KR20160033026A - Coating machine, coating device, and coating method - Google Patents

Abstract

[PROBLEMS] To provide an applicator capable of promptly discharging bubbles collected in an applicator to the outside.
[Solution] The applicator of the present invention comprises a first supply port 31 to which a coating liquid is supplied, a first manifold 11 connected to the first supply port 31, A second manifold 12 connected to the discharge slit 22 and a connection throttle 21 connecting the first manifold 11 and the second manifold 12, The first manifold 11 is connected to a first discharge port 41 for discharging bubbles collected in the first manifold 11 to the outside and to the second manifold 12, A supply port 32, and a second discharge port 42 for discharging bubbles collected in the second manifold 12 to the outside.

Description

[0001] COATING MACHINE, COATING DEVICE, AND COATING METHOD [0002]

The present invention relates to an applicator for discharging (discharging) a coating liquid from a discharging slit to form a coating film on an object to be coated, a coating device for forming a coating film on the coating material using the applicator, To a coating method for forming a coating film on a coating material.

2. Description of the Related Art [0002] A coating apparatus having an applicator having an ejection slit for ejecting a coating liquid is known as an apparatus for applying a coating liquid on an object to be coated such as a glass substrate or a film to form a coating film. The applicator has a supply port through which a coating liquid is supplied, a manifold which extends to the supply port and widens the coating liquid in the width direction, and a discharge slit through which the coating liquid is discharged. The coating liquid which has flowed into the manifold from the supply port is widened in the width direction of the manifold, and once it is collected in the manifold, the coating liquid passes through the discharge slit and is discharged to the object to be coated. Thereby, the coating liquid is uniformly discharged over the entire width of the discharge slit, so that a coating film having a uniform film thickness can be formed.

Since the supply port is provided at the central portion of the manifold, the coating liquid flowing into the manifold from the supply port is not completely widened in the width direction of the manifold, and the center portion of the discharge slit is the end portion, There is a problem that a coating film having a thicker film thickness at the central portion in the width direction is formed as a result.

In order to solve this problem, a dispenser has been proposed in which a manifold is disposed at two upper and lower stages in an applicator, and a connecting slit is provided between these manifolds (Patent Document 1, etc.). According to this applicator, the coating liquid widened in the width direction in the upper manifold is further widened in the width direction at the lower manifold, whereby the coating liquid discharged from the discharging slit is spread over the entire width of the discharging slit . Thus, a coating film having a uniform film thickness in the width direction can be formed.

When the application liquid is filled in the applicator, bubbles (air) may remain in the manifold in the applicator. In addition, even when the coating liquid is bubbled, the bubbles dissolved in the coating liquid are foamed in the applicator, or when the valve is opened or closed to supply the coating liquid to the coater, bubbles are mixed in, or the bubbles are sucked There is a thing to do.

As described above, when bubbles are present in the applicator, retardation occurs in the propagation of the application pressure at the start of application (start), so that the film thickness at the application start portion becomes thinner, By the discharge of the member, a pinhole-like coating defect occurs in the coating film, or bubbles mixed in the discharging slit divide the flow of the coating liquid and coating flaws such as vertical stripe occur in the coating film .

In order to solve such a problem, a discharge port for discharging bubbles is provided in the manifold, and bubbles collected in the manifold in the applicator are periodically discharged to the outside (Patent Document 2, etc.).

Japanese Patent Application Laid-Open No. 2013-176736 Japanese Patent Application Laid-Open No. 2006-212592

It can be considered that the bubbles collected in the manifold in the applicator are discharged to the outside from the discharge port by the following mechanism.

When the coating liquid is supplied from the supply port provided at the center of the manifold into the manifold, the coating liquid flows in the manifold along the width direction. At this time, the bubbles collected in the manifold are pushed up to the discharge ports provided at both ends in the width direction of the manifold by the flow of the coating liquid. As a result, the bubbles collected in the manifold are discharged to the outside from the discharge port.

In order to form a coating film having a uniform film thickness in the width direction, in the applicator in which the manifold is constituted by the upper and lower two stages, the supply port of the coating liquid is provided on the upper manifold. Therefore, the supply of the coating liquid to the coater is performed from the supply port provided in the upper manifold.

As the coating liquid supplied to the upper manifold flows in the manifold through the width direction, the bubbles collected in the manifold are pushed up to the discharge ports provided at both ends in the width direction and discharged to the outside through the discharge port.

In the lower manifold, the coating liquid flows from the upper manifold through the connecting slit, and the bubbles collected in the lower manifold are pushed out by the flowing coating liquid and discharged to the outside.

However, since the coating liquid flowing into the lower manifold is supplied from the full width of the connecting slit, the flow along the width direction of the manifold is weakened. Therefore, it takes time to discharge the bubbles collected in the lower manifold. As a result, there is a problem that the discharge time of the bubbles in the entire applicator becomes longer.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and its main object is to provide an applicator capable of expelling bubbles gathered in an applicator quickly to the outside as well as a coating contribution with a plurality of manifolds.

The applicator according to the present invention includes a first supply port to which a coating liquid is supplied, a first manifold following the first supply port, a discharge slit through which the coating liquid is discharged, a second manifold following the discharge slit, And a connection throttle for connecting the first manifold and the second manifold. The first manifold is connected to a first outlet for discharging bubbles collected in the first manifold to the outside, and the second manifold is connected to the first manifold, And a second discharge port for discharging bubbles collected in the second manifold to the outside.

A coating apparatus according to the present invention is a coating apparatus comprising a holding means for holding an object to be coated, an applicator for discharging the coating liquid to the object to be coated, a liquid collection portion for collecting the application liquid, And a drive means for relatively moving at least one of the to-be-coated member and the applicator with respect to the other.

The coating method according to the present invention is a coating method for forming a coating film on a coating material by discharging a coating liquid from the coating machine and discharging bubbles collected in all the manifolds provided in the coating machine to the outside and a step (b) of discharging the coating liquid from the discharging slit of the applicator after the step (a) to form a coating film on the coated member, wherein in the step (a) The bubbles collected in the second manifold are discharged from the first discharge port to the outside by the coating liquid flowing from the first supply port toward the first discharge port and the bubbles collected in the second manifold flow from the second supply port to the second discharge port And the supply of the coating liquid from the second supply port provided in the second manifold is stopped in the step (b) by the coating liquid.

According to the present invention, it is possible to reliably and promptly discharge the bubbles collected in the respective manifolds in the applicator to the outside, thereby forming a coating film which is uniform and free from coating defects Lt; / RTI >

1 (a) and 1 (b) are diagrams schematically showing the configuration of an applicator according to an embodiment of the present invention.
2 (a) to 2 (d) are longitudinal sectional views showing a mechanism for discharging bubbles when the coating liquid is initially charged.
Fig. 3 is a view showing a state in which supply of the coating liquid from the second supply port is continued when the coating film is formed on the coated member. Fig.
4 (a) and 4 (b) are longitudinal sectional views showing a coating method for forming a coating film on an object to be coated in another embodiment of the present invention.
5 (a) and 5 (b) are diagrams showing a configuration of a coating apparatus for forming a coating film on a coating material in another embodiment of the present invention.
6 is a view showing the configuration of an applicator in another embodiment of the present invention.
7 (a) and 7 (b) are views showing a modified example of the connection throttle.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Incidentally, the present invention is not limited to the following examples. In addition, it is possible to change appropriately within a range not deviating from the scope of bringing about the effect of the present invention.

1 (a) and 1 (b) are diagrams schematically showing the configuration of an applicator according to an embodiment of the present invention. FIG. 1 (a) is a cross- to be.

As shown in Figs. 1 (a) and 1 (b), the applicator 10 in this embodiment is provided with a first supply port 31 to which a coating liquid is supplied, 22). The applicator 10 in this embodiment is provided with upper and lower two manifolds, and the first manifold 11 (hereinafter referred to as the "upper manifold") is connected through the through holes 36 , And a first supply port (31). The upper manifold 11 and the lower manifold 12 are connected to the connection throttle 21 and the lower manifold 12 are connected to the discharge slit 22. The second manifold 12 is connected to the discharge slit 22, Respectively.

The upper manifold 11 is connected to a first discharge port 41 through which the bubbles collected in the upper manifold 11 are discharged to the outside through the through holes 45. [ The lower manifold 12 is connected to the second supply port 32 through which the coating liquid is supplied through the through hole 37 and is connected to the lower manifold 12 through the through hole 46. [ And a second discharge port 42 for discharging the air bubbles collected in the discharge port 42 to the outside. The first supply port 31 and the second supply port 32 are provided at the center of the width direction of the upper manifold 11 and the lower manifold 12, respectively. The first outlet 41 and the second outlet 42 are provided at both ends of the upper manifold 11 and the lower manifold 12 in the width direction.

The first supply port 31 and the second supply port 32 are connected to a pipe 35 leading to a pump (not shown) for sending a coating liquid and as a coating liquid supply control means 38, A first supply valve 33 and a second supply valve 34 are provided. By opening the first supply valve 33 and the second supply valve 34, the first manifold 11 and the second manifold 11 are connected via the first supply port 31 and the second supply port 32, respectively, The coating liquid is supplied to the lower manifold 12.

The first discharge port 41 and the second discharge port 42 are connected to the pipes 47 and 48 respectively and as the bubble discharge control means 49, 2 discharge valve 44 is provided. The bubbles collected in the upper manifold 11 and the lower manifold 12 can be discharged to the outside by opening the first discharge valve 43 and the second discharge valve 44. [

1 (b), the bubbles 50 collected in the upper manifold 11 are separated from the upper manifold 11 by the coating liquid flowing from the first supply port 31 toward the first discharge port 41, Is controlled by the coating liquid supply control means 38 and the bubble discharge control means 49 so as to be discharged to the outside together with the coating liquid discharged from the first discharge port 41 do.

The bubbles 50 collected in the lower manifold 12 are pushed to both ends in the width direction of the lower manifold 12 by the coating liquid flowing from the second supply port 32 toward the second discharge port 42 And is controlled by the coating liquid supply control means 38 and the bubble discharge control means 49 so as to be discharged to the outside together with the coating liquid discharged from the second discharge port 42.

By providing the second supply port 32 through which the coating liquid is supplied to the lower manifold 12 as described above, it is possible to prevent the bubbles collected in the lower manifold 12 from being pushed up to both ends in the width direction Flow can be generated. As a result, the bubbles gathered in the lower manifold 12 can be reliably and quickly discharged. As a result, the time required for discharging the bubbles of the entire applicator 10 can be shortened.

2 (a) to 2 (d) are longitudinal sectional views showing an example of a mechanism for discharging bubbles when the coating liquid is initially charged in the applicator 10 of the present embodiment.

Fig. 2 (a) shows the empty state before the application liquid is filled in the applicator 10. Fig. When the first supply valve 33 connected to the first supply port 31 is opened and the coating liquid is supplied from the first supply port 31 to the upper manifold 11, As shown by the arrows, the coating liquid flowing from the first supply port 31 toward the first discharge port 41 and further widened from the upper manifold 11 flows through the connecting throttle 21, the lower manifold 12, and the discharge slit 22 in this order, and is discharged from the applicator. At this time, in the upper manifold 11 and the lower manifold 12, the bubbles 50 are left on the upper portions of the respective manifolds by buoyancy.

Next, as shown in Fig. 2 (c), by opening the first discharge valve 43 connected to the first discharge port 41 while supplying the coating liquid from the first supply port 31, A flow of the coating liquid from the supply port 31 toward the first discharge port 41 is generated. By this flow, the bubble 50 in the upper manifold 11 is pushed up to both end portions in the width direction of the upper manifold 11, and is discharged to the outside together with the coating liquid discharged from the first discharge port 41 .

2 (d), by opening the second discharge valve 44 following the second discharge port 42 while supplying the coating liquid from the second supply port 32, A flow of the coating liquid from the supply port 32 to the second discharge port 42 is generated. By this flow, the bubble 50 in the lower manifold 12 is pushed down to both ends in the width direction of the lower manifold 12, and is discharged to the outside together with the coating liquid discharged from the second discharge port 42 .

In addition, when the coating liquid is supplied from the pump at a constant flow rate, when the coating liquid is simultaneously supplied to the upper manifold 11 and the lower manifold 12, the supplied coating liquid is supplied to the two manifolds 11 and 12 Dispersed. Therefore, the flow rate of the coating liquid passing through the transverse cross section of each of the manifolds 11 and 12 in the width direction is set to be equal to or greater than the flow velocity of the coating liquid when the coating liquid is supplied to only one of the upper manifold 11 and the lower manifold 12 . Thereby, it may take time to discharge small bubbles which are difficult to receive the push-out effect by the flow of the coating liquid.

Therefore, while the bubbles collected in the upper manifold 11 are discharged from the first discharge port 41 to the outside, the second supply port 32 closes the second supply valve 34 to supply the coating liquid And the second discharge port 42 is controlled so as to close the second discharge valve 44 so as to stop the discharge of the bubble. Similarly, while bubbles collected in the lower manifold 12 are discharged from the second discharge port 42 to the outside, the first supply port 31 closes the first supply valve 33, and the supply of the coating liquid It is preferable that the first discharge port 41 is controlled so as to close the first discharge valve 43 so as to stop the discharge of bubbles. This makes it possible to increase the flow velocity of the coating liquid passing through the transverse cross section of each manifold in the width direction, and to reliably and quickly discharge bubbles.

In the present embodiment, the sizes of the upper manifold 11 and the lower manifold 12 are not particularly limited, and the size of the upper manifold 11 and the lower manifold 12 may be determined by the widening conditions of the coating liquid, Me too. The supply conditions such as the flow rate of the coating liquid supplied from the first supply port 31 and the supply time and the supply conditions such as the supply amount of the coating liquid supplied from the second supply port 32, And the flow rate and the supply time of the pump may be appropriately determined depending on, for example, the capacity of the upper manifold 11 and the lower manifold 12, the cross-sectional shape thereof, the mixing amount of bubbles, and the like.

In the present embodiment, the second supply port 32, which is connected to the lower manifold 12, is configured to apply the bubbles collected in the lower manifold 12 to the outside and push the bubbles to both ends in the width direction It is installed to generate liquid flow. As a result, the bubbles gathered in the lower manifold 12 can be reliably and promptly discharged to the outside. That is, the second supply port 32 following the lower manifold 12 functions to discharge bubbles collected in the lower manifold 12 to the outside.

On the other hand, the first supply port 31 following the upper manifold 11 discharges the coating liquid from the discharge slit 22 after the discharge of the bubbles collected in the upper manifold 11 is completed, When a coating film is formed on the substrate.

3 is a view showing a state in which the coating liquid is supplied from the second supply port 32 in addition to the first supply port 31 when the coating film is formed on the coated member.

3, the coating liquid supplied from the first supply port 31 is widened at the upper manifold 11, and further flows through the connection throttle 21 at the lower manifold 12 again And is discharged from the discharge slit 22 in a uniform discharge distribution over its entire width. On the other hand, since the coating liquid supplied from the second supply port 32 is widened only at the lower manifold 12 without widening at the upper manifold 11, the widening effect at the second stage can not be obtained, The discharge amount increases at the central portion of the discharge slit 22, and the discharge amount decreases at the both end portions of the discharge slit 22. Finally, the discharge distribution of the coating liquid discharged from the discharge slit 22 is such that the discharge distribution derived from the first supply port 31 and the discharge distribution derived from the second supply port 32 are added to each other, At the central portion of the discharge slit 22, the discharge amount of the coating liquid increases as compared with both end portions of the discharge slit 22. As a result, the thickness of the coating film formed at the center becomes thick, and the uniformity of the coating film deteriorates.

Therefore, in order to form a uniform coating film, it is preferable that the second supply port 32 following the lower manifold 12 is controlled so as to stop the supply of the coating liquid while forming the coating film on the coated member Do.

4A and 4B are longitudinal sectional views showing a coating method for forming a coating film on an object to be coated in another embodiment of the present invention. Fig. 4 (b) is a view showing a step of discharging a coating liquid from the discharge slit 22 to form a coating film on an object to be coated. Fig.

4A, in the process of discharging the bubbles collected in the applicator to the outside, the first supply valve 33 and the second supply valve 33 are connected to the first supply port 31 and the second supply port 32, respectively, And the second supply valve 34 are opened so that the coating liquid is supplied to the upper manifold 11 and the lower manifold 12 from the first supply port 31 and the second supply port 32, Is controlled by the coating liquid supply control means (38). The bubbles 50 collected in the upper manifold 11 are discharged from the first discharge port 43 by the coating liquid flowing from the first supply port 31 toward the first discharge port 41 by opening the first discharge valve 43, 41, respectively. The bubbles collected in the lower manifold 12 are discharged from the second discharge port 42 by the coating liquid flowing from the second supply port 32 toward the second discharge port 42 by opening the second discharge valve 44 As shown in Fig. In addition, as described above, in order to increase the flow rate of the coating liquid passing through the cross-sectional surface of the manifold in the width direction and to enable reliable and rapid bubble discharge, the bubbles in the upper manifold 11 are discharged to the outside The second supply port 32 is controlled such that the supply of the coating liquid is stopped by closing the second supply valve 34 and the second discharge port 42 is closed by closing the second discharge valve 44 , It is preferable that the discharge of bubbles is controlled to be stopped. Likewise, while discharging the bubbles in the lower manifold 12 to the outside, the first supply port 31 is controlled so as to stop the supply of the coating liquid by closing the first supply valve 33, The first discharge port 41 is preferably controlled so as to close the first discharge valve 43 so as to stop discharging the bubbles.

After the bubbles in the applicator are discharged to the outside, the supply of the application liquid is stopped and the applicator is moved onto the object to be coated (not shown). Then, as shown in Fig. 4 (b) To form a coating film on the coated member. At this time, the second supply port 32 is controlled by the coating liquid supply control means 38 so that the supply of the coating liquid is stopped by closing the second supply valve 34 connected thereto. On the other hand, the coating liquid is supplied from the first supply port 31 and the coating liquid widened in the width direction in the upper manifold 11 and the lower manifold 12 is discharged from the discharge slit 22 Thus, a uniform coating film is formed on the coated member.

5A and 5B are diagrams showing an example of the configuration of a coating apparatus for forming a coating film on a coated member in another embodiment of the present invention. And Fig. 5 (b) is a perspective view of the coating device. As shown in Fig.

As shown in Fig. 5 (b), the coating device 1 in the present embodiment is a holding device for holding an object to be coated W, which is a sheet-like base material such as a glass substrate, An applicator 10 for discharging the coating liquid to the object to be coated W on the stage 2; a tank 6 as a collection of liquid for collecting the coating liquid; A pump 5 as a liquid sending means to be sent to the applicator 10 and a driving means 3 as a driving means for relatively moving the applicator 10 in the X direction with respect to the stage 2. [ The coating liquid in the tank 6 is supplied to the applicator 10 through the piping 4 by the pump 5.

5 (a), the applicator 10 includes a first supply port 31 to which a coating liquid is supplied, an upper manifold 11 connected to the first supply port 31, A lower manifold 12 connected to the discharge slit 22 and a connection throttle 21 connecting the upper manifold 11 and the lower manifold 12 to each other, have. The upper manifold 11 is connected to a first discharge port 41 for discharging bubbles collected in the upper manifold 11 to the outside. The lower manifold 12 is connected to a second supply port 32 through which the coating liquid is supplied and a second discharge port 42 for discharging bubbles collected in the lower manifold 12 to the outside.

The coating liquid is supplied from the first supply port 31 and the second supply port 32 into the upper manifold 11 and the lower manifold 12 before the coating film is formed on the coating material W, The bubbles collected in the upper manifold 11 and the lower manifold 12 are discharged from the first discharge port 41 and the second discharge port 42 to the outside.

A process for forming a coating film on the coated member (W) is started after discharging the bubbles in the applicator (10) to the outside. As shown in Fig. 5 (a), while the ejection port of the ejection slit 22 and the to-be-coated member W are kept at a constant interval and the applicator 10 is moved in the X- The coating film M is formed on the coated member W by discharging the coating liquid from the coating liquid 22.

At this time, as described above, in order to form a uniform coating film, the second supply port 32, which is connected to the lower manifold 12, is formed in such a manner that the coating film M is formed on the object to be coated W , It is preferable that the supply of the coating liquid is stopped.

In the case where the coating film M is continuously formed on a plurality of the objects to be coated W without going through the operation of discharging the bubbles in the applicator 10, The coating solution filled in the second supply port 32 and the through hole 37 continuing to the second supply port 32 stays for a long time until the next bubble discharging operation is performed. Thereby, the components of the coating liquid may deteriorate over time, or the components contained in the coating liquid may be solidified. When the coating liquid thus deteriorated is supplied from the second supply port 32 to the inside of the applicator 10 at the time of bubble discharging operation, the components of the coating film M are altered or the solidified components are discharged By blocking a part of the slit 22, a coating defect such as a vertical stripe is generated in the coating film M, and therefore, the quality of the coating film M may be deteriorated.

Therefore, it is known that there is a step of initializing the tip end of the applicator 10 by discharging a small amount of the coating liquid from the discharge slit 22 before forming the coating film M. In this initialization step, It is preferable that the coating liquid is supplied from the second supply port 32 to the base 10. This prevents the coating liquid filled in the second supply port 32 and the through hole 37 from staying for a long time and preventing deterioration or solidification of the components of the coating liquid and improving the quality of the coating film M .

In addition, the coating liquid filled in the through hole 37 and the second supply port 32 does not need to stay for a long time, and the supply of the coating liquid in the initialization step is performed by the first supply port 31 and the second supply port It may be carried out simultaneously from the opening 32.

According to the present embodiment, in the applicator 10 provided with the two-stage manifolds 11 and 12, the second manifold 12 of the applicator 10 is provided with a second supply port The bubbles gathered in the applicator 10 can be reliably and quickly discharged to the outside. Thereby, it is possible to provide an applicator which forms a coating film which is uniform and free from coating defects.

While the present invention has been described with reference to preferred embodiments thereof, such description is not intended to be limiting but may be modified in various ways.

For example, in the above embodiment, the applicator having the two-stage manifolds 11 and 12 has been described. However, the present invention is not limited thereto, and the lower manifold 12 may include a plurality of manifolds It is also applicable to an applicator having a fold. In this case, the second outlet 42 is required to be installed in all of the plurality of manifolds constituting the lower manifold 12. However, the second inlet 32 must be installed in all the manifolds But may be provided on at least one of the plurality of manifolds. This makes it possible to shorten the time required to discharge the bubbles of the entire applicator as compared with the case where the second supply port 32 is not provided.

When the second supply port 32 is provided in the plurality of manifolds, it is preferable that the second supply port 32 is preferentially installed in the manifold in which the bubbles are discharged slowly.

6 is a diagram schematically showing the configuration of an applicator in another embodiment of the present invention.

The applicator in the present embodiment has a configuration in which the lower manifold 12 has two manifolds 12a and 12b (hereinafter referred to as an upper manifold 12a and a lower manifold 12b) And is composed of three manifolds together with the upper manifold 11. [ The upper manifold 11 and the upper manifold 12a are connected by a connection throttle 21a and the upper manifold 12a and the lower manifold 12b are connected by a connection throttle 21b, The lower manifold 12b is connected to the discharge slit 22.

The upper manifold 11 is connected to a first supply port 31 to which a coating liquid is supplied and a first discharge port 41 to discharge the bubble 50 collected in the upper manifold 11 to the outside. The upper manifold 12a is connected to a second supply port 32 to which the coating liquid is supplied and a second discharge port 42a to discharge the bubble 50 collected in the upper manifold 12a to the outside .

On the other hand, the lower manifold 12b is not connected to the second supply port through which the coating liquid is supplied. Instead, the lower manifold 12b has a sloped surface 60 that rises toward the center and is formed on the upper surface of the sloped surface 60, And a second discharge port 42b for discharging the discharge port 50 to the outside.

That is, in the present embodiment, the second supply port 32 is preferentially installed in the upper manifold 12a in which the discharge of bubbles is slow, among the lower manifolds 12. [

The bubbles 50 collected in the upper manifold 12a out of the upper manifold 11 and the second manifold 12 are supplied to the first supply port 31 and the second supply port The bubbles 50 collected in the first manifold 11 and the upper manifold 12a are discharged to the first discharge port 41 and the second discharge port 42a by the flow of the coating liquid supplied from the first manifold 11 and the second manifold 12, ) Can be quickly discharged to the outside.

On the other hand, among the second manifolds 12, the bubbles 50 collected in the lower manifold 12b are discharged from the second discharge port 42b provided on the upper end of the inclined surface 60 along the inclined surface 60 by buoyancy, The bubbles collected in the lower manifold 12b can be quickly discharged to the outside by discharging the collected bubbles to the outside through the second outlet 42b.

Thus, in the applicator in which the lower manifold 12 is constituted by a plurality of manifolds, it is possible to shorten the discharge time of the bubbles in the entire applicator, and at the same time, It is not necessary to provide the coating liquid on all of them, so that the configuration of the applicator can be simplified.

In this embodiment, the second outlet 42b is provided at the center of the lower manifold 12b. However, the second outlet 42b is not limited to this and may be provided anywhere on the upper surface of the inclined surface 60. [

In the case where the second supply port 32 is provided in the applicator in which the lower manifold 12 has a plurality of manifolds, the coating liquid is discharged from the discharge slit 22 to form a coating film The supply of the coating liquid from the second supply port 32 is preferably stopped.

In the above embodiment, the connection throttle 21 connecting the upper manifold 11 and the lower manifold 12 is a slit-shaped flow path. However, the present invention is not limited to this, It may be a flow path which is long in the width direction of the fuel cell stack 10 and narrowed narrowly in the direction orthogonal to the fuel cell stack 10. For example, as shown in Figs. 7 (a) and 7 (b), the flow path narrowed narrowly in the tapered shape or the flow path narrowed stepwise may be used.

In the above embodiment, a mechanism for discharging the bubbles collected in the applicator 10 to the outside when the applicator 10 is initially filled with the coating liquid in the applicator 10 has been described. However, The present invention is not limited to this, and the bubbles collected in the applicator 10 may be periodically discharged to the outside even after the formation of the coating film is started.

Although the second supply port 32 is provided at the center in the width direction of the lower manifold 12 and the second outlet 42 is provided at both ends of the lower manifold 12 in the width direction in the above embodiment, The arrangement of the second supply port 32 and the second discharge port 42 may be determined so that the bubble is pushed toward the second discharge port 42 by the flow of the coating liquid. For example, the second supply port 32 may be provided at one end in the width direction of the lower manifold 12, and the second outlet 42 may be provided at the other end in the width direction of the lower manifold 12 .

In the above embodiment, the application device having the applicator of the present invention is a coating device for applying a coating liquid to a sheet substrate such as a glass substrate. However, the present invention is not limited to this, The application device may be a coating device for applying a coating liquid to a continuous substrate such as a film.

1: Coating device
2: stage
3: driving means
4: Piping
5: Pump
6: Tank
10: Applicator
11: Top manifold (first manifold)
12: Lower Manifold (Second Manifold)
21: Connection throttle
22: Discharge slit
31: First supply port
32: second supply port
33: first supply valve
34: second supply valve
35: Piping
36, 37: through hole
38: Coating liquid supply control means
41: First outlet
42: Second outlet
43: First discharge valve
44: Second discharge valve
45, 46: through hole
47, 48: Piping
49: bubble discharge control means
50: Bubble
60:

Claims (9)

A first supply port through which a coating liquid is supplied,
A first manifold following the first supply port,
A discharge slit in which the coating liquid is discharged (discharged)
A second manifold following the discharge slit,
And a connection throttle for connecting the first manifold and the second manifold
And a coating unit
The first manifold is connected to a first discharge port for discharging bubbles collected in the first manifold to the outside,
Wherein the second manifold is connected to a second supply port through which the coating liquid is supplied and a second discharge port through which bubbles collected in the second manifold are discharged to the outside. The method according to claim 1,
The bubbles collected in the first manifold are discharged to the outside from the first discharge port by the coating liquid flowing from the first supply port toward the first discharge port,
Wherein the bubbles collected in the second manifold are discharged to the outside from the second outlet by a coating liquid flowing from the second supply port toward the second outlet. 3. The method according to claim 1 or 2,
The supply of the coating liquid to the second supply port is stopped while the bubbles collected in the first manifold are discharged to the outside from the first discharge port and the discharge of the bubbles is stopped in the second discharge port,
The supply of the coating liquid to the first supply port is stopped while the bubbles collected in the second manifold are discharged to the outside from the second discharge port and the discharge of the bubbles is stopped Characterized by an applicator. 4. The method according to any one of claims 1 to 3,
Wherein the supply of the coating liquid is stopped while the coating liquid is discharged from the discharging slit and the coating film is formed on the coating material. The method according to claim 1,
Wherein the second manifold comprises a plurality of manifolds connected to each other along the discharge direction of the coating liquid by the connection throttle,
The second outlet is provided in each of the plurality of manifolds,
And the second supply port is provided in at least one manifold among the plurality of manifolds. The method according to claim 1,
The second manifold is composed of two manifolds connected to each other along the discharge direction of the coating liquid by the connection throttle,
And the second outlet is provided in each of the two-stage manifolds,
The second supply port is provided only in the upper manifold among the two-stage manifolds,
Wherein an upper end of the lower manifold of the two-stage manifold is inclined to be higher toward the second outlet. A coating liquid for collecting the coating liquid; and a liquid delivery portion for delivering the coating liquid of the collection portion of the liquid to the applicator And a driving means for relatively moving at least one of the to-be-coated member and the applicator on the holding means relative to the other,
The application device according to any one of claims 1 to 6, wherein the applicator is an applicator. A coating method for discharging a coating liquid from the applicator according to any one of claims 1 to 6 to form a coating film on an object to be coated,
(A) discharging bubbles collected in all the manifolds installed in the applicator to the outside,
(B) of ejecting the coating liquid from the discharging slit of the applicator after the step (a) to form a coating film on the coated member;
Lt; / RTI >
In the step (a)
The bubbles collected in the first manifold are discharged to the outside from the first discharge port by the coating liquid flowing from the first supply port toward the first discharge port,
The bubbles collected in the second manifold are discharged to the outside from the second discharge port by the coating liquid flowing from the second supply port toward the second discharge port,
In the step (b)
Wherein supply of the coating liquid from the second supply port provided in the second manifold is stopped. 9. The method of claim 8,
Wherein the second manifold is composed of a plurality of manifolds connected to each other along the discharge direction of the coating liquid by a connection throttle,
The second outlet is respectively installed in the plurality of manifolds,
Wherein the second supply port is provided in at least one manifold among the plurality of manifolds,
Wherein the bubbles collected in the manifold provided with the second supply port are discharged to the outside from the second discharge port by the coating liquid flowing from the second supply port toward the second discharge port.

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