SG10201913568SA - Acoustic wave device with transverse mode suppression - Google Patents
Acoustic wave device with transverse mode suppressionInfo
- Publication number
- SG10201913568SA SG10201913568SA SG10201913568SA SG10201913568SA SG10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA
- Authority
- SG
- Singapore
- Prior art keywords
- acoustic wave
- wave device
- transverse mode
- mode suppression
- suppression
- Prior art date
Links
- 230000001629 suppression Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02889—Means for compensation or elimination of undesirable effects of influence of mass loading
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
- H03H9/14529—Distributed tap
- H03H9/14532—Series weighting; Transverse weighting
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/1457—Transducers having different finger widths
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6483—Ladder SAW filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6489—Compensation of undesirable effects
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862785919P | 2018-12-28 | 2018-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10201913568SA true SG10201913568SA (en) | 2020-07-29 |
Family
ID=71124317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201913568SA SG10201913568SA (en) | 2018-12-28 | 2019-12-27 | Acoustic wave device with transverse mode suppression |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US11368137B2 (en) |
| JP (1) | JP2020109957A (en) |
| SG (1) | SG10201913568SA (en) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11368137B2 (en) | 2018-12-28 | 2022-06-21 | Skyworks Solutions, Inc. | Acoustic wave device with transverse mode suppression |
| US12136910B2 (en) | 2019-06-07 | 2024-11-05 | Skyworks Solutions, Inc. | Acoustic wave resonator with patterned conductive layer for transverse mode suppression |
| US11451212B2 (en) | 2019-06-19 | 2022-09-20 | Skyworks Solutions, Inc. | Acoustic wave resonator with transverse spurious mode for filter steepness |
| US11705883B2 (en) | 2019-10-24 | 2023-07-18 | Skyworks Solutions, Inc. | Acoustic wave resonator with mass loading strip for suppression of transverse mode |
| US11552614B2 (en) | 2019-12-03 | 2023-01-10 | Skyworks Solutions, Inc. | Laterally excited bulk wave device with acoustic mirrors |
| CN112217490B (en) * | 2020-10-22 | 2021-09-14 | 展讯通信（上海）有限公司 | Laminated temperature compensation type surface acoustic wave resonator and packaging method |
| US20240039508A1 (en) * | 2020-12-23 | 2024-02-01 | HANGZHOU SAPPLAND MICROELECTRONICS TECHNOLOGY Co.,Ltd. | Surface Acoustic Wave Resonator and Manufacturing Method Therefor |
| CN112886938B (en) * | 2020-12-23 | 2022-04-26 | 杭州左蓝微电子技术有限公司 | Surface acoustic wave resonator capable of suppressing transverse mode and manufacturing method thereof |
| US12355423B2 (en) * | 2020-12-29 | 2025-07-08 | Skyworks Solutions, Inc. | Acoustic wave device with mass loading strip having tapered sidewall |
| US12301208B2 (en) | 2021-02-22 | 2025-05-13 | Skyworks Solutions, Inc. | Acoustic wave device with multi-layer interdigital transducer electrode |
| JP7627611B2 (en) * | 2021-04-30 | 2025-02-06 | 太陽誘電株式会社 | Acoustic Wave Resonators, Filters, and Multiplexers |
| CN117321915A (en) * | 2021-05-17 | 2023-12-29 | 株式会社村田制作所 | Piezoelectric body wave device |
| US12483221B2 (en) * | 2021-07-15 | 2025-11-25 | Skyworks Solutions, Inc. | Multilayer piezoelectric substrate device with partially recessed passivation layer |
| CN117581478A (en) * | 2021-07-21 | 2024-02-20 | 株式会社村田制作所 | Elastic wave device |
| CN117981221A (en) * | 2021-09-21 | 2024-05-03 | 株式会社村田制作所 | Elastic wave device |
| JP7364196B2 (en) * | 2021-09-24 | 2023-10-18 | 三安ジャパンテクノロジー株式会社 | Acoustic wave devices, modules |
| US20230103956A1 (en) * | 2021-10-04 | 2023-04-06 | Skyworks Solutions, Inc. | Stacked single mirror acoustic wave device and double mirror acoustic wave device |
| WO2023058767A1 (en) * | 2021-10-08 | 2023-04-13 | 株式会社村田製作所 | Elastic wave device |
| WO2023090172A1 (en) * | 2021-11-18 | 2023-05-25 | 株式会社村田製作所 | Elastic wave device |
| US20230179171A1 (en) | 2021-12-06 | 2023-06-08 | Skyworks Solutions, Inc. | Multi-band surface acoustic wave filters |
| US12483226B2 (en) | 2021-12-29 | 2025-11-25 | Skyworks Solutions, Inc. | Acoustic wave device with tilted multilayer interdigital transducer electrode |
| US20230223910A1 (en) * | 2022-01-13 | 2023-07-13 | Skyworks Solutions, Inc. | Method of making acoustic wave device with vertically mass loaded multi-layer interdigital transducer electrode for transverse mode suppression |
| US12355415B2 (en) | 2022-01-20 | 2025-07-08 | Skyworks Solutions, Inc. | Multi-band filter with suppressed shear horizontal mode |
| WO2023140354A1 (en) * | 2022-01-21 | 2023-07-27 | 株式会社村田製作所 | Elastic wave device and filter device |
| US12494766B2 (en) | 2022-03-02 | 2025-12-09 | Skyworks Solutions, Inc. | Acoustic wave device with interdigital transducer electrode having buffer layer |
| CN114679146B (en) * | 2022-03-29 | 2024-10-01 | 北京航天微电科技有限公司 | Preparation method of temperature compensation filter, temperature compensation filter and electronic equipment |
| US12500572B2 (en) | 2022-04-15 | 2025-12-16 | Skyworks Solutions, Inc. | Multiplexer formed on multi-layer piezoelectric substrate and temperature compensated surface acoustic wave device dies |
| WO2023229049A1 (en) * | 2022-05-26 | 2023-11-30 | 株式会社村田製作所 | Elastic wave device and filter device |
| CN119605080A (en) * | 2022-08-26 | 2025-03-11 | 株式会社村田制作所 | Elastic wave device |
| CN115149922B (en) * | 2022-09-01 | 2022-12-09 | 阿尔伯达(苏州)科技有限公司 | Structure for inhibiting transverse parasitic mode of acoustic coupling filter |
| CN119923795A (en) * | 2022-09-29 | 2025-05-02 | 株式会社村田制作所 | Elastic wave device |
| CN115296642B (en) * | 2022-10-08 | 2023-03-24 | 深圳新声半导体有限公司 | Surface acoustic wave resonator structure, forming method thereof and filter |
| CN116208119B (en) * | 2023-04-19 | 2023-07-14 | 深圳新声半导体有限公司 | Surface acoustic wave device and manufacturing method thereof |
| CN116979926B (en) * | 2023-09-01 | 2023-12-22 | 深圳新声半导体有限公司 | Surface acoustic wave resonator device, method of manufacturing the same, and filter |
| CN117097296B (en) * | 2023-10-18 | 2024-02-06 | 深圳新声半导体有限公司 | Surface acoustic wave resonator device, method of manufacturing the same, and filter |
| CN117424579B (en) * | 2023-12-13 | 2024-06-25 | 深圳新声半导体有限公司 | Surface acoustic wave resonator device, method of manufacturing the same, and filter |
| CN120825143A (en) * | 2025-09-16 | 2025-10-21 | 深圳飞骧科技股份有限公司 | Surface acoustic wave device |
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| US7576471B1 (en) | 2007-09-28 | 2009-08-18 | Triquint Semiconductor, Inc. | SAW filter operable in a piston mode |
| US8294331B2 (en) | 2009-09-22 | 2012-10-23 | Triquint Semiconductor, Inc. | Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities |
| DE102010005596B4 (en) | 2010-01-25 | 2015-11-05 | Epcos Ag | Electroacoustic transducer with reduced losses due to transversal emission and improved performance by suppression of transverse modes |
| TWI546910B (en) | 2010-02-26 | 2016-08-21 | 精材科技股份有限公司 | Chip package and method of manufacturing same |
| WO2012132238A1 (en) * | 2011-03-25 | 2012-10-04 | Panasonic Corporation | Acoustic wave device with reduced higher order transverse modes |
| WO2015007319A1 (en) | 2013-07-18 | 2015-01-22 | Epcos Ag | Electroacoustic transducer with improved suppression of unwanted modes |
| EP3235130A1 (en) | 2014-12-16 | 2017-10-25 | SnapTrack, Inc. | Electroacoustic transducer with improved suppression of unwanted modes |
| CN107615654B (en) | 2015-06-24 | 2020-08-21 | 株式会社村田制作所 | filter device |
| US10361678B2 (en) | 2015-12-14 | 2019-07-23 | Taiyo Yuden Co., Ltd. | Acoustic wave resonator, filter, and duplexer |
| DE112016005980B4 (en) | 2015-12-25 | 2024-08-22 | Murata Manufacturing Co., Ltd. | Device for elastic waves |
| DE102016105118A1 (en) | 2016-03-18 | 2017-09-21 | Snaptrack, Inc. | SAW device with reduced interference due to transversal and SH modes and RF filter with SAW device |
| JP6454299B2 (en) | 2016-05-13 | 2019-01-16 | 太陽誘電株式会社 | Elastic wave device |
| US10469050B2 (en) | 2016-08-19 | 2019-11-05 | Qorvo Us, Inc. | Guided acoustic wave device |
| KR102270389B1 (en) | 2017-02-08 | 2021-06-29 | 가부시키가이샤 무라타 세이사쿠쇼 | Acoustic wave devices, high-frequency front-end circuits and communication devices |
| WO2019139076A1 (en) | 2018-01-11 | 2019-07-18 | 株式会社村田製作所 | Acoustic wave device |
| US11368137B2 (en) | 2018-12-28 | 2022-06-21 | Skyworks Solutions, Inc. | Acoustic wave device with transverse mode suppression |
| US12136910B2 (en) | 2019-06-07 | 2024-11-05 | Skyworks Solutions, Inc. | Acoustic wave resonator with patterned conductive layer for transverse mode suppression |
-
2019
- 2019-12-20 US US16/723,990 patent/US11368137B2/en active Active
- 2019-12-24 JP JP2019233107A patent/JP2020109957A/en active Pending
- 2019-12-27 SG SG10201913568SA patent/SG10201913568SA/en unknown
-
2022
- 2022-05-25 US US17/824,800 patent/US12334902B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US12334902B2 (en) | 2025-06-17 |
| US11368137B2 (en) | 2022-06-21 |
| US20220286105A1 (en) | 2022-09-08 |
| US20200212876A1 (en) | 2020-07-02 |
| JP2020109957A (en) | 2020-07-16 |
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