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LV13383B - Method and device for vacuum vaporization metals or alloys - Google Patents

Method and device for vacuum vaporization metals or alloys Download PDF

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Publication number
LV13383B
LV13383B LVP-04-63A LV040063A LV13383B LV 13383 B LV13383 B LV 13383B LV 040063 A LV040063 A LV 040063A LV 13383 B LV13383 B LV 13383B
Authority
LV
Latvia
Prior art keywords
mhd
melt
evaporator
evaporation
liquid
Prior art date
Application number
LVP-04-63A
Other languages
English (en)
Inventor
Grigorijs Pipkevics
Edgars Jadins
Roberts Zeila
Original Assignee
Sidrabe As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidrabe As filed Critical Sidrabe As
Priority to LVP-04-63A priority Critical patent/LV13383B/lv
Priority to DE112005001190.9T priority patent/DE112005001190B4/de
Priority to JP2007514934A priority patent/JP2008500454A/ja
Priority to CNA2005800146727A priority patent/CN1950541A/zh
Priority to PCT/LV2005/000005 priority patent/WO2005116290A1/en
Publication of LV13383B publication Critical patent/LV13383B/lv

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

LV 13383
CnOCOB M yCTPOHCTBO ATLH HAHECEHUH ΠΟΚΡΜΤΗΜ B ΒΑΚΥΥΜΕ METOAOM HCriAPEHRH METAJIJIOB H CllJlABOB H3o6peTeHHe othochtch k TexHHKe HaHeceHHH ποκρμτηη b BaKyyMe, npeHMymecTBeHHo zm» HaHeceHHH ποκρωτΗΗ Ha pyjioHHbie nozmoacKH mctoziom TepMHnecKoro HcnapeHHH MeTajmoB h cnjiaeoB b npoMbmuieHHOM o6opyzioBaHHH HenpeptiBHoro hjih nojiyHenpepwBHoro neHCTBHH.
Cnoco6bi h ycTpoftcTBa HcnapeHHa MaTepnajioe aicTHBHO HccneziyioTCfl zum HaHeceHHH βητηκορρο3ηοηηηχ ποκρΒίτΗΗ b MeTaīuiyprHH, zma HaHeceHHS arrHBHbnt CJIOeB B npOH3BOaCTBe XHMHHeCKHX HCTOHHHKOB TOKa, HJIH HaHeceHHH pa3JIHHHbIX φ^ΚΙΙΗΟHajIbHbIX ĪIOKpblTHH B 3JieKTpOHHKe H HpyTHX o6jiaCTHX TeXHHKH. ripeHMymecTBeHHO zum 3thx uejiefi Hcnojib3yK>Tc« Meranjibi hjih hx cnjiaBbi, Taicne KaK IIHHK, MarHHH, KajIMHH, JIHTHH, HHZUIH, CnJiaB HHHK-MaTHHft. B npoMbiiujieHHbix npoueccax xpe6yeTcx Hcnapemie b HenpepbiBHOM peacHMe 3HaHHTeJibHoro KOJiHHecTBa 3thx MerajuiOB, H3MepaeMoro jiecsTKaMH, a HHorzia h cothhmh khjiorpaMMOb . Ποϋο0Ηί>ιε KOJiHHecTBa HcnapxeMbix MaTepHanoB BecbMa cjiohcho nozmepMCHBaīb npn TeMnepaType HcnapeHHH (KaK npaBHJio, 3TO TeMnepaTypbi He HHJKe 500 °C) BHyrpH BaKyyMHOH KaMepbi. īlo3TOMy B03HHKaeT npoSneMa HenpepbiBHoS nozianH HcnapaeMoro MaTepnazia BHvrpb KaMepbi 6e3 HapymeHHH BaicyyMa b TeneHHe zuiHTejibHoro BpeMeHH. ΙΠπροκο H3BecTHbie cnocoObi nozianH ncnapaeMoro Marepnajia b BHzie cjiHTKa, npOBOJioKH. rpaHyn hjih nopoinKa MajionpHroziHbi zum peineHHH TaKOH 3aziaHH. Acjio b tom, hto npn nocTyiuieHHH BemecTBa b BHZie nopouiKa hjih rpaHyji HenocpeziCTBeHHO b HcnapnTejib πζιετ 6biCTpbift HarpeB MaTepnana zio TeMnepaTyp HcnapeHHH, conpoBoiKziaeMbiH BmejieHHeM coziep5KaiiiHXCH Ha noBepxHOCTH h bhjtph nacTHij hjih rpaHyji azicop6HpoBaHHbix h pacTBopeHHbix ra30B. 3to OTpniiaTejibHo cKa3biBaeTCH Ha KanecTee ποκρωτΗΗ, ocoSeHHO TaKHX aKTHBHbix MeTajuioe, KaK jihthh. rioziana Bemecroa b BHje npoBojioKH HJiH cjiHTKa, χοτη h b MeHbiueH cTeneHH, ho TaKžKe conpoBO'/KziaeTCH BbuejieHHeM ra30B. KpoMe τογο, npouecc HaHeceHHH noKpbmm HeH36excHo ziojiHceH npepbiBaTbCH zum nonojiHeHHH 3anaca προΒοποκκ hjih cjiHTKa. B 3HaHHTejibHoft CTeneHH jiHineHbi )nca3aHHbix Bbiine HeziocTaTKOB cnoco6bi noziaiH BemecTBa b pacnjiaBJieHHOM coctohhhh b HcnapHTejib. HanGojiee nojmo npeHMymecTBa ποζιπητκη HcnapHTejifl iKHziKHM MerajmoM peajiH3yiOTCH npn HcnapeHHH MeTajuioe c HH3KOH TOHKOH nJiaBJieHHH, ΤΒΚΗΧ, KaK JIHTHH, HHZJHH, IIHHK, K3ZIMHH H, OTHaCTH, MarHHH. H3BecTHa 3ajiBKa Γ. ΓOHHapoea JVk 93026154, 27.12.1996r., Pocchh: «ΥοτροποτΒΟ zum noziaHH MeTajuia b HcnapHTejib». AaHHoe ycTpOHCTBo coziepjKHT pa3MemeHHyio 3a npeziejiaMH BaKyyMHOH KaMepbi nenb zum njiaBJieHHH MeTazuīa, ycTaHOBJTeHHbiH b BaKyyMHOH KaMepe HcnapHTejib h coeziHHmoiiiHH 06a ooteKTa τρνόοπροΒοζι. PacnjiaBJieHHbiH b THrjie MeTajui HaxoziHTCJi nozi aTMoeiļjepHbiM ziaBJieHHeM. Floziana pacnjTaBa MeTajuia b HcnapHTejib ocvmecTBzmeTCfl 3a cneT nepenaja aaBJieHHH Mexcziy BaicyyMHOH Kavepoii h OKpvncaiouieH ΒΤΜοαφερυΡί.
YpoBeHb Meraaaa b HcnapHTejie onpenezmeTCH oanaHCOM. Bo-nepBbix. cvmmm 3ΤΜθθφερΗθΓθ ziaBjieHHJi h ziaBjieHHii cTOJi6a Meranna b ruiaBHJībHOM THTJie, βο-βτορμχ, ZiaBJieHHH CTOJi6a MeTazuīa b nonatomeM Tpy6onpoBozie h HcnapHTene. 2
Ee3 BOcnojineHHH 3anaca BeinccTBa b njiaBHJībHOM Tnrjie npH paGūTC HcnapHTejiH yMeHbuiaeTC5i ypoeeHb pacnjiaBa KaK b njiaBHJībHOM THrae, TaK η b caMOM ncnapHTejie. B H3BecTHOM ycTpoHCTBe 3to npHBo^HT κ naaeHHio npon3BOiļHTejibHOCTH HcnapHTe/iH 3a cneT Toro, hto nacTb reHepHpyeMoro HcnapHTejieM napa KOHneHCHpyeTCH Ha cTeHKax thtjih HcnapHTejia h HenocpejjcTBeHHO Ha noAnoxcKy He nocTynaeT. CjiejtOBaTejibHO, no Mepe pacxo,aa MeTaruia h H3MeHeHHH ypoBHH pacnnaBa b ncnapHTene, CKopocTb HcnapeHHH 6yaeT cHHncaTbCH, a TOJimHHa ποκρΗΤΗΗ Ha pa3JiHHHbix ynacTKax noanoHCKH, HanpHMep, pyjiOHa nneHKH hjih Φοιιβγη, 6yaeT pa3JiHHHOH no ee zuiHHe. Χοτη ΕΒτορ H3o6peTeHHH ynoMHHaeT cxa6HJiH3aTop ypoBHH pacnjiaBa b ncnapHTejie, bo3mo>khocth TaKoro CTa6HJiH3aTopa npH paccMaipHBaeMOM MeTojie noganu pacnjiaBa npejiCTaBJunoTca BecbMa orpaHHHeHHbiMH.
Cneflyex oco6o no/iHepKHVTb, hto cHCTeMbi πολπητκη, nocTpoeHHbie Ha jteftcTBHH aτMocφepHOΓo naBJieHHH, cnjibHo orpaHHHeHbi njiOTHOcTbio Hcnojib3yeMbix pacnjiaeoB. Tax, misi nonann UHHKa, hhhhh, KajiMHH nepenaa bbicot Mexcjiy njiaBHJībHbiM TnrjieM h HcnapHTejieM nonnceH 6biTb He MeHee 2.0....2.5 ΜβτροΒ, λιτή nojtaHH MarHHH - 6 MerpoB, a, HanpHMep, jihthh - 19 Μέτρο b (!).
KpoMe τογο, κοητβκτ moGoro MeTajuia c 3ΤΜθοφεροΗ HencejiaTejieH no npHHHHe ero OKHCJieHHH H HaKanJIHBaHHH UIJiaKOB, a JļJIH JIHTHH - B ΠρΗΗΗΗΠβ He/JOnyCTHM ΠΟ ΠρΗΗΗΗβ ero ΜΓΗΟΒεΗΗΟΓΟ Β03Γ0ρΗΗΗΗ. HHoe pemeHHe npoSjieMbi noganu jkhhkhx MeTajuiOB ocHOBaHO Ha ηοοιιοήκηηη KOHTaKTa pacnjiaBa b njiaBHJībHOM rarne c ΗΤΜΟοφβρΗΜΜ B03,nyxoM 3a cneT repMeTH3aiiHH THrjiH h, HanpHMep, ero BaicyyMHOH οτκβηκη. 3to no3BOJineT coKpaTHTb raGapnTbi CHCTeMbi πολπητκη, yjTyHLUHTL· HHCTOTy pacnjiaea b njiaBHJībHOM THrjie. B nacTHOCTH, H3BecTHO ycTpoHCTBo, onncaHHoe b noiciajie 3. fljiHHa “Deposition of Coatings or Free Foils of Sublimating Metals”, SVC 40th annual Technical Conference Proceedings, 1997, CTp. 69. B naHHOM ycTpoftcTBe pacnjiae MarHHH H3 nenn nnaBJieHHH nojjaiOT b ncnapHTejib nyreM nepeKpbiTHH BaKvvMHoft OTKamcn npocxpaHCTBa mņ. pacmiaBOM b nnaBHjībHOH nenn h ynpaBJiHeMoro HanycKa HHepTHoro ra3a b yKa3aHHoe npocTpaHCTBO. Οπβιτ 3KcnjiyaTaiiHH naHHoro ycTpoficTBa b opraHH3auHH - 3aHBHTejie λβηηοη 3Βηβκη noKa3aji, hto πρκ oTHocHTejibHo He6onbuiHx H3MeHeHHHx TeMnepaTypsi MeTaiuionpoBOiia h HcnapHTenbHoro 3JieMem:a MeHHeTCH CMaHHBaeMOCTb cxeHOK MerajuionpoBojta h yKa3aHHoro one.MeHTa pacnnaBOM. IIostomv Heo6xonHMO pervnnpoBaTb h nozwep>KHBaTb aaejieHHe HHepTHoro ra3a b nnaBHnbHoii nenn c bmcokoh τοηηοοπ>ιο, πτοδω hckjhohhtb nepenojiHeHHe HcnapHTejiH. 3to Tpe6yeT co3aaHHH h npHMeHeHHH aocTaTOhho οιοκημχ cHCTeM perynnpoBaHHH, hto HBJiHeTCH H3BecTHbiM HeaocTaTKOM. JIpyrHe pemeHHH ocHOBaHbi Ha nojmepncaHHH ypoBHH pacnnaea b HcnapHTejie 3a cner nozmepjKaHHH ypoBHH pacnjiaBa b CBH3aHHOM c hhm THrne njraBjieHHH c πομοιηβκ) MexaHHHecKHx cpeacTB.
TaK, H3BecTeH cnocoS nojiann pacnnaBa UHHKa no ηποηοκοη 3anBKe 62-267470 3a cneT noateMa nenn c pacnnaBOM MeTanna, KOHTpoJiHpyeMoro λ&τηηκομ ypoBHH MeTajuiaB ncnapHTejie. KaK npaBHJio, nenb ,αοη'/KHa HMeTb Gojibuion 3anac Meīajuia, nocTaTOHHbiH ΛΓΙΗ BbinOJTHeHHH JUIHTeJIbHbIX UHKJIOB HCHapeHHH, HanpHMep, B TeneHHe OJJHOH H.3H
HecKOHbKHx pa6oHHx cmch. B cbokj onepejjb, 6ojibmaH Macca nenn co3aaeT aocTaTOHHO cepbe3Hbie npooneMbi λιη npHBOiia nozrbeMa nenn h pervjiHpoBaHHH h nozmepjKaHHH vpoBHH pacnnaBa b HcnapuTene.
TexHHHecKOe peuieHHe, ocHOBaHHoe na nozmepHcaHHH ypoBH« pacnnaBa b HcnapnTene 3a chct MexaHHHecKHx cpencTB. onyonHKOBaHnoe b anoncKon Bbino>KeHHOH 3aHBKe 09-053173A. Fukui Yasushi et al, «CnocoG cTaSHnbHOH nojjaHH ncnapneMoro MaTepna.ria», πρηηητο b KanecTBe npoTOTHna. 3 LV 13383 ΥςτροΗΟΤΒΟ, pacKpbiToe b naHHOH 3aaBKe, conepncHT nnaBHnbHbift THrejib, MeTajmonpoBoa, ycTaHOBneHHbift b BaicyyMHOH KaMepe HcnapnTenb, cpencTBa H3MepeHHn ypoBH« paciuiaBa b HcnapHTejie, norpy>KaeMoe b pacnnae nnaBHnbHoro THrna τεηο, cpe^cTBa ynpaBneHHa rny6HHOH norpjoKeHHa yKa3aHHoro Tena. Πο Mepe pacxona BemecTBa noKpbiran, no cnmajiaM yKa3aHHbix cpencTB H3MepeHHa, eeneTca norpyaceHHe Tejia b pacnjiaB, 3a cneT nero ypoBeHb pacnnaea b nnaBnnbHOM rarne η, οοοτβοτοτβοηηο, b HcnapHTene, οβη3βηηομ c hhm Tpy6onpoBonoM, ocraerca CTaOHnbHbiM.
PaccMarpHBaeMoe TexHHnecKoe pemeHHe HMeeT cymecTBeHHbie HenocTaTKH.
BnojiHe oneBHAHO, hto pecypc pa6oxbi naHHOH CHCTeMbi orpaHHHHBaeTca o&beMOM norpyxcaeMoro b pacnnae Tena. riocjie nojraoro norpy>KeHHsi Teņa b pacnnae Tpe6yerca npeKpaTHTb npopecc, nonHara Teno b HcxonHoe nonoaceHHe, oxnannTb nnaBHnbHbift rarenb c ocTaTKaMH MeTanna, HanycTHTb B03nyx h norpy3HTb rarenb hoboh nopuHeft MeTanna. ,flpyroH HenocTaTOK Kacaerca MecTa pa3MeineHHa λ^τηηκοβ ypoBHa pacnnaea b HcnapHTene. KoHTponb ypoBHa pacnnaea HenocpencTBeHHO b HcnapHTene, pa6onan TeMnepanypa κοτοροτο μηογο Bbime TeMnepaTypw nnaBneHHa caMoro MeTanna, a npocTpaHCTBO BOKpyr Hero 3anonHeHO napaMH MeTanna, Tpe6yeT cneimanbHOH 3amHTbi naTHHKOB, Hcnonb30BaHHn MaTepnanoB, ctohkhx k nammiM ycnoBH«M.
CnenyiomHŽ HenocTaTOK H3BecTHoro pememia o6ycnoBneH τεΜ, hto nnaBneHHe h nonnnTKa HcnapHTena Benjnrca H3 ernraoro cocyna - nnaBHnbHoro rarna. 3to 03HanaeT, hto πρκ MHoroKpaTHbix 3arpy3Kax nnaBHnbHoro rarna cnHTKaMH HcnapaeMoro MeTanna b HeM MoryT HaKannHBaTbca npHMecH, HanpHMep, OKcnnbi, HHipHntbi h npyrne coenHHeHHa. YKa3aHHbie npHMecH BMecTe c pacnnaBOM Moryr nocTynaTb b HcnapHTenb h nanee Ha nonno*Ky, hto CHHacaeT KaneciBO noKpbiraa. Iļenbīo HacToamero Η3θ6ρετβΗΗΗ HBJineTca ycipaHeHHe OTMeHeHHbix Bbime HenocTaTKOB h oOecneneHHe HaHeceHHa ποκρωτΗΗ b BaxyyMe c ποοτοληηοη npoH3Bo/iHTenbHocTbio 3a cneT nocTOHHCTBa ypoBHa pacnnaea b HcnapHTene He3aeHCHMO ot KOHHHecTBa HcnapaeMoro BemecTBa. Jļsm nocranceHHa yKa3aHHoft lienu Meacny nnaBHnbHbiM rarneM h ncnapirreneM pa3MemaeTca MarHHTorHnponnHaMHHecKHH (MT/ļ) KOHTyp, BKmoHaiouiHH, no Kpaimeii Mepe, οληη pe3epeyap, cncTeMy Tpy6onpoBonoB h Mrjļ Hacoc.
IlpennaraeMoe TexHHHecKoe pemeHHe no3BonaeT ycTpaHHTb oTMeneHHbie Bbime HenocTaTKH npoTOTHna.
Tax, nocne 3anonHeHHa KOHTypa h ero pe3epeyapa pacnnaBOM MeTanna H3 nnaBHnbHoro THrna HanHHaeTca ηκκη HaHeceHHa noKpbiraa. TeM BpeMeHeM, He npepbraaa nponecc HaHeceHHa noKpbiraa, nnaBHnbHbifi rarenb mohcho oxnanHTb, BCKpbiTb h 3anonHHTb cnenyioineH πορηκεκ MeTanna. Pa3yMeerca, npenBapHTenbHo ΗεοβχοηκΜΟ oxnaOHTb HHace tohkh nnaBneHHa MeTanna ynacTOK MerannonpoBona Mencny nnaBHnbHbiM rarneM h KOHTypoM.
KoHTponb ypoBHa pacnnaBa b HcnapHTene eeneTca no ypoBHio pacnnaea b KOHType, rne TeMnepaTypa pacnnaea TonbKo Ha 30...50 C Bbime tohkh nnaBneHHa MeTanna, a napbi MeTanna npaKTHHecKH OTcyTCTByiOT, τεΜ caMbiM o6ecneHHBaeTca HaneacHocTb paSoTbi naTHHKOB ypoBHa pacnnaea h Bceft cHCTeMbi b nenoM.
Hcnonb30BaHHe nnaBHnbHoro THrna no3BonaeT, KaK h b npyrnx H3Becrabix CHCTeMax, npoBonHTb nacTHHHoe o6e3raacHBaHHe η pa<ļ)HHHpoBaHHe HcnapaeMoro MeTanna. BMecTe c TeM, KaK oTMenanocb Bbime, npn MHOroicpaTHOM nononHeHHH nnaBHnbHoro THrna HcnapaeMbiM MeTannoM bo3moxcho HaKonneHHe HeacenaTenbHbix npHMeceH. 4 0,zmaKO b npeaJiaraeMOM pemeHHH pa3AejieHHe onepaijHH nJiaBJieHHa h HacTHHHoro pa(J)HHHpoBaHHH HcnapaeMoro MeTajuia c nojmepacaHHeM nocToaHHoro ypoBHa pacnjiaBa b τηγιιηχ HcnapHTejia no3BOJiaeT oahh κοκτγρ nocToaHHoro Hanopa o6beAHHHTb c HeCKOJIbKHMH njiaBHJĪbHblMH ΤΗΠΙΗΜΗ, KOTOpbie MOMCHO nepHOAHHeCKH BbIBOflHTb H3 3KcnjiyaTaiļHH ajih nojiHoii ohhctkh ot uuiaKOB h HaKonjieHHbix npHMeceS. Πρπ 3TOM pa6oTa CHCTeMbi HcnapeHHa He npeKpamaerca. npeaaaraeMoe pemeHHe noacHaeTca cxeMaTHHecKH Ha Φηγ.1.
YcTpo0cTBO coAepiKHT njraBHJībHbiH rarejib 1 c pacnjiaBOM HcnapaeMoro MaTepnana (hchakhm MeTamiOM) 2, oahh hjih HecKOJibKO rarnefi 3 HcnapHTejia 4 b BaKyyMHoft KaMepe 5, HarpeBaeMbifi MeTajuionpoBOA 6, coenHHaioinHH yKa3aHHbiH iuiaBHjībHbiž rarejib c yKa3aHHHMH τηγμιημη HcnapeHHa nepe3 ΜΓβ KOHTyp 7 cTaTHHecicoro aaBJieHHa pacnjiaBa. Komyp 7 CHa6aceH MĪTI HacocoM 8 h BKjnonaeT npHMMKaiomHe κ ΜΓ,Π, Hacocy ynacTKH MeTatuionpoBoaa 6, MerajiJionpoBOAbi 9, 10 h 11, pacinHpHTejib 12, ycTaHOBJieHHbiii b yKa3aHHOM MeraJuionpoBO^e 9, oSorpeBaeMbm pe3epByap 13, coejmHeHHbift MeTajuionpOBOAOM 11c ynacTKOM Mērāmoπροeo^a 6 nepe# MTJļ HacocoM η meTaruionpoβολομ 10 c pacnmpHTejieM 12. IIpocTpaHCTBa Haa pacimaBOM b pacniHpHTejie h pe3epeyape coeAHHeHbi Tpy6onpoBOflOM 14 co cpe^cTBaMH BaKyyMHož OTicaHKH (He noKa3aHbi). B pacumpHTejie ycTaHOBJieHH nea 3jieinpHHecKHX AaraHica 15 ypoBHH L pacnjiaBa. ΥροΒβΗΒ pacnjiaBa L b pacuiHpHTeJie h HcnapHTejie HaxojīHTca Ha BbicoTe Ah oTHocHTejibHo ypoBHa pacnjiaBa Lo b pe3epByape ΜΓ/ļ KOHTypa, T.e. Ah npeacTaBJiaeT co6oh AeHCTBjroniHH Hanop. B KanecTBe npHMepa noAJioadconepacarejib 16 b npHBeneHHOH cxeMe npeacTaBjieH b bh ae BpamaeMoro oxjiaacaaeMoro 6apa6aHa, a ποζυιοικκοΗ 17, Ha KOTopyio HaHocaT noKpbiTHe, HBJiaeTca pyjioHHbra MaTepnaji, HanpHMep, nojiHMepHaa rniemca hjih MeTajuiHHecKaa Φοιιβγβ, χοτβ npe/piaraeMoe pemeHHe πρΗΜβΗΗΜΟ η jyia ApyrHX τηποβ nofljioaceK c apyrnM kohctpjtcthbhhm HcnojiHeHHeM ee φπια^φΐΗ h/hjih TpaHcnopTHpOBKH b npouecce HaHeceHHa noKpbiTHa.
IljiaBHJībHbiH rarejib 1 nepe3 naTpy6ox 18 coenHHeH co cpeacTBaMH BaicyyMHOH OTKanKH (He noKa3aHbi) h nepe3 naTpy6oK 19 co cpejicTBaMH nonām HHepnioro ra3a, HanpHMep, aproHa (He noKa3aHw), h cHaēaceH αητηηκομ 20 ajih H3MepeHHa aaBJieHHa b npocTpaHCTBe naa pacnjiaBOM η αβτηηκομ 21 jina H3MepeHHa ypoBHa pacnjiaBa.
IlpejHiaraeMoe ycTpoHCTBo MoaceT 6βιτβ cHa6aceHO U - o6pa3HWM kojichom 22 c ynpaBjiaeMofi chctcmoh 3KCTpeHHoro oxjiaacaeHHa (He noKa3aHa) b KanecTBe aonojiHHTejibHoro cpencTBa 6e3onacHOCTH. Πρπ OTHOCHTejibHO κοροτκΗΧ UHKJiax HaHeceHHa ποκρΜΤΗΗ OTnanaeT Heo6xoAHMOCTb nepHOAHnecKoro nonojmeHHa KOHTypa craTHHecicoro naBJieHna 7 b TeneHHe HHKJia 3a cner 3arpy3KH HcnapaeMoro MeTaruia b njiaBHJībHbift rarejib 1, KaK onHcaHo Bbirne. B stom cjiyHae npemiaraeMoe ycTpoiicTBo MoaceT 6biTb ynpouieHo, KaK noKa3aHo Ha φΗΓ. 2. B BapnaHTe peajW3au,HH ycTpoHCTBa, ποκ33Βηηομ Ha Φηγ. 2, HCKjiJoneH oGorpeBaeMbifi pe3epByap 13 KOHTypa 7 cTaTHnecKoro AaBjieHHa pacnjiaBa, a njiaBHJībHbift rarejib 1 c cooxBeTCTByioiHHMH npnGopaMH ycTaHOBJieH HenocpeACTBeHHO b yK33aHH0M KOHType 7 bmccto pe3epeyapa 13. B stom cjiynae pacumpHTejib 12 coeAHHeH MexajmonpoBOAOM 10 HenocpeACTeeHHo c njiaBHJībHbiM THraeM 1, a Tpy6onpoBOA 14 coenHHaeT npocTpaHCTBa Haa pacnaaBOM b njiaBHjībHOM THrne h pacuiHpHTejie co cpeacTBaMH BaKyyMHOH οτκβηκη. 5 LV 13383 njiaBHJībHbiH THrenb 1, pe3epeyap 13 h Meraimoπροβολή 9,10 h 11 ajieKTpiraecKH HarpeBaiOTca H3BecTHbiMH MeTonaMH. KpoMe τογο, yica3aHHbie y3Jibi cHaGaceHbi KaHanaMH oxJiaacaeHHH, npenno HTHTenbHO Β03Λ>τπημμ 3MeeBHKOM. yKa3aHHbie KaHajībi Moiyr 6ηπ, H MCH^KOCTHblMH, O^HaKO OHH 6oJiee CHOHCHbl B HCIIOJIH6HHH, a B ΗεΚΟΤΟρΜΧ CJtyHaJIX KaTeropHHecKH HenpiteMjiHMbi H3 coo6paxceHHft 6e3onacHOCTH (HanpHMep, npa HcnapeHHH jihthh). npHMeHeHHe KaHanoB 0XJiaHmeHHH hto aaer bo3momchoctL· ποβμοητβ npoH3BO,zmTejibHOCTb 3a cqeT coKpameHH» MexcnHicjioBbix onepaaHH. JJjin ynpoineHH» cHCTeMbi HarpeBa h oxjraxcfleHHa Ha Φηγ. 1 h 2 He noKa3aHbi. Bo3MoacHbie BapnaHTbi HcnojiHeHHa cHCTeM HarpeBa h oxjiaameHHX πληβηλβηογο τηγλχ 1 h pe3epeyapa 13 noKa3aHbi b pa3pe3e Ha Φηγ. 3, a MeTaruionpoBonoB 9,10 η 11 - Ha φΗΓ. 4.
Ha Φηγ. 3. npencīaBJieH pa3pe3 CHCTeMH ajieicrpHHecKoro HarpeBa η βο3Λ>ππηογο oxjia>KjieHH5i njiaBHjībHoro τηπιη: 23 - creHica njiaBHjībHoro τηγγιη 1 hjih pe3epeyapa 13; 24 - pe3HCTHBHbIH HarpeBaTeJIb, 3JieKTpHHeCKH H30 JIHpO BaHHblH OT CTeHKH rarjM (hjih pe3epeyapa); 25 - TenaoH30JixuHa; 26 - Tpy6onpoBon B03nyumoro oxjiaxcneHHa.
Ha φΗΓ. 4. npeflCTaBJieH pa3pe3 CHcreMbi 3JieKTpHHecicoro HarpeBa η βο3Λ>τηηογο oxjiaxcn;eHHa MeTaJUioπροβολοb 9, 10 η 11: 1 - ηοιλκηη MeTajm; 27 - CTeHKa MeTaiuionpoBoaa; 28 - HarpeBaTejib; 29 - TenjioH30JiauHa; 30 - Tpy6onpoBon βο3λ>τπηογο oxjiaayieHHH; 31 - 3JieMeHT coejmHeHH» B03nynmoro Tpy6onpoBona c MeTaJiJioπροβολομ (HanpHMep, CBapHOH uiob).
YcTpoHCTBO pa6oTaer cnenyioinHM o6pa30M.
Pe3epeyap 13 MI7J KOHTypa 7 3anojiH»eTca χμλκημ MeTajuioM 2 ;πο6βιμ H3BecTHbiM cnocoGoM. B nacTHOCTH, Ha φΗΓ.1 noKa3aHO 3anojraeHHe KOHTypa MeronoM BbiTecHeHHa pacnJiaBa H3 njiaBHjībHoro τηπηι 1 3a cneT nepenana naBjieHHii, B03HHKaioiHero πρκ HanycKe nHepraoro ra3a, HanpHMep, aproHa, Hepe3 naipy6oK 19 b npocTpaHCTBO Han pacnnaBOM. Πρκ nycxe ΜΓ/ļ Hacoca HaHHHaer 3anojiH»TbCH MeTaruionpoBon 6 h pacmnpHTejib 12. IIocKOjn>Ky nojioaceHHe MeTanjionpoBoaa h paCIHHpHTeJIH φΗΚΟΗρΟΒΗΗΟ, TO CTeneHb HX 3anOJIHeHHa MeTaiIJIOM neJIHKOM H ΠΟΛΗΟΟΤΜΟ onpenejweTca HanopoM Ah, pa3BHBaeMbiM ΜΓ/ļ HacocoM. Πρκ HenocTaTOHHOM Hanope Tpy6onpoBOA Μοικετ 6biTb 3anojiHeH ιιηιπβ Ha nacTb CBoeft bmcotu. Πρκ stom KaKaa-JiH6o HHpKyjixiiHa pacnjiaBa OTcyTCTByeT. C yBeJiHneHHeM Hanopa ΜΓ/1 Hacoca pacnjiaB nocTeneHHO 3anoJin»eT 3HanHTeJibHyio nacTt pacumpHTeJi» 12. Πρκ nocTH»ceHHH pacnjiaeoM ypOBHs L HanHHaeTc» ero nepeTeKaHHe no MeTanjionpoBony 10 b pe3epeyap 13. TaKHM o6pa30M HacTynaeT UHpKyji»nHH pacnjiaBa b Komype 7 ποοτοχηηογο Hanopa. B coejjHHeHHOM c MeTajijionpoBonoM 6 pacumpHTejie 12 cKopocTb TeneHHH pacnjiaBa pe3KO CHHacaeTCH, npnGnnjKaacb κ xapaKTepHofi jļhh jiaMHHapHoro pejKHMa TeHeHHH.
Hto6w b cjiynae η36μτοηηογο Hanopa He npoHcxonnjio nepenoJiHeHHii pacuiHpHTejiB h ecero KOHTypa 7, b pacniHpHTejie HMeioTCH λβτηηκη 15 bmcotu cTOJiGa pacnjiaBa b KOHType, BbmaKnnne cHrHan o pa3BHBaeMon ΜΓ# HacocoM BejiHHHHe Hanopa. HaiiHHHe yica3aHHbix naTHHKOB HenocpencTBeHHo b KOHType no3BOJiaeT c πομοιηβιο H3BecTHbix cpencTB peryjiHpoBaHHH oGecnenHTb nocTOHHCTBO Hanopa, pa3BHBaeMoro ΜΓΛ HacocoM, a, cjienoBarejibHO, h ypoBHH pacnnaea b KOHxype. Ecjih Teneps pa3orpeTb yHacTOK MeTaiuionpoBona 6, coe/mHaioinHH KOHTyp c τηγλλμη 3 HcnapHTenu 4 no cooTBeTCTByioineft TeMnepaTypbi, to pacnjiae HaHHeT 3anojiHHTb τηπιη, npnneM, ypoBHH pacnjiaea Kate b KOHType, TaK η b HcnapHTeJie OKaxcyTCH οληηβκοβμμη, nocKOJibKy neficTBjToiiiHH Hanop ΜΓ7Ι Hacoca b MeTajuionpoBonax 6 h 9 onHHaKOB. 6 Πο onbrry oprammuHH - 3aaBHTena, Tpe6yeMoe naBneHHe F b KaHajie ΜΓ,ΙΙ, Hacoca nna o6ecneHeHH« Heo6xon;HMoro ypoBHS pacnnaea MoaceT onpenenaTbca no φορΜγηβ: F > p*gAh, rne p - iuioTHocTb pacnnaBa, g - ycKopeHne cboŠohhoto naaeHHa,
Ah - ^eHCTByK)UļHH Hanop.
Pa6oTa ynpomeHHoro eapnaHTa npe/ļnaraeMoro ycrpoHCTBa (φΗΓ. 2) OTjmnaeTca τοπβκο τεΜ, hto nocjie nnaBneHHa h HacTHHnoro o6e3raacnBaHHa HcnapaeMoro MeTajuia b njiaBHJībHOM rarjie 1 pa30rpeBafOTca MerannonpoBonbi KOHTypa CTaranecKoro naBneHHH 7, BKJnoHaerca ΜΓ# Hacoc h npoBonHTca 3anojmeHHe KOHTypa h HcnapHTena aHanorīnmo TOMy, K3K onHcaHO Bbirne.
BcjieacTBHe y6biJiH KoannecTBa Haxonaineroca b cncTeMe MeTanaa 3a cneT HcnapeHHa (φηΓ. 1 h 2) ypoBeHb pacnnaea Lo HMeeT tchachhhio κ nocToaHHOMy CHH3K6HHIO. OflHaKO ΗβΛΗΜΗβ HaTHHKOB 15 Π03Β0ΒΗβΤ KOMIĪ6HCHpOBaTb CHHHCCHHe yKa3aHHoro ypoBHa yBejiHneHHeM Hanopa ΜΓ71 Hacoca. JļaHHaa npone,nypa MoaceT 6mtb aBTOMaTH3HpOBaHHa H3BCCTHBIMH CpenCTBaMH. flonojiHHTejibHbiM npeHMymecTBOM npeAJiaraeMoro pemeHHa aBJiaerca ocoāeHHocTb caMoro MTfl Hacoca, κοτορκή MoaceT npaKTHHecKH μγηοβθηηο nepeKJHOHaTbca Ha peBepcHBHbm Hanop. JļaHHoe KanecTBO OKa3biBaeTca nojie3HbiM npn HcnapcHHH inejioHHbix MeTajuiOB, KOHTaKT pacnjiaBa κοτορπιχ c B03nyxoM onaceH. no3TOMy npn aBapHHHbix cHTyannax, o6ycnoBneHHbix B03pacTaHHeM naBneHHa b KaMepe HaHeceHHa noKpbiTHa, nocjie cooTBeTCTBjnomefi KOMMyraiļHH MTfl Hacoca, mojkho HOCTaTOHHO SbicTpo onopoacHHTb τηγπη HcnapHTejia. C Hpyroft cTopoHbi, npH pa6oTe c tcmh ace menoHHbiMH MeTajuiaMH, BecbMa onacHa pa3repMeTH3aHHa caMoft chctcmm nonaHH h nHpKynanHH pacnjiaea MeTajma. 3to npeBaTO 3a6pocoM 6ojibinoro KOJinnecTBa pacnnaBa b BaKyyMHyro KaMepy. JI,nn MHHHMH3anHH nocjiencTBHH npennaraeTca Tpy6onpoBon nonann pacnnaBa b HcnapHTenb ocHacTHTb U - o6pa3HbiM KoneHOM c chctcmoh 3KCTpeHHoro 3axonancHBaHHa. flaHHbifi aneMeirr no3BonaeT no KOManne chctcmbi 6e3onacHocTH 3aKynopHTb Tpy6onpoBon, προδκοη H3 caMoro HcnapaeMoro MeTanna. IļpHMCP. ycTpoHCTBo, cxeMaTHHecKH noKa3aHHoe Ha φΗΓ. 1, 6bino peanH30BaHO b KOHCTpyKUHH BaKyyMHon ycTaHOBKH nna HaHeceHHa nHTHeBoro ποκρΗΤΗη Ha nonHMepHyio nneHKy ΜετοηοΜ TepMHnecKoro HcnapeHHa ηΗτηη. B BaKyyMHofi KaMepe ycTaHOBKH 6bin ycTaHOBneH HcnapHTenb, cocToauļHH H3 HeTbipex cTanbHbix rarnen. THrenb nnaBneHHa ηκτκη 6bin ycTaHOBneH 3a npenenaMH BaicyyMHOH KaMepbi h nocpencTBOM MeTannonpoBonoB coenHHanca c ncnapHTeneM. Ha MeTannonpoBone coezuīHeHHa THrna nnaBneHHa c HcnapHTeneM ycTaHaBnnBanca KOHTyp nocToaHHoro Hanopa acnnKoro MeTanna, cocToauiHM H3 ΜΓ^ Hacoca, pe3epeyapa h chctcmm MeTannonpoBonoB. B cBoefi BepxHeH nacTH KOHTyp conepacan pacuiHpnTenb, b κοτορΜΗ 6binH BBeneHbi nea H3onHpoBaHHbix ot Maccbi τοηκηχ crepncHa, coenHHeHHMX c 6ηοκθΜ nnTaHHa h ynpaBneHHa ΜΓ/1 Hacoca. CTepacHH HMenH B03M0acH0CTb BepTHKanbHoro nepeMemeHHH b npenenax 10-15 mm. 7 LV 13383 ΚοΗτγρ 6hji BbinojiHeH τακΗΜ o6pa30M, hto cepe/mHa OTxonamero ot pacuiHpHTejra ropH30HTaribHoro ynacTKa MerajuionpoBona Haxo,UHjiacb Ha οληομ ypoBHe c McejiaeMbiM ypoBHeM 3anojiHeHHa rarneH HcnapHTena pacnnaBOM jihthh. B CB06H HH^cHen nacra KOHTyp 6bijī coenHHeH ynacTKOM MeTajiJionpoBo^a c THmeM nJiaBJieHH» jihthh. THrejib njiaBJieHHa jihthh h BepxHaa nacra KOHTypa 6biJiH coe^HHeHbi c JiHHHen BaicyyMHOH οτκβηκη. KpoMe τογο, rarejib njiaBJieHHa 6biji aononHHTejibHO CHaSaceH jiHHHeft HanycKa aproHa η κοητβκτηβιμ naTHHKOM ypoBHH pacnjiaBa.
Bce 3JieM6HTbI CHCTeMbI ΠΟΛΠΗΤΚΗ HCnapHTeJia HMejlH CeKIIHOHHpOBaHHbie MeKTpHHecKHe HarpeBaTejiH KocBeHHoro neflcraHa η naramcH TeMnepaTypbi οτθηοκ. Tnrejib njiaBJieHHa pa3Meinajica b cMeacHOM c BaKyyMHofi ycraHOBKOH noMemeHHH, rne nozwep3KHBajiacb oraocHTenbHaa BJiaacHocTb B03nyxa He Bbime 2%.
Cjihtkh jihthh, KaacnbīH Maccon npHMepHO 840 r, 3arpyacanHCb b nenb njiaBJieHHa npH BJiaacHOCTH B03^yxa 2%. Ηοχοληβιη o6beM hhthh cocraBHji npHMepHO 6.3 JiHTpa. Ilocjie repMeTH3auHH njiaBHJībHoro rarjia HanHHanacb ero BcucyyMHaa oTKanica. OflHOBpeMeHHO ocymecTBjiajiacb OTKamca BaicyyMHOH KaMepbi h KOHTypa Hanopa Hcnnicoro MeTajuia. Πο nocraaceHHH naBjieHHH 2 Ila b npocTpaHCTBc rarna njiaBJieHHa HaHHHajica ero pa3orpeB, κοτορΗΗ nponojiacajica no nocTHaceHHH TeMnepaTypbi 250 °C. KoHTpojib TeMnepaTypbi οτβΗκκ njiaBHJībHoro rarna no3BOJian onpenenim. momcht Hanana njiaBJieHHa jiHraa, a cnreaii naTHHKa ypOBHa - ycTaHOBHTb cTeneHb 3anojiHeHHa nenn pacnjiaBOM. Πο 3aBepmeHHH njiaBJieHHa nponojiacanacb oTKanna nenn juia ynajieHHa pacTBopeHHbix b jihthh ra30B. OnHOBpeMeHHo KOHTyp HarpeBajica Taicace no 250 °C h BKJHonajica 6jiok nHTaHHa Hacoca. Πο HCTeneHHH 3-x nacoB nepeicpbiBajiacb JiHHHa oTKaHKH njiaBHJībHoro rarjia η ηβηηηβποη HanycK b Hero aproHa nepe3 HaTeKaTenb tohkoh peryjiHpoBKH. Πο cnrHajiy naTHHKa ypoBHa jiHraa b iuiaBHjn>HOM rarjie OTMenajica momcht Hanajia nocTynjieHna JiHraa b KOHTyp. OnycKaHne naTHHKa ypoBHa Ha pacHeTHyio niy6HHy no3BOJiajio Taicace ycTaHOBHTb μομθητ, Korna 3anojiHeHHe KOHTypa jiHraeM 3aBepniHjiocb. Hanop Hacoca nocTeneHHo yBejiHHHBajica no MOMeHTa cpa6aTbiBaHHH naraHKa, ycTaHOBJieHHoro b pacumpHTejie Komypa. nocjie 3Toro OTicnonajica HarpeB njiaBHJībHoro THrjia h MeTaiiJionpoBona, coenHHaioinero ero c KOHTypoM Hanopa, h BJononanca pa3orpeB MeTajuionpOBona nonanH JiHraa b HcnapHTejib TaKace no 250 °C. Πο nocTHaceHHH 3anaHH0H TeMnepaTypbi nepe3 CMOTpoeoe ycTpoficTBo Ha BaKyyMHofl KaMepe Ha6jnonanH 3anojiHeHHe rarneH ncnapHTejia pacnnaBOM jiHTHa. nocjie pa3orpeea rarnefi c JiHraeM no TeMnepaTypbi 580 °C ηβηηηηπη uhkji HaHeceHHa jihthh Ha pyjiOH PET nneHKH tojiihhhoh 25 MHKpOH c noncJioeM “Inconel 400” tojiuihhoh 40 ΗΗΗΟΜβτροΒ. npouecc BejiH b TeneHHe 5 nacoB 6e3 nepepbiea, η3Γοτοβηβ πρκ 3τομ 300 ΜβτροΒ nponyKTa. ΠερΗοηΗπεααί Ha6jnonajiH, hto ypoeeHb JiHraa b Tnrjiax ncnapHTejia ocTaeajica HeH3MeHHbiM. Πο 3aBepmeHHH HaHeceHHa jraraa BbiKjnoHajiH HarpeB rarnen h oxjiaacnanH jihthh no 300 °C. 3aTeM nepeKjnoHajiH Hacoc Ha peeepc h cjiHBajm jihthh H3 rarnen oOparao b KOHxyp b TeneHHe onHoft MHHyrbi. Jļanee oTtononanH HarpeB MeTajuionpOBona, coenHHaiomero kohtvp c HcnapHTejieM, h nonaBajiH CHcaTbiii eo3nyx nJia oxjiaacneHna ero CTeHOK, a TaioKe nJia oxnaHcneHHH rarjieH. Πο nocra>KeHHH ypoBHa TeMnepaTypbi 50-60 °C b Ka\iepy HanycKajica cyxoft B03nyx, Bbirpyacajica pynoH c nponyKTOM, 3anpaBJiajica ηοβηη pynoH h HaHHHanca HOBblH HHKJI. 8 U - o6pa3Hoe KOJieHo Ha τργδοπροΒΟΛβ no/ianH jihthh b HcnapHTejib, κοτοροβ Bcer^a ocTaeajiocL· 3anoJiHeHHHM MeTamioM, nocjie oxjia»c,AeHHH Meran/ioπροeom nepe^ HanycKOM B03^yxa b KaMepy BbinojiHHJio pojib KJianaHa, npe^oTepaujaioinero nonaaamie B03^yxa B ropHHHH KOHTyp.
Ποαο6ηβιμ o6pa30M Ha οληοη 3arpy3Ke jihthh 6wjio BbinojiHeHO 5 hhkjiob h nojiyHeHO 1500 Μέτροb npo,ayKTa, κοτορπικ b KanecTBe aHOjmoro MaTepnana npHMeHHercH B XHMHHeCKHX HCTOHHHKaX TOKa. H3MepeHHe TOJIIIļHHbl JIHTHH ΠΟ flJIHHe BCeX pyJIOHOB noKa3ajio, hto ee pa36poc He npeBbīcnji 5%, hto xapaicrepHO ajih jno6bix nponeccoB HaHeceHHH ΠΟΙφΜΤΗΗ B BaxyyMe. IIpH 3TOM ΜΟΗΟΤΟΗΗΟΓΟ y6bIBaHHfl TOJimHHbl, o6ycjioBJieHHoro CHHaceHHeM ypoBHH pacnjiaBa β τηγπηχ 6e3 πολπητκη, He o6HapyxceHO. ΑΗΗΟΤΑΙΙ,ΚΗ npejuiaraeTCH cnoco6 h ycTpoficTBo jum HaHeceHHH noKpbiTHH b BaxyyMe ΜβτοΛΟΜ TepMHHecKoro ncnapeHHH MeTajuioe h cnjiaBOB. ripeAJiaraeMoe ycTpoficTBO (φπΓ. 1) coaepHCHT njiaBHJībHbift rarejib 1 c paciuiaBOM HcnapneMoro MaTepHaaa (jkh^khm MeTajuioM) 2, οληη hjih HecKOJibKO rameH 3 HcnapHTejiH 4 b BaKyyMHofi KaMepe 5, HarpeBaeMbiH MeTajuionpoBoa 6, coeajiHHionmH yica3aHHbiH njiaBHJībHHfi rarejib c yKa3aHHbiMH thtjihmh HcnapeHHH nepe3 MTJļ κοΗτγρ 7 CTaranecKoro aaBJieHHH pacnjiaBa. KoHiyp 7 CHaGnceH MITI HacocoM 8 h BKjnonaer npHMbiKaiomHe κ ΜΓ/ļ Hacocy ynacTKH MeTajuionpoBOna 6, HarpeBaeMbie MeTajuionpoBO/ibi 9, 10 h 11, HarpeBaeMbifi pe3epeyap 13, coeaHHeHHbiā MeTajinonpoBoaoM 11 c ynacTKOM MeTajuionpoBo^a 6 nepea MTJ\ HacocoM h MeTajuionpoBOflOM 10 c pacmHpHTejieM 12, ycTaHOBJieHHbiM b yKa3aHHOM MeTajuionpoBoae 9. FIpocTpaHCTBa uaji paciuiaBOM b pacuiHpHTejie h pe3epeyape coe^HHeHbi Tpy6onpoBOflOM 14 co cpe,QCTBaMH BaicyyMHOH οτκβηκη (He noica3aHbi). B paciHHpHTejie ycTaHOBaeHbi ,OBa 3JieKipHHecKHX aaTHHKa 15 ypoBHH L pacnjiaBa. YpoBeHb pacnjiaea L b paciHHpHTejie h HcnapHTejie HaxonHTCH Ha BbicoTe Ah oTHocHTejibHO ypoBHH pacnjiaBa L0 b pe3epeyape ΜΓ,Π, KOHiypa, T.e. Ah npeacTaBJineT co6oh aeHCTByiomHH Hanop. /ļaHHoe TexHHHecKoe pemeHHe no3BojiHeT noBbiCHTb CTa6HJibHOCTb HcnapeHHH MeTajuioB h cnjiaBOB b jyiHTeabHbix nponeccax η τηκημ o6pa30M noBbicHTb npoH3BOflHTejibHocTb npouecca. PemeHHe mohcho Hcnojib30BaTb juih HaHeceHHH pa3JiHHHbix φ)ΉκηΗ0Ηαιπ>ΗΜΧ noKpbiTHH b 3jieicrpoHHKe, MeTaiuiyprHH, MaiDHHOCTpOeHHH. TaKHM ΜβΤΟΛΟΜ MOMCHO HCnapHTb UHHK, Μ3ΓΗΗΗ, KaflMHH, JIHTHH, HHflHH, CnJiaB UHHKa - ΜΒΓΗΗΗ. 9 LV 13383
ΦΟΡΜΥϋΑ H30EPETEHKH 1. Cnoco6 HaHeceHna noKpbiTHH b BaicyyMe Mero^OM HcnapeHHa MeTamiOB h cnnaBOB, BKjnonaiomHH njiaBjieHHe HcnapaeMoro BemecTBa b πιήβη,ιιβηομ THrjie, pa3MemeHHOM 3a npe^eaaMH BaicyyMHoro o6beMa h coeflHHeHHOM nocpe^cTBOM MeTajiJionpoBo^a c ncnapHTejieM, pa3MemeHHOM b BaKyyMHOM o6beMe, no,aaHy pacnjiaBa yica3aHHoro BemecTBa no yKa3aHHOMy MeTaiuionpoBO/iy b HcnapHTejib, KOHTpojib h nojmepacaHHe nocroaHCTBaypOBHapaciuiaeab HcnapHTejie, ouiHHaioiiiHHca τβΜ, hto, c nejibK) noBbimeHHa cTa6HJibHOCTH HcnapeHHa b zuiHTejibHbix npoiieccax, nogana pacnjiaBa b HcnapHTejib ocymecTBjiaeTca ΜΓ/ί HacocoM, npH stom CTa6HjiH3amni ypoBHa pacnjiaea b HcnapHTene npoH3BOAHTca ΜΓ/ļ κοΗτγροΜ CTaTHHecKoro flaBjieHna, a KOHTpojit ypoBHa pacnjiaBa b HcnapHTejie ocymecTBjiaeTca no naTHHKy, ycTaHOBJieHHOMy b yKa3aHHOM KOHType. 2. yCTpoHCTBO hjih HaHeceHHa ποκρΜΤΗΗ b BaxyyMe Μετο,αοΜ HcnapeHHa MeTajuiOB h cnnaBOB HcnapeHHa, BKjnonaiomee BaKyyMHyio KaMepy co cpencTBaMH OTKanKH, pa3MenīeHHbift b BaicyyMHOH KaMepe HcnapHTejib, conepHcamHfi oahh hjih HecKOjibKO THrjieft HcnapeHHa, rniaBHJībHbiH rarejib 3a npenenaMH BaKyyMHOH KaMepbi, coeflHHeHHHH c HcnapHTeaeM HarpeBaeMbiM MeTajmonpoBO/ioM, cpencTBa H3MepeHHa h peryjiHpoBaHHa ypoBHa pacnnaBa b HcnapHTejie, OTJiHHaiomeecH τεΜ, hto, c nejibK) noBbimeHHa CTaSHJībHocTH HcnapeHHa η HafleacHOCTH pa6oTbi ycTpOHCTBa b OTHTejiBHbK HHKJiax HcnapeHHa, oho CHaSaceno ΜΓ/ļ KOHTypoM CTaranecKoro naBJieHHa pacnjiaea. 3. ΥCTpoftcTBo non. 2, OTJiHaaromeeca τεΜ, hto MT7J KOHTyp CTaTHHecKoro naBJieHHa pacnjiaBa coctoht H3 ηη^τοιηοηηογο ΜΓ,ΖΪ Hacoca, chctcmm ΜβταιυιοπροΒΟΛΟΒ h pe3epeyapa c 3anacoM HcnapaeMoro Merajuia h ycraHOBJieH Me»my yKa3aHHbiM njiaBHJībHbiM τππιβΜ h HcnapHTejieM. 4. yCTpoftcTBo non. 2,OTjiHHaromeecH τεΜ, htoMTflKOHTyp CTaTHHecKoro jiaBJieHHH paciuiaBa coctoht H3 yKa3aHHoro njiaBHJībHoro τηπμ, HH^yiciļHOHHoro MTfl Hacoca h CHCTeMbi MeTajuionpoBO^OB. 5. y CTpoftcTBo non. 2, OTjiHHaiomeeca τεΜ, hto, c nejibfo noBbimeHHa npoH3BO^HTejibHOCTH o6opyzioBaHHa 3a cneT coKpameHHa juiHTejibHocTH MeacayUHKjioBbix onepaimft, MTJļ Hacoc HMeeT peBepcHBHjno Tary. 6. y CTpoftcTBo non. 2, OTJiHHaiomeeca τβΜ, hto, c uejibio noBbimeHHa npoH3BOflHTenbHOCTH o6opy^oBaHHa 3a cneT coKpameHHa juiHTejibHocTH MeacoyuHKJioBbix onepanHft, CTeHKH rmaBHjībHoro rarna, pe3epeyapa h MeTannonpoBoaoB CHa6aceHbi KaHajiaMH βο3Λ)τηηογο oxiiaHc^eHHa. 7. y CTpo ftcTBo non. 2, oTjiHHaiomeeca τεΜ, hto, c nejibio noBbimeHHa 6e3onacHocTH pa6oTbi πρκ no/jane h HcnapeHHH meJiOHHbix MeTajmoB h c nejibio npeaoTBpameHHa Bbi6poca 6ojibihhx KOJinnecTB pacnjiaBa b BaKyyMHyio xaMepy πρκ HapymeHHH BaicyyMa b 3JieMeHTax noaaHH h UHpKyjianHH pacnjiaBa, ynacTOK MeTajijronpoBOjia Meacay HcnapHTejieM h KOHTypoM CTaTHHecKoro jiaBJieHHa pacnjiaBa coaepacHT U-o6pa3Hoe KOjieHo c ynpaBJiaeMOH cHcreMon 3KCTpeHHoro OKnaac^eHHa.

Claims (7)

  1. LV 13383 IZGUDROJUMA FORMULA 1. Paņēmiens pārklājumu uznešanai vakuumā ar metālu un sakausējumu iztvaicēšanas metodi, kas ietver iztvaicējamās vielas kausēšanu tīģelī, kas izvietots ārpus vakuuma kameras un savienots ar iztvaicētāju, kas atrodas vakuuma kamerā, ar metālvada palīdzību, minētās vielas padevi uz iztvaicētāju pa minēto metālvadu. kausējuma līmeņa iztvaicētājā nemainīguma saglabāšanas kontroli un nodrošināšanu, kas atšķiras ar to, ka, lai paaugstinātu iztvaicēšanas stabilitāti ilgstošos procesos, kausējuma padeve uz iztvaicētāju tiek veikta ar MHD sūkni, pie tam iztvaicētājā kausējuma līmeņa stabilitāti tiek nodrošināta ar statiska spiediena MHD kontūru, bet kausējuma līmeņa kontrole iztvaicētājā tiek īstenota ar devēju, kas uzstādīts minētajā kontūrā.
  2. 2. Ierīce pārklājumu uznešanai vakuumā ar metālu un sakausējumu iztvaicēšanas metodi, kura satur vakuuma kameru ar atsūknēšanas līdzekļiem, vakuuma kamerā izvietotu iztvaicētāju, kas satur vienu vai vairākus iztvaicēšanas tīģeļus, kausēšanas tīģeli ārpus vakuuma kameras, kas savienots ar iztvaicētāju ar apsildāma metālvada palīdzību, iztvaicējamā kausējuma līmeņa mērīšanas un regulēšanas līdzekļus, kas atšķiras ar to, ka, ar mērķi paaugstināt iztvaicēšanas stabilitāti un ierīces darba drošumu ilgstošos iztvaicēšanas ciklos, tā satur statiska spiediena MHD kontūru.
  3. 3. Ierīce saskaņā ar 2. punktu, kas atšķiras ar to, ka minētais statiska spiediena MHD kontūrs sastāv no MHD sūkņa, metālvadu sistēmas un rezervuāra ar iztvaicējamā metāla rezervi un tas uzstādīts starp minēto kausēšanas tīģeli un iztvaicētāju.
  4. 4. Ierīce saskaņā ar 2. punktu, kas atšķiras ar to, ka kausējuma statiskā spiediena MHD kontūrs sastāv no minētā kausēšanas tīģeļa, indukcijas MHD sūkņa un metālvadu sistēmas.
  5. 5. Ierīce saskaņā ar 2. punktu, kas atšķiras ar to, ka, ar mērķi paaugstināt iekārtas ražotspēju uz starpciklu operāciju saīsināšanas rēķina, MHD sūknis ir pārslēdzams uz reversīvu velkmi.
  6. 6. Ierīce saskaņā ar 2. punktu, kas atšķiras ar to, ka, ar mērķi paaugstināt iekārtas ražotspēju uz starpciklu operāciju saīsināšanas rēķina kausēšanas tīģeļa, rezervuāra un metālvadu sieniņas aprīkotas ar gaisa dzesēšanas kanāliem.
  7. 7. Ierīce saskaņā ar 2. punktu, kas atšķiras ar to. ka, ar mērķi paaugstināt darba drošību, padodot un iztvaicējot sārmu metālus un novērst kausējuma lielu daudzumu ieplūdi vakuuma kamerā gadījumā, ja vakuums kausējuma padeves un cirkulācijas elementos zūd, metālvada posms starp iztvaicētāju un kausējuma statiskā spiediena kontūru satur U-formas posmu ar vadāmu ekstra dzesēšanas sistēmu.
LVP-04-63A 2004-05-27 2004-05-27 Method and device for vacuum vaporization metals or alloys LV13383B (en)

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DE112005001190.9T DE112005001190B4 (de) 2004-05-27 2005-05-26 Vorrichtung zur Vakuumbeschichtung durch Metall- oder Legierungsverdampfung und Verfahren mit derartiger Vorrichtung
JP2007514934A JP2008500454A (ja) 2004-05-27 2005-05-26 金属及び合金の蒸発による真空蒸着方法及び真空蒸着装置
CNA2005800146727A CN1950541A (zh) 2004-05-27 2005-05-26 通过蒸发金属和金属合金进行真空淀积的方法和设备
PCT/LV2005/000005 WO2005116290A1 (en) 2004-05-27 2005-05-26 Method and apparatus for vacuum deposition by vaporizing metals and metal alloys

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CN1950541A (zh) 2007-04-18

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