PL2283508T3 - Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego - Google Patents

Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego

Info

Publication number: PL2283508T3
Authority: PL; Poland
Prior art keywords: radiation; liquid; radiation source; generating; chamber
Prior art date: 2008-06-05

Application number

PL09757210T

Other languages

English (en)

Inventor

Frank Sukowski

Norman Uhlmann

Original Assignee

Fraunhofer Ges Forschung

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2008-06-05

Filing date

2009-05-28

Publication date

2012-03-30

2009-05-28 Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung

2012-03-30 Publication of PL2283508T3 publication Critical patent/PL2283508T3/pl

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
- H01J35/13—Active cooling, e.g. fluid flow, heat pipes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes

Landscapes

Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
X-Ray Techniques (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

PL09757210T 2008-06-05 2009-05-28 Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego PL2283508T3 (pl)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE102008026938A DE102008026938A1 (de)	2008-06-05	2008-06-05	Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
EP09757210A EP2283508B1 (de)	2008-06-05	2009-05-28	Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung
PCT/EP2009/003784 WO2009146827A1 (de)	2008-06-05	2009-05-28	Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Publications (1)

Publication Number	Publication Date
PL2283508T3 true PL2283508T3 (pl)	2012-03-30

Family

ID=41078192

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PL09757210T PL2283508T3 (pl)	2008-06-05	2009-05-28	Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego

Country Status (6)

Country	Link
US (1)	US8565381B2 (pl)
EP (1)	EP2283508B1 (pl)
AT (1)	ATE531069T1 (pl)
DE (1)	DE102008026938A1 (pl)
PL (1)	PL2283508T3 (pl)
WO (1)	WO2009146827A1 (pl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102014226813A1 (de)	2014-12-22	2016-06-23	Siemens Aktiengesellschaft	Metallstrahlröntgenröhre
US10748736B2 (en)	2017-10-18	2020-08-18	Kla-Tencor Corporation	Liquid metal rotating anode X-ray source for semiconductor metrology
EP3493239A1 (en) *	2017-12-01	2019-06-05	Excillum AB	X-ray source and method for generating x-ray radiation
US11719652B2 (en)	2020-02-04	2023-08-08	Kla Corporation	Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11882642B2 (en)	2021-12-29	2024-01-23	Innovicum Technology Ab	Particle based X-ray source
US11955308B1 (en)	2022-09-22	2024-04-09	Kla Corporation	Water cooled, air bearing based rotating anode x-ray illumination source

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4737647A (en)	1986-03-31	1988-04-12	Siemens Medical Laboratories, Inc.	Target assembly for an electron linear accelerator
DE19955392A1 (de) *	1999-11-18	2001-05-23	Philips Corp Intellectual Pty	Monochromatische Röntgenstrahlenquelle
AU2001272873A1 (en)	2000-07-28	2002-02-13	Jettec Ab	Method and apparatus for generating x-ray or euv radiation
DE10062928A1 (de) *	2000-12-16	2002-06-20	Philips Corp Intellectual Pty	Röntgenstrahler mit Flüssigmetall-Target
DE10106740A1 (de) *	2001-02-14	2002-08-22	Philips Corp Intellectual Pty	Röntgenstrahler mit einem Target aus einem flüssigen Metall
DE10129463A1 (de) *	2001-06-19	2003-01-02	Philips Corp Intellectual Pty	Röntgenstrahler mit einem Flüssigmetall-Target
DE10130070A1 (de) *	2001-06-21	2003-01-02	Philips Corp Intellectual Pty	Röntgenstrahler mit Flüssigmetall-Target
AU2003252819A1 (en) *	2002-03-08	2003-09-22	Koninklijke Philips Electronics N.V.	A device for generating x-rays having a liquid metal anode
WO2003077277A1 (en)	2002-03-08	2003-09-18	Koninklijke Philips Electronics N.V.	A device for generating x-rays having a liquid metal anode
US7436931B2 (en) *	2002-12-11	2008-10-14	Koninklijke Philips Electronics N.V.	X-ray source for generating monochromatic x-rays
DE102004013620B4 (de) *	2004-03-19	2008-12-04	GE Homeland Protection, Inc., Newark	Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004013618B4 (de) *	2004-03-19	2007-07-26	Yxlon International Security Gmbh	Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler
DE102004015590B4 (de)	2004-03-30	2008-10-09	GE Homeland Protection, Inc., Newark	Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
US7483517B2 (en) *	2004-04-13	2009-01-27	Koninklijke Philips Electronics N.V.	Device for generating X-rays having a liquid metal anode

2008
- 2008-06-05 DE DE102008026938A patent/DE102008026938A1/de not_active Withdrawn
2009
- 2009-05-28 US US12/996,239 patent/US8565381B2/en active Active
- 2009-05-28 WO PCT/EP2009/003784 patent/WO2009146827A1/de not_active Ceased
- 2009-05-28 PL PL09757210T patent/PL2283508T3/pl unknown
- 2009-05-28 AT AT09757210T patent/ATE531069T1/de active
- 2009-05-28 EP EP09757210A patent/EP2283508B1/de active Active

Also Published As

Publication number	Publication date
EP2283508A1 (de)	2011-02-16
ATE531069T1 (de)	2011-11-15
DE102008026938A1 (de)	2009-12-17
EP2283508B1 (de)	2011-10-26
US8565381B2 (en)	2013-10-22
US20110080997A1 (en)	2011-04-07
WO2009146827A1 (de)	2009-12-10

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