PL3329033T3 - Urządzenie do powlekania - Google Patents
Urządzenie do powlekaniaInfo
- Publication number
- PL3329033T3 PL3329033T3 PL16747606T PL16747606T PL3329033T3 PL 3329033 T3 PL3329033 T3 PL 3329033T3 PL 16747606 T PL16747606 T PL 16747606T PL 16747606 T PL16747606 T PL 16747606T PL 3329033 T3 PL3329033 T3 PL 3329033T3
- Authority
- PL
- Poland
- Prior art keywords
- coating apparatus
- coating
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title 1
- 238000000576 coating method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
- C03C17/005—Coating the outside
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2456—Coating containing TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1513339.0A GB201513339D0 (en) | 2015-07-29 | 2015-07-29 | Coating apparatus |
| EP16747606.8A EP3329033B1 (en) | 2015-07-29 | 2016-07-29 | Coating apparatus |
| PCT/GB2016/052359 WO2017017478A1 (en) | 2015-07-29 | 2016-07-29 | Coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL3329033T3 true PL3329033T3 (pl) | 2021-11-15 |
Family
ID=54106779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL16747606T PL3329033T3 (pl) | 2015-07-29 | 2016-07-29 | Urządzenie do powlekania |
Country Status (13)
| Country | Link |
|---|---|
| US (2) | US20180216231A1 (pl) |
| EP (1) | EP3329033B1 (pl) |
| JP (1) | JP6882257B2 (pl) |
| CN (1) | CN108026641B (pl) |
| AU (1) | AU2016299411B2 (pl) |
| BR (1) | BR112018001828B1 (pl) |
| CA (1) | CA2993411C (pl) |
| ES (1) | ES2886108T3 (pl) |
| GB (1) | GB201513339D0 (pl) |
| MX (1) | MX2018001088A (pl) |
| PL (1) | PL3329033T3 (pl) |
| PT (1) | PT3329033T (pl) |
| WO (1) | WO2017017478A1 (pl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201513339D0 (en) * | 2015-07-29 | 2015-09-09 | Pilkington Group Ltd | Coating apparatus |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1951950A (en) * | 1933-05-29 | 1934-03-20 | Corning Glass Works | Method and apparatus for cooling glass articles |
| US2222327A (en) * | 1939-07-28 | 1940-11-19 | Walkup Samuel Thomas | Electric smoothing iron device |
| US2314812A (en) * | 1940-03-07 | 1943-03-23 | Corning Glass Works | Method of making glass articles |
| US3658304A (en) * | 1970-05-11 | 1972-04-25 | Anchor Hocking Corp | Means for vapor coating |
| US3736728A (en) * | 1970-08-03 | 1973-06-05 | Kleissler Co G | Waste material separator and collector |
| US3934063A (en) * | 1974-05-31 | 1976-01-20 | Anchor Hocking Corporation | Flame masking of glass articles for metal oxide film deposition |
| US3989004A (en) * | 1974-08-15 | 1976-11-02 | Ball Corporation | Apparatus for applying durable lubricous coatings to newly formed vitreous surfaces |
| US4150964A (en) * | 1977-01-31 | 1979-04-24 | Owens-Illinois, Inc. | Apparatus for coating glassware |
| US4431692A (en) * | 1980-02-15 | 1984-02-14 | Owens-Illinois, Inc. | Process for making glass surfaces abrasion-resistant and article produced thereby |
| US4425868A (en) * | 1981-12-28 | 1984-01-17 | Thatcher Glass Corporation | Coating hood |
| US4389234A (en) * | 1982-03-18 | 1983-06-21 | M&T Chemicals Inc. | Glass coating hood and method of spray coating glassware |
| DE3226900C2 (de) * | 1982-07-17 | 1985-11-28 | Veba-Glas Ag, 4300 Essen | Verfahren und Vorrichtung zum Beschichten von Glasbehältern mit Titanoxid als Vergütungsmittel |
| US4615916A (en) * | 1984-06-25 | 1986-10-07 | Owens-Illinois, Inc. | Surface treatment of glass containers |
| US4668268A (en) * | 1984-12-20 | 1987-05-26 | M&T Chemicals Inc. | Coating hood with air flow guide for minimizing deposition of coating compound on finish of containers |
| US4689749A (en) * | 1985-02-15 | 1987-08-25 | Omni Engineering | Automatic tack-off machine |
| GB8531424D0 (en) * | 1985-12-20 | 1986-02-05 | Glaverbel | Coating glass |
| US4879970A (en) * | 1987-04-21 | 1989-11-14 | M&T Chemicals Inc. | Coating hood for applying coating compound on containers |
| JP2927857B2 (ja) * | 1990-01-19 | 1999-07-28 | 株式会社東芝 | 基板加熱装置 |
| US5454873A (en) * | 1994-05-20 | 1995-10-03 | Scholes; Addison B. | Cold end glassware coating apparatus |
| US5498758A (en) * | 1994-05-20 | 1996-03-12 | Alltrista Corporation | Method for the cold end coating of glassware using a vaporizer having an internal flow path from a reservoir of liquid coating material to a vapor deposition chamber |
| US5846332A (en) * | 1996-07-12 | 1998-12-08 | Applied Materials, Inc. | Thermally floating pedestal collar in a chemical vapor deposition chamber |
| US6189482B1 (en) * | 1997-02-12 | 2001-02-20 | Applied Materials, Inc. | High temperature, high flow rate chemical vapor deposition apparatus and related methods |
| FI120437B (fi) * | 1999-03-01 | 2009-10-30 | Eko Tekniikka Turku Oy | Laite ja menetelmä kiinteiden aineiden vaahtoerotuksessa |
| DE10007059A1 (de) * | 2000-02-16 | 2001-08-23 | Aixtron Ag | Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung |
| KR100406174B1 (ko) * | 2000-06-15 | 2003-11-19 | 주식회사 하이닉스반도체 | 화학적 강화 화학 기상 증착 장비에 사용되는 샤워 헤드 |
| WO2002071463A1 (en) * | 2001-03-02 | 2002-09-12 | Tokyo Electron Limited | Shower head gas injection apparatus with secondary high pressure pulsed gas injection |
| US7217336B2 (en) * | 2002-06-20 | 2007-05-15 | Tokyo Electron Limited | Directed gas injection apparatus for semiconductor processing |
| KR101153161B1 (ko) * | 2005-04-01 | 2012-06-18 | 주성엔지니어링(주) | 가스분사장치 및 이를 포함하는 액정표시소자의 제조장치 |
| KR100700493B1 (ko) * | 2005-05-24 | 2007-03-28 | 삼성에스디아이 주식회사 | 효율적인 필라멘트 배열 구조를 갖는 촉매 강화 화학 기상증착 장치 |
| JP4344949B2 (ja) * | 2005-12-27 | 2009-10-14 | セイコーエプソン株式会社 | シャワーヘッド、シャワーヘッドを含む成膜装置、ならびに強誘電体膜の製造方法 |
| JP2007308789A (ja) * | 2006-04-19 | 2007-11-29 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
| FI121669B (fi) * | 2006-04-19 | 2011-02-28 | Beneq Oy | Menetelmä ja laitteisto lasin pinnoittamiseksi |
| KR100849929B1 (ko) * | 2006-09-16 | 2008-08-26 | 주식회사 피에조닉스 | 반응 기체의 분사 속도를 적극적으로 조절하는 샤워헤드를구비한 화학기상 증착 방법 및 장치 |
| DE102007048564A1 (de) * | 2007-10-09 | 2009-04-23 | Heraeus Noblelight Gmbh | Vorrichtung für eine Bestrahlungseinheit |
| JP5403984B2 (ja) * | 2008-10-08 | 2014-01-29 | 光洋サーモシステム株式会社 | 基板の熱処理装置 |
| TW201142066A (en) * | 2010-05-18 | 2011-12-01 | Hon Hai Prec Ind Co Ltd | Coating device |
| JP5041558B2 (ja) * | 2010-06-24 | 2012-10-03 | 東洋ガラス株式会社 | びんのコーティングチャンバ |
| JP5677563B2 (ja) * | 2011-02-24 | 2015-02-25 | 株式会社日立国際電気 | 基板処理装置、基板の製造方法及び半導体装置の製造方法 |
| EP2662148A1 (en) * | 2012-05-09 | 2013-11-13 | Arkema Vlissingen B.V. | Improved method for applying a cold-end coating integrated in glass container manufacturing process |
| US9322097B2 (en) * | 2013-03-13 | 2016-04-26 | Applied Materials, Inc. | EPI base ring |
| JP5386046B1 (ja) * | 2013-03-27 | 2014-01-15 | エピクルー株式会社 | サセプタ支持部およびこのサセプタ支持部を備えるエピタキシャル成長装置 |
| US9683745B2 (en) * | 2013-03-29 | 2017-06-20 | Roger Lehet | Small, high efficient wood stove |
| GB201320521D0 (en) * | 2013-11-20 | 2014-01-01 | Pilkington Group Ltd | Coating apparatus |
| US20150280051A1 (en) * | 2014-04-01 | 2015-10-01 | Tsmc Solar Ltd. | Diffuser head apparatus and method of gas distribution |
| KR102260572B1 (ko) * | 2014-07-07 | 2021-06-07 | (주)선익시스템 | 복수의 증발원을 갖는 박막 증착장치 |
| DE102014116991A1 (de) * | 2014-11-20 | 2016-05-25 | Aixtron Se | CVD- oder PVD-Reaktor zum Beschichten großflächiger Substrate |
| CN104451601B (zh) * | 2014-12-02 | 2017-02-22 | 浙江大学 | 一种常压化学气相沉积镀膜反应器 |
| US9499906B2 (en) * | 2015-02-13 | 2016-11-22 | Eastman Kodak Company | Coating substrate using bernoulli atomic-layer deposition |
| GB201513339D0 (en) * | 2015-07-29 | 2015-09-09 | Pilkington Group Ltd | Coating apparatus |
| GB201523156D0 (en) * | 2015-12-31 | 2016-02-17 | Pilkington Group Ltd | High strength glass containers |
| JP6700156B2 (ja) * | 2016-11-16 | 2020-05-27 | 株式会社ニューフレアテクノロジー | 成膜装置 |
| WO2018165660A1 (en) * | 2017-03-10 | 2018-09-13 | Beckett Gas, Inc. | Adjustable restrictor for burner |
-
2015
- 2015-07-29 GB GBGB1513339.0A patent/GB201513339D0/en not_active Ceased
-
2016
- 2016-07-29 WO PCT/GB2016/052359 patent/WO2017017478A1/en not_active Ceased
- 2016-07-29 CA CA2993411A patent/CA2993411C/en active Active
- 2016-07-29 PT PT167476068T patent/PT3329033T/pt unknown
- 2016-07-29 EP EP16747606.8A patent/EP3329033B1/en active Active
- 2016-07-29 CN CN201680051966.5A patent/CN108026641B/zh active Active
- 2016-07-29 PL PL16747606T patent/PL3329033T3/pl unknown
- 2016-07-29 BR BR112018001828-7A patent/BR112018001828B1/pt active IP Right Grant
- 2016-07-29 ES ES16747606T patent/ES2886108T3/es active Active
- 2016-07-29 JP JP2018504242A patent/JP6882257B2/ja active Active
- 2016-07-29 AU AU2016299411A patent/AU2016299411B2/en active Active
- 2016-07-29 US US15/748,206 patent/US20180216231A1/en not_active Abandoned
- 2016-07-29 MX MX2018001088A patent/MX2018001088A/es unknown
-
2023
- 2023-01-26 US US18/101,749 patent/US20230167556A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP3329033A1 (en) | 2018-06-06 |
| AU2016299411A1 (en) | 2018-02-15 |
| CA2993411A1 (en) | 2017-02-02 |
| PT3329033T (pt) | 2021-08-06 |
| GB201513339D0 (en) | 2015-09-09 |
| US20180216231A1 (en) | 2018-08-02 |
| AU2016299411B2 (en) | 2022-05-12 |
| CN108026641B (zh) | 2021-07-16 |
| MX2018001088A (es) | 2018-09-05 |
| US20230167556A1 (en) | 2023-06-01 |
| ES2886108T3 (es) | 2021-12-16 |
| JP2018521227A (ja) | 2018-08-02 |
| WO2017017478A1 (en) | 2017-02-02 |
| BR112018001828A2 (pt) | 2018-09-18 |
| EP3329033B1 (en) | 2021-05-05 |
| CA2993411C (en) | 2023-09-05 |
| BR112018001828B1 (pt) | 2022-05-31 |
| CN108026641A (zh) | 2018-05-11 |
| JP6882257B2 (ja) | 2021-06-02 |
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