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SG10201600680TA - Imprint apparatus and method of manufacturing article - Google Patents

Imprint apparatus and method of manufacturing article

Info

Publication number
SG10201600680TA
SG10201600680TA SG10201600680TA SG10201600680TA SG10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA
Authority
SG
Singapore
Prior art keywords
imprint apparatus
manufacturing article
article
manufacturing
imprint
Prior art date
Application number
SG10201600680TA
Inventor
Takemura Shun
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG10201600680TA publication Critical patent/SG10201600680TA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5833Measuring, controlling or regulating movement of moulds or mould parts, e.g. opening or closing, actuating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/585Measuring, controlling or regulating detecting defects, e.g. foreign matter between the moulds, inaccurate position, breakage
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5891Measuring, controlling or regulating using imaging devices, e.g. cameras
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/24Condition, form or state of moulded material or of the material to be shaped crosslinked or vulcanised
    • B29K2105/246Uncured, e.g. green
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3406Components, e.g. resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optics & Photonics (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
SG10201600680TA 2015-02-13 2016-01-28 Imprint apparatus and method of manufacturing article SG10201600680TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015026967A JP6525628B2 (en) 2015-02-13 2015-02-13 Imprint apparatus and method of manufacturing article

Publications (1)

Publication Number Publication Date
SG10201600680TA true SG10201600680TA (en) 2016-09-29

Family

ID=56620777

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201600680TA SG10201600680TA (en) 2015-02-13 2016-01-28 Imprint apparatus and method of manufacturing article

Country Status (6)

Country Link
US (1) US20160236381A1 (en)
JP (1) JP6525628B2 (en)
KR (1) KR102025975B1 (en)
CN (1) CN105892228B (en)
SG (1) SG10201600680TA (en)
TW (1) TWI564936B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6333039B2 (en) 2013-05-16 2018-05-30 キヤノン株式会社 Imprint apparatus, device manufacturing method, and imprint method
JP6315904B2 (en) * 2013-06-28 2018-04-25 キヤノン株式会社 Imprint method, imprint apparatus, and device manufacturing method
JP6942487B2 (en) * 2017-03-03 2021-09-29 キヤノン株式会社 Imprinting equipment, imprinting method, and article manufacturing method
US11681216B2 (en) * 2017-08-25 2023-06-20 Canon Kabushiki Kaisha Imprint apparatus, imprint method, article manufacturing method, molding apparatus, and molding method
JP6979845B2 (en) * 2017-10-11 2021-12-15 キヤノン株式会社 Imprint device and article manufacturing method
JP7015147B2 (en) * 2017-11-06 2022-02-02 キヤノン株式会社 Imprinting equipment and article manufacturing method
JP7558696B2 (en) * 2020-07-06 2024-10-01 キヤノン株式会社 Molding device and method for manufacturing article
CN114953403A (en) * 2021-02-18 2022-08-30 中兴通讯股份有限公司 Thermal forming device and method for flexible circuit board
JP2023175231A (en) 2022-05-30 2023-12-12 キヤノン株式会社 Molding equipment, molding method, and article manufacturing method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10319022B4 (en) * 2003-04-28 2009-10-15 Fette Gmbh Plant for the production of tablets
JP4217551B2 (en) * 2003-07-02 2009-02-04 キヤノン株式会社 Fine processing method and fine processing apparatus
JP5268239B2 (en) * 2005-10-18 2013-08-21 キヤノン株式会社 Pattern forming apparatus and pattern forming method
JP2011009250A (en) * 2009-06-23 2011-01-13 Toshiba Corp Substrate processing method, method of manufacturing semiconductor device and imprint device
NL2005430A (en) * 2009-11-24 2011-05-25 Asml Netherlands Bv Alignment and imprint lithography.
JP5455583B2 (en) * 2009-11-30 2014-03-26 キヤノン株式会社 Imprint device
JP5451450B2 (en) * 2010-02-24 2014-03-26 キヤノン株式会社 Imprint apparatus, template thereof, and article manufacturing method
JP2012084732A (en) * 2010-10-13 2012-04-26 Canon Inc Imprint method and device
JP5850717B2 (en) * 2010-12-02 2016-02-03 キヤノン株式会社 Imprint apparatus and article manufacturing method using the same
JP5674445B2 (en) * 2010-12-13 2015-02-25 東芝機械株式会社 Master mold manufacturing equipment
JP5773761B2 (en) * 2010-12-17 2015-09-02 キヤノン株式会社 Lithographic system and article manufacturing method using the same
JP2012227488A (en) * 2011-04-22 2012-11-15 Canon Inc Imprint device, imprint method and product manufacturing method
JP5713961B2 (en) * 2011-06-21 2015-05-07 キヤノン株式会社 Position detection apparatus, imprint apparatus, and position detection method
JP5706861B2 (en) * 2011-10-21 2015-04-22 キヤノン株式会社 Detector, detection method, imprint apparatus, and article manufacturing method
JP5813603B2 (en) * 2012-09-04 2015-11-17 株式会社東芝 Imprint apparatus and imprint method

Also Published As

Publication number Publication date
KR20160100232A (en) 2016-08-23
CN105892228A (en) 2016-08-24
JP6525628B2 (en) 2019-06-05
TW201633375A (en) 2016-09-16
TWI564936B (en) 2017-01-01
US20160236381A1 (en) 2016-08-18
JP2016149510A (en) 2016-08-18
KR102025975B1 (en) 2019-09-26
CN105892228B (en) 2019-10-22

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