RU2796791C1 - Method, sensor device and displacement measurement system based on quantum properties of atomic beams - Google Patents

Abstract

FIELD: measurement devices.

SUBSTANCE: invention is related to devices for measuring kinematic parameters of movement of objects in space in real time. The displacement measurement process is based on formation of a monochromatic atomic beam with a given average velocity and a given direction of motion, based on a focused ion beam (FIB), registration of the starting time of the beginning of the beam fragment and coordinates of the spatial beginning of the beam fragment, detection of beam particles that have reached the sensitive elements of the detector, with registration of the time of arrival of the three-dimensional coordinate profile, reconstruction in the computer of the space-time evolution of the beam from the known starting characteristics of each fragment until the moment of registration by the detector elements after passing through the working volume with the calculation of the increment of the polar angle, azimuth and distance traveled for the time during which these increments are obtained, which makes it possible to trace the dependence in real time of all spatio-temporal movements of a device or an object rigidly mechanically connected with it.

EFFECT: increase of accuracy of real-time measurements of all spatio-temporal movements.

3 cl, 6 dwg

Description

Technical field

The present invention relates to devices for measuring the kinematic parameters of the movement of objects in space in real time.

The present invention is intended for use on moving objects where precise knowledge of the object's evolution parameters is required.

Prior Art

During the patent search, no direct analogues of the claimed invention were found.

SUMMARY OF THE INVENTION AND DESCRIPTION OF THE DRAWINGS

The method of operation of a displacement measurement sensor (DMS) is based on the use of the inertia property of an atomic (molecular) beam [1] and the properties of atomic transitions of excited atoms [29] with an activated "clock" transition. For convenience of description, let's conditionally divide it into blocks, contours and volumes, each of which performs certain functions ("decomposition" [2]) and in total they ensure the operation of the DIP. On FIG. 1 shows a diagram of the selected conditional division of the DIP into functional blocks, contours and volumes according to the invention.

In the implementation of DIP, ion beams are used [3] to select ions with certain (given) velocities in order to form monochromatic atomic or molecular beams on their basis, if necessary (the choice for the implementation of not ions, but atoms and molecules).

The terms - "atomic (molecular) beams" and "clock"transition" are used in atomic clocks (atomic frequency standards) and mean directed flows of molecules or atoms moving in vacuum practically without collisions with each other and particles of the residual gas, in addition, atomic (molecular) beams imply small standard deviations in the values of the longitudinal velocities of the beam particles from the average value and close to zero standard deviations of the transverse particle velocities. The term "activated" clock transition "- means that the particle (atom, molecule) is transferred to an excited short-lived quantum state with an energy higher than the energy of the ground state, and if the particle is not externally affected, then after some time a spontaneous transition to the ground state occurs. a state in which quanta of an ultra-narrow spectral line are emitted with a base frequency f _b and a relative width of the spectral line Df _b /f _b <10 ^-9 .

I. Device configuration on a single DIP element.

The component parts of the DIP device element - Fig. 1 - are:

column (generator) of a focused ion beam (FIB) [4] - (1), with a proprietary power supply (2);

FIP-column evacuation unit (3);

thermal control unit FIP-column (4);

FIP-column remote control unit (5);

carrier shell of the device on a single DIP element - a cylindrical stainless steel pipe, sealed on one side, outer diameter 1 cm, wall thickness 300 µm (6);

shell of passive electromagnetic protection - 5 pairs of layers of protective materials (7); thermostatic casing - assembled from plates of six-layer Peltier elements (8);

DIP start-detector with a desonant synchronous phase detector for measuring the ion beam profile (9);

ion beam electric charge compensator (10);

activator of the "clock" transition of the atomic beam (11);

an array of terminal detectors based on LGAD elements for registration of beam atoms, pixel readout type (12);

an array of terminal detectors based on SiPM elements for registering photons of the “clock” transition, pixel readout type (13);

2-channel power supply circuit and device evacuation circuit on a single DIP element (14);

control center, communications and data processing - device calculator on a single DIP element (15);

vacuum sealing of the carrier shell of the device on a single DIP element (16);

working volume of the device on a single DIP element (17).

Focused ion beams.

Ion beams are obtained using ion sources [5] of various types. Further, the ions are drawn into the electrical and magnetic focusing unit with the help of a constantly applied accelerating potential difference, which forms a cylindrical ion beam.

To implement FIB, a "focused ion beam"(FIB; Focusedionbeam (FIB); [4]) is used in the form of one of several types of commercially available ion columns of the TomahawkTM type from FEI, [6] or products from Raith [7], which provide cylindrical focused ion beam (positive ions H, Li, Be, B, C, Si, Co, Ga, Ge, Au, Bi and other elements and substances) with a cross section of 1 μm or less, controlled by an accelerating voltage of up to 30 kV (which covers the ion energy range of 0.01 eV - 30 keV), current up to 50 nA (3.125 10 ¹⁰ ions / s), energy spread 5-10 eV.

For our purposes, sufficient currents are I ~ 1 nA (N ~ 6.25 * 10 ⁸ ions / s), while the average distance between ions in the beam will be ~ 1.6 nm (~ 16 atomic diameters).

The use of atoms (molecules) of chemical elements and substances such as cesium, rubidium, methane, thallium, calcium, strontium, hydrogen, iodine, osmium (VIII) oxide, mercury and others gives an additional advantage, which consists in the possibility of using the narrow spectral lines (with a relative width of the spectral line Δf _b /f _b <10 ^-9 ), for the quanta of the activated transition of atoms (ions, molecules) from the excited energy quantum state to the ground state.

Synchronization of the electronic circuits of the device

The stability of modern quartz clock generators with thermal stabilization reaches 10 ^-10 s/hour [8]. In this regard, the clocking of the electronic circuits of the device is built according to a two-stage scheme consisting of a 100 MHz thermally stabilized generator and a microwave generator clocked by this generator with a frequency of 10 GHz (MG3691C - RF and microwave signal generator from 2 to 10 GHz) [9].

The resonant synchronous phase detector for analyzing the output current of an ion beam in real time is based on the classical scheme of a synchronous detector [10]. The input signal f _in (t) (see Fig. 2) for the circuit is generated by a generator w ~ 10 GHz [11] (oscillation period 100 ps) using one of the three output waveguides with a phase-matched resonator controlled by a capacitive sensor included in it ion beam current (see Fig. 3). The other two waveguides form the reference input signals Acos(wt) and Asin(wt) which are also phase-matched.

The components of the piping of the resonant synchronous phase detector for analyzing the output current of the ion beam - Fig. 3 - are:

10 GHz generator (18);

waveguide generator splitter (19);

output waveguides (20);

controlled resonator (21);

ion beam current sensor (22);

upper electrode of the ion beam current sensor (23);

lower electrode of the ion beam current sensor (24);

differential signal amplifier of the ion beam current sensor (25);

schematic arrangement of the ion beam fragment (26);

resonant synchronous phase detector for analysis of the output current of the ion beam (27).

The output signal f _out (t) is continuously digitized by an ADC with a sampling rate of 10 GHz (for example, AD9213, 10 GSPS, 12 bit [12]) and sent via high-speed internal communications (BcBK) to the control, communications and data processing center (DCCOD). Intensive high-speed interblock data flows are provided by the 100-Gigabit Ethernet [13] CiscoCFP-100G-SR10 standard module.

As a result, we have a 12-bit current profile (charge density) of the ion beam with a sampling frequency of 10 GHz (period T=100 ps) and an average integral number of ions ~100/0.73=137 per period, along with the clock pulse of the same sending frequency and high stability accompanying it and, thanks to the counting of clock pulses, a clear timing of all important events in the device with a time resolution σ _t ~ 10 ps (clock pulse jitter). The moment of time t _0n of the beginning (start) of the passage of the given (numbered) fragment of the phase detector registrars is fixed. The accumulated data make it possible to reconstruct the 3d profile I(x(t), y(t), z(t), t), calculate the transit time of the centers of individual charges (statistically), and the total charge. In addition, according to the accumulated data, between the moments of time t _0n and t _0n +T, the polar angle of the direction of movement of the axis of the beam fragment, the speed V _of the movement of the center of mass of the fragment is calculated.

Ion Charge Compensation in the Beam

To ensure the operability of the device, a monoenergetic beam of neutral atoms with a cross section of ~1 μm is created. This is achieved by soft neutralization of the charge of the primary beam of monoenergetic ions with a cross section of ~1 μm already obtained using the FIB source.

For most transitions (the process of neutralization of atoms) ion-atom, the maximum values of the capture cross section (σ _capture ) of an electron are within Vopt ~ 0.5-2 Vo (here Vо = 2.19⋅10 ⁸ cm/s) [14]. With increasing V, according to experimental data for ions in hydrogen, in the region V=1.5-2, the cross sections σ _capture for ions with charges i=1-5 decrease proportionally to V ^-3 . With a further increase in velocity, the dependence of these cross sections on V increases, and already in the region V>2-3 we have σ _capture ~V ^-5 .

Thus, the optimal electron speed is 0.5-2 Vo, and the electron energy corresponding to this speed and, accordingly, the energy of electrons at the output of the electron gun of the charge compensator is E _e ~ 5-30 eV.

Axially symmetric charge compensator electron gun - Fig. 4 - made according to the well-known scheme of the Pierce electron gun with a converging cylindrical type flow [15]. The design uses an emitter (a low-temperature impregnated cathode with a current density of up to 10 A/ ^cm2 [16]) made of LaB ₆ to create a bright source of low-energy electrons with an energy spread of ~0.3 eV.

The components of the circuit in a partial section of the ion beam charge compensator - Fig. 4 - are:

Pierce's ring electron gun (28);

fragment of the ion beam - schematic arrangement (29);

fragment of the flow of compensating electrons - schematic arrangement (30);

a fragment of a beam of neutral atoms - a schematic arrangement (31);

compensator electron collector (32);

electrode for collecting residual electrons of the compensating flow (33).

Thus, if at the input of the charge compensator the initial FIB of light ions (protons) was cylindrical with a diameter of 1 μm and an ion velocity of 2–3 km/s, then the beam of neutral atoms obtained after charge compensation on the working volume detector will have a diameter of ~0.5 µm due to partial focusing by the transverse flow of compensating electrons. Compensation for the charge of heavier ions will have an even lesser effect on the change in the dimensions of the initial beam at the detector. The residual electrons of the compensating flow are collected on the collector electrode of the compensator under the action of a potential difference of several tens of volts.

Activation of the "clock" transition

Neutral atoms (molecules) of the resulting monoenergetic beam are activated into an excited quantum state of the "clock" transition, in which atoms (molecules) will emit photons with a highly stable base frequency f _b when passing between two hyperfine energy levels.

The activator is implemented according to the scheme of optical coherent pumping [30] (see Fig. 5) using a set (line) of diode lasers from BWT Beijing LTD [31] covering the visible light spectrum from the near ultraviolet to the near infrared range.

The components of the circuit of the activator of the "clock" transition of the atomic beam - Fig. 5 - are:

diode laser pumping the resonator of the activator of the "clock" transition of the atomic beam (34);

adjustable fastenings of optical elements (35);

optics of a linear resonator for pumping an atomic beam (36);

activation zone of beam atoms (37);

fragment of a beam of neutral atoms in the ground quantum state - schematic arrangement (38);

a fragment of a beam of neutral atoms with an activated "clock" transition - schematic arrangement (39).

working volume.

The working volume is made in the form of a hollow evacuated (high vacuum of the order of 10 ^-2 -10 ^-3 Pa) cylinder, L~100 cm long, which corresponds to the path of free movement (by inertia) of the beam fragment and rectilinear photon propagation. The working volume (see figure 1) is placed in a circuit of passive electromagnetic shielding (KPEME), providing electromagnetic protection (residual level of the electric field is not more than 0.0001 V/cm, the magnetic field is not more than 10 ^-6 -10 ^-7 T). In addition, the working volume is covered by a temperature control circuit (CTS, thermal stabilization of a given operating temperature of the order of 10 ^-2 -10 ^-3 C).

Thus, at the entrance to the working volume, we have a beam of neutral atoms with energy and spatial-angular characteristics similar to the initial ion beam (see paragraph "Focused ion beams."), with a 3d intensity profile synchronized ("attached") with clock pulses (frequency sampling ~10 GHz, see paragraph "Synchronization of operation of electronic circuits of the device"), the polar angle of the direction of movement of the fragment axis, the velocity Vc _of the movement of the center of mass of the fragment, and the time t _0n of the passage of the data (numbered) fragment of the phase detector recorders.

Further, a fragment of a beam of practically monoenergetic atoms with a constant given velocity V _c and known characteristics freely propagates by inertia in the working volume of the DIP. In this case, the atoms of each fragment, falling into the working volume, move by inertia with a certain average velocity V _c , set by the FIB device in the range from ~1 km/s to ~1000 km/s. For the given values of V _c =2.2 km/s, the time of flight of length L is about t _of ~450 μs. which corresponds to N _tof =4.5 10 ⁸ /10 ² 0=4.5 10 ⁶ cycles.

When using atoms (molecules) of chemical elements and substances that have narrow spectral lines of transition quanta ("clock" transition) of atoms (molecules) of a substance from an excited energy quantum state to the ground state, an independent spontaneous process will be superimposed on the mechanical movement of atoms in the working volume emission of photons with a highly stable base frequency f _b during the transition between two hyperfine energy levels.

An array of terminal LGAD and SiPM detector elements in the working volume.

The working volume (see Fig. 1) contains a detector part consisting of a plurality of elements mounted on its inner surface. The LGAD elements of the detector are sensitive to the events of collision of beam atoms with their surface, while the SiPM elements of the detector are sensitive to the events of collision (interaction) of photons of the "clock" transition from beam atoms. The signal of the detecting element is proportional, in the case of atoms, to the energy of the collision of the atom with the sensitive surface of the LGAD element, and in the case of photons, to the energy (frequency) of the photon.

Atomically sensitive elements of the detector are based on the so-called. avalanche diodes with low gain (low-gainavalanchediodes LGAD, another name is resistive silicon detector (RSD)) [17].

Low gain avalanche diodes are a class of silicon sensors with high time resolution - ~10-30 ps at room temperature. With fast readout and digitization electronics, the response frequency reaches ~1 GHz. The signal is formed in less than 2 ns. [18]. The avalanche diode is a flat layered structure on a silicon wafer 100 µm thick. A potential difference of 100 V is applied to the n++ and p++ electrodes of the detector. The electrodes for reading pixel-type signals are deposited on the outer (sensitive) side of the plate.

The light-sensitive elements of the detector for photons of the “clock” transition of the base frequency f _b located in the range from the near ultraviolet to the near infrared part of the visible spectrum are also built on the basis of silicon avalanche photodiodes. Each element is integrated into an assembly that has a pixel structure and is sold under the name SiPM (silicon photomultiplier tube). R-series SiPMs of the microRA model from SensL [32] were used.

Atomic-sensitive elements occupy the center of the end part of the detector, and photon-sensitive elements occupy the periphery of the end part and the side part of the detector.

The spatial resolution of the detector for both types of sensors is determined by the expression r/(12) ^1/2 , where r is the gap between the electrodes (pixels), in our case, the gap is r=0.5 µm, from which σ _r ~0.12 µm.

Algorithm for obtaining measured values.

Any element of the detector operates continuously, in a pipelined mode, triggered by every 10th (i.e., at a frequency of ~1 GHz) pulse of the clock generator. The energy integrated over a time of ~1 ns from photons of the "clock" transition and collisions of beam atoms with the corresponding detector element is recorded, digitized [19], and the information received is fed to the DCCOD via HVC channels.

The Doppler change in the frequency (energy) of an electromagnetic quantum during the motion of a signal source (beam atom) is described by the formula [20] (for simplicity, a planar 2-dimensional formula is given)

here _fb is the basic quantum frequency, f is the quantum frequency recorded by the detector element, V is the source velocity, the receiver is assumed to be stationary, θ is the angle between the source velocity vector and the direction to the receiver, c is the speed of light in vacuum. At low speeds of movement of objects, the source-receiver V=V _c <<c=300000 km/s (in our case, it is fulfilled) the formula is simplified and the speed through the frequencies f _b , f and the angle θ is expressed as

V=c(f/f _b -1)/cosθ.

The calculator (DSCOD) generates in real time a 3d-histogram (3-dimensional distribution) of the energy E(x(t+t _of ),y(t+t _of ),z(t+t _of )) of photons recorded by the detector, for each cycle of calculations.

Substituting the basic relation of the quantum theory of photon emission

f=h/E(x(t+t _of ),y(t+t _of ),z(t+t _of ))

in the previous formula, we calculate the speed V of the movement of the DIP.

Further, on the basis of the kinematic relation for the free motion of the body by inertia S=Vt, the calculator, using the given parameters of the beam and the working volume, i.e. given values V _c =2.2 km/s, the time of flight of length L is about t _of ~450 μs, restores the space-time picture of the hit of freely moving atoms in this (corresponding to the n-th cycle of the generator) fragment of the atomic beam, fixed in the device ( see paragraph "Synchronizing the operation of the electronic circuits of the device"), on the sensitive surface of the corresponding elements of the detector. Reconstructed spatiotemporal (t _i , x _i (t _i ), y _i (t _i ), z _i (t _i )) picture of registration of atoms knowledge of kinematic and spatial (t _ion , x _i (t _ion ), y _i ( t _ion ), z _i =0+f _i (ξ _i (t _ion )), here f _i (ξ _i (t _ion ) is the offset from the coordinate z _i =0 of the i-th atom of the fragment for time t _ion ) characteristics of each atom of the n-th fragment at the moment of start, from the condition of smallness of the angular evolution per measurement cycle, in accordance with the trigonometric formula

Tg(Δθ _i ,Δϕ _i )=(y _i (t _i ), z _i (t _i ))/L~(Δθ _i ,Δϕ _i )

allows you to calculate the increment of the polar angle Δθ _i and the azimuth angle Δϕ _i , the distance traveled Δs _i =x _i (t _i )+x _i (Δt _i ), where the time during which these increments are obtained Δt _i =t _i -t _ion for each atom.

The summation of the obtained values for atoms and photons of a beam fragment or for atoms and photons in a given period of time makes it possible to obtain the values of increments of angles, distance traveled and speed with high accuracy. So the error in measuring the angles σ _θ,ϕ ~7⋅10 ^-6 degrees, the error in measuring the path length σ _s ~0.12 μm.

Accuracy and dynamic ranges obtained depend on the average velocity (energy) of ions V _c selected using the FIB device, which can vary in the range from ~1 km/s to ~1000 km/s.

The speed calculated from the Doppler shift of frequencies (energies) for each quantum and averaged for all detected photons over the period of the clock generator after processing in the DCCOD corresponds to the accuracy of the calculated values obtained by processing the beam of free atoms.

Control, communications and data processing center - computer.

The network node - the center of communications, control and data processing (CUCOD) is built on the basis of graphics processors with the NVIDIA GA102 Ampere architecture, which provide the necessary functions and performance [22]. The network node combines all internal information sources of the DIP and, being an active access point (router), provides an output stream of information in a consistent format for external users. Sufficient bandwidth of inter- and intra-unit communication lines, as well as communication outside the device, is provided by high-speed internal communications (HVL) based on the 100-Gigabit Ethernet standard by Cisco CFP-100G-SR10 modules [23].

The circuit of active-passive electromagnetic shielding.

The circuit of active electromagnetic shielding is a set of electrical and magnetic elements: copper plates - electrodes and magnetic (solenoidal) coils - dipole magnets. The elements are connected to the power circuit of all working units of the DIP, are controlled by the TsUKOD and serve to compensate for internal inter- and intra-unit electromagnetic fields of the device.

The passive electromagnetic shielding circuit is a multilayer casing fixed on the device frame. The individual layers are glued together. Layers are made up of two types of materials. The first type is with high electrical conductivity based on copper, the second type is with high magnetic permeability based on nickel-molybdenum-iron alloy. The electromagnetic screen is assembled from five pairs of layers. A pair consists of glued films or thin sheets of each type.

As the first type, a film of screening material NK-97 was chosen, material thickness: 0.21 mm [24]. The shielding ratio at high, ultra high, ultra high frequencies is -70 dB or better.

As the second type, sheets of the so-called. Mu metal. Specifications: ASTM A-753 Alloy 4, MIL N-14411C Composition [25]. Mu-metal is 80% nickel, 4.5% molybdenum, the rest is iron in the form of a soft ferromagnetic alloy. Magnetic permeability Mumax: 350000-500000; Saturation induction: 0.76T; Coercive force: 0.6 A/m;

The level of m-permeability for this material is hundreds of times higher than that for ordinary steel.

The casing of the described design provides the required protection against external electromagnetic fields in a wide range of intensities and frequencies from hundreds of GHz up to constant electric and magnetic fields at a level of electric field no more than 0.0001 V/cm, magnetic field no more than 10 ^-6 -10 ^-7 Tl.

Vacuum circuit of the device.

The evacuation circuit covers the entire internal volume of the device, interfaces with the evacuated transitional volume of the FIB and provides a high vacuum of the order of 10 ^-2 -10 ^-3 Pa in the working volume and the cavities for transporting the ion and, then, the atomic beam of the device. The high performance of the evacuation circuit is ensured by the pumping system of the ERSTEVAK MT-Turbo D type, assembled completely on oil-free pumping means (turbomolecular pump (65 l/s), diaphragm fore vacuum pump) [26].

Temperature control circuit

The temperature control circuit, covering all the main heat-generating units of the device - FIB, reading electronic circuits, upper and lower synchronizer electrodes, charge compensator electrodes and detector elements of the working volume. The main part of the thermal flows of the FIP column is regulated by its own (proprietary) system. The fine thermal stabilization of the FIB by means of controlled forced air cooling is ensured by its interface with the temperature control circuit of the device. Electronic circuits located outside the evacuated volume are also forced cooled by controlled air flow. Thermoactive structural elements located in the evacuated part of the device - readout electronic circuits, upper and lower synchronizer electrodes, charge compensator electrodes and detector elements of the working volume - are cooled by six-layer modules of the Peltier type TEC6-60506 (62 × 23 mm, dT ~ 100 ° C, W _cool ~10 W) [27]. The body part of the working volume is also covered by a thermal stabilization circuit with six-layer Peltier modules.

The temperature control circuit is closed by feedback temperature sensors and controlled by the TsUKOD. The mode of stabilization of the operating temperature is maintained at the level of the standard deviation of 10 ^-2 -10 ^-3 deg.C.

DIP power supply circuit.

The power supply circuit of the DIP device is 2-channel.

The first - the power channel - consists of an industrial 10-kW remotely controlled voltage stabilizer Shtil InStab IS1110RT [28] - an inverter voltage stabilizer that provides maximum voltage protection with poor-quality sinusoid correction, the output voltage is 220 V ± 2% and its own power supplies for the vacuum circuit and FIP columns.

The second one is the power supply channel for low-current beam transport control circuits, synchronization, and working volume detectors and consists of an industrial 10-kW remotely controlled voltage stabilizer Shtil InStab IS1110RT with connected remotely controlled stabilized power supply units of the AKIP-1108A-130-3 type. The TsUKOD power supply is also connected to the voltage stabilizer of the 2nd channel.

II. Measurement system based on three DIP elements.

The measurement system diagram shown in Fig. 6 is assembled from 3 rigidly fastened together and oriented mutually perpendicular identical (identical) elements of the DIP described in section I.

The components of the functional diagram of the displacement measurement system - Fig. 6 - are:

Device-1 on a single DIP element (40).

Device-2 on a single DIP element (41).

Device-3 on a single DIP element (42).

Additional power supply channel for the displacement measurement system device (43).

Additional common clock generator and common DSCOD of the device of the displacement measurement system (44).

The components of the displacement measurement system (SIS) are synchronized with the help of an additional common clock generator (OTG) and are controlled by a common DSCOD (OCCD). OTG and OTsUKOD are assembled from elements similar to those described in the relevant sections of section I. An additional power channel consists of an industrial 10-kW remotely controlled voltage stabilizer Shtil InStab IS1110RT with its own OTsUKOD power supplies connected to it and a remotely controlled stabilized power supply unit AKIP-1108A-130 -3 for OTG.

Combining through transformations of reference systems and coordinates into a single coordinate system (using data processing in OCUKOD) associated with the SIP, the obtained values for 3 independent identical orthogonally oriented relative to each other arms of the SIP device makes it possible to trace the dependence in real time of all spatio-temporal displacements Δθ(t), Δϕ(t), Δs(t), of the SIP device or an object rigidly mechanically connected to it. In this case, the error in measuring the angles σ _θ,ϕ ~7⋅10 ^-6 degrees, the error in measuring the path length σ _s ~0.12 μm.

LITERATURE

1. Physical encyclopedia v. 3, article "Molecular and atomic beams", Moscow, Scientific publishing house "Big Russian Encyclopedia", 1992

2. https://ru.wikipedia.org/wiki/Decomposition

3. Physical encyclopedia v. 2. article "Ion beam". Moscow. "Soviet encyclopedia. 1990

4. https://ru.wikipedia.org/wiki/Focused_ion_beam

5. Physical encyclopedia v. 2, article "Ion source", Moscow, "Soviet Encyclopedia", 1990

6. https://fei.com

7.https://www.raith.com/

8. V. Kochemasov, E. Khasyanova "Thermostated quartz self-oscillators" Components and technologies, No. 1, 2018, p. 46.

http://www.radiocomp.ru/joom/images/storage/docs/articles/12_2018.pdf

9. https://www.etalonpribor.ru/catalog/generatori_signalov_vch/product/MG3691C_-_generator_Rch_i_SVCh_signalov_ot_2_do_10_Ggts/

10. Physical encyclopedia, volume 4, article "Synchronous detector", p. 529, Ch. Editor A.M. Prokhorov, Moscow, Scientific Publishing House, "Great Russian Encyclopedia", 1994.

11. http://terascan.ru/teragercovyve-generator

12. https://www.analog.com/media/en/technical-documentation/data-sheets/AD9213.pdf

13. https://www.cisco.com/c/en/us/products/collateral/interfaces-modules/transceiver-modules/data_sheet_c78-633027.html

14. http://www.jetp.ac.ru/cgi-bin/dn/r_116_1539.pdf

I.S. Dmitriev, Ya.A. Teplova, Yu.A. Feinberg ZhETF, 1999, 116, no. 5(11)

15. Alyamovsky I.V. Electron beams and electron guns. Soviet radio, 1966.

16. http://www.gycom.ru/products/katod.htm

17. LGAD Design for Future Particle Trackers N. Cartilla, R. Arcidiacono, G. Borghi, M. Boscardin, M. Costa, March 31, 2020, 17 pages, Published: Nucl.Instrum.Meth.A 979 (2020) 164383, DOI: 10.1016 / j.nima.2020.164383

18. https://www.bnl.gov/instrumentation/case/low-gain-avalanche-diodes.php

19. https://www.analog.com/media/en/technical-documentation/data-sheets/AD9213.pdf

20. L. D. Landau and E. M. Lifshits, Field Theory. 8th edition, stereotypical. Fizmatlit, 2001.

21. https://ru.wikipedia.org/wiki/Chi-square test

22. https://www.nvidia.com/ru-ru/data-center/nvidia-ampere-gpu-architecture/

23. https://www.cisco.com/c/en/us/products/collateral/interfaces-modules/transceiver-modules/data_sheet_c78-633027.html

24. https://shielding.su

25. http://mumetal.co.uk

26. https://erstvak.com/catalog/vakuumnaya-sistema-ustanovka/vysokovakuumnaja-otkachnaja-sistema/

27. https://www.chipdip.ru/catalog-show/thermoelectric-modules

28. https://energo-msk.ru/

29. https://ru.wikipedia.org/wiki/Atomic_clock

30. https://ru.wikipedia.org/wiki/Laser_pumping#Optical_pumping

31. http://www.bwt-laser.com/

32 www.sensl.com; https://www.onsemi.com/products/sensors/silicon-photomultipliers-sipm/

Claims (3)

1. The method for measuring the movements of objects in space is based on the formation of a monochromatic beam of particles with an intensity of 10 ⁵ to 10 ¹⁰ particles / second with a given average speed in the range from ~ 1 km / s to ~ 1000 km / s and a given direction of movement inside it, based on a focused ion beam (FIB) with a current in the range of 1 pA - 50 nA, a cross section of not more than 1 μm, an energy in the range of 0.01 eV - 30 keV with a spread of 5-10 eV, registration of the starting time t ₀ - start beam fragment by the arrival of the clock pulse, the integrated intensity for the period of the clock generator 100 ps and coordinates x ₀ , y ₀ , z ₀ , the spatial beginning of the beam fragment, the use of chemical elements and substances with a relative width of the spectral line Δf _b /f _b <10 ^-9 to form a particle beam and activate the quantum transition of particles corresponding to this narrow spectral line, to provide conditions for the movement of the prepared beam in the working volume in the absence of other external influences, and spontaneous emission of photons of the narrow spectral line of the activated quantum transition, with the base frequency f _b , and the arrays end detectors register the frequency f of each photon emitted by the particles of the beam, detecting the particles of the beam and photons emitted by them, with the frequency f of the narrow spectral line of the activated quantum transition, which reached the sensitive elements of the detector, with the registration of the arrival time t _f and three-dimensional x _f , y _b , z _f of the coordinate profile of the integrated intensity of the detected particles and photons over 10 periods of the clock generator 1000 ps, recovery in the calculator of the spatiotemporal evolution of the particle beam from the known starting characteristics of each fragment, clocked by the generator until the moment of registration by the detector elements of 10 fragments (i.e. . with a period of 1000 ps) after passing through the working volume with the calculation of the increment of the polar angle Δθ, azimuth Δϕ and distance traveled Δs for the time during which these increments were obtained Δt, with measurement errors for this period σ _θ,ϕ ~7⋅10 ^-6 deg ., σ _t ~10 ps and σ _s ~0.12 μm. 2. A device for measuring the movements of objects in space for implementing the method according to claim 1, characterized in that it contains a cylindrical stainless steel pipe sealed at one end, forming a carrier shell of the device with a working volume inside, while the carrier shell is installed inside a ten-layer shell electromagnetic protection, which is installed inside the thermostatic casing; a focusable ion beam column with power supply, evacuation, temperature control and remote control units, fixed on one side to the carrier shell; inside the carrier shell there is a starting detector with a resonant synchronous phase detector for measuring the ion beam profile, an ion beam electric charge compensator, an activator of a narrow spectral line of the quantum transition of the particle beam, which is adjacent to the working volume, in which arrays of terminal detectors are installed for registering beam particles of a pixel-type readout and terminal detectors for detecting photons of a narrow spectral line of an activated quantum transition of a pixel type of reading, while the elements are connected to the power supply circuit of devices, working blocks and circuits and to the control, communications and data processing center. 3. The system for measuring the movements of objects in space, including the device according to claim 2, characterized in that it is made of three rigidly fastened together and oriented mutually perpendicular identical elements of the device for measuring movements, the components of the system are synchronized using an additional common clock generator and are controlled from with the help of an additional common center for control, communications and data processing, the obtained values make it possible to trace the dependence in real time of all spatiotemporal movements Δθ(t), Δϕ(t), Δs(t), Δt(t) of a system or object, rigidly mechanically Associated with it, the continuous repetition of the cycles of measuring-calculating-issuing displacement values and subsequent operations with them ensure the continuity of the motion monitoring process.

Images