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SG10201805737PA - Fluid containing member - Google Patents

Fluid containing member

Info

Publication number
SG10201805737PA
SG10201805737PA SG10201805737PA SG10201805737PA SG10201805737PA SG 10201805737P A SG10201805737P A SG 10201805737PA SG 10201805737P A SG10201805737P A SG 10201805737PA SG 10201805737P A SG10201805737P A SG 10201805737PA SG 10201805737P A SG10201805737P A SG 10201805737PA
Authority
SG
Singapore
Prior art keywords
containing chamber
fluid
separation film
containing member
fluid containing
Prior art date
Application number
SG10201805737PA
Inventor
Kawahara Nobuto
Mita Yutaka
Araki Yoshimasa
Hasegawa Noriyasu
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG10201805737PA publication Critical patent/SG10201805737PA/en

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Reciprocating Pumps (AREA)
  • Powder Metallurgy (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Ink Jet (AREA)

Abstract

SG0144 - OF THE DISCLOSURE FLUID CONTAINING MEMBER A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber. [Figure 1]
SG10201805737PA 2017-07-14 2018-07-03 Fluid containing member SG10201805737PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017138190 2017-07-14
JP2018094398A JP7171234B2 (en) 2017-07-14 2018-05-16 Fluid containing member

Publications (1)

Publication Number Publication Date
SG10201805737PA true SG10201805737PA (en) 2019-02-27

Family

ID=65353213

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201805737PA SG10201805737PA (en) 2017-07-14 2018-07-03 Fluid containing member

Country Status (3)

Country Link
JP (1) JP7171234B2 (en)
SG (1) SG10201805737PA (en)
TW (1) TWI693163B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7309433B2 (en) * 2019-04-25 2023-07-18 キヤノン株式会社 Storage device
JP7321755B2 (en) * 2019-04-26 2023-08-07 キヤノン株式会社 Discharge material filling device
JP7232737B2 (en) * 2019-08-07 2023-03-03 東京エレクトロン株式会社 Substrate processing equipment

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4024639B2 (en) 2002-10-16 2007-12-19 大日本スクリーン製造株式会社 Chemical liquid pump, piping system, substrate processing unit, substrate processing apparatus, chemical liquid discharging method, liquid distribution method, and substrate processing method
DE102004044744B4 (en) * 2004-09-16 2008-04-10 J. S. Staedtler Gmbh & Co. Kg Ink tank for automatic registration, writing and drawing positions
US7465042B2 (en) * 2005-12-05 2008-12-16 Silverbrook Research Pty Ltd Method of priming inkjet printhead
JP2013035248A (en) 2011-08-10 2013-02-21 Fujifilm Corp Image recording apparatus
JP6048004B2 (en) * 2012-07-23 2016-12-21 セイコーエプソン株式会社 cartridge
JP6362109B2 (en) * 2013-10-04 2018-07-25 キヤノン株式会社 Imprint apparatus and component manufacturing method
JP2016164961A (en) 2014-10-30 2016-09-08 キヤノン株式会社 Liquid ejection apparatus, nanoimprint apparatus, liquid storage tank for nanoimprint, method for producing cured product pattern, method for producing optical component, method for producing circuit board, method for producing mold for imprint
JP6494380B2 (en) * 2015-04-03 2019-04-03 キヤノン株式会社 Liquid ejecting apparatus, imprint apparatus and component manufacturing method

Also Published As

Publication number Publication date
TW201908143A (en) 2019-03-01
TWI693163B (en) 2020-05-11
JP7171234B2 (en) 2022-11-15
JP2019021908A (en) 2019-02-07

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