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PL2016209T3 - Sposób wytwarzania objętościowego kryształu III-N i swobodnego podłoża III-N oraz objętościowy kryształ III-N i swobodne podłoże III-N - Google Patents

Sposób wytwarzania objętościowego kryształu III-N i swobodnego podłoża III-N oraz objętościowy kryształ III-N i swobodne podłoże III-N

Info

Publication number
PL2016209T3
PL2016209T3 PL07724886T PL07724886T PL2016209T3 PL 2016209 T3 PL2016209 T3 PL 2016209T3 PL 07724886 T PL07724886 T PL 07724886T PL 07724886 T PL07724886 T PL 07724886T PL 2016209 T3 PL2016209 T3 PL 2016209T3
Authority
PL
Poland
Prior art keywords
iii
substrate
free
standing
bulk crystal
Prior art date
Application number
PL07724886T
Other languages
English (en)
Inventor
Gunnar Leibiger
Frank Habel
Stefan Eichler
Original Assignee
Freiberger Compound Mat Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freiberger Compound Mat Gmbh filed Critical Freiberger Compound Mat Gmbh
Publication of PL2016209T3 publication Critical patent/PL2016209T3/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
PL07724886T 2006-05-08 2007-05-04 Sposób wytwarzania objętościowego kryształu III-N i swobodnego podłoża III-N oraz objętościowy kryształ III-N i swobodne podłoże III-N PL2016209T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US79831406P 2006-05-08 2006-05-08
EP07724886A EP2016209B1 (en) 2006-05-08 2007-05-04 Process for producing a iii-n bulk crystal and a free-standing iii -n substrate, and iii -n bulk crystal and free-standing iii-n substrate
PCT/EP2007/003961 WO2007128522A2 (en) 2006-05-08 2007-05-04 Process for producing a iii-n bulk crystal and a free-standing iii -n substrate, and iii -n bulk crystal and free-standing ih-n substrate

Publications (1)

Publication Number Publication Date
PL2016209T3 true PL2016209T3 (pl) 2011-06-30

Family

ID=38198100

Family Applications (1)

Application Number Title Priority Date Filing Date
PL07724886T PL2016209T3 (pl) 2006-05-08 2007-05-04 Sposób wytwarzania objętościowego kryształu III-N i swobodnego podłoża III-N oraz objętościowy kryształ III-N i swobodne podłoże III-N

Country Status (7)

Country Link
US (1) US8048224B2 (pl)
EP (1) EP2016209B1 (pl)
JP (1) JP5656401B2 (pl)
CN (2) CN102358955B (pl)
DE (1) DE602007011917D1 (pl)
PL (1) PL2016209T3 (pl)
WO (1) WO2007128522A2 (pl)

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US9909230B2 (en) * 2006-04-07 2018-03-06 Sixpoint Materials, Inc. Seed selection and growth methods for reduced-crack group III nitride bulk crystals
US20100242835A1 (en) * 2006-06-09 2010-09-30 S.O.I.T.E.C. Silicon On Insulator Technologies High volume delivery system for gallium trichloride
US8778078B2 (en) * 2006-08-09 2014-07-15 Freiberger Compound Materials Gmbh Process for the manufacture of a doped III-N bulk crystal and a free-standing III-N substrate, and doped III-N bulk crystal and free-standing III-N substrate as such
US20090223441A1 (en) * 2006-11-22 2009-09-10 Chantal Arena High volume delivery system for gallium trichloride
US9481944B2 (en) 2006-11-22 2016-11-01 Soitec Gas injectors including a funnel- or wedge-shaped channel for chemical vapor deposition (CVD) systems and CVD systems with the same
EP2066496B1 (en) 2006-11-22 2013-04-10 Soitec Equipment for high volume manufacture of group iii-v semiconductor materials
US9481943B2 (en) 2006-11-22 2016-11-01 Soitec Gallium trichloride injection scheme
WO2008064077A2 (en) 2006-11-22 2008-05-29 S.O.I.Tec Silicon On Insulator Technologies Methods for high volume manufacture of group iii-v semiconductor materials
US8197597B2 (en) 2006-11-22 2012-06-12 Soitec Gallium trichloride injection scheme
US8545628B2 (en) * 2006-11-22 2013-10-01 Soitec Temperature-controlled purge gate valve for chemical vapor deposition chamber
WO2008101626A1 (de) * 2007-02-23 2008-08-28 Freiberger Compound Materials Gmbh Verfahren zur herstellung von (al, ga)inn-kristallen
JP5018423B2 (ja) * 2007-11-20 2012-09-05 住友電気工業株式会社 Ｉｉｉ族窒化物半導体結晶基板および半導体デバイス
JP5045388B2 (ja) * 2007-11-20 2012-10-10 住友電気工業株式会社 Ｉｉｉ族窒化物半導体結晶の成長方法およびｉｉｉ族窒化物半導体結晶基板の製造方法
JP2009126723A (ja) * 2007-11-20 2009-06-11 Sumitomo Electric Ind Ltd Ｉｉｉ族窒化物半導体結晶の成長方法、ｉｉｉ族窒化物半導体結晶基板の製造方法およびｉｉｉ族窒化物半導体結晶基板
JP5251893B2 (ja) * 2010-01-21 2013-07-31 日立電線株式会社 導電性ｉｉｉ族窒化物結晶の製造方法及び導電性ｉｉｉ族窒化物基板の製造方法
JP2011213557A (ja) * 2010-04-01 2011-10-27 Hitachi Cable Ltd 導電性ｉｉｉ族窒化物単結晶基板の製造方法
US20130000552A1 (en) * 2011-06-28 2013-01-03 Nitride Solutions Inc. Device and method for producing bulk single crystals
KR20160054514A (ko) 2013-09-04 2016-05-16 니트라이드 솔루션즈 인크. 벌크 확산 결정 성장 방법
WO2016118862A1 (en) * 2015-01-22 2016-07-28 Sixpoint Materials, Inc. Seed selection and growth methods for reduced-crack group iii nitride bulk crystals
CN107740183A (zh) * 2017-10-12 2018-02-27 北京大学 一种适用于AlN单晶生长的高温洁净腔室系统及其方法
JPWO2019167337A1 (ja) * 2018-03-01 2021-02-12 住友電気工業株式会社 炭化珪素基板
US12046471B1 (en) * 2018-06-06 2024-07-23 United States Of America As Represented By The Secretary Of The Air Force Optimized thick heteroepitaxial growth of semiconductors with in-situ substrate pretreatment
WO2023214590A1 (ja) * 2022-05-06 2023-11-09 株式会社福田結晶技術研究所 高品質・低コストＧａＮ自立基板の製造方法
WO2024075328A1 (ja) * 2022-10-06 2024-04-11 日本碍子株式会社 Ｉｉｉ族元素窒化物半導体基板

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EP1471168B2 (en) * 2003-04-24 2011-08-10 Norstel AB Device and method for producing single crystals by vapour deposition
JP4513326B2 (ja) * 2004-01-14 2010-07-28 日立電線株式会社 窒化物半導体結晶の製造方法及び窒化物半導体基板の製造方法
JP3888374B2 (ja) * 2004-03-17 2007-02-28 住友電気工業株式会社 ＧａＮ単結晶基板の製造方法

Also Published As

Publication number Publication date
CN101443488B (zh) 2013-03-27
WO2007128522A2 (en) 2007-11-15
US20070257334A1 (en) 2007-11-08
JP5656401B2 (ja) 2015-01-21
EP2016209A2 (en) 2009-01-21
US8048224B2 (en) 2011-11-01
JP2009536139A (ja) 2009-10-08
DE602007011917D1 (de) 2011-02-24
CN101443488A (zh) 2009-05-27
EP2016209B1 (en) 2011-01-12
WO2007128522A3 (en) 2008-01-10
CN102358955A (zh) 2012-02-22
CN102358955B (zh) 2014-06-25

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