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PL3017079T3 - Sposób wytwarzania warstw tixsi1-xn - Google Patents

Sposób wytwarzania warstw tixsi1-xn

Info

Publication number
PL3017079T3
PL3017079T3 PL14737148T PL14737148T PL3017079T3 PL 3017079 T3 PL3017079 T3 PL 3017079T3 PL 14737148 T PL14737148 T PL 14737148T PL 14737148 T PL14737148 T PL 14737148T PL 3017079 T3 PL3017079 T3 PL 3017079T3
Authority
PL
Poland
Prior art keywords
tixsi1
layers
production
production tixsi1
Prior art date
Application number
PL14737148T
Other languages
English (en)
Other versions
PL3017079T5 (pl
Inventor
Denis Kurapov
Siegfried Krassnitzer
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51167846&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL3017079(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from DE102013011073.4A external-priority patent/DE102013011073A1/de
Priority claimed from DE201310011071 external-priority patent/DE102013011071A1/de
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of PL3017079T3 publication Critical patent/PL3017079T3/pl
Publication of PL3017079T5 publication Critical patent/PL3017079T5/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0682—Silicides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Coating By Spraying Or Casting (AREA)
PL14737148T 2013-07-03 2014-07-01 Sposób wytwarzania warstw tixsi1-xn PL3017079T5 (pl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102013011073.4A DE102013011073A1 (de) 2013-07-03 2013-07-03 TlxSi1-xN Schichten und ihre Herstellung
DE201310011071 DE102013011071A1 (de) 2013-07-03 2013-07-03 TixSi1-xN Schichten mit CryAl1-yN Haftschicht und ihre Herstellung
EP14737148.8A EP3017079B2 (de) 2013-07-03 2014-07-01 Verfahren zur herstellung von tixsi1-xn schichten
PCT/EP2014/001792 WO2015000581A1 (de) 2013-07-03 2014-07-01 Tixsi1-xn schichten und ihre herstellung

Publications (2)

Publication Number Publication Date
PL3017079T3 true PL3017079T3 (pl) 2017-09-29
PL3017079T5 PL3017079T5 (pl) 2020-12-28

Family

ID=51167846

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14737148T PL3017079T5 (pl) 2013-07-03 2014-07-01 Sposób wytwarzania warstw tixsi1-xn

Country Status (17)

Country Link
US (1) US9840768B2 (pl)
EP (1) EP3017079B2 (pl)
JP (1) JP6122975B2 (pl)
KR (2) KR101891900B1 (pl)
CN (1) CN105392911B (pl)
BR (1) BR112015032169B1 (pl)
CA (1) CA2916784C (pl)
ES (1) ES2630316T5 (pl)
IL (1) IL243136A (pl)
MX (1) MX361325B (pl)
MY (1) MY187100A (pl)
PH (1) PH12015502753B1 (pl)
PL (1) PL3017079T5 (pl)
PT (1) PT3017079T (pl)
RU (1) RU2674179C2 (pl)
SG (1) SG11201510417RA (pl)
WO (1) WO2015000581A1 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170536A1 (ja) * 2016-03-30 2017-10-05 三菱日立ツール株式会社 被覆切削工具
US11224921B2 (en) 2017-09-27 2022-01-18 Moldino Tool Engineering, Ltd. Coated cutting tool
CN115125486B (zh) * 2022-07-27 2024-01-02 安徽工业大学 一种含有多层结构的高强韧纳米复合涂层及其制备方法

Family Cites Families (42)

* Cited by examiner, † Cited by third party
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JPH0867971A (ja) * 1994-08-30 1996-03-12 Mitsubishi Materials Corp モザイク状Ｔｉシリサイドターゲット材
DE19625577A1 (de) 1996-06-27 1998-01-02 Vaw Motor Gmbh Aluminium-Gußteil und Verfahren zu seiner Herstellung
JP3417907B2 (ja) † 2000-07-13 2003-06-16 日立ツール株式会社 多層皮膜被覆工具
JP3996809B2 (ja) 2002-07-11 2007-10-24 住友電工ハードメタル株式会社 被覆切削工具
US6906295B2 (en) * 2003-02-20 2005-06-14 National Material L.P. Foodware with multilayer stick resistant ceramic coating and method of making
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US7097922B2 (en) * 2004-05-03 2006-08-29 General Motors Corporation Multi-layered superhard nanocomposite coatings
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US7348074B2 (en) 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
SE0500994L (sv) * 2005-04-29 2006-10-30 Seco Tools Ab Tunt slitstarkt skikt
WO2007048098A2 (en) * 2005-10-18 2007-04-26 Southwest Research Institute Erosion resistant coatings
GB0608582D0 (en) † 2006-05-02 2006-06-07 Univ Sheffield Hallam High power impulse magnetron sputtering vapour deposition
CA2885593C (en) * 2006-05-17 2018-03-06 G & H Technologies Llc Wear resistant coating
RU2327811C1 (ru) * 2006-11-14 2008-06-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
SE0602814L (sv) * 2006-12-27 2008-06-28 Sandvik Intellectual Property Skärverktyg med multiskiktbeläggning
KR101150145B1 (ko) 2007-05-30 2012-06-08 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구
JP5246165B2 (ja) 2007-10-12 2013-07-24 日立ツール株式会社 硬質皮膜被覆部材の製造方法
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RU2428509C1 (ru) * 2010-04-13 2011-09-10 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2419680C1 (ru) * 2010-04-20 2011-05-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
CN102918183B (zh) * 2010-04-23 2015-01-21 山高刀具公司 用于金属加工的pvd涂层
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JP5392408B2 (ja) * 2010-07-06 2014-01-22 株式会社タンガロイ 被覆ｃＢＮ焼結体工具
DE102010034321B4 (de) 2010-08-09 2017-04-06 Technische Universität Dresden Verfahren zur Herstellung einer Hartstoffbeschichtung auf metallischen, keramischen oder hartmetallischen Bauteilen sowie eine mit dem Verfahren hergestellte Hartstoffbeschichtung
MX346949B (es) 2010-11-26 2017-04-06 Sumitomo Electric Hardmetal Corp Cuerpo sinterizado de superficie revestida.
JP2014517870A (ja) † 2011-04-20 2014-07-24 エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハ スパッタ粒子のイオン化を向上させる高出力インパルスマグネトロンスパッタリング法およびそれを実施するための装置
DE102011117177A1 (de) † 2011-10-28 2013-05-02 Oerlikon Trading Ag, Trübbach Verfahren zur Bereitstellung sequenzieller Leistungspulse
DE102011018363A1 (de) † 2011-04-20 2012-10-25 Oerlikon Trading Ag, Trübbach Hochleistungszerstäubungsquelle
DE102011053372A1 (de) 2011-09-07 2013-03-07 Walter Ag Werkzeug mit chromhaltiger Funktionsschicht
BR112014013533B1 (pt) 2011-12-05 2021-09-08 Oerlikon Surface Solutions Ag, Pfäffikon Processo de pulverização catódica reativa, e seu processo de regulação
DE102012209293B3 (de) † 2012-06-01 2013-06-20 Helmholtz-Zentrum Dresden - Rossendorf E.V. Sputterverfahren

Also Published As

Publication number Publication date
EP3017079B2 (de) 2020-09-09
EP3017079A1 (de) 2016-05-11
PH12015502753A1 (en) 2016-03-21
KR20160029091A (ko) 2016-03-14
CN105392911B (zh) 2018-12-21
MY187100A (en) 2021-08-31
US20160177436A1 (en) 2016-06-23
KR20170108177A (ko) 2017-09-26
BR112015032169A2 (pt) 2017-07-25
KR102178189B1 (ko) 2020-11-13
JP2016534217A (ja) 2016-11-04
HK1219516A1 (zh) 2017-04-07
RU2674179C2 (ru) 2018-12-05
CA2916784C (en) 2018-07-31
IL243136A (en) 2017-04-30
RU2016102845A (ru) 2017-08-09
BR112015032169A8 (pt) 2018-01-02
BR112015032169B1 (pt) 2022-04-19
EP3017079B1 (de) 2017-04-12
KR101891900B1 (ko) 2018-09-28
WO2015000581A1 (de) 2015-01-08
MX2015017033A (es) 2016-10-26
ES2630316T5 (es) 2021-06-18
SG11201510417RA (en) 2016-01-28
PL3017079T5 (pl) 2020-12-28
PH12015502753B1 (en) 2016-03-21
RU2016102845A3 (pl) 2018-05-24
US9840768B2 (en) 2017-12-12
MX361325B (es) 2018-11-20
JP6122975B2 (ja) 2017-04-26
CN105392911A (zh) 2016-03-09
PT3017079T (pt) 2017-07-19
ES2630316T3 (es) 2017-08-21
CA2916784A1 (en) 2015-01-08

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