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PL3669153T3 - Czujnik - Google Patents

Czujnik

Info

Publication number
PL3669153T3
PL3669153T3 PL18759272.0T PL18759272T PL3669153T3 PL 3669153 T3 PL3669153 T3 PL 3669153T3 PL 18759272 T PL18759272 T PL 18759272T PL 3669153 T3 PL3669153 T3 PL 3669153T3
Authority
PL
Poland
Prior art keywords
sensor
Prior art date
Application number
PL18759272.0T
Other languages
English (en)
Inventor
Markus WEINÖHL
Dietmar Weisser
Original Assignee
Marquardt Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marquardt Gmbh filed Critical Marquardt Gmbh
Publication of PL3669153T3 publication Critical patent/PL3669153T3/pl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044Constructional details of non-semiconductive diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
PL18759272.0T 2017-08-17 2018-08-15 Czujnik PL3669153T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017007717 2017-08-17
PCT/EP2018/072084 WO2019034674A1 (de) 2017-08-17 2018-08-15 Sensor

Publications (1)

Publication Number Publication Date
PL3669153T3 true PL3669153T3 (pl) 2025-07-28

Family

ID=63364048

Family Applications (1)

Application Number Title Priority Date Filing Date
PL18759272.0T PL3669153T3 (pl) 2017-08-17 2018-08-15 Czujnik

Country Status (5)

Country Link
EP (1) EP3669153B1 (pl)
CN (1) CN110998269A (pl)
DE (2) DE102018006392A1 (pl)
PL (1) PL3669153T3 (pl)
WO (1) WO2019034674A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018131352A1 (de) 2018-12-07 2020-06-10 Carl Freudenberg Kg Sensorelement mit einstückigem Trag- und Sensorkörper
DE102024207159A1 (de) * 2024-07-30 2025-08-07 Carl Zeiss Smt Gmbh Sensorvorrichtung mit Drucksensor, Verfahren zum Erfassen einer Druckänderung und Projektionsbelichtungsanlage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233323A1 (de) * 1992-10-05 1994-04-07 Wolfgang Daum Tastsinnachahmung
JP2003516539A (ja) * 1999-12-08 2003-05-13 ゼンジリオン アクチエンゲゼルシャフト 容量型センサー
US7024936B2 (en) * 2002-06-18 2006-04-11 Corporation For National Research Initiatives Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
US7121145B2 (en) * 2004-10-18 2006-10-17 Silverbrook Research Pty Ltd Capacitative pressure sensor
DE102005008959B4 (de) * 2005-02-28 2012-08-30 Heinz Plöchinger Drucksensoren und Kombinations-Drucksensoren und deren Verwendung
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
DE102009051176A1 (de) * 2009-10-29 2011-05-05 Marquardt Gmbh Sensor
DE102013224023A1 (de) * 2013-11-25 2015-05-28 Contitech Ag Elastomerer Hohlkörper, insbesondere elastomerer Schlauch, mit Sensorelement zur Erfassung eines Druckes sowie Verfahren hierzu
CN103954394B (zh) * 2014-03-10 2015-11-25 西安交通大学 基于介电高弹聚合物的柔性压力传感器及传感压力的方法
CN105136378B (zh) * 2015-09-24 2018-04-20 京东方科技集团股份有限公司 一种显示基板及显示装置
CN107044891A (zh) * 2016-08-28 2017-08-15 美国钛晟科技股份有限公司 基于离子膜的电容式压力传感器
CN106370324A (zh) * 2016-09-28 2017-02-01 中国科学院重庆绿色智能技术研究院 基于共形石墨烯的电容式压力传感器及其制备方法

Also Published As

Publication number Publication date
DE102018006392A1 (de) 2019-02-21
WO2019034674A1 (de) 2019-02-21
CN110998269A (zh) 2020-04-10
DE202018006962U1 (de) 2024-12-19
EP3669153A1 (de) 2020-06-24
EP3669153B1 (de) 2025-04-23

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