SG10201600680TA - Imprint apparatus and method of manufacturing article - Google Patents
Imprint apparatus and method of manufacturing articleInfo
- Publication number
- SG10201600680TA SG10201600680TA SG10201600680TA SG10201600680TA SG10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA SG 10201600680T A SG10201600680T A SG 10201600680TA
- Authority
- SG
- Singapore
- Prior art keywords
- imprint apparatus
- manufacturing article
- article
- manufacturing
- imprint
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5833—Measuring, controlling or regulating movement of moulds or mould parts, e.g. opening or closing, actuating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/585—Measuring, controlling or regulating detecting defects, e.g. foreign matter between the moulds, inaccurate position, breakage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5891—Measuring, controlling or regulating using imaging devices, e.g. cameras
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/24—Condition, form or state of moulded material or of the material to be shaped crosslinked or vulcanised
- B29K2105/246—Uncured, e.g. green
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3406—Components, e.g. resistors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optics & Photonics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015026967A JP6525628B2 (en) | 2015-02-13 | 2015-02-13 | Imprint apparatus and method of manufacturing article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10201600680TA true SG10201600680TA (en) | 2016-09-29 |
Family
ID=56620777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201600680TA SG10201600680TA (en) | 2015-02-13 | 2016-01-28 | Imprint apparatus and method of manufacturing article |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20160236381A1 (en) |
| JP (1) | JP6525628B2 (en) |
| KR (1) | KR102025975B1 (en) |
| CN (1) | CN105892228B (en) |
| SG (1) | SG10201600680TA (en) |
| TW (1) | TWI564936B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6333039B2 (en) | 2013-05-16 | 2018-05-30 | キヤノン株式会社 | Imprint apparatus, device manufacturing method, and imprint method |
| JP6315904B2 (en) * | 2013-06-28 | 2018-04-25 | キヤノン株式会社 | Imprint method, imprint apparatus, and device manufacturing method |
| JP6942487B2 (en) * | 2017-03-03 | 2021-09-29 | キヤノン株式会社 | Imprinting equipment, imprinting method, and article manufacturing method |
| US11681216B2 (en) * | 2017-08-25 | 2023-06-20 | Canon Kabushiki Kaisha | Imprint apparatus, imprint method, article manufacturing method, molding apparatus, and molding method |
| JP6979845B2 (en) * | 2017-10-11 | 2021-12-15 | キヤノン株式会社 | Imprint device and article manufacturing method |
| JP7015147B2 (en) * | 2017-11-06 | 2022-02-02 | キヤノン株式会社 | Imprinting equipment and article manufacturing method |
| JP7558696B2 (en) * | 2020-07-06 | 2024-10-01 | キヤノン株式会社 | Molding device and method for manufacturing article |
| CN114953403A (en) * | 2021-02-18 | 2022-08-30 | 中兴通讯股份有限公司 | Thermal forming device and method for flexible circuit board |
| JP2023175231A (en) | 2022-05-30 | 2023-12-12 | キヤノン株式会社 | Molding equipment, molding method, and article manufacturing method |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10319022B4 (en) * | 2003-04-28 | 2009-10-15 | Fette Gmbh | Plant for the production of tablets |
| JP4217551B2 (en) * | 2003-07-02 | 2009-02-04 | キヤノン株式会社 | Fine processing method and fine processing apparatus |
| JP5268239B2 (en) * | 2005-10-18 | 2013-08-21 | キヤノン株式会社 | Pattern forming apparatus and pattern forming method |
| JP2011009250A (en) * | 2009-06-23 | 2011-01-13 | Toshiba Corp | Substrate processing method, method of manufacturing semiconductor device and imprint device |
| NL2005430A (en) * | 2009-11-24 | 2011-05-25 | Asml Netherlands Bv | Alignment and imprint lithography. |
| JP5455583B2 (en) * | 2009-11-30 | 2014-03-26 | キヤノン株式会社 | Imprint device |
| JP5451450B2 (en) * | 2010-02-24 | 2014-03-26 | キヤノン株式会社 | Imprint apparatus, template thereof, and article manufacturing method |
| JP2012084732A (en) * | 2010-10-13 | 2012-04-26 | Canon Inc | Imprint method and device |
| JP5850717B2 (en) * | 2010-12-02 | 2016-02-03 | キヤノン株式会社 | Imprint apparatus and article manufacturing method using the same |
| JP5674445B2 (en) * | 2010-12-13 | 2015-02-25 | 東芝機械株式会社 | Master mold manufacturing equipment |
| JP5773761B2 (en) * | 2010-12-17 | 2015-09-02 | キヤノン株式会社 | Lithographic system and article manufacturing method using the same |
| JP2012227488A (en) * | 2011-04-22 | 2012-11-15 | Canon Inc | Imprint device, imprint method and product manufacturing method |
| JP5713961B2 (en) * | 2011-06-21 | 2015-05-07 | キヤノン株式会社 | Position detection apparatus, imprint apparatus, and position detection method |
| JP5706861B2 (en) * | 2011-10-21 | 2015-04-22 | キヤノン株式会社 | Detector, detection method, imprint apparatus, and article manufacturing method |
| JP5813603B2 (en) * | 2012-09-04 | 2015-11-17 | 株式会社東芝 | Imprint apparatus and imprint method |
-
2015
- 2015-02-13 JP JP2015026967A patent/JP6525628B2/en active Active
-
2016
- 2016-01-18 TW TW105101398A patent/TWI564936B/en active
- 2016-01-27 US US15/007,729 patent/US20160236381A1/en not_active Abandoned
- 2016-01-28 SG SG10201600680TA patent/SG10201600680TA/en unknown
- 2016-02-02 KR KR1020160012656A patent/KR102025975B1/en active Active
- 2016-02-03 CN CN201610076426.4A patent/CN105892228B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160100232A (en) | 2016-08-23 |
| CN105892228A (en) | 2016-08-24 |
| JP6525628B2 (en) | 2019-06-05 |
| TW201633375A (en) | 2016-09-16 |
| TWI564936B (en) | 2017-01-01 |
| US20160236381A1 (en) | 2016-08-18 |
| JP2016149510A (en) | 2016-08-18 |
| KR102025975B1 (en) | 2019-09-26 |
| CN105892228B (en) | 2019-10-22 |
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