Classifications

• • G—PHYSICS
  • G06—COMPUTING OR CALCULATING; COUNTING
  • G06F—ELECTRIC DIGITAL DATA PROCESSING
  • G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
  • G06F13/38—Information transfer, e.g. on bus
  • G06F13/42—Bus transfer protocol, e.g. handshake; Synchronisation
  • G06F13/4204—Bus transfer protocol, e.g. handshake; Synchronisation on a parallel bus
  • G06F13/4221—Bus transfer protocol, e.g. handshake; Synchronisation on a parallel bus being an input/output bus, e.g. ISA bus, EISA bus, PCI bus, SCSI bus
• • G—PHYSICS
  • G06—COMPUTING OR CALCULATING; COUNTING
  • G06F—ELECTRIC DIGITAL DATA PROCESSING
  • G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
  • G06F13/14—Handling requests for interconnection or transfer
  • G06F13/20—Handling requests for interconnection or transfer for access to input/output bus
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67733—Overhead conveying

Landscapes

• Engineering & Computer Science (AREA)
• Theoretical Computer Science (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• General Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Computer Networks & Wireless Communication (AREA)
• Signal Processing (AREA)
• General Factory Administration (AREA)
• Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Applications Claiming Priority (3)

Publications (1)

Family

ID=50626960

Family Applications (1)

Country Status (8)

Families Citing this family (14)

Family Cites Families (22)

• 2013
  • 2013-06-10 WO PCT/JP2013/065949 patent/WO2014069029A1/en not_active Ceased
  • 2013-06-10 EP EP13852085.3A patent/EP2916345B1/en not_active Not-in-force
  • 2013-06-10 CN CN201380055040.XA patent/CN104737270B/en active Active
  • 2013-06-10 JP JP2014544339A patent/JP6036842B2/en active Active
  • 2013-06-10 KR KR1020157008390A patent/KR101642793B1/en active Active
  • 2013-06-10 SG SG11201503376TA patent/SG11201503376TA/en unknown
  • 2013-06-10 US US14/434,813 patent/US9880963B2/en active Active
  • 2013-10-31 TW TW102139545A patent/TWI573750B/en active

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