KR900007127A - Multi-variate conveying method and device - Google Patents

Abstract

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Description

Multi-variate conveying method and device

Since this is an open matter, no full text was included.

1 is an overall configuration diagram showing an embodiment of a multi-variate conveying apparatus according to the present invention.

2 is a block diagram of a wafer handing unit in FIG.

3 is a perspective view of arrow A of FIG.

Claims (36)

And a plurality of processing means for processing various kinds of workpieces, a conveying means for conveying the various kinds of workpieces, the conveying means, and a mobile mounting means for receiving the workpieces between the processing means. Multiple types of workpieces are simultaneously transported between the processing means, and when the workpiece is located at a predetermined position of the mobile mounting means, the mobile mounting means recognizes and accepts the type of workpiece desired by the transfer means. Way. Recognizing the desired kind of work between the conveying means and the conveying means, which are equipped with various kinds of workpieces at the same time and travel between a plurality of processing means and convey them to a predetermined position of the moving mounting means of the work prepared corresponding to the processing means. Multi-type conveying device comprising a mobile mounting means for receiving. A conveying system for conveying a workpiece between processing means for processing various kinds of workpieces, comprising: a tracking means for confirming the physical position of the workpiece moved according to a movement instruction indicating a moving source and a moving place, and a workpiece desired at a place of an arbitrary mounting means. A moving means, which stops while being mounted on a mobile station, stores a work as necessary and exchanges work between the conveying means for conveying a variety of workpieces at the same time, between the conveying means, between the conveying means and the processing means, and between the processing means. Multi-type conveying device including. As a conveying system for conveying multiple kinds of workpieces at the same time, the processing means for processing the work, the storage means for controlling the progress and speed of the work between the processing means, the conveying means for conveying between the storage means, the conveying means, storage And a tracking means for checking the physical position of the workpiece moved between the means, the storage means and the moving means for carrying the moving means between the processing means and the moving instruction indicative of the moving source and the moving place. A production system for producing a variety of workpieces at the same time, comprising: a mobile mounting means for inputting several kinds of workpieces into a processing means for processing the workpieces; and a conveying means for supplying several kinds of workpieces to the mobile mounting means from other mobile mounting means. A multi-variate conveying method in which the processing means instructed to process a certain kind of work processes the various kinds of work according to the instruction. The multi-variate conveyance apparatus of Claim 2 which uses a conveyance means which mounts a various kind of workpiece as said conveyance means irrespective of the kind, and memorize | stores the kind of the workpiece mounted. The multi-type conveyance apparatus of Claim 2 using the conveyance means which the mounting means which mounts the workpiece | work as said conveyance means runs on the track | orbit of a closed loop. The multi-type conveyance apparatus of Claim 2 using the conveyance means comprised by the mounting means of the workpiece | work which travels along the grid | lattice track | orbit provided in the ceiling as said conveyance means. The multi-variate conveying apparatus of Claim 2 provided with the conveying means which carries out a conveyance operation | work outside a specific track as needed as the said conveying means. The multi-type conveyance apparatus of Claim 2 which provides the function of hold | maintaining a workpiece | work in the said conveying means, and controls the advancing order and advancing speed of a workpiece | work. The multi-variate conveyance apparatus of Claim 2 using conveyance means which arbitrarily selects the track | orbit which runs with the workpiece | work mounted by the mounting means which mounts the workpiece | work in the said conveyance means. The multi-type conveyance apparatus of Claim 7 which uses the conveyance means with the function of hold | maintaining a workpiece | work and the function of carrying a workpiece | work in the conveyance means which mounts a workpiece | work and runs on the track | orbit of a closed loop. The multi-type conveyance apparatus of Claim 2 using the mobile mounting means which transfer a workpiece | work between a specific conveying means and individual processing means in the production system provided with the processing means in which the workpiece delivery method differs. The multi-type conveyance apparatus of Claim 2 which controls the progress of a workpiece | work and the speed | rate of a workpiece | work by providing the function of storing a workpiece | work in the mobile mounting means provided in all the processing means. The method according to claim 2, wherein the work is held in the conveying means and sealed in a clean atmosphere, and the clean atmosphere is controlled to a minimum by always supplying a clean atmosphere to the space in which the work is in contact with the moving means. Multi-variate conveying device. The multi-variate conveying apparatus of Claim 2 which a mobile mounting means transfers a workpiece to a processing means with the workpiece accommodated in a jig in the production system which accommodates and conveys a workpiece | work in the jig. The multi-type conveyance apparatus of Claim 2 which receives several workpiece | work simultaneously at the said mobile mounting means. The multi-variate conveyance apparatus of Claim 3 which writes the identification code of a workpiece | work in each workpiece | work in the said tracking means, and recognizes each workpiece | work by the identification code. The multi-variate product conveyance apparatus of Claim 3 which tracks a workpiece | work by combining each tracking by a processing means, a conveying means, and a receiving means in the said tracking means. The product of claim 3, wherein the tracking means writes an identification code indicating that the workpiece has passed through the point at a point where the workpiece passes, and tracks the workpiece by identifying the workpiece. Conveying device. Several processing apparatuses for processing various types of wafers, a transfer vehicle on which wafers are mounted, and a transfer vehicle for transferring between processing equipments in a track-shaped conveyance rail, and a mobile mounting apparatus for carrying wafers between the conveying vehicle and the processing apparatus. Apparatus, a storage shelf for temporarily storing wafers one by one, a storage shelf for temporarily storing each process, and an identification device for identifying wafer numbers of wafers, and the mobile loading device, storage shelf, and identification device correspond to each processing device. Multi-variate conveying device with unit configuration. 23. The multi-variate conveying apparatus of claim 21, wherein the unit for wafer passing is configured as a common interface unit united between different processing apparatuses. 22. The multi-variate conveyance of claim 21, wherein the unit for wafer delivery is configured to maintain high cleanliness by separating the atmosphere in contact with the wafer from other atmospheres when the wafer is exchanged between the transport vehicle and the processing apparatus. Device. 23. The scope of claim 21, further comprising: means for storing process sequences and processing conditions for each variety in correspondence with the storage shelf, a communication network for connecting several storage shelves, starting states and inventory amounts and processing of each processing apparatus. And control means for determining the number of wafers completed and the state of the next process by the storage means and the communication network, and performing control for determining the wafer to be processed in each storage shelf. 22. The multi-type conveyance apparatus of claim 21, wherein the mobile mounting apparatus has a means for moving the wafer between the transport vehicle and the storage shelf and a means for moving the wafer between the storage shelf and the processing apparatus. The wafer is introduced, the wafer is transported to the place of the processing apparatus corresponding to the first process by the transport vehicle, and temporarily stored in the storage shelf, and put into the processing apparatus according to the demand of the wafer processing apparatus, and processed. After completion of processing, the wafer number with data such as varieties is identified by the identification device and temporarily stored in the storage shelf, and then transported by the transport vehicle to check whether a series of processing is completed. A multi-variate conveying method for returning items and returning them after repeated processing until a series of processing ends. A wafer holding device having a mechanism for holding a wafer when transferring one or several wafers from one semiconductor manufacturing device to another semiconductor manufacturing device, wherein the wafer holding device is received by a cassette receiver and one or more cassettes are received. A transport vehicle having a function of conveying and handing over to the intended cassette receiver, the wafer holding device received from the transporting vehicle, and the wafers stored in the holding device are taken out in a clean box or held in the clean box. A cassette receiving and receiving device for placing a wafer in the apparatus and handing a cassette for conveyance to the carrier, a first wafer moving-mounting apparatus for moving the wafer between the holding device and the wafer storage shelf; It is provided for each semiconductor manufacturing apparatus and memorizes a place to store and store one wafer. Wafer storage shelf to be pulled out from the storage shelf, and the second wafer moving equipment for each semiconductor manufacturing apparatus in which the wafer is moved between the wafer storage shelf and the semiconductor manufacturing apparatus in correspondence with the position of cassette cassette remaining in each semiconductor manufacturing apparatus and its direction. Apparatus, a mechanism in which a carriage can exchange wafers for transferring wafers in order to separate the atmosphere in contact with the wafer from other atmospheres and maintain high cleanness when exchanging wafers between the carrier and the semiconductor manufacturing apparatus. A clean box is provided with a barrier to prevent the atmosphere, and a clean box having a fan for blowing air and a filter for removing dust on the upper surface thereof, a lead device for reading the identification code described on the wafer, and a process flow for each variety in the wafer storage shelf. The processing conditions are stored, and all wafer storage shelves are connected to the information network. Multi-variate conveying system including a control device for determining wafers to be processed in the storage lathe according to the operation status and inventory amount of the teeth, the number of wafers for which the processing is completed, and the operation status and inventory amount of the semiconductor manufacturing apparatus for processing wafers next time. . A multi-type conveying system comprising means for processing various kinds of workpieces, conveying means for conveying various kinds of workpieces, and mobile mounting means for receiving the workpieces between the conveying means and the processing means, wherein And conveying the work, storing the work to be supplied in accordance with the absorption of the load balance between the processing means and the processing speed of the processing means, and switching the processing order as necessary, wherein the mobile mounting means performs the processing. A method for conveying a variety of varieties, having a standardized common workpiece receiving mechanism of means, wherein the workpiece of the type desired by said conveying means is identified and received. Carrying means for traveling between processing means and conveying said conveying jig of various types to the workpiece movement mounting means provided corresponding to the said processing means, when the various kinds of conveying jig containing a workpiece | work are simultaneously mounted, a kind desired for the conveying means A multi-variate conveying apparatus comprising a mobile mounting means for receiving the conveying jig by identifying the workpiece of the workpiece. As a conveying system for conveying a jig including a work among processing means for processing a plurality of work pieces, conveying a variety of work or conveying jig, the absorption of the load balance between the processing means and the processing speed for switching the order as necessary Multi-variate conveying device for conveying varieties to the conveying means for simultaneously performing the recognition of the desired type of workpiece and the normalized common work receiving mechanism of the storage, processing means to adjust the. A conveying system for conveying several workpieces at the same time, the preprocessing and post-processing storage means for carrying out conveyance by the conveying means which conveys the conveying means between conveying means by controlling the advancing order and advancing speed of a workpiece | work, between the conveying means and the said storing means. And moving means for moving between the storage means and the processing means, and tracking means for identifying the physical position of the moving source workpiece according to the moving instruction indicating the moving source and the moving site. . The multi-type conveyance apparatus of Claim 1 containing the conveyance means which carries a various kind of workpiece | work in synchronization with a conveyance speed as said conveyance means. The multi-variate conveyance apparatus of Claim 1 in which the mounting means which has the workpiece mounted as the said conveying means includes the conveying means which travels on the closed loop track | orbit image which consists of liquids. 32. A method according to claim 31, wherein the conveying system performs a conveying operation in a single mode for each work. 32. A method according to claim 31, wherein a conveying operation of a workpiece having a conveying system is executed. The multi-variate conveying apparatus of Claim 2 provided with a conveying means for controlling the advancing order and advancing speed of a workpiece by circulation and bidirectionality. ※ Note: The disclosure is based on the initial application.