-21
US20160329226A1 (en) 2016-11-10
JPWO2015104887A1 (en) 2017-03-23
EP3093258A1 (en) 2016-11-16
CN105899444A (en) 2016-08-24
JP6160711B2 (en) 2017-07-12
TWI630166B (en) 2018-07-21
IL246504A0 (en) 2016-08-31
CN105899444B (en) 2017-11-10

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