KR20160074741A - A novel boron carbon based piezoelectric material and a film and a device using the same - Google Patents
A novel boron carbon based piezoelectric material and a film and a device using the same Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 81
- PPWPWBNSKBDSPK-UHFFFAOYSA-N [B].[C] Chemical compound [B].[C] PPWPWBNSKBDSPK-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229920000620 organic polymer Polymers 0.000 claims abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052796 boron Inorganic materials 0.000 claims abstract description 7
- 238000004519 manufacturing process Methods 0.000 claims description 12
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 7
- 238000009830 intercalation Methods 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000002687 intercalation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000002156 mixing Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 37
- 238000000034 method Methods 0.000 description 18
- 239000010410 layer Substances 0.000 description 13
- 238000005452 bending Methods 0.000 description 10
- 239000000843 powder Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- TZHYBRCGYCPGBQ-UHFFFAOYSA-N [B].[N] Chemical compound [B].[N] TZHYBRCGYCPGBQ-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000010532 solid phase synthesis reaction Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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Abstract
본 발명은 신규한 보론카본계 압전재료와 이를 이용한 필름 및 소자에 관한 것으로서, 더욱 상세하게는 보론나이트라이드(BN)와 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질의 보론카본계 압전재료와 이를 유기중합체와 혼합하여 기판에 형성된 필름 및 이를 이용한 소자를 제조하여 활용할 수 있도록 하는 신규한 보론계 압전재료와 이를 이용하는 필름 및 소자에 관한 것이다.The present invention relates to a novel boron-based carbon piezoelectric material and a film and an element using the same. More particularly, the present invention relates to a novel boron-carbon-based piezoelectric material and a film and an element using the boron carbon oxynitrate (BCNO) The present invention relates to a novel boron-based piezoelectric material capable of mixing a boron-carbon-based piezoelectric material of an anisotropic material with an organic polymer to form a film formed on the substrate and a device using the same, and a film and an element using the same.
Description
본 발명은 신규한 보론카본계 압전재료와 이를 이용한 필름 및 소자에 관한 것으로서, 더욱 상세하게는 보론나이트라이드(BN)에 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질의 보론카본계 압전재료와 이를 유기중합체와 혼합하여 기판에 형성된 필름 및 이를 이용한 소자를 제조하여 활용할 수 있도록 하는 신규한 보론계 압전재료와 이를 이용하는 필름 및 소자에 관한 것이다.
The present invention relates to a novel boron carbon-based piezoelectric material and a film and a device using the same. More particularly, the present invention relates to a novel boron carbon-based piezoelectric material, and more particularly, to a boron nitride thin film made of boron carbon oxynitrate (BCNO) by intercalating carbon into boron nitride The present invention relates to a novel boron-based piezoelectric material, and a film and an element using the boron-carbon-based piezoelectric material.
압전(壓電) 재료는 기계적 에너지가 전기적 에너지로 변환되는 특성을 갖고 있는 재료로서, 이 물질의 응용 분야로 착화소자, 부저, 레조네이터, 초음파 진동자, 압전 스피커, 적외선 센서 등에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전 모터, 압전 트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프(수평각도제어기), 광변위 소자 등에 이르기까지 매우 다양하게 사용하고 있다. Piezoelectric material is a material that has the characteristic that mechanical energy is converted into electric energy. The application field of this material is advanced high value added type such as ignition device, buzzer, resonator, ultrasonic vibrator, piezoelectric speaker, They range from inkjet printers, piezoelectric motors, piezoelectric transformers, medical ultrasonic devices, military SONAR, gyroscopes, and optical displacement devices.
종래의 압전 재료는 크게 Pb 계와 Non-Pb계로 나누어 지며, 대표적인 Pb 계인 PZT(PbZrTiO3)는 우수한 압전성에도 불구하고 불안정한 화학적 특성, 인체 및 환경에 유해성 문제가 있다. 또한, Non-Pb 계 압전 재료인 BaTiO3, Bi 층상 화합물, Tungsten-Bronze 구조 화합물 등은 상대적으로 Pb 계의 PZT 압전 특성에 비해 열위한 단점을 가지고 있다.Conventional piezoelectric materials are mainly divided into Pb-based and non-Pb-based piezoelectric materials. Typical Pb-based PZT (PbZrTiO 3 ) has unstable chemical properties and harmful effects on the human body and environment in spite of excellent piezoelectric properties. In addition, BaTiO 3 , Bi layered compound, and Tungsten-Bronze structural compound, which are non-Pb piezoelectric materials, have disadvantages compared with Pb-based PZT piezoelectric characteristics.
따라서, 이러한 Pb 계 및 Non-Pb 계 압전 재료의 단점을 해결하기 위해, 외부 환경에 대해 구조적 및 화학적으로 안정되고 인체 및 환경에 유해성이 없는 우수한 압전 재료에 대한 연구가 필요하다. Therefore, in order to solve the disadvantages of such Pb-based and non-Pb-based piezoelectric materials, it is necessary to study excellent piezoelectric materials that are structurally and chemically stable to the external environment and are not harmful to human and environment.
압전 재료의 사용은 크게 두 가지로 나눌 수가 있는데, 압전 효과를 이용하여 전기 에너지를 생산하는 제네레이터(Generator)가 첫 번째이고, 역압전 효과를 이용하여 진동 등의 물리적 변위를 만들어내는 액튜에이터(Actuator)가 두 번째이다.The use of piezoelectric materials can be roughly classified into two types. The first is a generator that produces electric energy using the piezoelectric effect, and the second is an actuator that generates physical displacements such as vibration by using an inverse piezoelectric effect. Is the second.
그 중에서, 액튜에이터를 제작하는 방법으로는 압전체 박막 형태가 가장 많이 이용되고 있으며, 주로 전기 에너지를 가하여 진동을 발생시키는 구조이다. 그러나 순수 압전체 박막을 사용하기 때문에 유연성과 투명도를 갖지 못한다. 그러므로 향후, 압전 액튜에이터는 진동뿐만이 아니라, 디바이스가 휘어지는 벤딩 모드의 구현, 디스플레이 소자에 이용될 수 있는 투명한 압전층의 구현이 필요한 실정이다.Among them, the piezoelectric thin film type is most widely used as a method of manufacturing the actuator, and it is a structure that generates vibration mainly by applying electric energy. However, since the piezoelectric thin film is used, it has no flexibility and transparency. Therefore, in the future, it is necessary to realize not only the vibration but also the bending mode in which the device is bent, and the transparent piezoelectric layer that can be used in the display device in the future.
종래 JP 특개 제2012-211278호에서는 B-C-N-O 형광체의 제조방법으로서, 질소붕소 화합물을 산화 분위기 하에서 소성 산화 소성 공정을 포함하고, 상기 질소 붕소 화합물을 구성하는 붕소와 질소의 몰비가 0.05 : 1 ~ 0.5 : 1의 범위인 것을 특징으로 하는 붕소 (B), 탄소 (C), 질소 (N) 및 산소 (O)로 구성된 B-C-N-O 형광체의 제조방법에 관하여 제안하고 있다. 또한 JP 특개 제2013-010878호에서는 붕산 및/또는 붕산 유도체와 분해 온도 200 ℃ 이상의 질소붕소 고분자 화합물을 혼합하여 열분해 공정에 붙이고 형광체 전구체를 제조하는 전구 컨디션 제 공정과, 상기 형광체 전구체를 산화 분위기 하에서 소성 산화 소성 공정을 적어도 포함 B-C-N-O 형광체의 제조방법이 제안되어 있다.Conventional JP Specification No. 2012-211278 discloses a method for producing a BCNO phosphor that includes a step of calcining and oxidizing a nitrogen boron compound under an oxidizing atmosphere, wherein the molar ratio of boron to nitrogen constituting the nitrogen boron compound is 0.05: 1 to 0.5: (B), carbon (C), nitrogen (N), and oxygen (O), which is characterized in that the ratio Further, JP Specification No. 2013-010878 discloses a preconditioning process for preparing a phosphor precursor by mixing a boric acid and / or boric acid derivative with a nitrogen boron polymer compound having a decomposition temperature of 200 ° C or higher and subjecting it to a pyrolysis process, A method of producing a BCNO phosphor including at least a calcination oxidative calcination step has been proposed.
그러나 이러한 종래 기술들은 형광체에 관한 기술로서 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드의 구현과 투명한 압전층에 관하여 제시하지 못하고 있다.However, these prior arts do not disclose the implementation of the bending mode and the transparent piezoelectric layer in the technology relating to the piezoelectric element such as the actuator as the technology relating to the phosphor.
한편, 압전 재료가 사용되는 기술과 관련하여 한국공개특허 제2013-139603호에서는 제 1 플렉서블 기판 상에 제 1 전극층을 형성시키는 단계; 상기 제 1 전극층에 압전 파우더와 중합체를 혼합한 압전 복합체층을 스핀 코팅하는 단계; 상기 압전 복합체층을 열처리하여 경화시키는 단계; 및 상기 경화된 압전 복합체층 상에 제 2 전극층이 형성된 제 2 플렉서블 기판을 접합시키는 단계를 포함하는 플렉서블 압전 에너지 하베스팅 소자의 제조 방법에 제안되어 있으며, 한국공개특허 제2007-69986호에서는 기체와, 상기 기체의 상방에 형성된, 니오븀산 칼륨 나트륨으로 이루어지는 제1 압전체층을 포함하는 압전체 적층체로서, 압전물질로 NKN 물질을 압전 박막으로 사용하는 기술이 제안되어 있다.On the other hand, Korean Patent Laid-Open Publication No. 2013-139603 discloses a technique of forming a first electrode layer on a first flexible substrate in connection with a technique in which a piezoelectric material is used; Spin coating a piezoelectric composite layer obtained by mixing a piezoelectric powder and a polymer in the first electrode layer; Heat-treating and curing the piezoelectric composite layer; And bonding a second flexible substrate on which the second electrode layer is formed on the cured piezoelectric composite layer. In Korean Patent Publication No. 2007-69986, there is proposed a method of manufacturing a flexible piezoelectric energy harvesting device, , And a first piezoelectric layer made of sodium potassium niobate formed above the gas, and using an NKN material as a piezoelectric substance as a piezoelectric substance.
따라서 이러한 종래 기술 역시 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드와 투명한 압전층의 구현에 관하여 제시하지 못하고 있다.
Therefore, such prior art also fails to disclose the bending mode and the implementation of a transparent piezoelectric layer in the art relating to a piezoelectric element such as an actuator.
상기와 같은 종래기술의 문제점을 해결하기 위해, 본 발명은 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드와 투명한 압전층을 구현할 수 있는 압전재료의 제공을 해결과제로 한다.In order to solve the problems of the prior art as described above, it is an object of the present invention to provide a piezoelectric material capable of realizing a bending mode and a transparent piezoelectric layer in a technology relating to a piezoelectric element such as an actuator.
따라서 본 발명의 목적은 종래 압전재료의 단점인 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 문제들을 해결한 친환경적이며 저 원가의 압전재료를 제공하는데 있다.Accordingly, an object of the present invention is to provide an environmentally-friendly and low cost piezoelectric material that solves the problems of chemical instability, harmfulness to the human body and environment, and low piezoelectric characteristics, which are disadvantages of conventional piezoelectric materials.
또한, 본 발명의 다른 목적은 액튜에이터의 압전 소자에 적용 가능하고 유연성이 있는 벤딩 모드의 구현이 가능한 새로운 보론카본계 압전재료를 제공하는데 있다.Another object of the present invention is to provide a novel boron-carbon piezoelectric material which can be applied to a piezoelectric element of an actuator and which can realize a flexible bending mode.
또한, 본 발명의 또 다른 목적은 유기 중합체 내에 압전재료를 함유하되 유연성과 투명성을 가지도록 구현이 가능한 필름을 제공하는데 있다.It is still another object of the present invention to provide a film containing a piezoelectric material in an organic polymer, which can be implemented to have flexibility and transparency.
또한 본 발명의 또 다른 목적은 유기 중합체 내에 압전 재료의 고용 비율을 조절하여 투명성을 확보한 액튜에이터용 소자를 제공하는데 있다.
It is still another object of the present invention to provide an actuator element in which transparency is ensured by controlling the solubility ratio of a piezoelectric material in an organic polymer.
위와 같은 본 발명의 과제 해결을 위하여, 본 발명은 보론나이트라이드 (BN)와 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질에 전계를 가하여 분극(Polarization)이 이루어진 것을 특징으로 하는 보론카본계 압전재료를 제공한다.In order to solve the problems of the present invention, the present invention provides a method of manufacturing a semiconductor device, which comprises applying an electric field to an anisotropic material made of boron carbonitride (BCNO) by intercalating boron nitride (BN) Wherein the piezoelectric material is a carbon-based piezoelectric material.
또한, 본 발명은 상기와 같은 보론카본계 압전재료가 유기 중합체에 혼합되어 후막형태로 형성된 필름을 제공한다.The present invention also provides a film in which the boron carbon-based piezoelectric material is mixed with an organic polymer to form a thick film.
또한 본 발명은 상기 필름을 포함하는 압전 액튜에이터용 소자를 제공한다.
The present invention also provides a piezoelectric actuator element comprising the film.
본 발명에 따른 압전재료는 종래 압전재료의 단점을 극복한 것으로서 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 등의 문제들을 모두 해결한 친환경적인 압전재료를 경제적으로 확보할 수 있다.The piezoelectric material according to the present invention overcomes the disadvantages of the conventional piezoelectric material and can economically secure an environmentally friendly piezoelectric material that solves all problems such as chemical instability, harmfulness to human body and environment, and low piezoelectric property.
또한, 본 발명의 압전재료는 저온 합성 및 단순한 공정을 통해 양산에 적합한 공정을 가지고 있어 저 원가 압전 재료 제조가 가능한 장점을 가지고 있다In addition, the piezoelectric material of the present invention has a process suitable for mass production through low-temperature synthesis and simple processes, and thus has a merit that low-cost piezoelectric materials can be manufactured
또한 본 발명의 압전재료는 수십나노에서 수마이크로의 입자 크기 및 형상 제어가 용이하여, 매우 다양한 분야에 널리 활용될 수 있다.Further, the piezoelectric material of the present invention can easily control particle size and shape of several tens nanometers to several micros, and can be widely used in a wide variety of fields.
특히, 본 발명에 따른 압전소자는 기존의 역압전 효과를 이용한 소자에 관한 발명품과는 달리, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자에 적용할 수 있는 효과가 있다.
In particular, the piezoelectric element according to the present invention can be applied not only to a vibration actuator but also to a bending actuator and a display device, by producing a film having flexibility and transparency, unlike the device using the conventional reverse piezoelectric effect. It is effective.
도 1은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 필름을 제조하는 공정으로 도시한 공정도이다.
도 2는 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 필름에 전극이 적용된 압전 액튜에이터용 소자의 구성도이다.
도 3은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 압전 액튜에이터용 소자가 사용되는 것을 보여주는 사용 모식도이다.1 is a process diagram showing a process for producing a film using BCNO, which is a boron carbon-based piezoelectric material according to the present invention.
2 is a block diagram of a piezoelectric actuator element to which an electrode is applied to a film manufactured using BCNO, which is a boron carbon-based piezoelectric material according to the present invention.
FIG. 3 is a usage diagram showing the use of a piezoelectric actuator element manufactured using BCNO, which is a boron carbon-based piezoelectric material according to the present invention.
이하, 본 발명을 하나의 구현예로서 더욱 상세하게 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail as an embodiment.
본 발명은 보론카본계 압전재료를 보론카본 옥시나이트레이트(BCNO)로 구성하고 이를 기판 위에서 필름으로 형성하고 이를 이용하여 압전 액튜에이터용 소자로 제조하는 기술에 관한 것이다.The present invention relates to a technique of forming a boron carbon-based piezoelectric material from boron carbon oxynitrate (BCNO), forming it on a substrate as a film, and using the same as a device for a piezoelectric actuator.
본 발명의 바람직한 구현예에 따르면, BCNO는 Hexagonal 판상 구조를 갖는 등방성 물질인 보론나이트라이드(BN) 물질에 탄소(Carbon)를 층간삽입 (Intercalation) 하여 이방성 물질인 BCNO로 합성된다. 이러한 이방성 물질인 BCNO에 전계를 가하여 분극(Polarization)을 발생킴으로써 압전 특성이 구현된다.According to a preferred embodiment of the present invention, BCNO is synthesized as an anisotropic material BCNO by intercalating carbon into a boron nitride (BN) material which is an isotropic material having a hexagonal plate-like structure. Piezoelectric properties are realized by applying an electric field to BCNO, which is an anisotropic material, to cause polarization.
이에 대해 좀더 구체적으로 설명하면, 예컨대 본 발명에 따른 보론카본계 압전재료 제조를 위해서는 고상법, 혹은 수열합성법을 통하여 BCNO 분말을 합성한 후 이렇게 제조된 보론카본 옥시나이트라이드와 실리콘계 유기 바인더를 혼합한다. 혼합한 용액을 전극위에 도포한 후, 열로써 용액을 경화시켜 압전특성을 갖는 필름을 제조할 수 있다. 제작된 압전필름에 인위적인 전압을 인가하는 poling 공정을 통해 압전특성을 향상시킬 수 있다.In more detail, for example, in order to produce a boron-carbon piezoelectric material according to the present invention, a BCNO powder is synthesized by a solid-phase method or a hydrothermal synthesis method, and then the boron carbon oxynitride and the silicon-based organic binder thus prepared are mixed . The mixed solution is coated on the electrode, and then the solution is cured by heat to produce a film having piezoelectric characteristics. The piezoelectric characteristics can be improved through a poling process in which an artificial voltage is applied to the manufactured piezoelectric film.
본 발명에 따른 바람직한 구현예에 따르면, 이렇게 제조된 BCNO 압전재료는 3000 ℃ 에 가까운 용융점과 이방성의 wurtzite 구조를 갖는다.According to a preferred embodiment of the present invention, the BCNO piezoelectric material thus manufactured has a melting point close to 3000 ° C and an anisotropic wurtzite structure.
본 발명에 따르면 이러한 BCNO 분말을 이용하여 기판 상에서 필름을 형성하여 제조할 수 있는데, 예컨대 h-BN 분말을 폴리에틸렌글리콜(PEG) 등의 용매 중에서 UREA 등과 같은 유기 중합체와 함께 혼합하여 이를 기판상에 코팅하고 건조하고 소성함으로써 필름을 제조할 수 있다. 이때, 유기 중합체로서는 우레아, 실리콘계열의 유기바인더 등을 사용할 수 있으며, 용매로서는 PEG 를 사용할 수 있다. According to the present invention, such a BCNO powder can be produced by forming a film on a substrate. For example, h-BN powder is mixed with an organic polymer such as UREA in a solvent such as polyethylene glycol (PEG) Followed by drying and firing. At this time, as the organic polymer, urea, silicon-based organic binder, and the like can be used, and as the solvent, PEG can be used.
본 발명의 바람직한 구현예에 따르면, 압전재료를 사용하여 필름을 구성하기 위해서는 압전재료의 사용량이 유동성을 가질 수 있다. 만일 그 압전재료 분말의 사용량이 너무 소량 첨가되면 압전특성 저하의 문제가 있고, 너무 과량 첨가되면 균일한 필름제작 어려움의 문제가 있다.According to a preferred embodiment of the present invention, in order to construct a film using a piezoelectric material, the amount of use of the piezoelectric material may have fluidity. If the amount of the piezoelectric material powder to be used is too small, there is a problem of deterioration of the piezoelectric properties. If the amount of the piezoelectric material powder is too large, uniform film production becomes difficult.
본 발명의 바람직한 구현예에 따르면, 역압전 효과를 이용한 소자를 제작하기 위하여, 유기 중합체와 BCNO 분말을 균일하게 혼합한 후, 전극/기판 위에 필름 형태로 도포하여 필름을 제조할 수 있다.According to a preferred embodiment of the present invention, an organic polymer and a BCNO powder may be uniformly mixed to prepare a device using an inverse piezoelectric effect, and then the film may be coated on the electrode / substrate in the form of a film.
본 발명의 바람직한 구현예에 따르면, 도포된 필름은 100~500 μm 의 두께로 형성할 수 있으며, 용도에 따라 압전재료 분말의 고용 비율과 필름의 두께를 조절할 수 있다. 또한, 적용 방식에 따라 진동 또는 유연성이 있는 휘어짐(벤딩) 효과를 얻을 수 있다.According to a preferred embodiment of the present invention, the coated film may be formed to a thickness of 100 to 500 μm, and the ratio of the piezoelectric material powder and the thickness of the film may be adjusted according to the application. Further, a bending effect having vibration or flexibility can be obtained according to the application method.
상기와 같이, 본 발명에 따르면 본 발명에 따른 압전재료인 BCNO를 이용하여 필름과 소자를 바람직하게 제조할 수 있다.As described above, according to the present invention, films and devices can be preferably manufactured using BCNO, which is a piezoelectric material according to the present invention.
도 1은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 필름을 제조하는 과정을 도시한 공정도이다.FIG. 1 is a process diagram showing a process for producing a film using BCNO, which is a boron carbon-based piezoelectric material according to the present invention.
도 1에 의하면, 유기 중합체에 BCNO를 적합한 비율로 혼합하여 분산시켜서 BCNO 페이스트를 제조한 다음, 전극 기판 위에 BCNO 페이스트를 도포한다. 이때 BCNO의 사용량은 용도에 따라 적절하게 조절하여 유기 중합체에 혼합한다.According to Fig. 1, a BCNO paste is prepared by mixing and dispersing BCNO in an appropriate ratio to an organic polymer, and then BCNO paste is applied on the electrode substrate. At this time, the amount of BCNO to be used is appropriately adjusted according to the application and mixed with the organic polymer.
그 다음으로는, BCNO 페이스트가 도포된 코팅층을 예컨대 80~150 ℃ 에서 열처리하여 경화시킨다. 이렇게 하면 BCNO 페이스트로 이루어진 필름이 형성된다. 이렇게 경화된 코팅층인 BCNO 페이스트층(필름) 위에 전극기판을 연결하여 압전 액튜에이터용 소자를 제조할 수 있다. 이렇게 제조된 압전 액튜에이터용 소자의 구조는 도 2에 도시한 바와 같이 구성될 수 있다. Next, the coating layer coated with the BCNO paste is cured by heat treatment at 80 to 150 ° C, for example. This forms a film of BCNO paste. A piezoelectric actuator element can be manufactured by connecting an electrode substrate to a BCNO paste layer (film) which is a cured coating layer. The structure of the thus fabricated piezoelectric actuator device can be configured as shown in Fig.
도 2는 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 필름에 전극이 적용된 압전 액튜에이터용 소자의 구성도이다. 여기서는 본 발명에 따른 압전재료와 유기 중합체가 혼합된 필름을 포함하는 소자를 보여주고 있다.2 is a block diagram of a piezoelectric actuator element to which an electrode is applied to a film manufactured using BCNO, which is a boron carbon-based piezoelectric material according to the present invention. Here, an element including a film in which a piezoelectric material and an organic polymer according to the present invention are mixed is shown.
이와 같이 본 발명에 따라 제조된 압전재료를 포함하는 필름이 적용된 압전 액튜에이터는 디스플레이 패널 등에 적용되는 경우 그 필름이 유연성과 투명성을 확보하고 있으며, 매우 우수한 물성을 나타낸다.As described above, the piezoelectric actuator to which the film including the piezoelectric material manufactured according to the present invention is applied has excellent flexibility and transparency when applied to a display panel or the like, and exhibits excellent physical properties.
도 3은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 압전 액튜에이터용 소자가 사용되는 것을 보여주는 사용 모식도이다.FIG. 3 is a usage diagram showing the use of a piezoelectric actuator element manufactured using BCNO, which is a boron carbon-based piezoelectric material according to the present invention.
따라서 본 발명은 새로운 압전재료와 이를 이용한 필름, 그리고 이를 포함하는 압전 액튜에이터로 적용될 수 있는 것이다.Therefore, the present invention can be applied to a novel piezoelectric material, a film using the same, and a piezoelectric actuator including the same.
상기한 바와 같이 본 발명에 따르면, 종래 압전 재료의 단점인 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 문제들을 해결한 친환경적이며 저 원가의 신규 압전 재료의 발명과 그것을 이용하여 유연성, 투명도를 갖는 압전 필름을 제조할 수 있다.As described above, according to the present invention, it is possible to provide an eco-friendly and low cost new piezoelectric material which solves the problems of chemical instability, harmfulness to the human body and environment, and low piezoelectric property, which are disadvantages of conventional piezoelectric materials, Can be produced.
본 발명에 따른 BCNO 신규 압전 재료는 BCNO의 세라믹 원료인 Hexagonal 구조의 BN 기본 물질에 탄소를 Intercalation하여 제조되며 기존의 압전 재료에 비해 제조원가가 낮고 종래의 압전 재료인 Pb 계 및 Non-Pb계 물질에 비해 외부 환경 및 화학적 안정된 물질로서 우수한 압전 재료이다. 또한, BCNO의 제조 역시 저온 합성 및 단순한 공정을 통해 양산에 적합한 공정을 가지고 있어 저 원가 압전 재료 제조가 가능한 장점을 가지고 있다.The new piezoelectric material of BCNO according to the present invention is manufactured by intercalating carbon into BN base material of Hexagonal structure which is a ceramic raw material of BCNO. It is manufactured at a lower cost than conventional piezoelectric materials and can be manufactured by using Pb and Non- It is an excellent piezoelectric material as an external environment and chemically stable material. In addition, BCNO is also suitable for mass production through low-temperature synthesis and simple processes, which makes it possible to manufacture low-cost piezoelectric materials.
또한, 본 발명의 바람직한 구현예에 따르면, 본 발명에 따른 압전재료는 종래의 세라믹 합성법인 고상법, 액상법 및 기상법 등을 통해 수십나노에서 수마이크로의 입자 크기 및 형상 제어가 용이하여, 착화소자, 부저, 레조네이터, 초음파진동자, 압전스피커, 적외선 센서 등에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전모터, 압전트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프 (수평각도제어기), 광변위소자 등에 이르기까지 매우 다양한 분야에 활용 할 수 있는 압전 재료이다.According to a preferred embodiment of the present invention, the piezoelectric material of the present invention can easily control the particle size and shape of several tens nanometers to several tens nanometers through the conventional ceramic synthesis methods such as the solid phase method, the liquid phase method and the vapor phase method, From ultrasonic vibrators, piezoelectric loudspeakers, and infrared sensors to high-value-added inkjet printers, piezoelectric motors, piezoelectric transformers, medical ultrasound devices, military SONAR, gyroscopes and optical displacement devices, It is a piezoelectric material that can be used in various fields.
이러한 본 발명에 따른 압전재료는 액튜에이터와 디스플레이 소자로 적용될 수 있다.The piezoelectric material according to the present invention can be applied to an actuator and a display device.
특히, 기존의 역압전 효과를 이용한 소자와는 달리, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자로서 바람직하게 적용될 수 있다.In particular, unlike an element using the conventional inverse piezoelectric effect, the film can be suitably used as a vibration actuator, a bending actuator, and a display device by producing a film having flexibility and transparency.
따라서 본 발명은 상기와 같은 본 발명의 BCNO 압전 소자를 이용하여 제조된 필름을 포함하는 압전 액튜에이터를 적용하여 제조된 디스플레이를 포함한다.
Therefore, the present invention includes a display manufactured by applying a piezoelectric actuator including the film manufactured using the BCNO piezoelectric device of the present invention.
이하, 본 발명을 실시예에 의거 상세하게 설명하겠는 바, 본 발명이 실시예에 의해 한정되는 것은 아니다.
Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited to the Examples.
실시예 1 : BCNO 압전재료의 제조Example 1: Preparation of BCNO piezoelectric material
보론, 카본, 나이트라이드의 원료를 고상법으로 1500 ℃ 이상의 고온에서 소성하여 BCNO 압전분말을 합성하였다. 또는 상기 세가지 원소의 원료를 수열합성법으로 150 ℃ 이상의 온도에서 합성하여 압전분말을 합성하였다.
The raw materials of boron, carbon, and nitride were fired at a high temperature of 1500 ° C or higher by a solid phase method to synthesize BCNO piezoelectric powder. Or the raw materials of the above three elements were synthesized by hydrothermal synthesis at a temperature of 150 ° C or higher to synthesize a piezoelectric powder.
실시예 2 : 필름의 제조Example 2: Preparation of film
상기 실시예 1에서 제제돤 BCNO 압전재료 10g 과 폴리다이메틸실록세인 (Polydimethyl siloxane) 90g 을 혼합한 후 이를 기판 전극 위에 도포한 후 100 ℃ 온도에서 열처리하여 필름을 제조하였다.
10 g of the BCNO piezoelectric material prepared in Example 1 and 90 g of polydimethyl siloxane were mixed and coated on the substrate electrode, followed by heat treatment at 100 ° C to prepare a film.
실시예 3 : 압전 액튜에이터용 소자의 제조Example 3: Fabrication of device for piezoelectric actuator
상시 실시예 2에서 제제된 필름의 하부와 상부에 유연성을 갖는 전극을 연결한 후, 인위적으로 전압을 인가하는 poling 공정을 통해 압전필름의 압전특성을 향상시켰다. 특성을 향상시킨 압전필름을 소자에 적용하여 역압전 효과를 통한 진동, 밴딩 (휘어짐)을 구현하는 압전 소자를 제조하였다.
The piezoelectric characteristics of the piezoelectric film were improved through a poling process in which a flexible electrode was connected to the lower and upper portions of the film prepared in Example 2, and then a voltage was artificially applied. Piezoelectric films with improved characteristics were fabricated to realize vibration and bending (deflection) through the reverse piezoelectric effect.
비교예 ; 기존의 압전재료를 이용한 필름과 압전 액튜에이터용 소자의 제조Comparative Example; Manufacture of Film and Piezoelectric Actuator Using Existing Piezoelectric Material
압전층을 순수 세라믹 박막형태로 제작하여 표면탄성파 소자, 압전 공진자, 및 압전 액츄에이터로서의 특성을 구현하였다.
The piezoelectric layer was fabricated in the form of pure ceramic thin film to realize the characteristics as a surface acoustic wave device, a piezoelectric resonator, and a piezoelectric actuator.
본 발명에 따른 압전재료는 착화소자, 부저, 레조네이터, 초음파진동자, 압전스피커, 적외선 센서 등 에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전모터, 압전트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프 (수평각도제어기), 광변위소자 등에 이르기까지 매우 다양한 분야에 활용 할 수 있는 것이다.The piezoelectric material according to the present invention can be applied to a high-value-added-type inkjet printer, a piezoelectric motor, a piezoelectric transformer, a medical ultrasonic device, a SONAR for military use, a gyroscope (horizontal angle Controller), optical displacement device, and the like.
특히, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자 등에 바람직하게 적용될 수 있다.
In particular, by producing a film having flexibility and transparency, it can be suitably applied to bending actuators, display devices, and the like, as well as vibration actuators.
Claims (7)
A boron carbon-based piezoelectric material characterized in that an electric field is applied to an anisotropic material made of boron carbonitride (BCNO) by boron nitride (BN) and intercalation of carbon to perform polarization.
The boron carbon-based piezoelectric material according to claim 1, wherein the piezoelectric material enables conversion of physical energy and electrical energy.
Boron carbon oxynitrate (BCNO) was prepared by intercalating carbon into boron nitride (BN), and then boron carbon oxynitrate was prepared by polarizing the boron carbon oxynitrate by applying an electric field thereto. A method of manufacturing a carbon piezoelectric material.
Wherein the piezoelectric material according to claim 1 or 2 is mixed with an organic polymer.
The film according to claim 4, wherein the piezoelectric material is contained in an amount of 10 g per 90 g of the organic polymer.
An element for a piezoelectric actuator comprising the film according to claim 4 or claim 5.
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| KR20070069986A (en) | 2005-12-28 | 2007-07-03 | 동부일렉트로닉스 주식회사 | Manufacturing Method of Semiconductor Device |
| JP2012211278A (en) | 2011-03-31 | 2012-11-01 | Hiroshima Univ | Method for manufacturing b-c-n-o phosphor |
| JP2013010878A (en) | 2011-06-29 | 2013-01-17 | Kuraray Co Ltd | B-c-n-o fluorescent material |
| KR20130139603A (en) | 2012-06-13 | 2013-12-23 | 한국과학기술연구원 | Method for manufacturing flexible piezoelectric energy harvester using piezoelectric composite and flexible piezoelectric energy harvester manufactured by the same |
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| US10435293B2 (en) * | 2009-10-13 | 2019-10-08 | National Institute Of Aerospace Associates | Methods of manufacturing energy conversion materials fabricated with boron nitride nanotubes (BNNTs) and BNNT polymer composites |
| KR101328814B1 (en) * | 2013-01-16 | 2013-11-13 | 주식회사 효성 | Piezoelectric composition, manufacturing method thereof and piezoelectric element comprising the same |
| US9088265B2 (en) * | 2013-05-17 | 2015-07-21 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer |
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| KR20070069986A (en) | 2005-12-28 | 2007-07-03 | 동부일렉트로닉스 주식회사 | Manufacturing Method of Semiconductor Device |
| JP2012211278A (en) | 2011-03-31 | 2012-11-01 | Hiroshima Univ | Method for manufacturing b-c-n-o phosphor |
| JP2013010878A (en) | 2011-06-29 | 2013-01-17 | Kuraray Co Ltd | B-c-n-o fluorescent material |
| KR20130139603A (en) | 2012-06-13 | 2013-12-23 | 한국과학기술연구원 | Method for manufacturing flexible piezoelectric energy harvester using piezoelectric composite and flexible piezoelectric energy harvester manufactured by the same |
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