[go: up one dir, main page]

PL2153705T3 - Ulepszenie reakcji w fazie gazowej w plazmie przy użyciu ultradźwiękowych fal akustycznych o wysokiej intensywności i wysokiej mocy - Google Patents

Ulepszenie reakcji w fazie gazowej w plazmie przy użyciu ultradźwiękowych fal akustycznych o wysokiej intensywności i wysokiej mocy

Info

Publication number
PL2153705T3
PL2153705T3 PL08759518T PL08759518T PL2153705T3 PL 2153705 T3 PL2153705 T3 PL 2153705T3 PL 08759518 T PL08759518 T PL 08759518T PL 08759518 T PL08759518 T PL 08759518T PL 2153705 T3 PL2153705 T3 PL 2153705T3
Authority
PL
Poland
Prior art keywords
plasma
acoustic waves
phase reaction
ultrasonic acoustic
power ultrasonic
Prior art date
Application number
PL08759518T
Other languages
English (en)
Inventor
Alexander Bardenshtein
Henrik Bindslev
Niels Krebs
Yukihiro Kusano
Original Assignee
Force Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Force Technology filed Critical Force Technology
Publication of PL2153705T3 publication Critical patent/PL2153705T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4415—Acoustic wave CVD
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H05H1/2493—Generating plasma using acoustic pressure discharges the plasma being activated using horns
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
PL08759518T 2007-05-11 2008-05-13 Ulepszenie reakcji w fazie gazowej w plazmie przy użyciu ultradźwiękowych fal akustycznych o wysokiej intensywności i wysokiej mocy PL2153705T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200700717 2007-05-11
PCT/EP2008/055801 WO2008138915A1 (en) 2007-05-11 2008-05-13 Enhancing gas-phase reaction in a plasma using high intensity and high power ultrasonic acoustic waves
EP08759518.7A EP2153705B1 (en) 2007-05-11 2008-05-13 Enhancing gas-phase reaction in a plasma using high intensity and high power ultrasonic acoustic waves

Publications (1)

Publication Number Publication Date
PL2153705T3 true PL2153705T3 (pl) 2018-06-29

Family

ID=39711085

Family Applications (2)

Application Number Title Priority Date Filing Date
PL08759500T PL2153704T3 (pl) 2007-05-11 2008-05-09 Wspomaganie plazmowej modyfikacji powierzchni przy zastosowaniu ultradźwiękowych fal akustycznych o wysokim natężeniu i o wysokiej mocy
PL08759518T PL2153705T3 (pl) 2007-05-11 2008-05-13 Ulepszenie reakcji w fazie gazowej w plazmie przy użyciu ultradźwiękowych fal akustycznych o wysokiej intensywności i wysokiej mocy

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PL08759500T PL2153704T3 (pl) 2007-05-11 2008-05-09 Wspomaganie plazmowej modyfikacji powierzchni przy zastosowaniu ultradźwiękowych fal akustycznych o wysokim natężeniu i o wysokiej mocy

Country Status (8)

Country Link
US (3) US8399795B2 (pl)
EP (2) EP2153704B1 (pl)
CN (2) CN101743785B (pl)
DK (2) DK2153704T3 (pl)
ES (2) ES2662029T3 (pl)
NO (2) NO2153704T3 (pl)
PL (2) PL2153704T3 (pl)
WO (2) WO2008138901A1 (pl)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458300B2 (ja) * 2009-02-09 2014-04-02 公立大学法人横浜市立大学 微細構造物の蒸着装置及び方法
EP2455332B1 (en) * 2010-11-19 2014-02-12 Imec Method for producing temporary cap on a MEMS device
EP2691496A2 (en) * 2011-03-29 2014-02-05 Fuelina, Inc. Hybrid fuel and method of making the same
US8603207B2 (en) 2011-04-20 2013-12-10 General Electric Company Acoustic cleaning assembly for use in power generation systems and method of assembling same
CN102206866A (zh) * 2011-04-30 2011-10-05 常州天合光能有限公司 介质阻挡放电氢等离子钝化方法
KR101492175B1 (ko) 2011-05-03 2015-02-10 주식회사 엘지화학 양극 활물질 입자의 표면 처리 방법 및 이로부터 형성된 양극 활물질 입자
DE102011076806A1 (de) * 2011-05-31 2012-12-06 Leibniz-Institut für Plasmaforschung und Technologie e.V. Vorrichtung und Verfahren zur Erzeugung eines kalten, homogenen Plasmas unter Atmosphärendruckbedingungen
US9540545B2 (en) * 2011-09-02 2017-01-10 Schlumberger Technology Corporation Plasma treatment in fabricating directional drilling assemblies
CN102595756A (zh) * 2012-03-15 2012-07-18 大连海事大学 一种气液混合介质阻挡放电的发生装置及发生方法
EP2931067B1 (en) 2012-12-11 2018-02-07 Plasmology4, Inc. Method and apparatus for cold plasma food contact surface sanitation
US9567542B2 (en) * 2013-03-15 2017-02-14 Fuelina Technologies, Llc Hybrid fuel and method of making the same
US10800092B1 (en) 2013-12-18 2020-10-13 Surfx Technologies Llc Low temperature atmospheric pressure plasma for cleaning and activating metals
GB2546450B (en) * 2014-09-30 2022-04-20 Omni Conversion Tech Inc A non-equilibrium plasma system and method of refining syngas
AU2015358565B2 (en) 2014-12-03 2020-11-05 Drexel University Direct incorporation of natural gas into hydrocarbon liquid fuels
CN105879597A (zh) * 2014-12-24 2016-08-24 苏州超等环保科技有限公司 一种螺旋式等离子高压放电管的废气处理装置
US10427129B2 (en) * 2015-04-17 2019-10-01 LLT International (Ireland) Ltd. Systems and methods for facilitating reactions in gases using shockwaves produced in a supersonic gaseous vortex
HK1252126A1 (zh) 2015-04-28 2019-05-17 Mars, Incorporated 一种无菌湿宠物食品的制备方法
US10194672B2 (en) 2015-10-23 2019-02-05 NanoGuard Technologies, LLC Reactive gas, reactive gas generation system and product treatment using reactive gas
KR101788808B1 (ko) * 2015-11-26 2017-11-15 조선대학교산학협력단 상온 및 상압 조건하에서 이산화탄소와 수소를 이용한 메탄가스 합성방법 및 합성장치
US10543457B2 (en) 2017-10-18 2020-01-28 Thrivaltech, Llc Isolated plasma array treatment systems
US12480194B2 (en) * 2017-11-17 2025-11-25 Sms Group Gmbh Method for the preoxidation of strip steel in a reaction chamber arranged in a furnace chamber
CN109030615B (zh) * 2018-11-03 2024-07-12 宁波华仪宁创智能科技有限公司 热解吸装置及质谱分析方法
US10925144B2 (en) 2019-06-14 2021-02-16 NanoGuard Technologies, LLC Electrode assembly, dielectric barrier discharge system and use thereof
CN111111581B (zh) * 2019-12-19 2021-07-02 中国科学院电工研究所 一种等离子体燃料重整装置
JP7647576B2 (ja) * 2019-12-27 2025-03-18 株式会社レゾナック フッ素ガスの製造方法及びフッ素ガス製造装置
US11896731B2 (en) 2020-04-03 2024-02-13 NanoGuard Technologies, LLC Methods of disarming viruses using reactive gas
EP4169023A4 (en) 2020-06-17 2024-10-09 Awe Technologies, LLC DESTRUCTION OF AIRBORNE PATHOGENS AND MICROORGANISMS ON CEREALS AND FREEZE-DRIED FOOD USING ULTRASOUND
CN111954360A (zh) * 2020-09-18 2020-11-17 云南电网有限责任公司电力科学研究院 基于混合气体的大面积冷等离子体发生装置及方法
US11510307B1 (en) * 2021-05-08 2022-11-22 Perriquest Defense Research Enterprises, Llc Plasma engine using reactive species
CN115845111B (zh) * 2022-12-15 2025-07-25 上海惠浦机电科技有限公司 一种电子消毒卡
WO2025014870A2 (en) * 2023-07-07 2025-01-16 Rensselaer Polytechnic Institute Manipulation of gaseous ion beams with acoustic fields

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2755767A (en) * 1951-07-10 1956-07-24 Centre Nat Rech Scient High power generators of sounds and ultra-sounds
US3169507A (en) * 1961-06-14 1965-02-16 Northern Ind Inc Elastic wave generator
US5367139A (en) * 1989-10-23 1994-11-22 International Business Machines Corporation Methods and apparatus for contamination control in plasma processing
JP2820599B2 (ja) * 1993-08-31 1998-11-05 株式会社伸興 除塵装置
JP3405439B2 (ja) * 1996-11-05 2003-05-12 株式会社荏原製作所 固体表面の清浄化方法
JPH11335869A (ja) 1998-05-20 1999-12-07 Seiko Epson Corp 表面処理方法及び装置
JP2000040689A (ja) 1998-07-23 2000-02-08 Hitachi Chem Co Ltd プラズマエッチング用電極板
US6383301B1 (en) * 1998-08-04 2002-05-07 E. I. Du Pont De Nemours And Company Treatment of deagglomerated particles with plasma-activated species
US6231933B1 (en) * 1999-03-18 2001-05-15 Primaxx, Inc. Method and apparatus for metal oxide chemical vapor deposition on a substrate surface
JP2004514054A (ja) * 2000-11-10 2004-05-13 アピト　コープ．エス．アー． シート導電材を処理するための空中プラズマ方式およびその装置
ES2294112T3 (es) * 2001-03-27 2008-04-01 Apit Corp. Sa Procedimiento para el tratamiento de superficie por plasma y dispositivo para la realizacion de dicho procedimiento.
US20020182101A1 (en) * 2001-03-27 2002-12-05 Pavel Koulik Process and device for plasma surface treatment
US7288293B2 (en) * 2001-03-27 2007-10-30 Apit Corp. S.A. Process for plasma surface treatment and device for realizing the process
DK176184B1 (da) * 2001-03-28 2006-12-11 Force Technology Fremgangsmåde og apparat til desinfektion af et emne ved en overfladebehandling
US6554969B1 (en) * 2001-07-11 2003-04-29 Advanced Micro Devices, Inc. Acoustically enhanced deposition processes, and systems for performing same
TW507858U (en) * 2001-07-23 2002-10-21 Lin Chau Tang Energy saving lighting device with high illumination
US7001631B2 (en) * 2002-07-30 2006-02-21 Steris Inc. Low temperature sanitization of human pathogens from the surfaces of food and food packaging
EP1689908B1 (fr) * 2003-11-20 2012-09-05 Apit Corp. SA Dispositif de depot de film mince par plasma
JP2006013903A (ja) 2004-06-25 2006-01-12 Seiko Epson Corp 音響レンズ及びこれを用いた超音波スピーカ
UA95486C2 (uk) 2006-07-07 2011-08-10 Форс Текнолоджи Спосіб та система для поліпшеного застосування високоінтенсивних акустичних хвиль
US20080220133A1 (en) * 2007-03-05 2008-09-11 Gary Bruce Carman Food sanitation system

Also Published As

Publication number Publication date
DK2153705T3 (en) 2018-03-19
DK2153704T3 (en) 2018-04-23
WO2008138915A1 (en) 2008-11-20
EP2153704A1 (en) 2010-02-17
CN101743785B (zh) 2012-11-14
US8399795B2 (en) 2013-03-19
NO2153705T3 (pl) 2018-05-26
EP2153705B1 (en) 2017-12-27
WO2008138901A1 (en) 2008-11-20
ES2662029T3 (es) 2018-04-05
PL2153704T3 (pl) 2018-06-29
US20110048251A1 (en) 2011-03-03
ES2659714T3 (es) 2018-03-19
US20100304146A1 (en) 2010-12-02
EP2153705A1 (en) 2010-02-17
NO2153704T3 (pl) 2018-07-14
CN101731025B (zh) 2012-12-12
EP2153704B1 (en) 2018-02-14
CN101743785A (zh) 2010-06-16
CN101731025A (zh) 2010-06-09
US20180122622A1 (en) 2018-05-03

Similar Documents

Publication Publication Date Title
PL2153705T3 (pl) Ulepszenie reakcji w fazie gazowej w plazmie przy użyciu ultradźwiękowych fal akustycznych o wysokiej intensywności i wysokiej mocy
IL196445A0 (en) Wave energy converter
PT2094966T (pt) Conversor de energia das ondas
ZA200806769B (en) Wave power
IL192828A0 (en) Wave power
IL210601A0 (en) High power ultrasound transducer
ZA201005758B (en) A floatable wave energy converter and a method for improving the efficiency of a floatable wave energy converter
EP2041428A4 (en) HOMOLOGICAL APPARATUS AND ITS USE AS A RESOURCE ENERGY GENERATOR
IL189427A0 (en) Wave energy conversion
EG25194A (en) Wave power
EP1831542A4 (en) HOMELOMETER ENERGY DEVICE
GB0620039D0 (en) Wind and wave power generation
GB0620038D0 (en) Wave and wind power generation
GB2439872B (en) Wave energy accumulator
GB0906912D0 (en) Wave energy converter
ZA200902559B (en) Wave energy converter
ZA200610269B (en) Wave energy converter
GB0820021D0 (en) Wave power energy apparatus
ZA200708726B (en) Wave energy apparatus
GB2411928B (en) Wave energy device
GB0721623D0 (en) Wave energy apparatus
GB0720505D0 (en) Wave and tidal currot powered generator
GB0410779D0 (en) Wave power free energy
GB0501873D0 (en) Wave energy converter
GB0621596D0 (en) Wave energy aparatus