KR20160105653A - Color change agent and method of manufacturing thereof - Google Patents

Abstract

The present invention relates to a discoloring agent and a method for producing a discoloring agent, and more particularly, to a method for producing a discoloring agent and a discoloring agent comprising a raw material and a mixing indicator; The raw material is composed of microcrystalline cellulose and bentonite; Wherein the mixing indicator is a mixture of two or more indicators.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color change agent and a method for manufacturing the same,

The present invention relates to a coloring agent and a method for producing a coloring agent, and more particularly, to a method of producing a coloring agent and a coloring agent by identifying a acid group by color change depending on pH of a gas leaked when an acidic or basic gas is leaked, And a method for producing the discoloration agent.

Gas emissions as a by-product of the manufacture of semiconductor materials, devices, products, and memory articles may contain a wide variety of chemical species from process equipment. These species include decomposition products of organic and inorganic compounds, photoresists and other reactants, and a wide range of other gases that must be removed from the waste gas stream prior to discharge to the atmosphere from process equipment.

In gas emission treatment systems, halogen components such as fluorine (F ₂ ) and fluorinated compounds are particularly problematic among the various components that need to be reduced.

The most commonly used perfluorinated compounds (PFC) are CF ₄ , C ₂ F ₆ , SF ₆ , C ₃ F ₈ , and NF ₃ . The PFC is dissociated in a plasma state to produce highly reactive F ₂ and fluorine radicals. The products of these process operations contain large amounts of fluorine, silicon tetrafluoride (SiF ₄ ), and contain a small amount of hydrogen fluoride (HF) and carbonyl fluoride (COF ₂ ). The toxicity of these gases is a significant hazard to health and the environment, in addition to the high corrosiveness to the exhaust system.

Numerous reactants have been used to react with PFC to convert PFC into compounds that are less corrosive, can easily be scrubbed in exhaust streams, or are less hazardous to health and the environment. For example, hydrogen (H ₂ ) can be introduced as a reactant to convert fluorine to HF, which can then be removed using a wet scrubber.

As a reactant for providing hydrogen, methane (CH ₄ ) can be used to reduce fluorine and fluorinated chemical species by burning with methane added air or oxygen (O ₂ ). The water vapor and reactive hydrogen generated by this combustion reaction react with fluorine and fluorinated species to convert these components to HF and SiO ₂ .

Methane is not as explosive as hydrogen, but nitrogen oxides (NOx) are produced when methane is burned in the presence of oxygen. Under the combustion conditions when oxygen is insufficient, methane can be converted to fluorine-substituted methane (CHxFy, x and y being 0-4). In addition, both anhydrous ammonia (NH ₃ ) and aqueous ammonia (NH ₄ OH) can be used as F ₂ reducing reactants. The presence of ammonia can be a source of influxed oxygen if the pH can not be precisely controlled in the exhaust treatment system.

There is a problem that it is impossible to visually confirm whether the pH of the leaked gas is acidic or basic when the acidic or basic gas leaks to the outside in the semiconductor process and the leaked position of the gas can not be found and the quick treatment can not be performed.

Korean Registered Patent No. 10-0466687 (July 07, 2005)

The present invention has been proposed in order to solve the above problems, and it is an object of the present invention to identify acid bases by color change depending on the pH of a gas leaked when acidic and basic gas leaks, visually confirm gas leakage through color change of a discoloring agent, It is an object of the present invention to provide a discoloring agent that takes action.

The method for producing a discoloring agent of the present invention comprises a raw material and a mixed indicator; The raw material is composed of microcrystalline cellulose and bentonite; Wherein the mixing indicator is a mixture of two or more indicators.

In the above, the mixing indicator is characterized in that the discoloration range is different, and the colors differ from each other in acidity and basicity.

In the above, the mixing indicator may be selected from the group consisting of Bromothymol blue, Thymol blue, Methyl orange, Bromocresol green, Bromocresol purple, Phenolphtalein, Bromophenol, Cresol red, Methyl red, Bromophenol blue, and the like.

In the above, the mixing indicator is characterized by being composed of bromothymol blue and thymol blue.

In the above, the mixing indicator is characterized by dissolving in ethanol.

The raw material is mixed with 3 to 7 parts by weight of bentonite per 100 parts by weight of microcrystalline cellulose to form a mixed raw material.

35 to 45 parts by weight of a mixing indicator and 17 to 23 parts by weight of distilled water are added to and mixed with 100 parts by weight of the mixed raw material.

Wherein the mixed raw material is dried at 78 to 83 캜 so that the content of distilled water added is more than 0% by weight and less than 10% by weight.

The discoloring agent according to the present invention is produced by the method according to any one of the above-mentioned items.

The discoloring agent according to the present invention is in the form of a pellet, and is easy to carry and install, and is easy to use, and has an effect of facilitating post-management such as replacement of a discoloring agent. In addition, when the acid and basic gas leaks, the gas contacts with the discoloring agent, thereby visually checking the presence or the position of the gas leaking through the color change of the discoloring agent and taking measures.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing an experiment on an acid gas of a discoloring agent according to the present invention,
2 is a schematic diagram showing an experiment for a basic gas of a color fading agent according to the present invention,
3 is a flowchart of a method for producing a discoloring agent according to the present invention,
4 is a view showing a molding apparatus for molding a color fading agent according to the present invention.

Hereinafter, the discoloring agent and the method for producing a discoloring agent according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic diagram showing an experiment on an acid gas of a discoloring agent according to the present invention, FIG. 2 is a schematic diagram showing an experiment on a basic gas of a discoloring agent according to the present invention, FIG. Fig. 4 is a view showing a molding apparatus for molding a color fading agent according to the present invention. Fig.

The discoloring agent (100) according to the present invention enables visual inspection of gas emitted from a semiconductor factory or the like. The discoloration agent 100 is composed of a raw material and a mixed indicator.

The raw materials include bentonite and microcrystalline cellulose. The bentonite is used in an amount of 3 to 7 parts by weight per 100 parts by weight of microcrystalline cellulose. The bentonite and microcrystalline are mixed to produce a mixed raw material.

The blending indicator is composed of a mixture of two or more indicators. Examples of the indicator include Bromothymol blue, Thymol blue, Methyl orange, Bromocresol green, Bromocresol purple, Phenolphtalein, Bromophenol, Cresol red, Methyl red, Bromophenol blue, and the like. The mixing indicator is added in an amount of 3.5 to 4.5 parts by weight per 100 parts by weight of the mixed raw material.

The color fading agent (100) according to the present invention is obtained by mixing a mixing indicator with a mixed raw material.

≪ Example 1 > Preparation of mixed indicator

4 g of bromothymol blue (manufacturer: DAEJUNG) is dissolved in 5 L of ethanol. 5 g of thymol blue (manufacturer: DAEJUNG) is added to a solution in which bromothymol blue is dissolved and then dissolved (ST-150; preparation of mixed indicator). If necessary, it may be diluted with ethanol.

≪ Example 2 > Preparation of discoloring agent

Microcrystalline cellulose and bentonite are prepared (ST-110). 10 kg of microcrystalline cellulose (manufacturer: MINGTAI CHEMICAL) is mixed with 0.5 kg of bentonite (manufactured by TEPCO Reagent) (ST-131; raw material mixture).

4 L of the mixed indicator prepared in Example 1 is added to the mixed raw material. After addition of the mixing indicator, add 1.7 to 2.3 L of distilled water. Mix the ingredients mixed with the indicator and distilled water evenly and mix (ST-170; mix dough preparation). The technique of mixing down is not known in the detailed description as a known technique.

The finished mixed dough (ST-170) is poured into the molding machine 10 to form a pellet shape (for example, a diameter of 3 to 5 mm and a length of 3 to 5 mm) (ST-180; ).

The mixed dough (ST-170) molded in the form of pellets was dried so that the content of distilled water (hereinafter referred to as "moisture content") added in the oven at 78 to 83 DEG C was less than 10 wt% -190) discoloration agent is completed. If the moisture content is 10% by weight or more, the discoloring agent according to the present invention has a reduced strength and a problem that it can not be retained in an excessive amount of water and can be decomposed. When the moisture content is more than 0% by weight and less than 10% by weight, the strength of the discoloring agent is increased and the shape is maintained even when moisture is absorbed.

The molding machine 10 includes a housing 11, a driving shaft 12, a motor 13, a screw 13, and a forming roll 15. The housing 11 is provided with a hollow body. A drive shaft 12 is provided in the housing 11 in a vertical direction. A screw (13) is provided under the housing (11).

A motor 13 is disposed above the drive shaft 12. A screw 13 is provided under the drive shaft 12. The motor 13 is operated and the screw 13 is rotated.

The forming roll 15 is spaced apart from the lower portion of the housing 11. A plurality of the forming rolls 15 are provided. The forming rolls 15 are spaced from each other in the width direction. The forming roll 15 is rotated facing inward. A conveyor 16 may be provided below the forming roll 15 to be spaced downward.

[0031] Looking closely at the pellet molding step (ST-180)

The mixed dough (ST-170) is put into the housing 11 of the molding machine 10. The motor 14 is operated to drive the screw 13. The charged mixed dough (ST-170) is transferred to the forming roll 15 through the screw 13. The mixed dough passes through a forming roll 15 and is formed into a pellet shape.

Indicator Bromothiol Blue and Tymol Blue are added to the discolorant in neutral to yellow, acidic to red, and basic to blue. The discoloring agent according to the present invention is not affected by the concentration of the mixing indicator, the condition of the reactant, and the temperature.

<Experimental Example 1> Color change according to concentration of a coloring agent according to an acid / base solution

(Sample A) In the mixing indicator preparation step (ST-150), 10 parts by weight of ethanol is added to 90 parts by weight of the mixing indicator to dilute (ST-153; indicator dilution). A mixed dough is prepared (ST-170) with a diluted mixed indicator and dried (ST-190) to prepare a powder type discoloration agent.

(Sample B) In the mixing indicator preparation step (ST-150), 50 parts by weight of ethanol is added to 50 parts by weight of the mixed indicator to dilute the indicator (ST-153). A mixed dough is prepared (ST-170) with a diluted mixed indicator and dried (ST-190) to prepare a powder type discoloration agent.

(Sample C) A mixed dough is prepared (ST-170) with a stock solution of the indicator and dried (ST-190) to prepare a powder type discoloration agent.

An HCl solution (acidic) and NH ₃ solution (basic) having a concentration of 10 ppm are prepared and added to the prepared samples A, B and C to confirm color change. The density of the changed color is observed in the order of Sample C &gt; Sample B &gt; The discoloring agent according to the present invention is visually observed for color change in an acid / base solution.

<Experimental Example 2> Color change according to concentration of a mixed indicator of discoloring agent depending on acid and base gas

(Sample A) In the mixing indicator preparation step (ST-150), 10 parts by weight of ethanol is added to 90 parts by weight of the mixed indicator to dilute the indicator (ST-153). Mixed dough is prepared (ST-170) with a diluted mixture indicator and molded into pellets (ST-180) and dried (ST-190) to prepare a discoloration agent having a diameter of 1.6 mm.

(Sample B) In the mixing indicator preparation step (ST-150), 50 parts by weight of ethanol is added to 50 parts by weight of the mixed indicator to dilute the indicator (ST-153). Mixed dough is prepared (ST-170) with a diluted mixture indicator and molded into pellets (ST-180) and dried (ST-190) to prepare a discoloration agent having a diameter of 1.6 mm.

(Sample C) A mixed dough is prepared (ST-170) with a stock solution of the indicator reagent (ST-180) and dried (ST-190) to prepare a discoloring agent having a diameter of 1.6 mm.

1, air and HCl (g) are introduced into the chamber 3 to produce an acid gas having a concentration of 600 ppm. The produced acid gas is introduced into the discoloring agent storage device 7 through the pipe from the chamber 3. At this time, the flow rate of the acid gas is 5 LPM. A specimen spot 5 provided with a sample is positioned between the chamber 3 and the tube connecting the discoloration agent apparatus 7.

The basic gas is, as shown in Figure 2, flows into the air (Air) in the gas generating device (9) equipped with a NH ₃ produces a high concentration of NH ₃ (g). And the NH ₃ (g) generated in the gas generator 9 is moved from the gas generator 9 to the chamber 3. Air is introduced into the chamber 3 to produce a basic gas having a concentration of 1000 ppm. The produced basic gas is introduced into the discoloring agent apparatus 7 through the tube from the chamber 3. At this time, the flow rate of the basic gas is 5 LPM. A specimen spot 5 provided with a sample is positioned between the chamber 3 and the tube connecting the discoloration agent apparatus 7.

Samples A, B, and C are placed on the sample point (5) to check the color change. The density of the changed color is observed in the order of Sample C &gt; Sample B &gt; The discolorant according to Experimental Example 2 is visually observed for color change in an acidic or basic gas.

&Lt; Experimental Example 3 &gt;

Samples A, B, and C prepared in Experimental Example 2 were left at 78 to 83 캜 for 72 hours. After leaving for 72 hours, there is no change in color for the samples A, B, and C. Further, there is no color change due to heat before and after the reaction, and the performance of the discoloring agent is not changed.

Through the above experiments, the discoloration agent 100 according to the present invention is stable to heat and exhibits a color change by reacting not only with an acid-base solution but also in a gas phase. The color fading agent 100 has an effect of confirming the pH of the gas which can not be visually recognized through the color change and confirming the position of the leaked gas.

Although the color fading agent and the method of producing a color fading agent according to the present invention have been described with reference to the embodiments shown in the drawings, the present invention is merely illustrative and any person skilled in the art can make various modifications and equivalent embodiments therefrom. I will understand. Accordingly, the scope of the true technical protection should be determined by the technical idea of the appended claims.

3: Mixing chamber 5: Sampling point
7: discoloring agent device 9: gas generator
10: Pelletizer
11: Housing 12:
13: screw 14: motor
15: forming roll 16: conveyor
17: Pellets

Claims (9)

Consisting of raw materials and mixing indicators; The raw material is composed of microcrystalline cellulose and bentonite; Wherein the mixing indicator is a mixture of two or more indicators. The method for producing a discoloration agent according to claim 1, wherein the mixing indicator has a different discoloring range and different colors from acidity and basicity. The method of claim 1, wherein the mixing indicator is selected from the group consisting of Bromothymol blue, Thymol blue, Methyl orange, Bromocresol green, Bromocresol purple, , Phenolphthalein, bromophenol, cresol red, methyl red, bromophenol blue, and the like. The method for producing a discoloration agent according to claim 1, The method for producing a discoloration agent according to claim 1, wherein the mixing indicator is composed of bromothymol blue and thymol blue. 5. The method according to claim 4, wherein the mixing indicator is dissolved in ethanol. 2. The method according to claim 1, wherein the raw material is mixed with 3 to 7 parts by weight of bentonite per 100 parts by weight of microcrystalline cellulose to form a mixed raw material. The method according to claim 6, wherein 35 to 45 parts by weight of a mixing indicator and 17 to 23 parts by weight of distilled water are added to and mixed with 100 parts by weight of the mixed raw material. The method for producing a discoloration agent according to claim 7, wherein the mixed raw material is dried at 78 to 83 캜 so that the content of distilled water added is more than 0 wt% and less than 10 wt%. A discoloration agent produced by the method of any one of claims 1 to 6.

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