PL3669153T3 - Czujnik - Google Patents
CzujnikInfo
- Publication number
- PL3669153T3 PL3669153T3 PL18759272.0T PL18759272T PL3669153T3 PL 3669153 T3 PL3669153 T3 PL 3669153T3 PL 18759272 T PL18759272 T PL 18759272T PL 3669153 T3 PL3669153 T3 PL 3669153T3
- Authority
- PL
- Poland
- Prior art keywords
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102017007717 | 2017-08-17 | ||
| PCT/EP2018/072084 WO2019034674A1 (de) | 2017-08-17 | 2018-08-15 | Sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL3669153T3 true PL3669153T3 (pl) | 2025-07-28 |
Family
ID=63364048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL18759272.0T PL3669153T3 (pl) | 2017-08-17 | 2018-08-15 | Czujnik |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3669153B1 (pl) |
| CN (1) | CN110998269A (pl) |
| DE (2) | DE102018006392A1 (pl) |
| PL (1) | PL3669153T3 (pl) |
| WO (1) | WO2019034674A1 (pl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018131352A1 (de) | 2018-12-07 | 2020-06-10 | Carl Freudenberg Kg | Sensorelement mit einstückigem Trag- und Sensorkörper |
| DE102024207159A1 (de) * | 2024-07-30 | 2025-08-07 | Carl Zeiss Smt Gmbh | Sensorvorrichtung mit Drucksensor, Verfahren zum Erfassen einer Druckänderung und Projektionsbelichtungsanlage |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4233323A1 (de) * | 1992-10-05 | 1994-04-07 | Wolfgang Daum | Tastsinnachahmung |
| JP2003516539A (ja) * | 1999-12-08 | 2003-05-13 | ゼンジリオン アクチエンゲゼルシャフト | 容量型センサー |
| US7024936B2 (en) * | 2002-06-18 | 2006-04-11 | Corporation For National Research Initiatives | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure |
| US7121145B2 (en) * | 2004-10-18 | 2006-10-17 | Silverbrook Research Pty Ltd | Capacitative pressure sensor |
| DE102005008959B4 (de) * | 2005-02-28 | 2012-08-30 | Heinz Plöchinger | Drucksensoren und Kombinations-Drucksensoren und deren Verwendung |
| DE102007026243A1 (de) * | 2007-06-04 | 2008-12-11 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
| DE102009051176A1 (de) * | 2009-10-29 | 2011-05-05 | Marquardt Gmbh | Sensor |
| DE102013224023A1 (de) * | 2013-11-25 | 2015-05-28 | Contitech Ag | Elastomerer Hohlkörper, insbesondere elastomerer Schlauch, mit Sensorelement zur Erfassung eines Druckes sowie Verfahren hierzu |
| CN103954394B (zh) * | 2014-03-10 | 2015-11-25 | 西安交通大学 | 基于介电高弹聚合物的柔性压力传感器及传感压力的方法 |
| CN105136378B (zh) * | 2015-09-24 | 2018-04-20 | 京东方科技集团股份有限公司 | 一种显示基板及显示装置 |
| CN107044891A (zh) * | 2016-08-28 | 2017-08-15 | 美国钛晟科技股份有限公司 | 基于离子膜的电容式压力传感器 |
| CN106370324A (zh) * | 2016-09-28 | 2017-02-01 | 中国科学院重庆绿色智能技术研究院 | 基于共形石墨烯的电容式压力传感器及其制备方法 |
-
2018
- 2018-08-14 DE DE102018006392.6A patent/DE102018006392A1/de active Pending
- 2018-08-14 DE DE202018006962.0U patent/DE202018006962U1/de active Active
- 2018-08-15 CN CN201880053211.8A patent/CN110998269A/zh active Pending
- 2018-08-15 PL PL18759272.0T patent/PL3669153T3/pl unknown
- 2018-08-15 EP EP18759272.0A patent/EP3669153B1/de active Active
- 2018-08-15 WO PCT/EP2018/072084 patent/WO2019034674A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| DE102018006392A1 (de) | 2019-02-21 |
| WO2019034674A1 (de) | 2019-02-21 |
| CN110998269A (zh) | 2020-04-10 |
| DE202018006962U1 (de) | 2024-12-19 |
| EP3669153A1 (de) | 2020-06-24 |
| EP3669153B1 (de) | 2025-04-23 |
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