RU2013125647A - METHOD FOR PRODUCING NANOSIZED SILICON STRUCTURES - Google Patents
METHOD FOR PRODUCING NANOSIZED SILICON STRUCTURES Download PDFInfo
- Publication number
- RU2013125647A RU2013125647A RU2013125647/05A RU2013125647A RU2013125647A RU 2013125647 A RU2013125647 A RU 2013125647A RU 2013125647/05 A RU2013125647/05 A RU 2013125647/05A RU 2013125647 A RU2013125647 A RU 2013125647A RU 2013125647 A RU2013125647 A RU 2013125647A
- Authority
- RU
- Russia
- Prior art keywords
- silanes
- silicon structures
- producing nanosized
- nanosized silicon
- decomposition
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000004756 silanes Chemical group 0.000 claims abstract 6
- 238000006243 chemical reaction Methods 0.000 claims abstract 2
- 230000006835 compression Effects 0.000 claims abstract 2
- 238000007906 compression Methods 0.000 claims abstract 2
- 238000000354 decomposition reaction Methods 0.000 claims abstract 2
- 239000011261 inert gas Substances 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims abstract 2
- 229910052710 silicon Inorganic materials 0.000 claims abstract 2
- 239000010703 silicon Substances 0.000 claims abstract 2
- 238000005979 thermal decomposition reaction Methods 0.000 claims abstract 2
Landscapes
- Silicon Compounds (AREA)
Abstract
Способ получения наноразмерных структур кремния путем термического разложения силанов, отличающийся тем, что условия протекания реакций разложения силанов создают методом адиабатического сжатия смеси газообразных силанов с инертным газом.A method of producing silicon nanosized structures by thermal decomposition of silanes, characterized in that the conditions for the reaction of decomposition of silanes are created by adiabatic compression of a mixture of gaseous silanes with an inert gas.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2013125647/05A RU2547016C2 (en) | 2013-06-03 | 2013-06-03 | Method of producing nanosize silicon structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2013125647/05A RU2547016C2 (en) | 2013-06-03 | 2013-06-03 | Method of producing nanosize silicon structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2013125647A true RU2013125647A (en) | 2014-12-10 |
| RU2547016C2 RU2547016C2 (en) | 2015-04-10 |
Family
ID=53296719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2013125647/05A RU2547016C2 (en) | 2013-06-03 | 2013-06-03 | Method of producing nanosize silicon structures |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2547016C2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2609160C2 (en) * | 2015-06-16 | 2017-01-30 | Федеральное государственное бюджетное учреждение науки Институт неорганической химии им. А.В. Николаева Сибирского отделения Российской академии наук | Method to produce powders from silicon carbide nanoparticles coated with carbon coating |
| RU2705958C1 (en) * | 2018-12-04 | 2019-11-12 | Общество с ограниченной ответственностью "АС-Графен" | Apparatus for producing silicon nanopowders by monosilane adiabatic compression |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10353996A1 (en) * | 2003-11-19 | 2005-06-09 | Degussa Ag | Nanoscale, crystalline silicon powder |
| RU2359906C2 (en) * | 2007-08-31 | 2009-06-27 | Открытое акционерное общество "Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" | Method for preparation of nanocrystalline silicon powders |
-
2013
- 2013-06-03 RU RU2013125647/05A patent/RU2547016C2/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2547016C2 (en) | 2015-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20180604 |