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PL2603941T3 - Przyrząd do precyzyjnego przesuwania - Google Patents

Przyrząd do precyzyjnego przesuwania

Info

Publication number
PL2603941T3
PL2603941T3 PL11758374T PL11758374T PL2603941T3 PL 2603941 T3 PL2603941 T3 PL 2603941T3 PL 11758374 T PL11758374 T PL 11758374T PL 11758374 T PL11758374 T PL 11758374T PL 2603941 T3 PL2603941 T3 PL 2603941T3
Authority
PL
Poland
Prior art keywords
precision displacement
precision
displacement
Prior art date
Application number
PL11758374T
Other languages
English (en)
Inventor
Alexander Potemkin
Petr Nikolaevich Luskinovich
Vladimir Alexandrovich Zhabotinsky
Original Assignee
Alexander Potemkin
Petr Nikolaevich Luskinovich
Vladimir Alexandrovich Zhabotinsky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alexander Potemkin, Petr Nikolaevich Luskinovich, Vladimir Alexandrovich Zhabotinsky filed Critical Alexander Potemkin
Publication of PL2603941T3 publication Critical patent/PL2603941T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/208—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
PL11758374T 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania PL2603941T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP2011002706 2011-06-01
PCT/EP2011/003173 WO2012163378A2 (de) 2011-06-01 2011-06-28 Gerät zur präzisionsverschiebung
EP11758374.0A EP2603941B1 (de) 2011-06-01 2011-06-28 Gerät zur präzisionsverschiebung

Publications (1)

Publication Number Publication Date
PL2603941T3 true PL2603941T3 (pl) 2015-01-30

Family

ID=44658680

Family Applications (4)

Application Number Title Priority Date Filing Date
PL13002171T PL2639842T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania
PL13002172T PL2639843T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania
PL13002173T PL2639844T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania
PL11758374T PL2603941T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania

Family Applications Before (3)

Application Number Title Priority Date Filing Date
PL13002171T PL2639842T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania
PL13002172T PL2639843T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania
PL13002173T PL2639844T3 (pl) 2011-06-01 2011-06-28 Przyrząd do precyzyjnego przesuwania

Country Status (6)

Country Link
US (2) US9640751B2 (pl)
EP (4) EP2639843B1 (pl)
JP (1) JP5754830B2 (pl)
KR (2) KR20140051186A (pl)
PL (4) PL2639842T3 (pl)
WO (1) WO2012163378A2 (pl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3015147A1 (fr) * 2013-12-18 2015-06-19 Thales Sa Actionneur de precision aller-retour
RU2626194C1 (ru) * 2016-04-21 2017-07-24 Владимир Александрович Жаботинский Эталон для калибровки оптических приборов
FR3092454B1 (fr) * 2019-02-04 2022-06-10 Cedrat Tech Mecanisme de deplacement nanometrique a vis
EP4022321A4 (en) 2019-08-29 2023-08-30 National Research Council of Canada Atomic nano-positioning device
KR102626610B1 (ko) * 2021-01-02 2024-01-19 한국전자기술연구원 적층 압전 소자 및 그를 포함하는 압전 액추에이터

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4384230A (en) * 1980-11-06 1983-05-17 United Technologies Corporation Digital piezoelectric actuator
US4787148A (en) 1987-04-13 1988-11-29 Hughes Aircraft Company Nanometric drive apparatus
EP0556436B1 (en) * 1992-02-19 2001-09-05 Tandberg Data Asa Method and apparatus for positioning of a magnetic head
US5410205A (en) * 1993-02-11 1995-04-25 Hewlett-Packard Company Ultrasonic transducer having two or more resonance frequencies
GB9514558D0 (en) 1995-07-17 1995-09-13 Gersan Ets Marking diamond
US5714832A (en) * 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
DE19651029C2 (de) 1996-12-09 1999-12-02 Ibm Kalibrierstandard für Profilometer und Herstellverfahren
JP2002134805A (ja) * 2000-10-30 2002-05-10 Matsushita Electric Ind Co Ltd 圧電部品及び圧電装置
US7063596B2 (en) 2003-06-09 2006-06-20 David Benderly Vibratory material removal system, tool and method
US7402938B2 (en) * 2004-10-29 2008-07-22 Jfe Mineral Co., Ltd. Piezoelectric single crystal device
RU2284464C2 (ru) * 2004-12-28 2006-09-27 Алексей Леонидович Максимов Устройство для прецизионных перемещений
US7284396B2 (en) 2005-03-01 2007-10-23 International Gemstone Registry Inc. Method and system for laser marking in the volume of gemstones such as diamonds
EP2140505B1 (en) * 2007-03-21 2012-06-27 The University of Vermont and State Agricultural Piezoelectric vibrational energy harvesting systems incorporating parametric bending mode energy harvesting
US8531178B2 (en) * 2007-11-26 2013-09-10 Konica Minolta Medical & Graphic, Inc. Ultrasound probe, method for manufacturing the same, and ultrasound diagnostic apparatus
JP2010286371A (ja) * 2009-06-12 2010-12-24 Seiko Epson Corp 物理量検出装置、物理量検出装置の異常診断システム及び物理量検出装置の異常診断方法

Also Published As

Publication number Publication date
EP2603941B1 (de) 2014-03-26
KR20170054569A (ko) 2017-05-17
WO2012163378A3 (de) 2013-02-28
EP2639842B1 (de) 2014-06-04
JP5754830B2 (ja) 2015-07-29
PL2639843T3 (pl) 2015-01-30
KR20140051186A (ko) 2014-04-30
EP2639843B1 (de) 2014-08-27
PL2639844T3 (pl) 2014-12-31
EP2639842A1 (de) 2013-09-18
PL2639842T3 (pl) 2015-01-30
US20140152151A1 (en) 2014-06-05
US20170236992A1 (en) 2017-08-17
US9640751B2 (en) 2017-05-02
EP2639844A1 (de) 2013-09-18
WO2012163378A2 (de) 2012-12-06
EP2639844B1 (de) 2014-08-27
EP2639843A1 (de) 2013-09-18
EP2603941A2 (de) 2013-06-19
JP2014524137A (ja) 2014-09-18

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