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PL3060957T3 - Modularne urządzenie laserowe - Google Patents

Modularne urządzenie laserowe

Info

Publication number
PL3060957T3
PL3060957T3 PL14796824T PL14796824T PL3060957T3 PL 3060957 T3 PL3060957 T3 PL 3060957T3 PL 14796824 T PL14796824 T PL 14796824T PL 14796824 T PL14796824 T PL 14796824T PL 3060957 T3 PL3060957 T3 PL 3060957T3
Authority
PL
Poland
Prior art keywords
laser device
modular laser
modular
laser
Prior art date
Application number
PL14796824T
Other languages
English (en)
Inventor
Brice DUBOST
Emmanuel Mimoun
Jean-Philippe Schweitzer
Original Assignee
Saint-Gobain Glass France
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint-Gobain Glass France filed Critical Saint-Gobain Glass France
Publication of PL3060957T3 publication Critical patent/PL3060957T3/pl

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • G02B27/0961Lens arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • B23K26/0738Shaping the laser spot into a linear shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905Dividing and/or superposing multiple light beams
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0911Anamorphotic systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • G02B27/0966Cylindrical lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/005Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0081Simple or compound lenses having one or more elements with analytic function to create variable power
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/02Simple or compound lenses with non-spherical faces
    • G02B3/06Simple or compound lenses with non-spherical faces with cylindrical or toric faces

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
PL14796824T 2013-10-21 2014-10-16 Modularne urządzenie laserowe PL3060957T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1360222A FR3012264B1 (fr) 2013-10-21 2013-10-21 Appareil laser modulaire
PCT/FR2014/052642 WO2015059388A1 (fr) 2013-10-21 2014-10-16 Appareil laser modulaire
EP14796824.2A EP3060957B1 (fr) 2013-10-21 2014-10-16 Appareil laser modulaire

Publications (1)

Publication Number Publication Date
PL3060957T3 true PL3060957T3 (pl) 2018-07-31

Family

ID=49667484

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14796824T PL3060957T3 (pl) 2013-10-21 2014-10-16 Modularne urządzenie laserowe

Country Status (17)

Country Link
US (1) US9753290B2 (pl)
EP (1) EP3060957B1 (pl)
JP (1) JP6363718B2 (pl)
KR (1) KR102229320B1 (pl)
CN (1) CN105658371B (pl)
AU (1) AU2014338782B2 (pl)
BR (1) BR112016005652A8 (pl)
CA (1) CA2925491A1 (pl)
EA (1) EA030536B1 (pl)
ES (1) ES2658750T3 (pl)
FR (1) FR3012264B1 (pl)
HU (1) HUE036628T2 (pl)
MX (1) MX352465B (pl)
MY (1) MY187674A (pl)
PL (1) PL3060957T3 (pl)
TW (1) TWI635533B (pl)
WO (1) WO2015059388A1 (pl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201528379A (zh) * 2013-12-20 2015-07-16 Applied Materials Inc 雙波長退火方法與設備
FR3040319B1 (fr) * 2015-08-25 2017-11-24 Saint Gobain Appareil laser modulaire
CN106842587B (zh) * 2015-12-04 2020-12-15 北京润和微光科技有限公司 衍射光学方法实现高斯光整形为超高长宽比的极细线型均匀光斑
PL3491450T3 (pl) * 2016-07-27 2024-06-24 Trumpf Laser Gmbh Naświetlanie linią laserową
CN107252981B (zh) * 2017-07-14 2018-10-09 中国科学院微电子研究所 一种激光加工晶圆的方法及装置
FR3072895B1 (fr) 2017-10-31 2019-10-18 Saint-Gobain Glass France Procede d'alignement d'une pluralite de lignes lasers
US10822270B2 (en) 2018-08-01 2020-11-03 Guardian Glass, LLC Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same
CN109860034B (zh) * 2019-01-25 2021-03-30 云谷(固安)科技有限公司 激光退火装置和方法、显示面板及其制备装置
US11137246B2 (en) * 2019-01-31 2021-10-05 Himax Technologies Limited Optical device
GB2602966A (en) 2021-01-18 2022-07-27 Aptiv Tech Ltd Infrared-laser source device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737325A (en) * 1980-08-15 1982-03-01 Ricoh Co Ltd Imaging device
JP3017277B2 (ja) * 1989-12-07 2000-03-06 株式会社リコー 光アニール装置
JPH07202263A (ja) * 1993-12-28 1995-08-04 Ricoh Co Ltd 端面発光型発光ダイオード、アレイ状光源、側面受光型受光素子、受発光素子、端面発光型発光ダイオードアレイ状光源
JP3883592B2 (ja) * 1995-08-07 2007-02-21 株式会社半導体エネルギー研究所 レーザ照射方法および半導体作製方法および半導体装置の作製方法および液晶電気光学装置の作製方法
US6005717A (en) * 1998-11-17 1999-12-21 Ceramoptec Industries, Inc. Diode laser beam combiner system
JP2002141301A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp レーザアニーリング用光学系とこれを用いたレーザアニーリング装置
JP2002268001A (ja) * 2001-03-13 2002-09-18 Ricoh Co Ltd 照明装置
DE10111871A1 (de) * 2001-03-13 2002-09-19 Heidelberger Druckmasch Ag Bebilderungseinrichtung für eine Druckform mit einem Array von VCSEL-Lichtquellen
JP2005221872A (ja) * 2004-02-06 2005-08-18 Nec Viewtechnology Ltd 照明装置および表示装置
TW200741883A (en) * 2006-04-21 2007-11-01 Zeiss Carl Laser Optics Gmbh Apparatus for laser annealing of large substrates and method for laser annealing for large substrates
WO2008024211A2 (en) * 2006-08-23 2008-02-28 Applied Materials, Inc. Fast axis beam profile shaping
JP2008300602A (ja) * 2007-05-31 2008-12-11 Sony Corp 照射装置、半導体装置の製造装置、半導体装置の製造方法および表示装置の製造方法
DE102009021251A1 (de) 2009-05-14 2010-11-18 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung
KR101733422B1 (ko) * 2009-08-20 2017-05-10 코닌클리케 필립스 엔.브이. 구성 가능한 강도 분포를 갖는 레이저 장치

Also Published As

Publication number Publication date
EA201690827A1 (ru) 2016-08-31
WO2015059388A1 (fr) 2015-04-30
JP2017504219A (ja) 2017-02-02
HUE036628T2 (hu) 2018-07-30
EP3060957B1 (fr) 2017-12-13
MX352465B (es) 2017-11-27
BR112016005652A8 (pt) 2020-02-18
ES2658750T3 (es) 2018-03-12
FR3012264A1 (fr) 2015-04-24
AU2014338782A1 (en) 2016-05-12
CN105658371A (zh) 2016-06-08
JP6363718B2 (ja) 2018-07-25
KR20160073376A (ko) 2016-06-24
EA030536B1 (ru) 2018-08-31
TWI635533B (zh) 2018-09-11
AU2014338782B2 (en) 2019-09-26
US9753290B2 (en) 2017-09-05
US20160216522A1 (en) 2016-07-28
KR102229320B1 (ko) 2021-03-19
EP3060957A1 (fr) 2016-08-31
CN105658371B (zh) 2017-09-22
CA2925491A1 (fr) 2015-04-30
MY187674A (en) 2021-10-08
MX2016005139A (es) 2016-07-18
FR3012264B1 (fr) 2017-04-21
TW201523706A (zh) 2015-06-16

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