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SE9700612D0 - Sensorelement med integrerat referenstryck - Google Patents

Sensorelement med integrerat referenstryck

Info

Publication number
SE9700612D0
SE9700612D0 SE9700612A SE9700612A SE9700612D0 SE 9700612 D0 SE9700612 D0 SE 9700612D0 SE 9700612 A SE9700612 A SE 9700612A SE 9700612 A SE9700612 A SE 9700612A SE 9700612 D0 SE9700612 D0 SE 9700612D0
Authority
SE
Sweden
Prior art keywords
lid
getter body
getter
sensor housing
cavity
Prior art date
Application number
SE9700612A
Other languages
English (en)
Inventor
Staffan Jonsson
Original Assignee
Cecap Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cecap Ab filed Critical Cecap Ab
Priority to SE9700612A priority Critical patent/SE9700612D0/sv
Publication of SE9700612D0 publication Critical patent/SE9700612D0/sv
Priority to AU61284/98A priority patent/AU6128498A/en
Priority to PCT/SE1998/000302 priority patent/WO1998037392A1/en
Priority to US09/377,833 priority patent/US6735845B2/en
Priority to US10/774,493 priority patent/US7155803B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
SE9700612A 1997-02-20 1997-02-20 Sensorelement med integrerat referenstryck SE9700612D0 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9700612A SE9700612D0 (sv) 1997-02-20 1997-02-20 Sensorelement med integrerat referenstryck
AU61284/98A AU6128498A (en) 1997-02-20 1998-02-20 A sensor element having an integrated reference pressure
PCT/SE1998/000302 WO1998037392A1 (en) 1997-02-20 1998-02-20 A sensor element having an integrated reference pressure
US09/377,833 US6735845B2 (en) 1997-02-20 1999-08-20 Method of producing an integrated reference pressure sensor element
US10/774,493 US7155803B2 (en) 1997-02-20 2004-02-10 Method of manufacturing a sensor element having integrated reference pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9700612A SE9700612D0 (sv) 1997-02-20 1997-02-20 Sensorelement med integrerat referenstryck

Publications (1)

Publication Number Publication Date
SE9700612D0 true SE9700612D0 (sv) 1997-02-20

Family

ID=20405875

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9700612A SE9700612D0 (sv) 1997-02-20 1997-02-20 Sensorelement med integrerat referenstryck

Country Status (4)

Country Link
US (2) US6735845B2 (sv)
AU (1) AU6128498A (sv)
SE (1) SE9700612D0 (sv)
WO (1) WO1998037392A1 (sv)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
KR100545928B1 (ko) * 1997-12-23 2006-01-25 어낵시스 발처스 리미티드 용량식 진공 측정 셀
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
FR2846318B1 (fr) * 2002-10-24 2005-01-07 Commissariat Energie Atomique Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression
ITMI20030069A1 (it) * 2003-01-17 2004-07-18 Getters Spa Dispositivi micromeccanici o microoptoelettronici con deposito di materiale getter e riscaldatore integrato.
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
EP1949770B1 (en) * 2005-11-09 2018-12-12 Koninklijke Philips N.V. Method of manufacturing a package carrier for enclosing at least one microelectronic element and method of manufacturing a diagnostic device
CN101582363A (zh) * 2008-05-14 2009-11-18 清华大学 真空器件的封接方法
CN101587808B (zh) * 2008-05-23 2011-06-08 清华大学 真空器件的封接装置以及封接方法
CN101587807B (zh) * 2008-05-23 2011-05-04 清华大学 真空器件的封接装置以及封接方法
US8201456B2 (en) * 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor
KR101423063B1 (ko) 2010-02-02 2014-08-13 엠케이에스 인스트루먼츠, 인코포레이티드 용량성 압력 센서
DE102011077868A1 (de) * 2011-06-21 2012-12-27 Robert Bosch Gmbh Drucksensoranordnung zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum
CN103998909B (zh) 2011-09-29 2016-04-27 Mks仪器公司 具有改善的电极结构的电容式压力传感器
CN105758579B (zh) 2011-10-11 2019-06-11 Mks 仪器公司 压力传感器
CN103420584B (zh) * 2013-07-17 2016-08-10 戴长虹 双真空层抽气口的构造及制作方法
GB201711262D0 (en) * 2017-07-13 2017-08-30 Astrazeneca Ab Medicament dispensing system and dispensing method
CN110579308B (zh) * 2019-10-11 2023-12-22 中国海洋大学 一种海底沉积物压力观测装置及方法
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
DE102019133325A1 (de) * 2019-12-06 2021-06-10 Endress+Hauser SE+Co. KG Druckmessaufnehmer
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
JP7628843B2 (ja) * 2021-03-15 2025-02-12 アズビル株式会社 隔膜式圧力検出装置及びその製造方法
CN114720048B (zh) * 2022-06-09 2022-09-02 季华实验室 一种电容薄膜真空计及neg薄膜制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153847A (en) * 1963-08-02 1964-10-27 Jr John E Lindberg Method of making heat sensors
US3460310A (en) * 1964-12-09 1969-08-12 United Glass Ltd Container closures
US4008619A (en) * 1975-11-17 1977-02-22 Mks Instruments, Inc. Vacuum monitoring
US4334725A (en) * 1977-01-28 1982-06-15 Stanley Electric Co., Ltd. Method for making a fluorescent lamp
DE2902623A1 (de) * 1979-01-24 1980-07-31 Messer Griesheim Gmbh Verfahren und getteranordnung zur aufrechterhaltung eines vakuums
US4302063A (en) * 1980-02-28 1981-11-24 Rca Corporation Method for vaporizing getter material in a vacuum electron tube
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
SU1362971A1 (ru) * 1986-07-01 1987-12-30 Предприятие П/Я А-1891 Способ вакуумировани датчиков абсолютного давлени и устройство дл его осуществлени
IT1201540B (it) * 1986-12-22 1989-02-02 Getters Spa Dispositivo getter non evaporabile comprendente un supporto ceramico e metodo per la sua fabbricazione
KR960002929B1 (ko) * 1993-07-24 1996-02-28 엘지전자주식회사 음극선관용 게터(getter) 고정 장치
IT1270598B (it) * 1994-07-07 1997-05-07 Getters Spa Combinazione di materiali per dispositivi erogatori di mercurio metodo di preparazione e dispositivi cosi' ottenuti
IT1271207B (it) * 1994-07-07 1997-05-27 Getters Spa Dispositivo per il mantenimento del vuoto in intercapedini termicamente isolanti e procedimento per la sua produzione
JPH08159377A (ja) * 1994-12-02 1996-06-21 Matsushita Refrig Co Ltd 真空断熱体
US5800235A (en) * 1996-02-27 1998-09-01 Illumination Technology, Inc. Process for manufacturing incandescent lamps having gettering agents

Also Published As

Publication number Publication date
US20040211262A1 (en) 2004-10-28
WO1998037392A1 (en) 1998-08-27
US6735845B2 (en) 2004-05-18
US7155803B2 (en) 2007-01-02
US20030110865A1 (en) 2003-06-19
AU6128498A (en) 1998-09-09

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