SE0203844D0 - Förfarande för att överföra elektrisk ström till en rörugn - Google Patents
Förfarande för att överföra elektrisk ström till en rörugnInfo
- Publication number
- SE0203844D0 SE0203844D0 SE0203844A SE0203844A SE0203844D0 SE 0203844 D0 SE0203844 D0 SE 0203844D0 SE 0203844 A SE0203844 A SE 0203844A SE 0203844 A SE0203844 A SE 0203844A SE 0203844 D0 SE0203844 D0 SE 0203844D0
- Authority
- SE
- Sweden
- Prior art keywords
- electric current
- furnace wall
- procedure
- conducted
- tube furnace
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0203844A SE0203844L (sv) | 2002-12-23 | 2002-12-23 | Förfarande och anordning för överföring av elektrisk ström till en ugn |
| JP2004562176A JP4528630B2 (ja) | 2002-12-23 | 2003-12-04 | 管状炉に電流を供給する方法 |
| US10/540,679 US8071921B2 (en) | 2002-12-23 | 2003-12-04 | Method to supply electric current to a tube furnace |
| CNB2003801073048A CN100493265C (zh) | 2002-12-23 | 2003-12-04 | 供给电流到管式炉的方法 |
| PCT/SE2003/001886 WO2004057917A1 (en) | 2002-12-23 | 2003-12-04 | Method to supply electric current to a tube furnace |
| EP03776143A EP1576855B1 (en) | 2002-12-23 | 2003-12-04 | Method to supply electric current to a tube furnace |
| ES03776143T ES2297239T3 (es) | 2002-12-23 | 2003-12-04 | Metodo para el suministro de corriente electrica a un horno tubular. |
| DE60317707T DE60317707T2 (de) | 2002-12-23 | 2003-12-04 | Verfahren zur stromversorgung eines rohrofens |
| KR1020057011864A KR20050089849A (ko) | 2002-12-23 | 2003-12-04 | 관형 노에 전류를 공급하는 방법 |
| AU2003283927A AU2003283927A1 (en) | 2002-12-23 | 2003-12-04 | Method to supply electric current to a tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0203844A SE0203844L (sv) | 2002-12-23 | 2002-12-23 | Förfarande och anordning för överföring av elektrisk ström till en ugn |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE0203844D0 true SE0203844D0 (sv) | 2002-12-23 |
| SE521278C2 SE521278C2 (sv) | 2003-10-14 |
| SE0203844L SE0203844L (sv) | 2003-10-14 |
Family
ID=20289993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE0203844A SE0203844L (sv) | 2002-12-23 | 2002-12-23 | Förfarande och anordning för överföring av elektrisk ström till en ugn |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US8071921B2 (sv) |
| EP (1) | EP1576855B1 (sv) |
| JP (1) | JP4528630B2 (sv) |
| KR (1) | KR20050089849A (sv) |
| CN (1) | CN100493265C (sv) |
| AU (1) | AU2003283927A1 (sv) |
| DE (1) | DE60317707T2 (sv) |
| ES (1) | ES2297239T3 (sv) |
| SE (1) | SE0203844L (sv) |
| WO (1) | WO2004057917A1 (sv) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8039289B2 (en) * | 2009-04-16 | 2011-10-18 | Tp Solar, Inc. | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing |
| US8828776B2 (en) | 2009-04-16 | 2014-09-09 | Tp Solar, Inc. | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3271561A (en) * | 1964-03-02 | 1966-09-06 | Martin Marietta Corp | Apparatus for thermally evaporating various materials in vacuums for producing thin films |
| DE2340225A1 (de) * | 1973-08-08 | 1975-02-20 | Siemens Ag | Verfahren zum herstellen von aus halbleitermaterial bestehenden, direkt beheizbaren hohlkoerpern |
| IT1093108B (it) * | 1978-02-16 | 1985-07-19 | Rigatti Lochini Luchino | Forno elettrico a sistema joule per fusioni orafe,dentali e simili |
| US4286142A (en) | 1979-10-22 | 1981-08-25 | Theta Industries, Inc. | Electric tube furnace |
| JP2998903B2 (ja) * | 1990-11-14 | 2000-01-17 | 東京エレクトロン株式会社 | 熱処理装置 |
| DE4411591C2 (de) * | 1994-03-30 | 1996-06-05 | Mannesmann Ag | Bodenelektrode eines mit Gleichstrom beheizten Ofens |
| US5869810A (en) * | 1995-05-23 | 1999-02-09 | Victor Reynolds | Impedance-heated furnace |
| JP3388306B2 (ja) | 1996-02-01 | 2003-03-17 | 株式会社ニッカトー | 電気炉 |
| US6042370A (en) * | 1999-08-20 | 2000-03-28 | Haper International Corp. | Graphite rotary tube furnace |
-
2002
- 2002-12-23 SE SE0203844A patent/SE0203844L/sv not_active IP Right Cessation
-
2003
- 2003-12-04 KR KR1020057011864A patent/KR20050089849A/ko not_active Ceased
- 2003-12-04 EP EP03776143A patent/EP1576855B1/en not_active Expired - Lifetime
- 2003-12-04 JP JP2004562176A patent/JP4528630B2/ja not_active Expired - Fee Related
- 2003-12-04 ES ES03776143T patent/ES2297239T3/es not_active Expired - Lifetime
- 2003-12-04 US US10/540,679 patent/US8071921B2/en not_active Expired - Fee Related
- 2003-12-04 WO PCT/SE2003/001886 patent/WO2004057917A1/en not_active Ceased
- 2003-12-04 CN CNB2003801073048A patent/CN100493265C/zh not_active Expired - Fee Related
- 2003-12-04 DE DE60317707T patent/DE60317707T2/de not_active Expired - Lifetime
- 2003-12-04 AU AU2003283927A patent/AU2003283927A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| DE60317707T2 (de) | 2008-09-25 |
| US20090020519A1 (en) | 2009-01-22 |
| AU2003283927A1 (en) | 2004-07-14 |
| CN100493265C (zh) | 2009-05-27 |
| EP1576855A1 (en) | 2005-09-21 |
| US8071921B2 (en) | 2011-12-06 |
| EP1576855B1 (en) | 2007-11-21 |
| SE521278C2 (sv) | 2003-10-14 |
| DE60317707D1 (de) | 2008-01-03 |
| ES2297239T3 (es) | 2008-05-01 |
| CN1729717A (zh) | 2006-02-01 |
| JP2006511779A (ja) | 2006-04-06 |
| SE0203844L (sv) | 2003-10-14 |
| KR20050089849A (ko) | 2005-09-08 |
| WO2004057917A1 (en) | 2004-07-08 |
| JP4528630B2 (ja) | 2010-08-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NUG | Patent has lapsed |