KR20240097524A - Unit for transferring substrate and substrate treating apparatus with the same - Google Patents

Abstract

According to an aspect of the present invention, provided is a substrate transfer unit including: a hand configured to support a substrate and including a first separation prevention protrusion provided in front of a seating surface on which the substrate is placed; a base portion on which a pusher configured to move the hand forward or backward is installed; a pusher guide including a first part and a second part provided in a line with the first part in a longitudinal direction and configured to guide a moving direction of the hand; and a pressure sensor provided between the first part and the second part to sense pressure, wherein when the pressure sensor senses pressure equal to or greater than a set value, the hand moves to an opposite side of the pusher guide to adjust a position of the substrate.

Description

Substrate transfer unit and substrate processing apparatus including the same {UNIT FOR TRANSFERRING SUBSTRATE AND SUBSTRATE TREATING APPARATUS WITH THE SAME}

The present invention relates to a substrate transfer unit and a substrate processing device including the same.

Integrated circuit devices such as semiconductor devices can be obtained by performing processes such as a thin film process, an etching process, a cleaning process, a drying process, etc., and between unit processes, a transfer process is performed to transfer the substrate for manufacturing the integrated circuit device. It can be done. The transfer process for transferring substrates may use substrate transfer units with various structures.

On the other hand, if the substrate deviates from its original position during the process of placing it on the substrate transfer unit, a compressive force is generated and there is a risk of damage to the substrate, so improvements are needed.

The problem to be solved by the present invention is to provide a substrate transfer unit that can safely transfer a substrate and a substrate processing device including the same.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

One aspect of the substrate transfer unit of the present invention for achieving the above object includes a hand that supports a substrate and includes a first separation prevention bump provided in front of the seating surface on which the substrate is placed; a base portion on which a pusher for moving the hand forward or backward is installed; a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding a moving direction of the hand; and a pressure sensor provided between the first part and the second part to detect pressure, and when the pressure sensor detects a pressure exceeding a set value, the hand moves to the opposite side of the pusher guide to position the substrate. Adjust.

One aspect of the substrate processing apparatus of the present invention for achieving the above other problems includes an index module; a processing module in which the substrate is loaded from the index module and processed; and a transfer chamber for transferring the substrate between the processing modules, wherein at least one of the index module or the transfer chamber includes a substrate transfer unit, the substrate transfer unit supports a substrate, and the substrate A hand including a first separation prevention bump provided in front of the seating surface on which it is placed; a base portion on which a pusher for moving the hand forward or backward is installed; a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding a moving direction of the hand; and a pressure sensor provided between the first part and the second part to detect pressure, and when the pressure sensor detects a pressure exceeding a set value, the hand moves to the opposite side of the pusher guide to position the substrate. Adjust.

The other side of the substrate transfer unit of the present invention for achieving the above problem supports the substrate, and includes a first separation barrier provided in front of the seating surface on which the substrate is placed, and a second separation barrier provided behind the seating surface. A hand containing; a base portion on which a pusher for moving the hand forward or backward is installed; a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding a moving direction of the hand; A first sensor that detects the substrate and is provided on the inside based on the circumference of the substrate in the correct position on the base part, and a plurality of second sensors are provided in a row on the outside based on the circumference of the substrate in the correct position A sensor unit including; a pressure sensor provided between the first part and the second part to detect pressure; and a temperature sensor provided in the base and detecting the temperature of the substrate or the surrounding temperature of the substrate, and when the pressure sensor detects a pressure exceeding a set value, the hand moves to the opposite side of the pusher guide. When adjusting the position of the substrate or when the first sensor and the second sensor sense the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide, but moves the hand from the second sensor to the pusher guide. The board moves to a range where it cannot be detected.

Specific details of other embodiments are included in the detailed description and drawings.

1 is a diagram illustrating a substrate processing apparatus according to some embodiments of the present invention.
Figure 2 is a perspective view showing a substrate transfer unit according to some embodiments of the present invention.
Figure 3 is a plan view showing a robot of a substrate transfer unit according to the first embodiment of the present invention.
FIG. 4 is a diagram illustrating the substrate arranged in the correct position in section II of FIG. 3 .
Figure 5 is a plan view showing a state in which a substrate is moved out of its original position and moved to the pusher guide side in the robot of the substrate transfer unit according to the first embodiment of the present invention.
Figure 6 is a plan view showing a state in which a substrate is moved out of its original position and moved to the opposite side of the pusher guide in the robot of the substrate transfer unit according to the first embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various different forms. The present embodiments are merely intended to ensure that the disclosure of the present invention is complete, and that the present invention is not limited to the embodiments disclosed below and is provided by those skilled in the art It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

The terminology used herein is for describing embodiments and is not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context. As used herein, “comprises” and/or “comprising” refers to the presence of one or more other components, steps, operations and/or elements. or does not rule out addition.

1 is a diagram illustrating a substrate processing apparatus according to some embodiments of the present invention.

Referring to FIG. 1 , the substrate processing apparatus 1 of this embodiment may briefly include an index module 20, a processing module 30, and a transfer chamber 40.

The index module 20 transfers the substrate from the container 10 (e.g., Front Open Unified Pod (FOUP)) in which the substrate is stored to the processing module 30, and places the processed substrate in the container ( 10) It can be stored.

For example, the index module 20 may include a load port 22 and an index robot 23. A container 10 containing a substrate can be placed in the load port 22.

The index robot 23 may be provided to be movable along the guide rail 24 provided in the Y-axis direction. The index robot 23 is named separately from the transfer robot 42RB of the transfer chamber 40, but it is mentioned that the index robot 23 and the transfer robot 42RB may have the same or similar operation and shape. . In addition, mechanisms of known technology can be applied.

The processing module 30 may include a buffer chamber 31, a wet processing chamber 33, and a supercritical chamber 34. However, this is only an example and is not limited to this.

The buffer chamber 31 may be provided between the index module 20 and the transfer chamber 40. However, it is not limited to this. The buffer chamber 31 can store a plurality of substrates together. The substrate stored in the buffer chamber 31 can be carried in or out by the index robot 23 and the transfer robot 42RB.

The wet processing chamber 33 can process a liquid film on a substrate. For example, the wet processing chamber 33 can perform a cleaning process on the substrate, thereby cleaning the pattern surface of the substrate. The processing liquid discharged from the wet processing chamber 33 is a cleaning liquid and may include chemicals, pure water (DIW), and an organic solvent (eg, isopropyl alcohol (IPA)).

The supercritical chamber 34 may be provided adjacent to the wet processing chamber 33. The supercritical chamber 34 can process the substrate by supplying supercritical fluid to the substrate. For example, the supercritical chamber 34 may supply a supercritical fluid to the substrate processed in the wet processing chamber 33 to dry the substrate. In other words, the supercritical chamber 34 can dry the organic solvent remaining on the substrate.

The transfer chamber 40 may transfer the substrate between the wet processing chamber 33 and the supercritical chamber 34. The transfer chamber 40 may have its longitudinal direction parallel to the X-axis direction. A transfer robot 42RB may be provided in the transfer chamber 40. A guide rail 42GR whose longitudinal direction is parallel to the X-axis direction may be provided within the transfer chamber 40, and the transfer robot 42RB may be provided to be able to move on the guide rail 42GR.

The index module 20 and the transfer chamber 40 of this embodiment may be provided with a substrate transfer unit 100. Hereinafter, it will be described that the substrate transfer unit 100 is provided in the index module 20.

In other words, the robot 110 of the substrate transfer unit 100 may be provided as an index robot 23 or a transfer robot 42RB. Hereinafter, it will be described that the robot 110 of the substrate transfer unit 100 is provided as the index robot 23.

The rail portion 120 of the substrate transfer unit 100 may be provided as a guide rail 24 provided in the index module 20 or a guide rail 42GR of the transfer chamber 40. Hereinafter, it will be described that the rail portion 120 of the substrate transfer unit 100 serves as a guide rail 24 provided in the index module 20.

Figure 2 is a perspective view showing a substrate transfer unit according to some embodiments of the present invention.

Referring to FIG. 2, the substrate transfer unit 100 may be provided inside the housing 25 and may include a robot 110, a rail portion 120, a vertical portion 130, and a duct portion 140. You can.

The housing 25 may have the appearance of the index module 20 and may accommodate the substrate transfer unit 100. The housing 25 may have a box structure in which a receiving space is formed. The box structure may be composed of a combination of a frame and a plate, but is not limited to this.

The housing 25 of the index module 20 may be formed with an exhaust hole (not shown) so that the internal air (hereinafter referred to as fluid and the inside of the index module 20) is discharged to the outside. . The exhaust hole may be formed in a penetrating structure on the bottom surface of the index module 20. An exhaust unit such as an exhaust line and a fan/pump is installed in the exhaust hole, so that the air from the index module 20 can be forcibly exhausted to the outside. However, it is not limited to this.

The robot 110 can transfer a substrate. If the robot 110 is provided as the index robot 23, a door opener that opens and closes the door of the container 10 may be provided. Robot 110 can pick up and place substrates.

The robot 110 is provided on a vertical part 130 that moves along the rail part 120, and can move in the Y-axis direction among the horizontal directions according to the movement of the vertical part 130. In addition, it is implemented to be movable in the vertical direction in the vertical part 130, so that it can move in the vertical direction in the vertical part 130. However, it is not limited to this.

As an example, the robot 110 transfers the substrate W and may include a hand 111 and a base unit 115.

One or more hands 111 may be provided. For example, if a plurality of hands 111 are provided, the plurality of hands 111 may be provided to be spaced apart from each other in the vertical direction. The hand 111 may be provided to enable movement in the X-axis direction (forward and backward movement) and rotation around the Z-axis direction. For example, the hand 111 may be operated by a driver and gear module, such as a motor and/or cylinder.

The base portion 115 may support the hand 111. The base portion 115 may be provided in a block structure. The base portion 115 may be installed to be movable in the vertical direction on the vertical portion 130 so that the hand 111 moves along the Z-axis direction. In addition, the base portion 115 is provided with a driving device (not shown) such as a motor so that it can move along the rail portion 120. However, it is not limited to this.

The robot 110 supporting the substrate will be described in detail later with reference to the drawings.

The rail portion 120 guides the sliding of the vertical portion 130 and may have a rail structure. The rail portion 120 may have a length in the Y-axis direction.

The vertical portion 130 includes a frame 131, a motor 133, and a column 135, guides the vertical movement of the robot 110, and can move along the rail portion 120.

The robot 110 may be movably provided on the frame 131 or the column 135. For example, the frame 131 or the column 135 may be provided with a rail structure identical to or similar to the rail portion 120 to guide the vertical movement of the robot 110. However, it is not limited to this, and known techniques may be applied.

The frame 131 may have a square shape and may be slidably provided on the rail portion 120. For example, the frame 131 may be provided with a drive belt (not shown) and/or a gear module (eg, a rack gear and a pinion gear, etc., not shown).

The motor 133 is installed on the frame 131 and can transmit rotational force to the drive belt and/or gear module of the frame 131 to move the frame 131 in the Y-axis direction.

Columns 135 may be provided on both sides of the frame 131 in the Y-axis direction. Column 135 may have a space formed inside it. That is, the column 135 may form a flow path through which fluid passes. A plurality of fans (not shown) may be provided in the column 135 to form airflow, and a plurality of holes 135H may be formed adjacent to the fans in the column 135, and a plurality of holes 135H may be formed in the column 135. ) may be provided to be spaced apart from each other in the vertical direction, and the index module 20 may be introduced into the column 135 through a plurality of holes 135H. The input of the index module 20 into the column 135 may be achieved by an airflow formed by the fan 137 of the vertical portion 130. A downward airflow is formed by the fan and can be exhausted to the outside through the exhaust unit.

The duct portion 140 may be connected to the vertical portion 130 and move together with the vertical portion 130, and may have a barrel structure extending in the X-axis direction among the horizontal directions. This is to ensure that the outlet of the duct portion 140 is located in the exhaust hole of the housing 25.

Hereinafter, the robot 110 of the substrate transfer unit 100 will be described in detail with reference to the drawings.

Figure 3 is a plan view showing the robot of the substrate transfer unit according to the first embodiment of the present invention, Figure 4 is a diagram showing the substrate disposed in the correct position in the II-I cross section of Figure 3, and Figure 5 is this A plan view showing a state in which a substrate is moved out of its normal position and moved to the pusher guide side in the robot of the substrate transfer unit according to the first embodiment of the invention, and FIG. 6 is a robot of the substrate transfer unit according to the first embodiment of the present invention. This is a plan view showing the state in which the substrate is moved out of its original position and moved to the opposite side of the pusher guide.

3 to 6, the robot 110 includes a hand 111 and a base unit 115, a sensor unit 112, a pressure sensor 113, a temperature sensor 114, and a pusher guide 117. ) may further be included.

The hand 111 may be provided in a shape with one side open and the center open in the vertical direction, and may be provided to support the bottom surface of the substrate W. That is, the upper surface of the hand 111 serves as a seating surface on which the substrate W is seated, and may have a shape such as a 'V' shape or a 'U' shape, for example. However, it is not limited to this, and various modifications are possible, such as a polygonal (eg, square) plate as another example.

The hand 111 may be provided with a first separation prevention bump 111A and a second separation prevention bump 111B on the seating surface (upper surface) on which the substrate W is mounted.

The first separation prevention bump 111A can prevent the substrate on the seating surface of the hand 111 from being separated from the hand 111 when transferring the substrate. To this end, the first separation prevention bump 111A may be installed in front of the seating surface of the hand 111 and may have a structure that protrudes upward.

The second separation prevention bump 111B can prevent the substrate W on the seating surface of the hand 111 from being separated from the hand 111 when the substrate is transferred. To this end, the second separation prevention bump 111B may be installed rearward from the seating surface of the hand 111.

In other words, the substrate W can be prevented from leaving by the first separation prevention bump 111A at the front and the second separation prevention bump 111B at the rear.

The hand 111 may slide and move in the horizontal direction along the pusher guide 117. For the slide operation, the hand 111 may be guided in a moving direction by the pusher guide 117. The hand 111 may be slidably moved by the operation of the pusher 116.

The hand 111 of this embodiment moves the substrate W toward the pusher guide 117 when the first sensor 112A and the second sensor 112B detect the substrate W together (see FIG. 6). It can be moved to the pusher guide (117) side. At this time, the hand 111 may move to a range where the substrate W is not detected by the second sensor 112B (see FIG. 4).

In addition, when the pressure sensor 113 detects a pressure exceeding the set value (see FIG. 5), the hand 111 moves to the opposite side of the pusher guide 117 to adjust the position of the substrate W, thereby controlling the substrate (W). Damage due to pressure on the substrate W that may occur when W) moves excessively toward the pusher guide 117 can be prevented.

That is, the hand 111 prevents the substrate W from being biased toward the front of the correct position based on the determination of the sensor unit 112, while preventing the substrate W from being biased toward the rear of the correct position based on the determination of the pressure sensor 113. By preventing it from hitting, the substrate W can be operated to be placed in the correct position.

The sensor unit 112 can detect the substrate W located on the hand 111. The sensor unit 112 is provided in plural pieces and can detect whether the substrate W is placed in the correct position on the seating surface of the hand 111 or whether it is displaced from the correct position.

As an example, the sensor unit 112 may include a first sensor 112A and a second sensor 112B.

The first sensor 112A may be provided on the inside (right side of 'A1' in FIG. 4) based on the circumference of the substrate W in the correct position on the base portion 115.

One or more second sensors 112B may be provided outside (to the left of 'A1' in FIG. 4) based on the circumference of the substrate W in the correct position. If a plurality of second sensors 112B are provided, they may be provided in a line in a direction perpendicular to a tangent of the circumference of the substrate W or in the longitudinal direction of the hand 111 based on the circumference of the substrate W. However, it is not limited to this.

The sensor unit 112 uses the first sensor 112A and the second sensor 112B to detect the surroundings of the edge of the substrate W placed on the hand 111, thereby determining the state in which the substrate W is placed and/or The position of the substrate (W) can be detected.

When the first sensor 112A detects the substrate W, it can be determined that the substrate W is placed on the hand 111. If the substrate W is placed incorrectly on the seating surface of the hand 111, the substrate W can be detected by the second sensor 112B in addition to the first sensor 112A.

That is, when the second sensor 112B detects the substrate W at the same time as the first sensor 112A, it can be detected that the substrate W is out of position. This is because the second sensor 112B is located outside the circumference of the substrate W in the correct position.

In other words, the first sensor 112A located inside the circumference of the substrate W detects the substrate W when the substrate W is placed in the correct position, and the second sensor 112B detects the substrate W in the correct position. ), so the substrate W placed in the correct position cannot be detected. However, when the second sensor 112B detects the substrate W, it can be determined that the substrate W is out of the correct position. .

For example, the first sensor 112A and the second sensor 112B of the sensor unit 112 are sensor devices for detecting the presence of the substrate W and may be provided as a reflective sensor device or a transmissive sensor device. However, it is not limited to this.

For example, a reflective sensor device can detect the presence of the substrate W by projecting light onto the surface of the substrate W and detecting the reflected light reflected from the surface of the substrate W. If the substrate W is present, the presence of the substrate W is detected by reflecting light from the reflective surface of the substrate W. If the substrate W is not present, the light is not reflected, indicating the absence of the substrate W. It can be sensed.

A transmissive sensor device may consist of a light transmitting unit and a light receiving unit. The light transmitting unit projects light toward the light receiving unit, and if the substrate (W) exists between the light transmitting unit and the light receiving unit, the light does not reach the light receiving unit and the presence of the substrate (W) is detected.

Using this sensor unit 112, the robot 110 detects the presence and/or position of the substrate W, and detects the substrate W by using the first sensor 112A and the second sensor 112B provided in a row. By specifying the position of (W), the operation of the hand 111 can be controlled in detail.

The pressure sensor 113 may be provided between the first part 117A and the second part 117B to sense pressure.

The pressure sensor 113 may be provided to detect whether pressure is applied to the substrate W placed on the hand 111 and prevent damage to the substrate W.

This pressure sensor 113 is provided on the pusher guide 117 to detect the pressure generated on the substrate W when the pusher 116 operates, that is, to prevent the pressure from being generated above a preset pressure that may cause damage. The operation of (111) can be controlled.

For example, if the edge of the substrate (W) is not placed in the correct position (see FIG. 4, reference symbol 'A1') and is pushed (may be moved by a distance of 'D1'), the pressure sensor (113 ) can be pressed. At this time, pressure may be detected by the pressure sensor 113.

The temperature sensor 114 may be provided in the base portion 115 and may detect the temperature of the substrate W or the temperature surrounding the substrate W.

It may be provided to consider the compressive force applied to the substrate W (the pressure generated on the substrate W mentioned above) in consideration of thermal expansion depending on the temperature of the substrate W.

For example, during a process using heat, the temperature of the substrate W can be detected using the temperature sensor 114, and the operation of the hand 111 can be controlled to receive a smaller compression force compared to the substrate W at room temperature. .

The base portion 115 may support the hand 111. The hand 111 may be coupled to the base portion 115 to be movable in the front-back direction (see FIG. 1, X-axis direction). For example, a pusher 116 may be installed in the base portion 115.

The pusher 116 can move the hand 111 forward or backward. The pusher 116 may be provided to move linearly in the front-back direction (X-axis direction), which is the direction of movement of the hand 111. For example, the pusher 116 may be provided as a cylinder. However, it is not limited to this.

The pusher guide 117 is a component that guides the moving direction of the hand 111 and may be provided with a first part 117A and a second part 117B arranged in line with the first part 117A in the longitudinal direction. there is.

As an example, the first part 117A may have the shape of a pair of bars. A hand 111 is provided between a pair of bars, and the moving direction of the hand 111 can be guided.

The second part 117B may be provided at an end of the first part 117A. The second part 117B is coupled to the first part 117A, and can be moved in the direction of the first part 117A by pressure or provided with a shape that can be changed.

The second part 117B may have a pressure sensor 113 between it and the first part 117A, and may be provided in various structures in which pressure is transmitted to the pressure sensor 113. As an example, the second part 117B may be connected to the end of the first part 117A via an elastic part (eg, leaf spring, coil spring, etc., not shown) and may have a structure in which the second part 117B is elastically pressed.

Although embodiments of the present invention have been described with reference to the above and the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing its technical idea or essential features. You will understand that it exists. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive.

1: Substrate processing device
100: substrate transfer unit

Claims (10)

A hand that supports a substrate and includes a first separation prevention bump provided in front of a seating surface on which the substrate is placed;
a base portion on which a pusher for moving the hand forward or backward is installed;
a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding a moving direction of the hand; and
It includes a pressure sensor provided between the first part and the second part to detect pressure,
A substrate transfer unit wherein when the pressure sensor detects a pressure exceeding a set value, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate. According to paragraph 1,
The substrate transfer unit further includes a sensor unit that detects the substrate and includes a first sensor provided inside the base unit based on the circumference of the substrate in a fixed position. According to paragraph 2,
The sensor unit detects the substrate and includes a plurality of second sensors arranged in a row outside the circumference of the substrate at a fixed position,
When the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide. According to paragraph 3,
The hand moves to a range where the substrate is not detected by the second sensor. index module;
a processing module in which the substrate is loaded from the index module and processed; and
a transfer chamber that transfers the substrate between the processing modules,
At least one of the index module or the transfer chamber includes a substrate transfer unit,
The substrate transfer unit,
A hand that supports a substrate and includes a first separation prevention bump provided in front of a seating surface on which the substrate is placed;
a base portion on which a pusher for moving the hand forward or backward is installed;
a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding the moving direction of the hand; and
It includes a pressure sensor provided between the first part and the second part to detect pressure,
A substrate processing device wherein when the pressure sensor detects a pressure exceeding a set value, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate. According to clause 5,
The substrate processing apparatus further includes a sensor unit that detects the substrate and includes a first sensor provided inside the base unit based on the circumference of the substrate in a fixed position. According to clause 6,
The sensor unit detects the substrate and includes a plurality of second sensors arranged in a row outside the circumference of the substrate at a fixed position,
When the first sensor and the second sensor sense the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide. In clause 7,
The hand moves to a range where the substrate is not detected by the second sensor. According to clause 5,
The substrate processing device is provided in the index module. A hand that supports a substrate and includes a first separation prevention bump provided in front of a seating surface on which the substrate is placed and a second separation prevention bump provided in the rear of the seating surface;
a base portion on which a pusher for moving the hand forward or backward is installed;
a pusher guide including a first part and a second part aligned in a longitudinal direction with the first part, and guiding a moving direction of the hand;
A first sensor that detects the substrate and is provided on the inside based on the circumference of the substrate in the correct position on the base part, and a plurality of second sensors are provided in a row on the outside based on the circumference of the substrate in the correct position A sensor unit including;
a pressure sensor provided between the first part and the second part to detect pressure; and
It is provided in the base portion and includes a temperature sensor that detects the temperature of the substrate or the surrounding temperature of the substrate,
When the pressure sensor detects a pressure exceeding the set value, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate, or
When the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide, but moves to a range where the substrate is not detected by the second sensor. A substrate transfer unit.

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