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RU2003112221A - POROUS GAS-ABSORPTING DEVICES WITH REDUCED PARTICLE LOSS, AND METHOD FOR PRODUCING THEM - Google Patents

POROUS GAS-ABSORPTING DEVICES WITH REDUCED PARTICLE LOSS, AND METHOD FOR PRODUCING THEM

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Publication number
RU2003112221A
RU2003112221A RU2003112221/02A RU2003112221A RU2003112221A RU 2003112221 A RU2003112221 A RU 2003112221A RU 2003112221/02 A RU2003112221/02 A RU 2003112221/02A RU 2003112221 A RU2003112221 A RU 2003112221A RU 2003112221 A RU2003112221 A RU 2003112221A
Authority
RU
Russia
Prior art keywords
getter
getter material
alloy
mass composition
porous
Prior art date
Application number
RU2003112221/02A
Other languages
Russian (ru)
Other versions
RU2253695C2 (en
Inventor
Андреа КОНТЕ
Марко МОРАЯ
Original Assignee
Саес Геттерс С.П.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT2000MI002099A external-priority patent/IT1318937B1/en
Application filed by Саес Геттерс С.П.А. filed Critical Саес Геттерс С.П.А.
Publication of RU2003112221A publication Critical patent/RU2003112221A/en
Application granted granted Critical
Publication of RU2253695C2 publication Critical patent/RU2253695C2/en

Links

Claims (19)

1. Способ изготовления пористых газопоглотительных устройств (22) с пониженной потерей частиц, согласно которому на поверхности пористого газопоглотительного тела (10) формируют покрытие (20; 30, 31) с толщиной по меньшей мере 0,5 мкм из материала, совместимого с условиями использования газопоглотительного устройства и выбранного из числа переходных металлов, редкоземельных элементов и алюминия, с помощью метода, выбранного из испарения, осаждения из генерируемой дуговым разрядом плазмы, осаждения из ионного пучка и катодного осаждения.1. A method of manufacturing a porous getter devices (22) with reduced particle loss, according to which a coating (20; 30, 31) with a thickness of at least 0.5 μm is formed from a material compatible with the conditions of use on the surface of the porous getter body (10) getter device and selected from among transition metals, rare earth elements and aluminum, using a method selected from evaporation, deposition from plasma generated by an arc discharge, deposition from an ion beam and cathodic deposition. 2. Способ по п.1, в котором покрываемое пористое газопоглотительное тело изготавливают способом, выбранным из прессования порошков без или с органическими компонентами, испаряющимися во время последующих термообработок, электрофореза и трафаретной печати.2. The method according to claim 1, in which the coated porous getter body is made by a method selected from pressing powders without or with organic components that evaporate during subsequent heat treatments, electrophoresis and screen printing. 3. Способ по п.1, в котором газопоглотительный материал пористого тела выбирают из металлических титана или циркония, их гидридов, сплавов титана или циркония с одним или большим количеством элементов, выбранных из переходных металлов и алюминия, и смесей одного или большего количества этих сплавов с титаном и/или цирконием или их гидридами.3. The method according to claim 1, in which the getter material of the porous body is selected from metal titanium or zirconium, their hydrides, titanium or zirconium alloys with one or more elements selected from transition metals and aluminum, and mixtures of one or more of these alloys with titanium and / or zirconium or their hydrides. 4. Способ по п.3, в котором газопоглотительный материал представляет собой сплав, имеющий массовый состав Zr 84% - Al 16%.4. The method according to claim 3, in which the getter material is an alloy having a mass composition of Zr 84% - Al 16%. 5. Способ по п.3, в котором газопоглотительный материал представляет собой сплав, имеющий массовый состав Zr 70% - V 24,6% - Fe 5,4%.5. The method according to claim 3, in which the getter material is an alloy having a mass composition of Zr 70% - V 24.6% - Fe 5.4%. 6. Способ по п.3, в котором газопоглотительный материал представляет собой сплав, имеющий массовый состав Zr 80,8% - Co 14,2% - А 5%, где А обозначает элемент, выбранный из иттрия, лантана, редкоземельных элементов или их смесей.6. The method according to claim 3, in which the getter material is an alloy having a mass composition of Zr 80.8% - Co 14.2% - A 5%, where A denotes an element selected from yttrium, lanthanum, rare earth elements or their mixtures. 7. Способ по п.3, в котором газопоглотительный материал представляет собой смесь, содержащую, по массе, 70% Ti и 30% сплава, имеющего массовый состав Zr 84% - Al 16%.7. The method according to claim 3, in which the getter material is a mixture containing, by weight, 70% Ti and 30% alloy having a mass composition of Zr 84% - Al 16%. 8. Способ по п.3, в котором газопоглотительный материал представляет собой смесь, содержащую, по массе, 70% Ti и 30% сплава, имеющего массовый состав Zr 70% - V 24,6% - Fe 5,4%.8. The method according to claim 3, in which the getter material is a mixture containing, by weight, 70% Ti and 30% alloy having a mass composition of Zr 70% - V 24.6% - Fe 5.4%. 9. Способ по п.3, в котором газопоглотительный материал представляет собой смесь, содержащую, по массе, 40% Zr и 60% сплава, имеющего массовый состав Zr 70% - V 24,6% - Fe 5,4%.9. The method according to claim 3, in which the getter material is a mixture containing, by weight, 40% Zr and 60% alloy having a mass composition of Zr 70% - V 24.6% - Fe 5.4%. 10. Способ по п.3, в котором газопоглотительный материал представляет собой смесь, содержащую, по массе, 60% Ti и 40% сплава, имеющего массовый состав Zr 70% - V 24,6% - Fe 5,4%.10. The method according to claim 3, in which the getter material is a mixture containing, by weight, 60% Ti and 40% alloy having a mass composition of Zr 70% - V 24.6% - Fe 5.4%. 11. Способ по п.3, в котором газопоглотительный материал представляет собой смесь, содержащую, по массе, 10% Mo, 80% Ti и 10% TiH2.11. The method according to claim 3, in which the getter material is a mixture containing, by weight, 10% Mo, 80% Ti and 10% TiH 2 . 12. Способ по п.1, в котором газопоглотительный материал представляет собой порошок с размером частиц менее 125 мкм.12. The method according to claim 1, in which the getter material is a powder with a particle size of less than 125 microns. 13. Способ по п.12, в котором газопоглотительный материал представляет собой порошок с размером частиц в пределах от около 20 до около 100 мкм.13. The method according to item 12, in which the getter material is a powder with a particle size in the range from about 20 to about 100 microns. 14. Способ по п.1, в котором указанное покрытие имеет толщину менее 5 мкм.14. The method according to claim 1, wherein said coating has a thickness of less than 5 microns. 15. Способ по п.14, в котором указанное покрытие имеет толщину от 1 до 2,5 мкм.15. The method according to 14, in which the specified coating has a thickness of from 1 to 2.5 microns. 16. Способ по п.15, в котором осаждаемый материал выбирают из ванадия, ниобия, гафния, тантала, титана и циркония.16. The method according to clause 15, in which the deposited material is selected from vanadium, niobium, hafnium, tantalum, titanium and zirconium. 17. Способ по п.16, в котором материал осаждают путем катодного осаждения, получая слой с зернистой или столбчатой морфологией.17. The method according to clause 16, in which the material is deposited by cathodic deposition, obtaining a layer with a granular or columnar morphology. 18. Способ по п.17, в котором катодное осаждение выполняют при давлении инертного газа в пределах от около 1×10-3 до около 5×10-2 мбар и при температуре пористого газопоглотительного тела, близкой к комнатной температуре.18. The method according to 17, in which the cathodic deposition is performed at an inert gas pressure in the range from about 1 × 10 -3 to about 5 × 10 -2 mbar and at a temperature of the porous getter body close to room temperature. 19. Пористое газопоглотительное тело (22), сформированное из соединенных вместе частиц (11) газопоглотительного материала, причем частицы газопоглотителя на внешней поверхности указанного тела частично покрыты покрытием (20; 30, 31) из материала, выбранного из числа переходных металлов, редкоземельных элементов и алюминия, при этом указанное покрытие имеет толщину по меньшей мере 0,5 мкм.19. A porous getter body (22) formed from particles (11) of getter material joined together, the getter particles on the outer surface of said body being partially coated (20; 30, 31) with a material selected from transition metals, rare earth elements and aluminum, wherein said coating has a thickness of at least 0.5 μm.
RU2003112221/02A 2000-09-27 2001-09-25 Porous gas-absorbing units at reduced loss of particles and method of manufacture of such units RU2253695C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2000MI002099A IT1318937B1 (en) 2000-09-27 2000-09-27 METHOD FOR THE PRODUCTION OF POROUS GETTER DEVICES WITH REDUCED LOSS OF PARTICLES AND DEVICES SO PRODUCED
ITMI2000A002099 2000-09-27

Publications (2)

Publication Number Publication Date
RU2003112221A true RU2003112221A (en) 2004-12-20
RU2253695C2 RU2253695C2 (en) 2005-06-10

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Country Status (12)

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US (3) US6620297B2 (en)
EP (1) EP1322795B1 (en)
JP (1) JP2004509757A (en)
KR (1) KR100784584B1 (en)
CN (1) CN1318642C (en)
AT (1) ATE370261T1 (en)
AU (1) AU2001295881A1 (en)
DE (1) DE60130001T2 (en)
IT (1) IT1318937B1 (en)
RU (1) RU2253695C2 (en)
TW (1) TWI278523B (en)
WO (1) WO2002027058A1 (en)

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