RU2537363C2 - Indexing device - Google Patents

Abstract

FIELD: measurement technology.

SUBSTANCE: invention is intended for linear motions in a precise mechanics. For example, it can be used in contorographs, profilers and scanning sonde microscopes. The indexing device contains a guide (1), made from monocrystal material, carriage (2), conjugate with it, and also driver (6), installed on the guide (1) and conjugate with the carriage (2). The base element (12) is added to the device, which bears the guide (1) and the driver (6), and the carriage (2) contains the first and the second fragments located at an angle to each other.

EFFECT: minimising of non-functional moves due to increase of dimensional stability of guides in time.

7 cl, 14 dwg

Description

The precision movement device is designed for linear movements in precision mechanics. For example, it can be used in contrographs, profilometers, and scanning probe microscopes.

Materials for slideways are divided into three groups: hardened steels and cast irons, non-ferrous alloys and plastics [1]. Such guides do not have high dimensional stability over time associated with their amorphous structure.

Known miniature linear guide (moving device) company INA, containing a flat sliding guide and the carriage [2]. Due to temporary drifts, such a guide cannot be used in super-precision contourographs, profilographs, and scanning probe microscopes (SPM). This device is selected as a prototype of the proposed solution.

The technical result of the invention is to reduce non-functional movements by increasing the dimensional stability of the guides in time.

The specified technical result is achieved by the fact that in the device of precision displacement containing the guide (1) and the carriage (2) associated with it, the guide (1) consists of a single-crystal material, in particular silicon.

In one embodiment, a drive (6) coupled to a carriage (2) is inserted into the device, while the drive (6) can be mounted on a rail (1).

In another embodiment, a first base element (12) is inserted into the device, onto which a guide (1) and a drive (6) are fixed.

In the third embodiment, the second base element (16) is inserted into the device, the guide (1) has the shape of a parallelepiped containing the first working surface (17), the second working surface (18), and is mounted on the second basic element (16), the carriage (2) contains the first fragment (19) and the second fragment (20), located at an angle to each other and respectively containing the first pair of support elements (21) and the second pair of support elements (22), interfaced with the guide (1), while introduced into the device the first clip (23), mounted on the second base element (16) coupled with the carriage (2).

In the fourth embodiment, a third base element (27) is introduced into the device, containing the first (28) and second (29) base fragments located at an angle to each other, the guide (1) consists of the first plate (30), mounted on the first base fragment (28) and the second plate (31), mounted on the second base fragment (29), and the carriage (2) contains the first three support elements (32), paired with the first plate (30) and a third pair of support elements (33), paired with a second plate (31), while the second clip (35) is attached to the device, mounted on the third base element (27) and paired with the carriage (2).

In the fifth embodiment, the third base element (27) includes ferromagnetic material, the carriage (2) contains a third fragment (38) and a fourth fragment (39) located at an angle to each other and containing three second support elements (40) located on the third fragment (38) and a fourth pair of support elements (41) located on the fourth fragment (39), while the first set of magnets (42) located opposite the second support elements (40) and the second set of magnets (43) are inserted into the carriage (2) ) located opposite the fourth pair of support elements (41).

In the sixth embodiment, the third base element (27) includes a first ferromagnetic insert (44) located opposite the first plate (30), and a second ferromagnetic insert (45) located opposite the second plate (31) and connected to the duralumin insert (46), fixed based on (47) made of Armco steel.

In the seventh embodiment, the guide (1) is made in the form of a first cylinder (50), including a cylindrical ferromagnetic insert (51), and the carriage (2) has a cylindrical supporting surface (52), which is paired with the first cylinder (50), and a magnet ( 53) located on the opposite side of the abutment surface (52).

In the eighth embodiment, the guide (1) is made in the form of a second cylinder (56), and the carriage (2) is in the form of an annular element (57).

In the ninth embodiment, the carriage (2) contains the fifth (60) and sixth (61) fragments located at an angle to each other and containing the first (62) and second (63) support modules that are conjugated to the surface of the second cylinder (56), and the third (64) and fourth (65) clamps mounted on the carriage (2) and interfaced with the guide (1).

In the tenth embodiment, the guide (1) consists of a third cylinder (69) and a fourth cylinder (70) mounted on the fourth base element (71), the carriage (2) contains the first annular support (72), conjugated with the third cylinder (69), a second annular support (73) mated to the fourth cylinder (70), a third annular support (74) mated to the third cylinder (69), and a fourth annular support (75) mated to the fourth cylinder (70), while the first an annular support (72) and a second annular support (73), as well as a third annular support (74) and a fourth ring the howling of the support (75) to the third cylinder (69) and fourth cylinder (70) in different directions.

In the eleventh embodiment, the guide (1) is supplemented by a cage (86), including a first stop (87), a second stop (88) and a third stop (89) connected to the guide (1), and the carriage (2) contains a V-shaped support surface (90), conjugated with the second stop (88) and the third stop (89), as well as the carriage (2) contains a first flat bearing surface (91), conjugated with the first stop (87).

In the twelfth embodiment, the guide (1) is supplemented by a cage (86), including a first stop (87), a second stop (88) and a third stop (89) connected to the guide (1), and the carriage (2) contains a second flat supporting surface ( 96), conjugated with the second stop (88) and the third stop (89), as well as the carriage (2) contains a third flat bearing surface (97), conjugated with the first stop (87).

Figure 1 shows the device of precision movement in General.

Figure 2, figure 3 shows the installation options of the drive.

Figure 4, figure 5 shows the installation options guide on the base elements.

In Fig.6, Fig.7, Fig.8 depicts options for magnetic clamping of the carriage to the guide.

In Fig.9, Fig.10, Fig.11 depicts the use of single cylindrical guides.

Figure 12 shows an embodiment of the use of two cylindrical guides in the device.

In Fig.13, Fig.14 shows the options for installing the carriage through the intermediate elements on the rails.

The device for precision movement contains a guide 1 (Fig. 1) and a carriage 2, conjugated by a sliding surface 3 with its base surface 4, while the guide 1 consists of a single-crystal material, for example, silicon with a roughness Ra 0.32-0.04 μm and a non-flatness of less than 0.1 μm. Obtaining these parameters is described in [3, 4, 5]. The length of the guide 1 can be of the order of 100-200 mm, and its thickness should be more than 1 mm.

In one embodiment, a drive 6 is introduced into the device (FIG. 2), mounted on a guide 1 and interfaced with a carriage 2 by a first transmission mechanism 8. As a drive 6, electric drives described in [6] can be used, as well as spring clips of inertial stepping engines. In this case, the guide 1 can have a square section and be fixed on a piezoelectric element, as in [7, 8].

In the second embodiment, the first base element 11 is introduced into the device (Fig. 3), on which the guide 1 is fixed, and on the protrusion 12, the drive 6 is coupled to the carriage 2 by the second transmission mechanism 13. The drives described in [9] can be used as the drive 6 ]. As the transmission mechanisms, tin bronze flat springs [10] with a thickness of 0.2-0.4 mm and torsion bars providing high axial stiffness and simultaneous bending in a plane perpendicular to the direction of movement can be used (see, for example, [11]).

In all subsequent graphic materials, in order to simplify them, the drives 6 are not shown, of course, in most cases, the drives are used. Although in some cases, their use is optional and even impossible. For example, inside ultrahigh-vacuum installations with an aggressive environment, high temperatures and radiation, where the movement of the carriage 2 along the guide 1 will be carried out using ultrahigh-vacuum manipulators by point impact from different sides.

In the third embodiment, a second base element 16 is introduced into the device (Fig. 4), the guide 1 has the shape of a parallelepiped containing the first working surface 17, the second working surface 18, and is fixed to the second basic element 16. The carriage 2 contains the first fragment 19 and the second fragment 20, located at an angle to each other and containing, respectively, a first pair of support elements 21 and a second pair of support elements 22, conjugated with the guide 1. In this case, the first clamp 23 is attached to the device, mounted on the second base element 6 and the pair with a carriage 2. Supporting elements 21 and 22 can be made of ШХ15 steel [10]. The first clamp can be made of tin bronze or BrB2 spring bronze [10] 0.2-0.4 mm thick.

In the fourth embodiment, a third base element 27 (FIG. 5) is introduced into the device, containing the first 28 and second 29 base fragments located at an angle to each other. The guide 1 consists of a first plate 30 fixed on the first base fragment 28 and a second plate 31 fixed on the second base fragment 29. In this case, the carriage 2 contains three first support elements 32, conjugated with the first plate 30, and a third pair of support elements 33, paired with the second plate 31. In addition, a second clip 35 (similar to the first clip 23) is inserted into the device, mounted on the third base element 27 and paired with the carriage 2.

In the fifth embodiment, the third base element 27 (Fig.6) includes ferromagnetic material (in the particular case it can be made of nickel), the carriage 2 contains a third fragment 38 and a fourth fragment 39, located at an angle to each other and containing three second supporting elements 40 located on the third fragment 38 and the fourth pair of supporting elements 41 located on the fourth fragment 39, while the first set of magnets 42 located opposite the second supporting elements 40 and the second set of magnets 43 located opposite the fourth rtoy pair of supporting members 41. All the magnets may be made of samarium-cobalt alloy.

In the sixth embodiment, the third base element 27 (Fig. 7) includes a first ferromagnetic insert 44 (for example, made of nickel) located opposite the first plate 30 and a second ferromagnetic insert 45 located opposite the second plate 31 and connected to the duralumin insert 46 fixed on the basis of 47, made, for example, of steel "Armco". This connection can be carried out with VGO1 elastic sealant.

In one embodiment, the coupling of the support element with a magnet (see figure 5, figure 6) can be performed as follows. For example, in fragment 38 (Fig. 8), a bearing 48 (for example, number 25) is fixed, described in [12], inside of which a support element 40 (for example, made of nickel) is installed with a flat surface having a diameter of about 5 mm. In this case, the magnetic lines of force are closed through the element 40, the ferromagnetic fragment 29 and the outer part of the bearing 48. The basic elements 11, 16, 27 can be made of duralumin D16T.

In the seventh embodiment, the guide 1 (Fig. 9) is made in the form of a first cylinder 50, including a cylindrical ferromagnetic insert 51, and the carriage 2 has a cylindrical supporting surface 52, which is paired with the first cylinder 50, and a magnet 53 located on the opposite side from the supporting surface 52. A manufacturing option for a cylinder 50 with a diameter of about 8 mm made of silicon with a roughness Ra 0.32-0.04 μm and a deviation from linearity of less than 0.1 μm is described in [3].

In the eighth embodiment, the guide 1 (figure 10) is made in the form of a second cylinder 56, and the carriage 2 is in the form of an annular element 57 made, for example, of fluoroplastic. The split spring ring can be made of beryllium bronze 0.3-0.5 mm thick.

In the ninth embodiment, the carriage 2 (11) contains the fifth 60 and sixth 61 fragments, located at an angle to each other and containing the first 62 and second 63 support modules, mated to the surface of the second cylinder 56, as well as the third 64 and fourth 65 clamps, mounted on the carriage 2 and interfaced with the guide 1. Elements 64 and 65 can be made of fluoroplastic, and 66, 67 - of spring bronze.

In the tenth embodiment, the guide 1 (Fig. 12) consists of a third cylinder 69 and a fourth cylinder 70 mounted on the fourth base element 71. The carriage 2 comprises a first annular support 72 coupled to a third cylinder 69, a second annular support 73 coupled to a fourth cylinder 70, a third annular support 74 mated to a third cylinder 69, and a fourth annular support 75 mated to a fourth cylinder 70. In one embodiment, the carriage 2 may include an orienting member 77 in which by screw or adhesive (not shown) fixed ring supports 72, 73, 74 and 75, while their free parts are connected by a stiffener 78, for example, using screws (also not shown). The orienting element 77 and the stiffening element 78 can be made of titanium. Ring supports 72, 73, 74 and 75 can be made of tin bronze and have a surface finish of the order of Ra 0.08. The gaps between the cylinders 69, 70 and the annular bearings 72, 73, 74 and 75 may be in the range of 10-20 μm. The third cylinder 69 and the fourth cylinder 70 can be tightly fixed with their free ends in the first arm 79 and the second arm 80 connected by a jumper 82 of the fourth base element 71. The clamps of the first ring support 72 and the second ring support 73, as well as the third ring support 74 and the fourth annular support 75 to the third cylinder 69 and the fourth cylinder 70 are multidirectional due to the first flat spring 81 and the second flat spring 82, the first ends fixed in the orienting element 77. The second ends of the spring n 81 and 82 are connected with friction elements 83 located in the grooves 84 with the possibility of movement and made, for example, of tin bronze or ftoroplast. With the overall dimensions, as in FIG. 12, the flat springs 81 and 82 can have a thickness of 0.2-0.3 mm, a width of 20 mm and, with a bend of 2-3 mm, provide a clamping force of 3-8 N. It is advisable to use BrB2 beryllium bronze as the material of the springs 81 and 82.

In the eleventh embodiment, the guide 1 (Fig. 13) is supplemented by a U-shaped clip 86, including a first stop 87, a second stop 88 and a third stop 89 (intermediate elements) mated to the guide 1. The fixing of the stops 87, 88 and 89 in the clip 86 may be through VGO-1 sealant (not shown). The carriage 2 contains a V-shaped supporting surface 90, conjugated with the second stop 88 and the third stop 89, and the carriage 2 contains the first flat supporting surface 91, coupled with the first stop 87. The supporting surfaces 90 and 91 can be made of IK-100 policor described in [13], the first emphasis 87, the second emphasis 88 and the third emphasis 89 are made of steel ШХ15. The supporting surfaces 90 and 91 can be fixed by means of glue VK9 on the plate 92. The guide 1 can be fixed in the holder 86 by means of strips 93.

In a twelfth embodiment, the carriage 2 (FIG. 14) comprises a second flat abutment surface 96 mated to a second abutment 88 and a third abutment 89, and the carriage 2 contains a third flat abutment surface 97 mated to a first abutment 87. The guide 1 can be fixed to clip 86 with glue (not shown).

The connection of silicon rails with paired elements can be carried out with epoxy resin under a pressure of 1.5-2.5 n per square. cm, with a thickness of the residual layer of 1-3 microns.

The device operates as follows.

The device of FIG. 1 can be used inside ultra-high vacuum installations with an aggressive environment, high temperatures and radiation, where the movement of the carriage 2 along the guide 1 will be carried out with the help of ultra-high vacuum manipulators by means of point impact from different sides. In this case, strict plane-parallel movement of the carriage 2 will be maintained.

In the operation of the device of FIG. 2, FIG. 3, it is important to press the carriage 2 to the guide 1 by the transmission mechanisms 8 and 13. This can be done with flat springs and torsion bars. The drive 6 should form a linear movement, usually this is carried out by the transmission of a screw-nut (not shown separately, conditionally included in the drive 6).

When the device of Fig. 4, Fig. 5, it is possible to use anti-friction compositions between the clamps 23, 35 and the carriage 2. The use of such compositions between the supporting elements 21, 22, 32, 33 and the elements 1, 30, 31 is impractical, because . due to the uncontrollability of their number in the contact zones, non-functional movements of the carriage 2 may increase.

When the device of FIG. 6, FIG. 7 is selected, the pressing force of the carriage 2 to the plates 30 and 31 can be selected by selecting magnets 42 and 43.

In the operation of the device of Fig. 8, the size of the pad 49 is important depending on the radial play of the bearing 48. For engineering calculations, it is enough that the error (in linear dimensions) of the non-perpendicularity of the pad 49 (over its entire diameter) of the cylindrical generatrix of the support element 40 does not exceed 48. In this case, the platform 49 will be completely self-mounted on any supporting surface.

When the device of Fig. 9, Fig. 10 and Fig. 11 is possible, it is possible that the guide 1 is fixed and the carriage 2 is moved. If it is necessary to prevent the carriage 2 from turning, the transmission mechanism from the drive (not shown) can be used flat guide, as was shown in figure 2, figure 3. When fixing the carriage 2, it is possible to move the guide 1, for example, by an ultra-high vacuum manipulator, and if it is not necessary to maintain its angular position, then this can be done by a point action without using a transmission mechanism.

When using the device of Fig. 12, the following variant of its interface with the drive is possible. Given that the preload and orientation are provided in it, then a rotating or non-rotating screw can go from the drive (not shown) and push the carriage 2, a hook (not shown) can be used in the opposite direction. A variant of such a mechanism is presented in [14]. This example simultaneously uses external drive locking during extreme device operation.

When using the device of Fig.13, Fig.14 it is important to ensure a constant contact force between the stops 87, 88, 89 and the guide 1. In one embodiment, this can be achieved by constant pressure of the carriage 2 on the stops 87, 88 and 89, not fixed in the cage 86. In another embodiment, the stops 87, 88, and 89 can be secured with VGO-1 sealant (not shown) in a clip 86 so that they protrude below surface 94 (for example, by 0.1 mm), after which it is necessary to deform the elastic sealant and press the guide rails 93 1 to the surface 94 of the clip 86. This will reduce the deforming effect e clips 86 on the guide 1.

The implementation of the guide 1 of a crystalline material, in particular silicon, maintains its dimensional stability over time and reduces non-functional movements, and this extends the functionality of the device due to its possible use in a wider range of devices, for example, contrographs, profilometers and SPM.

The possibility of using drive 6 allows you to expand the scope of the device. For example, the embodiment of FIG. 2 can be used to supply the probe to the SPM. The embodiment of FIG. 3 can be used to move the sample to change the measurement zone in the SPM.

The options depicted in figure 4 and figure 5, through the use of basic elements 16 and 27, providing increased reliability of the elements 1, 30 and 31, can be used with significant (more than 100 mm) movements of the carriage 2 in profilometers and contourographs, as well as in wide-field SPM.

Magnetic clamping options (Fig.6, Fig.7) can be used in ultrahigh-vacuum equipment, where it is necessary to minimize friction donations. In the embodiment shown in Fig. 7, the thickness of the duralumin insert 46 may be of the order of 2 mm, and the ferromagnetic inserts 44 and 45 of the order of 1 mm. In this case, the temporary drift of the insert 46 will not deform the plates 30 and 31, and the movement of the carriage 2 along them will remain rectilinear.

The use of a bearing 48 (Fig. 8) increases the efficiency of the magnetic clamp, and also allows the use of the pad 49, which ensures the long-term operation of the silicon rails.

The use of guides in the form of cylinders 50 and 56 (Fig. 9, Fig. 10, Fig. 11) makes it possible to use the device in precise measuring technique, placing mirrors (not shown) at the ends of the cylinders and moving the cylinders to ensure accurate plane-parallel movement of the mirrors. Also, at the ends of the cylinders 50 and 56, it is possible to place SPM probes and maintain their angular position during axial movement.

Guides in the form of cylinders 69 and 70 with multidirectional clamping are expedient, for example, in the coordinate tables of the SPM for moving massive objects.

The device of Fig.13 and Fig.14 while maintaining the straightness of movement of the carriages 2 provides greater durability due to the possibility of optimal selection of rubbing pairs.

All the described options extend the functionality of the proposed device.

Literature

1. www.Machinebuilder.ru/

2. www.remen.ru/

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4. Feinstein S.M. Processing and surface protection of semiconductor devices. Processing and surface protection of semiconductor devices. - M .: "Energy", 1970. - 296 p.

5. Mazel E.S. and Press F.P. Planar technology of silicon devices. - M .: "Energy", 1974. - 384 p.

6. Dubey P. Basic principles of electric drives. - M .: Technosphere, 2009 .-- 480 p.

7. Patent RU 2347300. Inertial stepper motor. 02/20/2009.

8. Patent RU 2461098. Inertial stepper motor. 09/10/2012.

9. Moskalenko V.V. Electric drive. - M.: Academy, 2011 .-- 368 p.

10. Physical quantities: Reference book / A.P. Babichev, N.A. Babushkina, A.M. Bratkovsky and others; under the editorship of I.S. Grigoryeva, E.Z. Meilikhova. - M .; Energoatomizdat, 1991.

11. Patent RU 2297078. The positioner is three-coordinate. 04/10/2007.

12. Semeykin A.N. Provider Handbook No. 89: Bearings. - M .: Trading house of the supplier of LTD., 2009. - 530 p.

13. Vacuum technology: Reference / E.S. Frolov, V.E. Minaichev, A.T. Alexandrova et al .: Under the general. ed. E.S. Frolova, V.E. Minaicheva. - M: Mechanical Engineering, 1992. - 480 p.

14. Patent RU 2258901. Small-sized scanning probe microscope. 08/20/2005.

Claims (7)

1. The device is a precision movement containing a guide (1) made of single-crystal material, a carriage (2) associated with it, as well as a drive (6) mounted on a guide (1) and paired with a carriage (2), characterized in that the base element (12) is inserted into it, on which the guide (1) and the drive (6) are fixed, and the carriage (2) contains the first fragment (19) and the second fragment (20) located at an angle to each other. 2. The device according to claim 1, characterized in that the guide (1) includes a first element having the shape of a parallelepiped containing the first working surface (17), the second working surface (18), mounted on the base element (12), the carriage (2 ), containing the first fragment (19) and the second fragment (20), located at an angle to each other, respectively, includes the first pair of support elements (21) and the second pair of support elements (22), paired with the guide (1), while in the device introduced the first clip (23), mounted on the base element (12) and paired th with carriage (2). 3. The device according to claim 1, characterized in that the base element (27) contains the first (28) and second (29) base fragments located at an angle to each other, the guide (1) consists of a first plate (30), fixed on the first base fragment (28) and the second plate (31), mounted on the second base fragment (29), and the carriage (2) contains the first three support elements (32), paired with the first plate (30), and a third pair of support elements (33), interfaced with the second plate (31), while the second clip (35), mounted on the third base element (27) and paired with the carriage (2). 4. The device according to claim 3, characterized in that the base element (27) includes a ferromagnetic material, a carriage (2) containing a third fragment (38) and a fourth fragment (39) located at an angle to each other, contains three second supporting element (40) located on the third fragment (38), and a fourth pair of supporting elements (41) located on the fourth fragment (39), while the first set of magnets (42), opposite the second supporting elements, is inserted into the carriage (2) (40) and a second set of magnets (43) located opposite the fourth pair of support elements comrade (41). 5. The device according to claim 4, characterized in that the base element (27) includes a first ferromagnetic insert (44) located opposite the first plate (30) and a second ferromagnetic insert (45) located opposite the second plate (31) and connected with a duralumin insert (46) fixed to the base (47) made of Armco steel. 6. The device according to claim 1, characterized in that the carriage (2) containing the fifth (60) and sixth (61) fragments located at an angle to each other, includes the first (62) and second (63) support modules, paired with the surface of the guide (1), made in the form of a cylinder (56), as well as the third (64) and fourth (65) clamps mounted on the carriage (2) and mated with the guide (1). 7. The device according to claim 2, characterized in that the guide (1), made in the form of a parallelepiped, is supplemented with a clip (86), including a first stop (87), a second stop (88) and a third stop (89) connected to the guide ( 1), and the carriage (2) contains a V-shaped abutment surface (90) mated to a second stop (88) and a third abutment (89), as well as the carriage (2) contains a first flat abutment surface (91) mated to the first focus (87).

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