PL2817433T3 - Sposób osadzania chemicznego z fazy gazowej w celu nakładania powłoki krzemionkowej na podłoże szklane - Google Patents
Sposób osadzania chemicznego z fazy gazowej w celu nakładania powłoki krzemionkowej na podłoże szklaneInfo
- Publication number
- PL2817433T3 PL2817433T3 PL13705247T PL13705247T PL2817433T3 PL 2817433 T3 PL2817433 T3 PL 2817433T3 PL 13705247 T PL13705247 T PL 13705247T PL 13705247 T PL13705247 T PL 13705247T PL 2817433 T3 PL2817433 T3 PL 2817433T3
- Authority
- PL
- Poland
- Prior art keywords
- depositing
- glass substrate
- vapor deposition
- chemical vapor
- deposition process
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/42—Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
- C03C2217/241—Doped oxides with halides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
- C03C2218/1525—Deposition methods from the vapour phase by cvd by atmospheric CVD
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261602354P | 2012-02-23 | 2012-02-23 | |
| EP13705247.8A EP2817433B1 (en) | 2012-02-23 | 2013-02-18 | Chemical vapor deposition process for depositing a silica coating on a glass substrate |
| PCT/GB2013/050383 WO2013124634A1 (en) | 2012-02-23 | 2013-02-18 | Chemical vapor deposition process for depositing a silica coating on a glass substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL2817433T3 true PL2817433T3 (pl) | 2021-12-20 |
Family
ID=47741181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL13705247T PL2817433T3 (pl) | 2012-02-23 | 2013-02-18 | Sposób osadzania chemicznego z fazy gazowej w celu nakładania powłoki krzemionkowej na podłoże szklane |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9404179B2 (pl) |
| EP (1) | EP2817433B1 (pl) |
| JP (1) | JP6320303B2 (pl) |
| CN (1) | CN104136656B (pl) |
| PL (1) | PL2817433T3 (pl) |
| WO (1) | WO2013124634A1 (pl) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014020310A2 (en) * | 2012-07-30 | 2014-02-06 | Pilkington Group Limited | A method of depositing a coating utilizing a coating apparatus |
| EP2984050B1 (en) * | 2013-04-09 | 2022-08-03 | Nippon Sheet Glass Company, Limited | Method for producing glass sheet and glass sheet |
| CN105579408B (zh) * | 2013-09-25 | 2018-06-26 | 旭硝子株式会社 | 玻璃板的制造方法 |
| GB201406177D0 (en) * | 2014-04-04 | 2014-05-21 | Pilkington Group Ltd | A glazing |
| GB201505313D0 (en) * | 2014-10-21 | 2015-05-13 | Pilkington Group Ltd | Glass treatment |
| WO2017137773A1 (en) * | 2016-02-12 | 2017-08-17 | Pilkington Group Limited | Chemical vapor deposition process for depositing a mixed metal oxide coating and the coated article formed thereby |
| US11485678B2 (en) | 2017-08-31 | 2022-11-01 | Pilkington Group Limited | Chemical vapor deposition process for forming a silicon oxide coating |
| WO2023057756A1 (en) * | 2021-10-06 | 2023-04-13 | Pilkington Group Limited | Method of forming a silicon oxide coating |
| CN114447144A (zh) * | 2021-12-27 | 2022-05-06 | 张家港博佑光电科技有限公司 | 一种perc+se电池碱抛前后保护工艺 |
| GB202304625D0 (en) * | 2023-03-29 | 2023-05-10 | Pilkington Group Ltd | Coated glass article |
| CN117845189A (zh) * | 2023-12-12 | 2024-04-09 | 杭州中欣晶圆半导体股份有限公司 | 膜色均匀和膜厚均一性良好的薄片apcvd成膜加工方法 |
| WO2025202635A1 (en) | 2024-03-26 | 2025-10-02 | Pilkington Group Limited | Coated glass articles |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190209A (ja) * | 1983-04-11 | 1984-10-29 | Semiconductor Energy Lab Co Ltd | シリコン被膜作製方法 |
| US4818564A (en) | 1985-10-23 | 1989-04-04 | Canon Kabushiki Kaisha | Method for forming deposited film |
| US4837048A (en) * | 1985-10-24 | 1989-06-06 | Canon Kabushiki Kaisha | Method for forming a deposited film |
| JPH0645883B2 (ja) * | 1985-10-24 | 1994-06-15 | キヤノン株式会社 | 堆積膜形成法 |
| US4721632A (en) * | 1986-08-25 | 1988-01-26 | Ford Motor Company | Method of improving the conductivity and lowering the emissivity of a doped tin oxide film |
| US4810673A (en) * | 1986-09-18 | 1989-03-07 | Texas Instruments Incorporated | Oxide deposition method |
| US4922853A (en) | 1989-05-16 | 1990-05-08 | Libbey-Owens-Ford Co. | Stripe coating on glass by chemical vapor deposition |
| US5356718A (en) * | 1993-02-16 | 1994-10-18 | Ppg Industries, Inc. | Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates |
| US5599387A (en) * | 1993-02-16 | 1997-02-04 | Ppg Industries, Inc. | Compounds and compositions for coating glass with silicon oxide |
| CA2159296C (en) * | 1994-10-14 | 2007-01-30 | Michel J. Soubeyrand | Glass coating method and glass coated thereby |
| JPH098030A (ja) * | 1995-06-23 | 1997-01-10 | Sony Corp | シリコン系酸化膜の製造方法 |
| JPH0964176A (ja) * | 1995-08-21 | 1997-03-07 | Oki Electric Ind Co Ltd | 半導体素子の製造方法 |
| JP4467707B2 (ja) * | 1999-05-18 | 2010-05-26 | 日本板硝子株式会社 | 導電膜付きガラス板とその製造方法、およびこれを用いた光電変換装置 |
| US6858306B1 (en) * | 1999-08-10 | 2005-02-22 | Pilkington North America Inc. | Glass article having a solar control coating |
| US6583069B1 (en) * | 1999-12-13 | 2003-06-24 | Chartered Semiconductor Manufacturing Co., Ltd. | Method of silicon oxide and silicon glass films deposition |
| EP1462540B1 (en) | 2001-12-03 | 2012-03-07 | Nippon Sheet Glass Company, Limited | Method for forming thin film. |
| JP4362273B2 (ja) * | 2001-12-03 | 2009-11-11 | 日本板硝子株式会社 | 基板の製造方法 |
| JP4272534B2 (ja) * | 2002-01-28 | 2009-06-03 | 日本板硝子株式会社 | 透明導電膜を備えたガラス基板の製造方法、透明導電膜を備えたガラス基板、およびそれを用いた光電変換装置 |
| US6844612B1 (en) * | 2002-03-12 | 2005-01-18 | Novellus Systems, Inc. | Low dielectric constant fluorine-doped silica glass film for use in integrated circuit chips and method of forming the same |
| JP2007190844A (ja) * | 2006-01-20 | 2007-08-02 | Konica Minolta Holdings Inc | ガスバリア性樹脂基材および有機エレクトロルミネッセンスデバイス |
| EP2688851B1 (en) | 2011-03-23 | 2019-01-23 | Pilkington Group Limited | Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus |
-
2013
- 2013-02-18 WO PCT/GB2013/050383 patent/WO2013124634A1/en not_active Ceased
- 2013-02-18 JP JP2014558199A patent/JP6320303B2/ja active Active
- 2013-02-18 CN CN201380010476.7A patent/CN104136656B/zh active Active
- 2013-02-18 US US13/261,943 patent/US9404179B2/en active Active
- 2013-02-18 PL PL13705247T patent/PL2817433T3/pl unknown
- 2013-02-18 EP EP13705247.8A patent/EP2817433B1/en active Active
-
2016
- 2016-06-29 US US15/197,425 patent/US10837108B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10837108B2 (en) | 2020-11-17 |
| EP2817433B1 (en) | 2021-09-29 |
| CN104136656B (zh) | 2016-11-09 |
| US20160305021A1 (en) | 2016-10-20 |
| US20150140216A1 (en) | 2015-05-21 |
| WO2013124634A1 (en) | 2013-08-29 |
| JP6320303B2 (ja) | 2018-05-16 |
| CN104136656A (zh) | 2014-11-05 |
| US9404179B2 (en) | 2016-08-02 |
| JP2015514656A (ja) | 2015-05-21 |
| EP2817433A1 (en) | 2014-12-31 |
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