[go: up one dir, main page]

SE9900781D0 - Ozone generation device and method - Google Patents

Ozone generation device and method

Info

Publication number
SE9900781D0
SE9900781D0 SE9900781A SE9900781A SE9900781D0 SE 9900781 D0 SE9900781 D0 SE 9900781D0 SE 9900781 A SE9900781 A SE 9900781A SE 9900781 A SE9900781 A SE 9900781A SE 9900781 D0 SE9900781 D0 SE 9900781D0
Authority
SE
Sweden
Prior art keywords
oxygen
ozone
gas
alternating current
unit
Prior art date
Application number
SE9900781A
Other languages
Swedish (sv)
Other versions
SE9900781L (en
SE514694C2 (en
Inventor
Jan Borgstroem
Original Assignee
Kindgren Mats
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kindgren Mats filed Critical Kindgren Mats
Priority to SE9900781A priority Critical patent/SE514694C2/en
Publication of SE9900781D0 publication Critical patent/SE9900781D0/en
Priority to EP00915660A priority patent/EP1165435B1/en
Priority to DE60023857T priority patent/DE60023857T2/en
Priority to YUP-632/01A priority patent/RS49785B/en
Priority to ES00915660T priority patent/ES2251979T3/en
Priority to HK02107944.0A priority patent/HK1046676B/en
Priority to HU0201071A priority patent/HU228019B1/en
Priority to AT00915660T priority patent/ATE309175T1/en
Priority to AU36885/00A priority patent/AU758012B2/en
Priority to CA002362557A priority patent/CA2362557C/en
Priority to TR2001/02475T priority patent/TR200102475T2/en
Priority to MXPA01008906A priority patent/MXPA01008906A/en
Priority to IDW00200102134A priority patent/ID30456A/en
Priority to KR10-2001-7011294A priority patent/KR100472812B1/en
Priority to PCT/SE2000/000438 priority patent/WO2000053529A1/en
Priority to EA200100865A priority patent/EA003473B1/en
Priority to NZ514618A priority patent/NZ514618A/en
Priority to JP2000603974A priority patent/JP3848538B2/en
Priority to BRPI0008751-3A priority patent/BR0008751B1/en
Priority to APAP/P/2001/002260A priority patent/AP2001002260A0/en
Priority to OA1200100228A priority patent/OA11843A/en
Priority to CNB008063826A priority patent/CN1222468C/en
Priority to PL349836A priority patent/PL198476B1/en
Priority to DK00915660T priority patent/DK1165435T3/en
Priority to CZ20012898A priority patent/CZ294645B6/en
Priority to EEP200100471A priority patent/EE05151B1/en
Publication of SE9900781L publication Critical patent/SE9900781L/en
Publication of SE514694C2 publication Critical patent/SE514694C2/en
Priority to IS6032A priority patent/IS2513B/en
Priority to ZA200107076A priority patent/ZA200107076B/en
Priority to NO20014269A priority patent/NO335512B1/en
Priority to US09/946,319 priority patent/US6726885B2/en
Priority to BG105947A priority patent/BG105947A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/10—Dischargers used for production of ozone
    • C01B2201/12—Plate-type dischargers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/10—Dischargers used for production of ozone
    • C01B2201/14—Concentric/tubular dischargers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/20—Electrodes used for obtaining electrical discharge
    • C01B2201/22—Constructional details of the electrodes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/30—Dielectrics used in the electrical dischargers
    • C01B2201/32—Constructional details of the dielectrics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

An apparatus and method for ozone generation and a method for generating ozone by exposing oxygen to high frequency alternating current with high voltage over a dielectric. The apparatus comprises a pressure compensation admitting unit joined together by at least two plates of a dielectric material and therebetween a present electrode on which high frequency alternating current with high voltage is applicable, and two sealed spaces for generation of ozone on opposite sides of said unit, whereby the respective sealed space, on the opposite side of said plate of dielectric material, is delimited by an earthed and cooled electrode, through which oxygen gas or gas rich in oxygen is supplied to the space and ozone is conducted out of the same. By means of this apparatus, oxygen gas or gas rich in oxygen can be conducted under pressure into sealed chambers on opposite sides of the pressure compensation admitting unit.
SE9900781A 1999-03-05 1999-03-05 Device and method for generating ozone in which pressure changes are equalized SE514694C2 (en)

Priority Applications (31)

Application Number Priority Date Filing Date Title
SE9900781A SE514694C2 (en) 1999-03-05 1999-03-05 Device and method for generating ozone in which pressure changes are equalized
EEP200100471A EE05151B1 (en) 1999-03-05 2000-03-03 Smooth plate ozone generator
PCT/SE2000/000438 WO2000053529A1 (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
EA200100865A EA003473B1 (en) 1999-03-05 2000-03-03 Pressure compensation ozone generator and method for generation of ozone
YUP-632/01A RS49785B (en) 1999-03-05 2000-03-03 OZONE GENERATOR FLOOR PLATE WITH PRESSURE COMPENSATION AND PROCEDURE FOR OZONE PRODUCTION
ES00915660T ES2251979T3 (en) 1999-03-05 2000-03-03 OZONE GENERATOR IN PRESSURE COMPENSATION AND OZONE GENERATION PROCEDURE.
HK02107944.0A HK1046676B (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
HU0201071A HU228019B1 (en) 1999-03-05 2000-03-03 Ozone generating device
AT00915660T ATE309175T1 (en) 1999-03-05 2000-03-03 OZONE GENERATOR WITH PRESSURE COMPENSATION AND METHOD FOR PRODUCING OZONES
AU36885/00A AU758012B2 (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
JP2000603974A JP3848538B2 (en) 1999-03-05 2000-03-03 Ozone generator
TR2001/02475T TR200102475T2 (en) 1999-03-05 2000-03-03 Ozone generator and ozone generation method
MXPA01008906A MXPA01008906A (en) 1999-03-05 2000-03-03 Pressure compensation ozone generator and method for generation of ozone.
IDW00200102134A ID30456A (en) 1999-03-05 2000-03-03 AN OZONE GENERATOR AND METHOD FOR OZONE GENERATED
KR10-2001-7011294A KR100472812B1 (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
EP00915660A EP1165435B1 (en) 1999-03-05 2000-03-03 Pressure compensation ozone generator and method for generation of ozone
NZ514618A NZ514618A (en) 1999-03-05 2000-03-03 Ozone Generator and a Method for Generation of Ozone
BRPI0008751-3A BR0008751B1 (en) 1999-03-05 2000-03-03 flat plate ozone generator.
CA002362557A CA2362557C (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
DE60023857T DE60023857T2 (en) 1999-03-05 2000-03-03 OZONE COMPRESSED COMPRESSION GENERATOR AND METHOD FOR PRODUCING OZONE
APAP/P/2001/002260A AP2001002260A0 (en) 1999-03-05 2000-03-03 Ozone generator and a method for the generation of ozone.
OA1200100228A OA11843A (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone.
CNB008063826A CN1222468C (en) 1999-03-05 2000-03-03 Ozone generator and method for generation of ozone
PL349836A PL198476B1 (en) 1999-03-05 2000-03-03 Ozone generator and a method for generation of ozone
DK00915660T DK1165435T3 (en) 1999-03-05 2000-03-03 Ozone generator with pressure equalization and ozone generation method
CZ20012898A CZ294645B6 (en) 1999-03-05 2000-03-03 Ozone generator
IS6032A IS2513B (en) 1999-03-05 2001-07-31 Ozone production equipment and process for producing ozone
ZA200107076A ZA200107076B (en) 1999-03-05 2001-08-27 Ozone generator and a method for generation of ozone.
NO20014269A NO335512B1 (en) 1999-03-05 2001-09-03 Ozone generator and process for ozone generation
US09/946,319 US6726885B2 (en) 1999-03-05 2001-09-05 Ozone generator and a method for generation of ozone
BG105947A BG105947A (en) 1999-03-05 2001-09-25 Ozone generator and a method for generation of ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9900781A SE514694C2 (en) 1999-03-05 1999-03-05 Device and method for generating ozone in which pressure changes are equalized

Publications (3)

Publication Number Publication Date
SE9900781D0 true SE9900781D0 (en) 1999-03-05
SE9900781L SE9900781L (en) 2000-09-06
SE514694C2 SE514694C2 (en) 2001-04-02

Family

ID=20414721

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9900781A SE514694C2 (en) 1999-03-05 1999-03-05 Device and method for generating ozone in which pressure changes are equalized

Country Status (31)

Country Link
US (1) US6726885B2 (en)
EP (1) EP1165435B1 (en)
JP (1) JP3848538B2 (en)
KR (1) KR100472812B1 (en)
CN (1) CN1222468C (en)
AP (1) AP2001002260A0 (en)
AT (1) ATE309175T1 (en)
AU (1) AU758012B2 (en)
BG (1) BG105947A (en)
BR (1) BR0008751B1 (en)
CA (1) CA2362557C (en)
CZ (1) CZ294645B6 (en)
DE (1) DE60023857T2 (en)
DK (1) DK1165435T3 (en)
EA (1) EA003473B1 (en)
EE (1) EE05151B1 (en)
ES (1) ES2251979T3 (en)
HK (1) HK1046676B (en)
HU (1) HU228019B1 (en)
ID (1) ID30456A (en)
IS (1) IS2513B (en)
MX (1) MXPA01008906A (en)
NO (1) NO335512B1 (en)
NZ (1) NZ514618A (en)
OA (1) OA11843A (en)
PL (1) PL198476B1 (en)
RS (1) RS49785B (en)
SE (1) SE514694C2 (en)
TR (1) TR200102475T2 (en)
WO (1) WO2000053529A1 (en)
ZA (1) ZA200107076B (en)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001212705A1 (en) * 2000-09-05 2002-03-22 Ozonator Limited Flat plate ozone generator
AU2001210192A1 (en) * 2000-09-06 2002-03-22 Ozonator Limited Electrode unit for use in ozone generator and ozone generator
KR100471566B1 (en) * 2002-02-23 2005-03-08 주식회사 세아이엔씨 Discharge Tube for Ozone Generating and Ozone Generator Using the Same
CN100390526C (en) * 2003-03-27 2008-05-28 上海交通大学 Scanning Tunneling Microscope Tip Automatic Control Etcher
US20060045826A1 (en) * 2004-08-26 2006-03-02 Mullaney Robert A Apparatus and method to generate pressurized ozone gas
CN1938231B (en) 2005-01-24 2015-09-30 纽泰科O3公司 Ozone injection method and system
KR100813475B1 (en) * 2006-11-03 2008-03-13 제주대학교 산학협력단 Ozone Generator Using Water Electrodes
RU2422976C2 (en) 2006-12-20 2011-06-27 Праймозоун Продакшн Аб Supply unit for capacitance load
KR101106688B1 (en) 2009-10-29 2012-01-18 (주) 예스티 Appratus for generating ozone
US8241563B2 (en) * 2009-11-10 2012-08-14 Hussmann Corporation Air sanitization system with fiber optic monitoring system
US9102536B2 (en) * 2009-11-13 2015-08-11 Del Industries Inc. Ozone generator systems, methods and apparatus
EP2362532A1 (en) * 2010-02-25 2011-08-31 Dialog Semiconductor GmbH DC-DC converter efficiency improvement and area reduction using a novel switching technique
KR100958413B1 (en) * 2010-03-04 2010-05-18 주식회사 에피솔루션 Ozone generating apparatus and manufacturing process of the same
US9604863B2 (en) 2013-08-05 2017-03-28 P. K. Andy Hong Pressure cycling wastewater treatment apparatus
CN104512868B (en) * 2015-01-13 2016-05-04 张发鹏 The board-like ozone generator of multiple-unit modularization
CN106032269A (en) * 2015-03-14 2016-10-19 北京乾润开元环保科技有限公司 A ground electrode assembly, water-cooled ground electrode and ozone generator
SE540004C2 (en) * 2016-08-05 2018-02-20 Ozone Inventions Ltd OZONE GENERATOR UNIT AND SYSTEM
CN108046216B (en) * 2018-01-19 2021-06-15 河海大学常州校区 Cascade Rotary Air Ozone Generator
CN108408693A (en) * 2018-06-07 2018-08-17 广州珍澳臭氧设备有限公司 A kind of ozone generator equipped with gas storage groove
AU2020227180B2 (en) * 2019-02-25 2025-09-11 Primozone Production Ab A low frequency ozone generator
DK180586B1 (en) * 2019-02-25 2021-09-22 Water Aps An ozone generator for generating ozone, a method for generating ozone from an oxygen rich gas and use of the generator.
CN110467157A (en) * 2019-09-29 2019-11-19 无锡太然环保科技有限公司 High concentration low energy consumption ozone generator
US11247900B2 (en) * 2019-10-21 2022-02-15 Evoqua Water Technologies Llc Electrical discharge cell for generating ozone
CN111908428B (en) * 2020-08-28 2024-10-18 友达电子(深圳)有限公司 Ozone generator
CZ309213B6 (en) * 2020-12-03 2022-05-25 Technická univerzita v Liberci Surface ozone generator
MX2023014826A (en) 2021-06-14 2024-05-23 Stepan Co Catalyst-free method for degrading dioxane in alkyl ether sulfate vacuum removal water.
CN113428839A (en) * 2021-06-23 2021-09-24 广州创环臭氧电器设备有限公司 Ozone generator convenient to assemble
SE545161C2 (en) 2021-09-28 2023-04-25 Arrow Lake Ab Plate-type ozone generator and system for generating ozone
KR102495509B1 (en) * 2021-11-11 2023-02-06 세건하이테크(주) Modular type water-cooled ozone generator
DK181817B1 (en) 2023-06-06 2025-01-27 Water Aps An ozone generator comprising cooling means for generating ozone, a method for generating ozone from an oxygen reach gas and use of the generator
CN116986553B (en) * 2023-09-27 2023-11-28 天津奥尔斯曼新能源科技有限公司 High-concentration plate-type ozone generator capable of automatically distributing air flow
CN117489783B (en) * 2023-11-21 2025-01-24 北京金大万翔环保科技有限公司 Corrosion-resistant and flame-retardant rubber seals for modular plate-type ozone generators

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH569937A5 (en) 1973-10-09 1975-11-28 Hutter Apparatebau Ag
US3973113A (en) 1974-09-19 1976-08-03 Goldsamt Alan B Electronic calculator for feet-inch-fraction numerics
CH609309A5 (en) 1975-06-10 1979-02-28 Sauter Fr Ag Fabrik Elektrisch
JPS556751A (en) 1978-06-30 1980-01-18 Fujikura Ltd Watertight insulated wire
JPS608963B2 (en) 1979-04-24 1985-03-07 株式会社東芝 Manufacturing method of discharge electrode for flat plate ozonizer
US4545960A (en) 1983-03-04 1985-10-08 Erz Gerhard J Fluid treatment system and ozone generator therefor
JPS62278105A (en) 1986-05-23 1987-12-03 Sumitomo Heavy Ind Ltd Ozone-generator
US4869881A (en) 1988-05-03 1989-09-26 Pillar Technologies, Inc. Ozone generator system
CH676844A5 (en) 1988-09-09 1991-03-15 Asea Brown Boveri
US5008087A (en) * 1990-06-06 1991-04-16 American Ozone Systems, Inc. Ozone generator apparatus and method
WO1992014677A1 (en) 1991-02-22 1992-09-03 Clearwater Engineering Pty. Ltd. Method and apparatus for producing ozone by corona discharge
JP2564715B2 (en) * 1991-08-08 1996-12-18 住友精密工業株式会社 Plate type ozone generator
DE4141025C2 (en) 1991-12-12 1996-01-18 Manfred Prof Dr Rer Na Rimpler Device for generating ozone
US5211919A (en) * 1992-01-27 1993-05-18 Conrad Richard H Flat plate corona cell for generating ozone
US5417936A (en) 1992-06-08 1995-05-23 Nippon Ozone Co., Ltd. Plate-type ozone generator
KR100261902B1 (en) 1992-07-03 2000-07-15 Ebara Corp Ozonizer
WO1994008891A1 (en) 1992-10-14 1994-04-28 Novozone (N.Z.) Limited Ozone generation apparatus and method
US5354541A (en) * 1993-06-09 1994-10-11 Louis Sali Ozone generator
JP2877664B2 (en) 1993-07-12 1999-03-31 大建工業株式会社 How to paint a decorative veneer
JPH07187609A (en) 1993-12-27 1995-07-25 Meidensha Corp Ozonizer
JPH07187610A (en) 1993-12-28 1995-07-25 Fuji Electric Co Ltd Double tube ozone generator
JP2983153B2 (en) 1994-04-28 1999-11-29 三菱電機株式会社 Ozone generator
US5637279A (en) * 1994-08-31 1997-06-10 Applied Science & Technology, Inc. Ozone and other reactive gas generator cell and system
US5630990A (en) 1994-11-07 1997-05-20 T I Properties, Inc. Ozone generator with releasable connector and grounded current collector
US5529760A (en) 1994-12-13 1996-06-25 Burris; William A. Ozone generator
DE19503200A1 (en) 1995-02-02 1996-08-08 Schoenenberg Rolf Prof Dipl In Device for generating ozone with a breakdown-proof dielectric and low energy consumption
JPH08245203A (en) 1995-03-07 1996-09-24 Mitsubishi Electric Corp Ozone generator
SE9502339D0 (en) 1995-06-28 1995-06-28 Jan Arlemark Gas phase ozone generation device
US5770168A (en) 1995-07-18 1998-06-23 Val Priotte Ozone-generator self adjusting push-pull circuit
JPH09255308A (en) 1996-03-25 1997-09-30 Fuji Electric Co Ltd Ozone generation method and ozonizer
JPH1025104A (en) 1996-07-10 1998-01-27 Mitsubishi Electric Corp Ozone generator
JPH1029806A (en) 1996-07-17 1998-02-03 Yaskawa Electric Corp Ozone generator
JPH11209105A (en) 1998-01-26 1999-08-03 Meidensha Corp Ozonizer

Also Published As

Publication number Publication date
NO335512B1 (en) 2014-12-22
NZ514618A (en) 2004-05-28
ZA200107076B (en) 2002-10-30
CZ20012898A3 (en) 2002-06-12
BR0008751B1 (en) 2008-11-18
NO20014269L (en) 2001-11-05
EA200100865A1 (en) 2002-04-25
EE05151B1 (en) 2009-04-15
CN1222468C (en) 2005-10-12
ATE309175T1 (en) 2005-11-15
NO20014269D0 (en) 2001-09-03
PL198476B1 (en) 2008-06-30
IS6032A (en) 2001-07-31
SE9900781L (en) 2000-09-06
BG105947A (en) 2002-06-28
EP1165435A1 (en) 2002-01-02
JP2003503293A (en) 2003-01-28
PL349836A1 (en) 2002-09-23
JP3848538B2 (en) 2006-11-22
EA003473B1 (en) 2003-06-26
OA11843A (en) 2005-08-22
KR100472812B1 (en) 2005-03-08
WO2000053529A1 (en) 2000-09-14
RS49785B (en) 2008-06-05
BR0008751A (en) 2002-01-08
ES2251979T3 (en) 2006-05-16
DK1165435T3 (en) 2006-03-27
CA2362557C (en) 2009-12-22
TR200102475T2 (en) 2002-04-22
HK1046676A1 (en) 2003-01-24
AU3688500A (en) 2000-09-28
IS2513B (en) 2009-05-15
CZ294645B6 (en) 2005-02-16
YU63201A (en) 2004-03-12
HK1046676B (en) 2006-05-26
ID30456A (en) 2001-12-06
HU228019B1 (en) 2012-08-28
WO2000053529A8 (en) 2001-02-15
CA2362557A1 (en) 2000-09-14
US20020006366A1 (en) 2002-01-17
CN1347388A (en) 2002-05-01
EP1165435B1 (en) 2005-11-09
DE60023857T2 (en) 2006-08-10
DE60023857D1 (en) 2005-12-15
KR20010102504A (en) 2001-11-15
HUP0201071A2 (en) 2002-07-29
AP2001002260A0 (en) 2001-09-30
SE514694C2 (en) 2001-04-02
AU758012B2 (en) 2003-03-13
US6726885B2 (en) 2004-04-27
EE200100471A (en) 2002-12-16
MXPA01008906A (en) 2002-10-23

Similar Documents

Publication Publication Date Title
SE9900781D0 (en) Ozone generation device and method
KR910012328A (en) Plasma processing equipment
WO1997013266A3 (en) Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith
SE9403988L (en) Apparatus for generating linear arc discharge for plasma processing
JP2002186969A5 (en)
AU2003266900A8 (en) Waveform generator electronics based on tuned lc circuits
KR910010634A (en) Dry Processing Unit
EP1038993A4 (en) Apparatus for producing ozone water and method of producing ozone water by using the same apparatus
ATE289755T1 (en) PULSED ELECTRICAL FIELD TREATMENT CHAMBER WITH INTEGRATED MODULAR DESIGN
PL1827802T3 (en) Sealing device for the production of heat-sealed packages of a liquid food product
PL324110A1 (en) Ozone generating method and apparatus
ATE340414T1 (en) TIGHTLY SEALED BATTERY
MD1004G2 (en) Ozone generator
KR20180120737A (en) Ozone manufacturing method and ozone generating apparatus
WO2005017943A3 (en) Method and apparatus for plasma generation
ATE41273T1 (en) DEVICE FOR CONTINUOUS TREATMENT OF SURFACES.
JP4102126B2 (en) Ozone generator
WO2003070390A3 (en) Cleaning apparatus using atmospheric pressure plasma
KR980005796A (en) Plasma Etching Device of Semiconductor Device
RU2003113820A (en) OZONATOR
KR900000972A (en) Hydrogen discharge photolysis film forming device
JPS5680191A (en) Gas laser device
JP2004311251A (en) Atmospheric pressure plasma generating device
CA2299126A1 (en) Ozone generating apparatus
RO81423B1 (en) Ozone generator

Legal Events

Date Code Title Description
NUG Patent has lapsed