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PL2647033T3 - Cienkowarstwowe urządzenie fotowoltaiczne i sposób jego wytwarzania - Google Patents

Cienkowarstwowe urządzenie fotowoltaiczne i sposób jego wytwarzania

Info

Publication number
PL2647033T3
PL2647033T3 PL12726182T PL12726182T PL2647033T3 PL 2647033 T3 PL2647033 T3 PL 2647033T3 PL 12726182 T PL12726182 T PL 12726182T PL 12726182 T PL12726182 T PL 12726182T PL 2647033 T3 PL2647033 T3 PL 2647033T3
Authority
PL
Poland
Prior art keywords
production
thin film
photovoltaic device
film photovoltaic
thin
Prior art date
Application number
PL12726182T
Other languages
English (en)
Inventor
Adrian Chirila
Ayodhya Nath Tiwari
Patrick Bloesch
Shiro Nishiwaki
David Bremaud
Original Assignee
Flisom Ag
Empa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Flisom Ag, Empa filed Critical Flisom Ag
Publication of PL2647033T3 publication Critical patent/PL2647033T3/pl

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02367Substrates
    • H01L21/0237Materials
    • H01L21/02422Non-crystalline insulating materials, e.g. glass, polymers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02485Other chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02491Conductive materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02494Structure
    • H01L21/02496Layer structure
    • H01L21/02505Layer structure consisting of more than two layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02494Structure
    • H01L21/02496Layer structure
    • H01L21/0251Graded layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02568Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/126Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169Thin semiconductor films on metallic or insulating substrates
    • H10F77/1698Thin semiconductor films on metallic or insulating substrates the metallic or insulating substrates being flexible
    • H10F77/1699Thin semiconductor films on metallic or insulating substrates the metallic or insulating substrates being flexible the films including Group I-III-VI materials, e.g. CIS or CIGS on metal foils or polymer foils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
PL12726182T 2011-04-19 2012-04-17 Cienkowarstwowe urządzenie fotowoltaiczne i sposób jego wytwarzania PL2647033T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IB2011000857 2011-04-19

Publications (1)

Publication Number Publication Date
PL2647033T3 true PL2647033T3 (pl) 2017-01-31

Family

ID=46210311

Family Applications (1)

Application Number Title Priority Date Filing Date
PL12726182T PL2647033T3 (pl) 2011-04-19 2012-04-17 Cienkowarstwowe urządzenie fotowoltaiczne i sposób jego wytwarzania

Country Status (14)

Country Link
US (1) US9786807B2 (pl)
EP (4) EP3425659A1 (pl)
JP (1) JP5904563B2 (pl)
KR (1) KR101985944B1 (pl)
CN (2) CN106252202B (pl)
BR (1) BR112013026806B1 (pl)
ES (1) ES2590464T3 (pl)
HU (3) HUE030723T2 (pl)
MY (1) MY167014A (pl)
PL (1) PL2647033T3 (pl)
PT (1) PT2647033T (pl)
SI (1) SI2647033T1 (pl)
TW (1) TWI538235B (pl)
WO (1) WO2012143858A2 (pl)

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US9837565B2 (en) * 2012-12-21 2017-12-05 Flison Ag Fabricating thin-film optoelectronic devices with added potassium
CN104051569B (zh) * 2013-03-12 2017-09-26 台湾积体电路制造股份有限公司 薄膜太阳能电池及其制造方法
US10333850B2 (en) * 2015-06-25 2019-06-25 Tracfone Wireless, Inc. Device and process for data throttling for wireless device
EP3559303A1 (en) 2016-12-22 2019-10-30 Flisom AG Linear evaporation source
WO2018114373A1 (en) 2016-12-22 2018-06-28 Flisom Ag Linear source for vapor deposition with at least three electrical heating elements
WO2018114377A1 (en) 2016-12-22 2018-06-28 Flisom Ag Linear vapor source
WO2018114378A1 (en) 2016-12-22 2018-06-28 Flisom Ag Linear source for vapor deposition with heat shields
WO2018114379A1 (en) 2016-12-22 2018-06-28 Flisom Ag Roll-to roll vapor deposition system
CN110176517B (zh) * 2019-04-22 2021-03-26 云南师范大学 结构优化的银掺杂铜锌锡硫薄膜太阳电池及其制备方法
CN111342184A (zh) * 2020-02-24 2020-06-26 西安交通大学 一种可调的柔性微波器件及其制备方法
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Also Published As

Publication number Publication date
BR112013026806A2 (pt) 2017-01-10
TW201251062A (en) 2012-12-16
HUE059253T2 (hu) 2022-11-28
CN103430279A (zh) 2013-12-04
HUE057448T2 (hu) 2022-05-28
US20140026956A1 (en) 2014-01-30
JP2014518592A (ja) 2014-07-31
SI2647033T1 (sl) 2016-10-28
EP2660857B1 (en) 2021-09-22
WO2012143858A3 (en) 2012-12-27
HUE030723T2 (en) 2017-05-29
MY167014A (en) 2018-07-31
PT2647033T (pt) 2016-09-12
JP5904563B2 (ja) 2016-04-13
ES2590464T3 (es) 2016-11-22
WO2012143858A2 (en) 2012-10-26
EP3425659A1 (en) 2019-01-09
US9786807B2 (en) 2017-10-10
KR20140056169A (ko) 2014-05-09
CN106252202B (zh) 2020-01-10
CN103430279B (zh) 2016-09-14
CN106252202A (zh) 2016-12-21
EP2660857A1 (en) 2013-11-06
TWI538235B (zh) 2016-06-11
EP3454362B1 (en) 2022-06-01
KR101985944B1 (ko) 2019-09-30
EP3454362A1 (en) 2019-03-13
EP2647033B1 (en) 2016-06-08
EP2647033A2 (en) 2013-10-09
BR112013026806B1 (pt) 2021-09-28

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