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SE504199C2 - Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg - Google Patents

Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg

Info

Publication number
SE504199C2
SE504199C2 SE9501653A SE9501653A SE504199C2 SE 504199 C2 SE504199 C2 SE 504199C2 SE 9501653 A SE9501653 A SE 9501653A SE 9501653 A SE9501653 A SE 9501653A SE 504199 C2 SE504199 C2 SE 504199C2
Authority
SE
Sweden
Prior art keywords
crystal
dissipation factor
resonant frequency
frequency
oscillation
Prior art date
Application number
SE9501653A
Other languages
English (en)
Swedish (sv)
Other versions
SE9501653D0 (sv
SE9501653L (sv
Inventor
Bengt Kasemo
Michael Rodahl
Fredrik Hoeoek
Anatol Krozer
Original Assignee
Bengt Kasemo
Michael Rodahl
Fredrik Hoeoek
Anatol Krozer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bengt Kasemo, Michael Rodahl, Fredrik Hoeoek, Anatol Krozer filed Critical Bengt Kasemo
Priority to SE9501653A priority Critical patent/SE504199C2/sv
Publication of SE9501653D0 publication Critical patent/SE9501653D0/xx
Priority to US08/913,885 priority patent/US6006589A/en
Priority to AU57837/96A priority patent/AU5783796A/en
Priority to EP96914494A priority patent/EP0775295B1/fr
Priority to PCT/SE1996/000576 priority patent/WO1996035103A1/fr
Priority to DE69610183T priority patent/DE69610183T2/de
Publication of SE9501653L publication Critical patent/SE9501653L/xx
Publication of SE504199C2 publication Critical patent/SE504199C2/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/032Analysing fluids by measuring attenuation of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/22Measuring piezoelectric properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02818Density, viscosity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02845Humidity, wetness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0426Bulk waves, e.g. quartz crystal microbalance, torsional waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
SE9501653A 1995-05-04 1995-05-04 Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg SE504199C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9501653A SE504199C2 (sv) 1995-05-04 1995-05-04 Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg
US08/913,885 US6006589A (en) 1995-05-04 1996-04-03 Piezoelectric crystal microbalance device
AU57837/96A AU5783796A (en) 1995-05-04 1996-05-03 A piezoelectric crystal microbalance device
EP96914494A EP0775295B1 (fr) 1995-05-04 1996-05-03 Microbalance a quartz piezo-electrique
PCT/SE1996/000576 WO1996035103A1 (fr) 1995-05-04 1996-05-03 Microbalance a quartz piezo-electrique
DE69610183T DE69610183T2 (de) 1995-05-04 1996-05-03 Piezoelektrische quarz-mikrowaage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9501653A SE504199C2 (sv) 1995-05-04 1995-05-04 Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg

Publications (3)

Publication Number Publication Date
SE9501653D0 SE9501653D0 (sv) 1995-05-04
SE9501653L SE9501653L (sv) 1996-11-05
SE504199C2 true SE504199C2 (sv) 1996-12-02

Family

ID=20398192

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9501653A SE504199C2 (sv) 1995-05-04 1995-05-04 Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg

Country Status (6)

Country Link
US (1) US6006589A (fr)
EP (1) EP0775295B1 (fr)
AU (1) AU5783796A (fr)
DE (1) DE69610183T2 (fr)
SE (1) SE504199C2 (fr)
WO (1) WO1996035103A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998041820A1 (fr) * 1997-03-17 1998-09-24 Q-Sense Ab Procede et appareil de mesure des proprietes et des processus des cellules au niveau de surfaces

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6111512A (en) * 1997-03-13 2000-08-29 Nippon Telegraph And Telephone Corporation Fire detection method and fire detection apparatus
SE520046C2 (sv) * 1997-11-24 2003-05-13 Sense Ab Q Förfarande för att mäta växelverkan mellan en målmolekyl och en receptormolekyl med piezoelektrisk kristallmikrovåg
SE9800189L (sv) * 1998-01-23 1999-07-24 Sense Ab Q Anordning vid en piezoelektrisk kristalloscillator
ES2153740B1 (es) * 1998-07-08 2001-10-01 Univ Valencia Politecnica Sistema para compensar los efectos de rozamiento viscoso en la medida de la frecuencia de resonancia de un cristal piezometrico en un fluido
GB9823410D0 (en) 1998-10-26 1998-12-23 Smithkline Beecham Plc Novel device
SE9900996D0 (sv) * 1999-03-17 1999-03-17 Sense Ab Q Metod for studying chemical-physical properties of a polymer
GB9907300D0 (en) * 1999-03-31 1999-05-26 British Nuclear Fuels Plc Chemical sensor
US6370955B1 (en) * 1999-06-15 2002-04-16 Massachusetts Institute Of Technology High-temperature balance
US6292002B1 (en) 1999-08-16 2001-09-18 The B. F. Goodrich Company Crystal resonant frequency sensor
GB2359368A (en) * 2000-02-19 2001-08-22 Secr Defence Determining the viscosity of a fluid from the exponential decay of an excited piezo-electric element
ES2197796B1 (es) * 2002-01-31 2005-02-16 Universidad Politecnica De Valencia Sistema de caracterizacion de sensores de cristal de cuarzo resonante en medios fluidos, y procedimiento de calibracion y compensacion de la capacidad del cristal de cuarzo.
AU2003284175A1 (en) * 2002-10-28 2004-05-25 Biomondex, Ltd. Acoustic array analytical system
AT414274B (de) * 2002-11-07 2006-10-15 Avl List Gmbh Verfahren zur bestimmung physikalischer oder chemischer parameter einer dünnen materialschicht
US7611908B2 (en) 2005-05-02 2009-11-03 Bioscale, Inc. Method and apparatus for therapeutic drug monitoring using an acoustic device
US7749445B2 (en) 2005-05-02 2010-07-06 Bioscale, Inc. Method and apparatus for analyzing bioprocess fluids
US7648844B2 (en) 2005-05-02 2010-01-19 Bioscale, Inc. Method and apparatus for detection of analyte using an acoustic device
US7300631B2 (en) 2005-05-02 2007-11-27 Bioscale, Inc. Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles
EP1991723A2 (fr) 2006-03-03 2008-11-19 The Board Of Trustees Of The University Of Illinois Procede pour fabriquer des nanotubes ou des ensembles de nanotubes alignes dans l'espace
GB0705088D0 (en) * 2007-03-16 2007-04-25 Akubio Ltd Improvements in or relating to detection and/or characterisation of aggregates
DE102008026008B4 (de) 2007-05-29 2011-04-28 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
US8354280B2 (en) 2007-09-06 2013-01-15 Bioscale, Inc. Reusable detection surfaces and methods of using same
US8439033B2 (en) 2007-10-09 2013-05-14 Microdose Therapeutx, Inc. Inhalation device
WO2009060100A2 (fr) * 2007-11-09 2009-05-14 Universität Regensburg Microbalance à quartz à balayage de l'impédance
TWI354777B (en) * 2007-12-28 2011-12-21 Tatung Co Dual mode measurement system with quartz crystal m
DE102008026009B4 (de) 2008-05-29 2010-09-16 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
US8946683B2 (en) 2008-06-16 2015-02-03 The Board Of Trustees Of The University Of Illinois Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
DE102009002497B4 (de) 2009-04-20 2011-06-16 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Ermittlung elektrischer und mechanischer Materialeigenschaften
ES2333088B2 (es) 2009-06-23 2011-02-07 Universidad Politecnica De Valencia Metodo y dispositivo de nanogravimetria en medios fluidos basado en resonadores piezoelectricos.
DE102009040880B4 (de) 2009-09-09 2012-10-18 Andreas Hettich Gmbh & Co. Kg Vorrichtung zur Durchführung von Tests zur Hämostase
DE112010003713T5 (de) * 2009-09-18 2012-10-25 Delaware Capital Formation, Inc. Kontrollierte druckwellenkomponenten von dickenschermodus-mehrmessgrössensensoren
US8394753B2 (en) 2010-04-01 2013-03-12 The Procter & Gamble Company Three dimensional feel benefits to fabric
BR112012024963A2 (pt) 2010-04-01 2016-07-12 Procter & Gamble organossilicones
FR2968766B1 (fr) 2010-12-10 2016-12-09 Univ De Tech De Troyes Systeme de procede de detection d'especes biologiques ou chimiques bases sur un qcm structure
EP3215812B1 (fr) 2014-12-29 2020-10-07 Concentric Meter Corporation Capteur et dispositif de mesure de paramètre de fluide
US10126266B2 (en) 2014-12-29 2018-11-13 Concentric Meter Corporation Fluid parameter sensor and meter
US10107784B2 (en) 2014-12-29 2018-10-23 Concentric Meter Corporation Electromagnetic transducer
EP3258239A1 (fr) * 2016-06-13 2017-12-20 INL - International Iberian Nanotechnology Laboratory Procédé de validation d'un résonateur
ES2644580B2 (es) * 2017-07-26 2018-06-04 Universitat Politècnica De València Procedimiento de diagnóstico de lupus eritematoso sistémico (les)
DE102019119911A1 (de) * 2019-07-23 2021-01-28 Herrmann Ultraschalltechnik Gmbh & Co. Kg Verfahren und Generator zur Charakterisierung eines Schwingsystems
DE102020134066A1 (de) 2020-12-17 2022-06-23 Endress+Hauser Flowtec Ag Vortex-Durchflussmessgerät und Verfahren zum Überprüfen eines Vortex-Durchflussmessgeräts
WO2023003764A1 (fr) * 2021-07-19 2023-01-26 Inficon, Inc. Capteur de microbalance à cristal de quartz (qcm) à réponse d'enregistrement rapide
EP4467941A1 (fr) * 2023-05-25 2024-11-27 Innoperform GmbH Évaluation très précise de signaux dépendants du chemin
CN119534553B (zh) * 2025-01-23 2025-04-08 成都晶宝时频技术股份有限公司 无极石英晶体液相测量的分析方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3653253A (en) * 1970-01-05 1972-04-04 Thermo Systems Inc Aerosol mass concentration spectrometer
CH662421A5 (de) * 1983-07-13 1987-09-30 Suisse Horlogerie Rech Lab Piezoelektrischer kontaminationsdetektor.
US4788466A (en) * 1987-11-09 1988-11-29 University Of Arkansas Piezoelectric sensor Q-loss compensation
GB8922601D0 (en) * 1989-10-06 1989-11-22 Rolls Royce Plc Thermal piezoelectric microbalance and method of using the same
DE4293402T1 (de) * 1991-09-18 1994-09-08 Yuasa Battery Co Ltd Schwefelsäurekonzentrationssensor für Bleiakkumulatorbatterien
JP3354217B2 (ja) * 1993-07-30 2002-12-09 柴田科学株式会社 気体中の塵埃粒子の質量濃度を測定する方法
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US5827947A (en) * 1997-01-17 1998-10-27 Advanced Technology Materials, Inc. Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998041820A1 (fr) * 1997-03-17 1998-09-24 Q-Sense Ab Procede et appareil de mesure des proprietes et des processus des cellules au niveau de surfaces

Also Published As

Publication number Publication date
DE69610183T2 (de) 2001-06-21
AU5783796A (en) 1996-11-21
SE9501653D0 (sv) 1995-05-04
WO1996035103A1 (fr) 1996-11-07
US6006589A (en) 1999-12-28
EP0775295B1 (fr) 2000-09-06
SE9501653L (sv) 1996-11-05
DE69610183D1 (de) 2000-10-12
WO1996035103A9 (fr) 2000-02-10
EP0775295A1 (fr) 1997-05-28

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