KR20160075978A - Deformable mirror module - Google Patents

Abstract

The present invention provides a modified mirror module. The deformable mirror module includes a deformed mirror having a cooling water path disposed therein and a plurality of driving elements adhered to a rear surface of the deformed mirror to deform the deformed mirror, wherein each of the driving elements is adhered to the rear surface of the deformed mirror A supporting portion for supporting the deformed mirror, and a driving portion connected to the supporting portion and deforming the deformed mirror.

Description

[0001] The present invention relates to a deformable mirror module,

The present invention relates to a deformable mirror module, and more particularly to a deformable mirror module having a cooling water path therein.

Telescopes and high power lasers use adaptive optics to compensate for atmospheric wavefront distortion. Deformation mirrors in adaptive optics are key components. The deformed mirror is a thin mirror, and the driving part arranged at the rear deforms the mirror surface to the desired shape. However, in an optical system using a high-power laser, the energy absorption of the deformed mirror due to the high-power laser causes heat distortion, which causes mirror surface distortion.

It is a technical object of the present invention to provide a deformable mirror module capable of cooling a deformed mirror without a separate cooling device.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a deformable mirror module capable of reducing the stress between a deformable mirror and a driving element.

The present invention provides a modified mirror module. The deformable mirror module includes a deformed mirror having a cooling water path disposed therein and a plurality of driving elements adhered to a rear surface of the deformed mirror to deform the deformed mirror, wherein each of the driving elements is adhered to the rear surface of the deformed mirror A supporting portion for supporting the deformed mirror, and a driving portion connected to the supporting portion and deforming the deformed mirror.

By way of example, the cooling water is arranged to be symmetrical with respect to each other at the center of the deformed mirror.

According to an example, the cooling water has a plurality of inlets and a plurality of outlets formed along a side surface of the deformed mirror, and the inlets and outlets adjacent to each other are connected to each other through main flow paths provided in the deformed mirror .

According to an example, the adjacent plurality of main flow paths are connected to each other through an auxiliary flow path.

According to an example, the auxiliary flow paths are smaller in width than the main flow paths.

According to one example, the support portion includes a body portion extending in a first direction toward the deformed mirror and having a fastening portion, and a deformed portion connected to the body portion.

According to an embodiment, the deformed portion includes a plurality of bars extending in a second direction or a third direction perpendicular to the first direction, and the extending directions of the plurality of bars are orthogonal to each other.

By way of example, the body portion and the deformable portion are provided in a plurality, and the body portion and the deformable portion are arranged alternately.

According to an example, the body portion includes a first body portion, a second body portion, and a third body portion, wherein the deformable portion includes a first deformable portion and a second deformable portion, And the second deforming portion is disposed between the second body portion and the third body portion.

According to an example, the supporting portion and the driving portion are fixed to each other through a screw, and the driving element is coupled to the rear surface of the deformed mirror through an adhesive.

According to an example, the fixing device further includes a fixing plate to which the driving elements are fixedly coupled, and the fixing plate is positioned to face the deforming mirror via the driving elements.

According to another aspect of the present invention, there is provided a deformed mirror module including: a deformed mirror having a front surface, a rear surface, and a side surface facing each other; a plurality of supports attached to the rear surface of the deformed mirror to support the deformed mirror; And a plurality of driving parts for driving the deformed mirror, wherein the deformed mirror is formed in the same shape, and is provided with a plurality of main flow paths each having an inlet and an outlet.

According to an example, the plurality of main flow paths are spaced apart from each other at regular intervals.

According to an embodiment, the cooling water further includes an auxiliary flow path connecting the main flow paths adjacent to each other.

According to the embodiment of the present invention, a cooling water path can be formed inside the deformed mirror to easily cool the deformed mirror, and the cooling water path can be formed symmetrically so that the entire deformed mirror can be uniformly cooled. Further, it is possible to reduce the stress between the deforming mirror and the driving element by providing the driving element having the supporting portion.

1 is a view showing a modified mirror module according to an embodiment of the present invention.
Figure 2 is a cross-sectional view of the modified mirror module of Figure 1;
3 is a view showing a modified mirror according to an embodiment of the present invention.
Fig. 4 is a view showing the inside of the deformed mirror of Fig. 3;
5 is a view showing a support according to an embodiment of the present invention.
Figure 6 is an exploded cross-sectional view of the support of Figure 5;
Figs. 7 and 8 are views showing that pressure is applied to the deformed mirror by the support. Fig.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

In addition, the embodiments described herein will be described with reference to cross-sectional views and / or plan views, which are ideal illustrations of the present invention. In the drawings, the thicknesses of the films and regions are exaggerated for an effective description of the technical content. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. Therefore, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the forms that are generated according to the manufacturing process. For example, the etched area shown at right angles may be rounded or may have a shape with a certain curvature. Thus, the regions illustrated in the figures have schematic attributes, and the shapes of the regions illustrated in the figures are intended to illustrate specific types of regions of the elements and are not intended to limit the scope of the invention.

FIG. 1 is a view showing a modified mirror module according to an embodiment of the present invention, and FIG. 2 is a sectional view of the modified mirror module of FIG.

Referring to FIGS. 1 and 2, the deformable mirror module 1 may include a deformable mirror 100, a driving element 400, and a fixing plate 500. The deformable mirror 100 and the driving element 400 may be combined using an adhesive.

The deformed mirror 100 may have a front surface 100a, a rear surface 100b, and a side surface 100c facing each other. The front surface 100a of the deformable mirror 100 may be a reflecting surface. The front surface 100a may have a convex shape, a concave shape, and a flat shape. The rear face 100b may have a flat shape.

The driving element 400 may include a supporting part 200 and a driving part 300. The driving element 400 is bonded to the rear surface 100b of the deformed mirror 100 to support and drive the deformed mirror 100. [ A plurality of driving elements 400 are provided, and the deformed mirror 100 can be finely deformed. The supporting part 200 is adhered to the rear face 100b of the deformed mirror 100 and can support the deformed mirror 100. [ For example, the support 200 may be aluminum. The stress generated between the deformable mirror 100 and the driving element 400 can be reduced by the supporting part 200. [ The shape of the support portion 200 will be described later. The driving unit 300 may be connected to the supporting unit 200. The driving unit 300 can deform the deformed mirror 100. [ For example, the driving unit 300 may be a motor that can be moved up and down.

A first fastening member 610 may be provided between the support part 200 and the driving part 300. [ The first connecting member 610 may be, for example, a bolt, a nut or a rivet.

The fixing plate 500 may be positioned opposite the deformed mirror 100 via the driving element 400. A plurality of driving elements 400 may be fixedly coupled to the fixing plate 500.

A second fastening member 630 may be provided between the driving unit 300 and the fixing plate 500. The second connecting member 630 may be, for example, a bolt, a nut or a rivet. A third fastening member 650 may be provided on the lower surface of the fixing plate 500. The third connecting member 650 may be, for example, a bolt, a nut or a rivet. The fastening member 600 may include a first fastening member 610, a second fastening member 630, and a third fastening member 650.

FIG. 3 is a view showing a deformed mirror according to an embodiment of the present invention, and FIG. 4 is a view showing the inside of a deformed mirror of FIG.

3 and 4, an inlet 110 and an outlet 120 through which cooling water flows in and out of the side surface 100c of the deformed mirror 100 may be provided. The inlet 110 may include a first inlet 110a, a second inlet 110b, a third inlet 110c and a fourth inlet 110d. The outlet 120 may include a first outlet 120a, a second outlet 120b, a third outlet 120c, and a fourth outlet 120d.

A cooling water channel 150 may be provided inside the deformed mirror 100. The cooling water passages 150 may be disposed symmetrically with respect to each other in all directions at the center of the deformed mirror 100. The cooling water path 150 may include main flow paths 130a, 130b, 130c and 130d and auxiliary flow paths 140a, 140b, 140c and 140d. The main flow channels 130a, 130b, 130c and 130d may include a first main flow channel 130a, a second main flow channel 130b, a third main flow channel 130c and a fourth main flow channel 130d, The auxiliary flow paths 140a, 140b, 140c and 140d may include a first auxiliary flow path 140a, a second auxiliary flow path 140b, a third auxiliary flow path 140c and a fourth auxiliary flow path 140d. The first inlet 110a and the first outlet 120a may be connected to each other through the first main passage 130a and the second inlet 110b and the second outlet 120b may be connected to each other through the second main passage 130b The third inlet 110c and the third outlet 120c may be connected to each other through the third main passage 130c and the fourth inlet 110d and the fourth outlet 120d may be connected to each other through the fourth And may be connected to each other through the main flow path 130d. The first main passage 130a, the second main passage 130b, the third main passage 130c and the fourth main passage 130d may be spaced apart from each other by a predetermined distance. The main flow path 130 may have a U-shape, but is not limited thereto.

The plurality of adjacent main flow paths 130a, 130b, 130c, and 130d may be connected to each other through a plurality of auxiliary flow paths 140a, 140b, 140c, and 140d. That is, the first auxiliary passage 140a can connect the first main passage 130a and the second main passage 130b, and the second auxiliary passage 140b can connect the second main passage 130b and the third main passage 130b, The third auxiliary flow path 140c can connect the third main flow path 130c and the fourth main flow path 130d and the fourth auxiliary flow path 140d can connect the fourth main flow path 130d And the first main flow path 130a. The auxiliary flow paths 140a, 140b, 140c, and 140d may have a width smaller than that of each of the main flow paths 130a, 130b, 130c, and 130d. Warpage may occur in the deformed mirror 100 when the temperature of a part of the deformed mirror 100 is raised by the incident laser. The cooling water can be moved between the main flow paths 130a, 130b, 130c and 130d through the auxiliary flow paths 140a, 140b, 140c and 140d, and uniformity of the temperature of the entire deformable mirror 100 can be maintained have.

According to the general technology, when the deformed mirror 100 used in the optical system for high output laser is cooled, the high output laser causes serious damage to the structure of the deformed mirror 100 as well as the front surface 100a of the deformed mirror 100 . In addition, deformation may occur in the cooling water passage 150 and the deformed mirror 100 according to the hydraulic pressure of the cooling water flowing into the cooling water passage 150. Therefore, according to the embodiment of the present invention, the cooling water path 150 can be designed inside the deformed mirror 100 to increase the cooling efficiency and to eliminate the need for an additional cooling system. In addition, the cooling water path 150 may be symmetrically provided to prevent deformation of the cooling water path 150 and the deformed mirror 100 according to the hydraulic pressure of the cooling water.

FIG. 5 is an exploded cross-sectional view of a driving device according to an embodiment of the present invention, and FIG. 6 is a view illustrating a supporting part according to an embodiment of the present invention. A description of the redundant configuration will be omitted for the sake of brevity.

Referring to FIGS. 5 and 6, the driving element 400 may include a support portion 200 and a driving portion 300. The support portion 200 may include a body portion 220 extending in a first direction z toward the deformed mirror 100 and a deformation portion 240 having a smaller transverse sectional area than the body portion 220. The body part 220 may include a first body part 220a, a second body part 220b, and a third body part 220c. The deformable portion 240 may include a first deformable portion 240a and a second deformable portion 240b. The deformable portion 240 may be in a bar shape extending in a second direction x or a third direction y perpendicular to the first direction z. The first deformable portion 240a and the second deformable portion 240b may be perpendicular to each other. The first deformed portion 240a may be disposed between the first body portion 220a and the second body portion 220b and the second deformed portion 240b may be disposed between the second body portion 220b and the second body portion 220b. And the third body part 220c. 5, the deformable portion 240 may have an 'I' shape. A fastening part 225 may be provided inside the support part 200. The first fastening member 610 may be connected to the fastening portion 225. For example, the fastening portion 225 may be a female screw, and the first fastening member 610 may be a male screw.

The shape of the deforming portion 240 described above can reduce the stress generated between the deforming mirror 100 and the driving device 400. [

Unlike the above, there is no limitation on the number of the deforming portion 240 and the body portion 220.

A first fastening member 610 may be provided between the support part 200 and the driving part 300. [ A second fastening member 630 may be provided between the driving unit 300 and the fixing plate 500. A third fastening member 650 may be provided on the lower surface of the fixing plate 500. The first connecting member 610, the second connecting member 630 and the third connecting member 650 may be, for example, bolts, nuts or rivets. The supporting part 200 and the deforming mirror 100, the first fastening member 610 and the driving part 300, and the driving part 300 and the second fastening part 630 may be bonded together with an adhesive.

When the driving unit 300 is replaced, only the driving unit 300 can be separated from the supporting unit 200 without removing the adhesive. That is, since the fastening member 600 is a bolt, a nut, or a rivet, the driving unit 300 can be easily replaced.

Figs. 7 and 8 are views showing that pressure is applied to the deformed mirror by the support. Fig.

In Fig. 7, which shows a general technique, no supporting portion is provided for the driving elements 1400a, 1400b, and 1400c. When the driving elements 1400a, 1400b, and 1400c move up and down to deform the deformed mirror 1100, pressure can be applied to the deformed mirror 1100. [ Accordingly, stress may be generated between the deformable mirror 1100 and the driving elements 1400a, 1400b, and 1400c, and the adhesive may be dropped. When a length of the first driving element 1400a is changed, a large amount of pressure is applied to the first portion A directly contacting the first driving element 1400a. When the length of the second driving element 1400b is changed, A large amount of pressure is applied to the second portion B directly in contact with the third driving element 1400c and the third portion C in direct contact with the third driving element 1400c when the length of the third driving element 1400c is changed Pressure is applied.

In FIG. 8, the supporting portions 200a, 200b, and 200c may be provided on the driving elements 400a, 400b, and 400c as in the embodiment of the present invention. The support portions 200a, 200b and 200c are configured to reduce the stress between the deformable mirror 100 and the driving element 400 by the deforming portions 240a and 240b formed on the supporting portions 200a, 200b and 200c . When a length of the first driving element 400a is changed, a large amount of pressure is applied to the first portion A which directly contacts the first driving element 400a. When the length of the second driving element 400b is changed, A large amount of pressure is applied to the second portion B directly contacting the third driving element 400c and the third portion C directly contacting the third driving element 400c when the length of the third driving element 400c is changed Pressure is applied.

Table 1 shows simulation results according to FIG. 7 showing a general technique, and Table 2 shows simulation results according to an embodiment of the present invention. Comparing Table 1 and Table 2, as the support portions 200a, 200b, and 200c are present, the stress generated between the deformable mirror 100 and the driving device 400 is reduced by a maximum of 0.71 MPa. As the stress generated between the deformable mirror 100 and the driving element 400 is reduced, the pressure applied to the adhesive portion and the deformable mirror 100 can be reduced.

The first portion (A) The second portion (B) The third portion (C) When the length of the first driving element has changed 1.28 MPa 1.03 MPa 1.03 MPa When the length of the second driving element has changed 0.68 MPa 0.97 MPa 0.47 MPa When the length of the third driving element is changed 0.68 MPa 0.47 MPa 0.97 MPa

The first portion (A) The second portion (B) The third portion (C) When the length of the first driving element has changed 1.01 MPa 0.38 MPa 0.38 MPa When the length of the second driving element has changed 0.18 MPa 0.26 MPa 0.25 MPa When the length of the third driving element is changed 0.18 MPa 0.25 MPa 0.26 MPa

Claims (14)

A deformation mirror in which a cooling water path is disposed; And
And a plurality of driving elements adhered to the rear surface of the deformed mirror to deform the deformed mirror,
Each of the driving elements comprises:
A support attached to the rear surface of the deformed mirror and supporting the deformed mirror; And
And a driving part connected to the supporting part and adapted to deform the deforming mirror. The method according to claim 1,
Wherein the cooling water is arranged to be symmetrical with respect to each other at the center of the deformed mirror. 3. The method of claim 2,
Wherein the cooling water has a plurality of inlets and a plurality of outlets formed along a side surface of the deformed mirror,
Wherein the inlets and the outlets adjacent to each other are connected to each other through main flow paths provided in the deforming mirror. The method of claim 3,
And the adjacent plurality of main flow paths are connected to each other through an auxiliary flow path. 5. The method of claim 4,
Wherein the auxiliary flow paths are smaller in width than the main flow paths. The method according to claim 1,
Wherein the support comprises:
A body portion extending in a first direction toward the deformed mirror and having a fastening portion; And
And a deforming portion connected to the body portion. The method according to claim 6,
Wherein the deforming portion includes a plurality of bars extending in a second direction or a third direction perpendicular to the first direction,
Wherein the plurality of bars extend in a direction perpendicular to one another. The method according to claim 6,
Wherein the body portion and the deforming portion are provided in a plurality, and the body portions and the deforming portion are alternately arranged. 9. The method of claim 8,
Wherein the body portion includes a first body portion, a second body portion, and a third body portion,
Wherein the deforming portion includes a first deforming portion and a second deforming portion,
Wherein the first deforming portion is disposed between the first body portion and the second body portion, and the second deforming portion is disposed between the second body portion and the third body portion. The method according to claim 1,
Wherein the supporting portion and the driving portion are fixed to each other via a screw, and the driving element is coupled to the rear surface of the deformed mirror through an adhesive. The method according to claim 1,
Further comprising a fixing plate to which the driving elements are fixedly coupled,
Wherein the fixing plate is positioned to face the deformed mirror with the driving elements interposed therebetween. A deformation mirror having front, rear and side surfaces facing each other;
A plurality of supports bonded to the rear surface of the deformed mirror to support the deformed mirror; And
And a plurality of driving parts connected to the supporting parts to drive the deforming mirror,
Wherein the deformed mirror is provided with a cooling water path including a plurality of main flow paths each having an inlet port and an outlet port. 13. The method of claim 12,
Wherein the plurality of main flow paths are spaced apart from each other by a predetermined distance. 13. The method of claim 12,
As the cooling water,
And an auxiliary flow path connecting the main flow paths adjacent to each other.

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