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SG10201604363WA - Scanning probe microscope - Google Patents

Scanning probe microscope

Info

Publication number
SG10201604363WA
SG10201604363WA SG10201604363WA SG10201604363WA SG10201604363WA SG 10201604363W A SG10201604363W A SG 10201604363WA SG 10201604363W A SG10201604363W A SG 10201604363WA SG 10201604363W A SG10201604363W A SG 10201604363WA SG 10201604363W A SG10201604363W A SG 10201604363WA
Authority
SG
Singapore
Prior art keywords
scanning probe
probe microscope
microscope
scanning
probe
Prior art date
Application number
SG10201604363WA
Inventor
Kazunori Ando
Original Assignee
Hitachi High Tech Science Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Science Corp filed Critical Hitachi High Tech Science Corp
Publication of SG10201604363WA publication Critical patent/SG10201604363WA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20—Sample handling devices or methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
SG10201604363WA 2015-06-02 2016-05-30 Scanning probe microscope SG10201604363WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015111872A JP6516569B2 (en) 2015-06-02 2015-06-02 Scanning probe microscope

Publications (1)

Publication Number Publication Date
SG10201604363WA true SG10201604363WA (en) 2017-01-27

Family

ID=56087194

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201604363WA SG10201604363WA (en) 2015-06-02 2016-05-30 Scanning probe microscope

Country Status (7)

Country Link
US (1) US9689893B2 (en)
EP (1) EP3101433A1 (en)
JP (1) JP6516569B2 (en)
KR (1) KR20160142229A (en)
CN (1) CN106229247B (en)
SG (1) SG10201604363WA (en)
TW (1) TWI669508B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6581790B2 (en) * 2015-03-25 2019-09-25 株式会社日立ハイテクサイエンス Scanning probe microscope
CN108168932A (en) * 2017-12-15 2018-06-15 江苏鲁汶仪器有限公司 Pinpoint slice systems and method
CN110631764B (en) * 2018-06-21 2025-09-16 清华大学 Structure is extended to dull and stereotyped sample frame for vacuum
JP6631674B1 (en) * 2018-10-16 2020-01-15 株式会社島津製作所 Surface analyzer
JP7323892B2 (en) 2019-11-28 2023-08-09 株式会社リガク Measuring airtight box, airtight device, measuring system and measuring device
US12379392B2 (en) * 2020-08-12 2025-08-05 Hitachi High-Tech Corporation Surface analysis device
KR102465470B1 (en) * 2020-12-27 2022-11-09 (주)코셈 Specimen mount loading structure of electron microscope provided with cross-section polisher, transfer unit and specimen mount holder provided therein
CN114791515B (en) * 2022-05-05 2024-08-09 安徽光智科技有限公司 A sample delivery device for ultra-high vacuum atomic force microscope
DE102022124933A1 (en) * 2022-09-28 2024-03-28 Carl Zeiss Multisem Gmbh Multi-beam particle microscope with improved beam tube
CN116798839B (en) * 2023-08-25 2023-11-07 国仪量子(合肥)技术有限公司 Sample feeding device of scanning electron microscope and scanning electron microscope

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0406413B1 (en) * 1987-08-12 1995-10-25 Olympus Optical Co., Ltd. Scanning type tunnel microscope
JP2960423B2 (en) * 1988-11-16 1999-10-06 株式会社日立製作所 Sample moving device and semiconductor manufacturing device
JP2612395B2 (en) * 1992-02-03 1997-05-21 株式会社島津製作所 Atmosphere control probe scanning microscope
JPH06186027A (en) * 1992-12-18 1994-07-08 Olympus Optical Co Ltd Atomic force microscope
JPH08129985A (en) * 1994-10-28 1996-05-21 Nikon Corp Scanning electron microscope
JPH1187445A (en) * 1997-09-11 1999-03-30 Hitachi Ltd Semiconductor inspection equipment
US6093930A (en) * 1998-04-02 2000-07-25 International Business Machnines Corporation Automatic probe replacement in a scanning probe microscope
JP3649913B2 (en) * 1998-07-17 2005-05-18 日本電子株式会社 Parent-child holder
US6085581A (en) * 1998-11-18 2000-07-11 Sandia Corporation Method for accurately positioning a device at a desired area of interest
JP4060017B2 (en) 1999-11-24 2008-03-12 東洋精機株式会社 Heating device
JP2001153760A (en) * 1999-11-30 2001-06-08 Shimadzu Corp Sample container for transport
JP2003114181A (en) * 2001-10-04 2003-04-18 Jeol Ltd Scanning probe microscope
JP2003142393A (en) * 2001-11-07 2003-05-16 Tokyo Seimitsu Co Ltd Electron beam exposure system
JP2003240753A (en) * 2002-02-20 2003-08-27 Horiba Ltd Optical scanning type apparatus for measuring two- dimensional distribution of concentration
JP2005234306A (en) * 2004-02-20 2005-09-02 Olympus Corp Microscopic observing apparatus
JP4364817B2 (en) * 2005-02-23 2009-11-18 エスアイアイ・ナノテクノロジー株式会社 Surface information measuring apparatus and surface information measuring method
JP4784931B2 (en) * 2006-02-09 2011-10-05 エスアイアイ・ナノテクノロジー株式会社 Sample holding mechanism and sample processing / observation device
US8371182B1 (en) * 2012-06-11 2013-02-12 Jacob Israelachvili Mounting systems for a surface forces apparatus
JP5758861B2 (en) * 2012-09-28 2015-08-05 株式会社日立ハイテクノロジーズ Thermally assisted magnetic head inspection method and thermally assisted magnetic head inspection device

Also Published As

Publication number Publication date
EP3101433A1 (en) 2016-12-07
CN106229247B (en) 2019-10-11
JP6516569B2 (en) 2019-05-22
US9689893B2 (en) 2017-06-27
US20160356810A1 (en) 2016-12-08
KR20160142229A (en) 2016-12-12
TW201706605A (en) 2017-02-16
JP2016223959A (en) 2016-12-28
TWI669508B (en) 2019-08-21
CN106229247A (en) 2016-12-14

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