KR20130128117A - Non-contact magnetic levitation stage for substrate transfer - Google Patents

Abstract

The present invention relates to a non-contact magnetic levitation stage apparatus for transferring a substrate, and more particularly, to a non-contact magnetic levitation for transferring a substrate, which allows the bogie mounted with the substrate mounted vertically and horizontally to be guided and propagated at a constant speed by an in-line method. It relates to a stage device.
That is, the present invention is to solve the dust and vibration problems in the vacuum chamber in the process equipment of the display or semiconductor field, and to achieve high-precision stage position control to achieve the original purpose of the in-line method to improve the production efficiency, In the process of deposition under high vacuum conditions, using the magnetic levitation method to guide or propagate or rotate the object by the magnetic force generated from the electromagnet or permanent magnet without outgassing. It is an object of the present invention to provide a non-contact magnetic levitation stage device for transporting a substrate that can guide and propel a float at a constant speed.

Description

Non-contact Magnetic Levitation Stage Device for Substrate Transfer

The present invention relates to a non-contact magnetic levitation stage apparatus for transferring a substrate, and more particularly, to a non-contact magnetic levitation for transferring a substrate, which allows the bogie mounted with the substrate mounted vertically and horizontally to be guided and propagated at a constant speed by an inline method. It relates to a stage device.

In general, a substrate transfer stage is installed as a transfer apparatus for transferring substrate products between process equipment including deposition in display and semiconductor manufacturing processes.

Conventional substrate transfer stages employed in process equipment such as deposition chambers include a trolley on which a substrate made of glass or silicon is mounted, and a transfer means for transferring the trolley before and after the process of depositing a thin film on the substrate through a mask. do.

The conveying means of the conventional substrate transfer stage mainly uses contact and mechanical bearings such as rollers to support and transport the trolley on which the substrate is mounted.

Therefore, when the motor (not shown) commanded by the controller (not shown) to drive the roller rotates, the chain (not shown) connected to the motor shaft (not shown) is driven to rotate, and the angles connected to the chain are subsequently connected. As the roller is driven, the substrate product mounted on the trolley, including the trolley mounted on the roller, proceeds slowly at a constant speed along the process progress direction.

At this time, the bogie adopted in the deposition apparatus such as the deposition chamber is moved at a constant speed of 5 ~ 50mm / sec, when several bogies enter the deposition apparatus in an inline manner, the distance between the front and back bogie also thin film deposition It is very important as a factor.

In addition, when the trolley enters the deposition chamber (not shown), since a deposition material such as gas contacts the substrate to form a thin film, the moving speed of the trolley must be kept constant so that the thickness of the thin film can be maintained uniformly. It is also one of the important points.

In addition, in order to form a uniform thin film on a thin substrate, the environmental conditions inside the deposition apparatus should be good, and there should be no harmful substances such as dust during the deposition process.

However, in the structure of the conventional substrate transfer stage apparatus, dust is generated due to mechanical wear on the roller because the trolley and the roller are in contact with each other to transfer the substrate, and the dust adheres to the surface of the substrate or the mask to display the display panel. In addition to fatal defects in semiconductor products, wear and tear can cause roller failure and vibration.

As such, the conventional substrate transfer stage apparatus mainly uses contact bearings, so substrate products requiring precise position control are vibrated, substrate position control accuracy is reduced, and dust is generated due to friction. There is a problem that adversely affect the mask included in the product.

In addition, the cost and time required for maintenance, such as dust removal, there is a disadvantage that eventually leads to an increase in production costs.

Particularly, product defects occur frequently in liquid crystal display (LCD) deposition processes due to dust due to friction, and organic light emitting diodes (OLEDs) are more seriously generated than LCDs.

More specifically, the deposition material is present anywhere in the deposition chamber, and since it is accumulated inside the chamber, the vibration accumulated when the bogie of the substrate transfer stage is moved causes the dust accumulated in the chamber to fall on the substrate or mask. As a result, there is a fatal problem that the final substrate product cannot meet the prescribed specifications.

In view of the above, the present invention solves the dust and vibration problems in the vacuum chamber in the process equipment of the display or semiconductor field, and the high precision stage position control is possible to achieve the original purpose of the in-line method to improve the production efficiency The substrate is mounted vertically and horizontally using a magnetic levitation method in which an object is lifted and guided or rotated by a magnetic force generated from an electromagnet or a permanent magnet without outgassing even in a deposition process performed under high vacuum conditions. It is an object of the present invention to provide a non-contact magnetic levitation stage apparatus for transporting a substrate that allows the trolley to guide and propel a float at a constant speed in an inline manner.

In order to achieve the above object, the present invention provides a non-contact magnetic levitation stage apparatus for transporting a substrate, comprising: a trolley having a predetermined area and a tray module mounted on the trolley to mount a substrate; Floating means selectively mounted on the bottom to float the trolley in the floating direction (Z-axis direction); Horizontal guiding means arranged on both sides of the trolley for guiding in the horizontal guiding direction (Y-axis direction) of the trolley; Propulsion means selectively mounted on the top or bottom, top and bottom, side surfaces of the trolley to propel the trolley in the propulsion direction (X-axis direction) or to assist injuries; Gap measuring means for measuring the floating direction (Z axis) gap and the horizontal guide direction (Y axis) gap of the bogie and tray module and position measuring means for measuring the propulsion direction (X axis) position of the bogie and tray module ; It provides a non-contact magnetic levitation stage device for transporting the substrate, characterized in that configured to include.

According to the first embodiment of the present invention, as the above-mentioned floating means, a pair of first sub-box stone facing surfaces and a second sub-box facing surface are attached to both side ends of the upper and lower surfaces of the bogie, and the first sub-box facing surface and The first sub-box and the second sub-box are spaced apart from each other at a position facing the second sub-box opposing face; The horizontal guide means and the propulsion means, the first guide driving magnet opposing surface and the second guide driving magnet opposing surface is attached to both sides of the bogie, facing the first guide driving magnet opposing surface and the second guide driving magnet opposing surface The first guide driving magnet and the second guide driving magnet are spaced apart from each other in the viewing position; The gap measuring means includes a first gap sensor disposed adjacent to the outside of the first sub-box or the second sub-box to measure the vertical floating direction (Z-axis) gap of the bogie, and the horizontal guide direction (Y-axis) of the bogie. A second gap sensor disposed adjacent to an upper portion of the first guide propulsion magnet or the second guide propulsion magnet to measure the gap, and one end of the tray module to measure the horizontal guide direction (Y axis) gap of the tray module; And a third gap sensor disposed adjacent to the third gap sensor.

In the first embodiment, the first gap sensor can be fixedly installed in the chamber irrespective of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position, such as the upper or lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of the position if the horizontal gap (Y axis) of the bogie can be measured.

According to the second embodiment of the present invention, as the floating means, a pair of first sub-boxes facing surfaces are attached to both side ends of the upper surface of the bogie and at the position facing the first sub-box facing surface. The magnets are spaced apart; The horizontal guide means and the propulsion means, the first guide driving magnet opposing surface and the second guide driving magnet opposing surface is attached to both sides of the bogie, facing the first guide driving magnet opposing surface and the second guide driving magnet opposing surface The first guide driving magnet and the second guide driving magnet are spaced apart from each other in the viewing position; The gap measuring means includes a first gap sensor disposed adjacent to the outside of the first sub-box or the second sub-box to measure the vertical floating direction (Z-axis) gap of the bogie, and the horizontal guide direction (Y-axis) of the bogie. A second gap sensor disposed adjacent to an upper portion of the first guide propulsion magnet or the second guide propulsion magnet to measure the gap, and one end of the tray module to measure the horizontal guide direction (Y axis) gap of the tray module; And a third gap sensor disposed adjacent to the third gap sensor.

In the second embodiment, the first gap sensor can be fixedly installed in the chamber irrespective of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position of the upper or lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of the position if the horizontal gap (Y-axis) of the bogie can be measured.

According to the third embodiment of the present invention, as the floating means, a pair of first sub-boxes facing surfaces are attached to both side ends of the upper surface of the trolley and at the position facing the first sub-boxes facing surface. The magnets are spaced apart; The horizontal guide means and the propulsion means, the first guide driving magnet opposing surface and the second guide driving magnet opposing surface is attached to both sides of the bogie, facing the first guide driving magnet opposing surface and the second guide driving magnet opposing surface The first guide driving magnet and the second guide driving magnet are spaced apart from each other in the viewing position; As the propulsion means, a floating propulsion magnet opposing surface is further attached to both sides of the bottom of the trolley, and a floating propulsion magnet is further disposed at a position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed adjacent to the outside of the first auxiliary box to measure the vertical floating direction (Z axis) gap of the bogie, and a horizontal guide direction (Y axis) gap of the bogie. A second gap sensor disposed adjacent to an upper portion of the first guide propulsion magnet or the second guide propulsion magnet, and a second gap sensor disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y axis) gap of the tray module; It is characterized by consisting of three gap sensor.

In the third embodiment, the first gap sensor can be fixedly installed in the chamber regardless of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position, such as the upper side or the lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of position if it can measure the horizontal (Y-axis) gap of the bogie.

According to the fourth and fifth embodiments of the present invention, as the floating means, a pair of first sub-boxes facing surfaces are attached to both side ends of the upper surface of the bogie and at a position facing the first sub-box facing surface. The first sub-box is spaced apart; The horizontal guiding means, wherein first and second guide magnet opposing surfaces are attached to both sides of the trolley, and the first and second guide magnets are disposed at positions facing the first and second guide magnet opposing surfaces; As the propulsion means, in the fourth embodiment, the floating propulsion magnet opposing surface is further attached to both the bottom surfaces of the trolley in the fifth embodiment, and the floating propulsion magnet is located at the position facing the opposing propulsion magnet opposing surface. Deployed; The gap measuring means includes a first gap sensor disposed adjacent to the outside of the first auxiliary box to measure the vertical floating direction (Z axis) gap of the bogie, and a horizontal guide direction (Y axis) gap of the bogie. A second gap sensor disposed adjacent the upper portion of the first guide magnet or the second guide magnet, and a third gap disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y-axis) gap of the tray module; It is characterized by consisting of a sensor.

In the fourth and fifth embodiments, if the first gap sensor can measure the vertical (Z-axis) gap of the trolley regardless of the position of the upper or lower side of the trolley, the first gap sensor may be located in a chamber (not shown) regardless of the position. It may be fixedly installed, and the second gap sensor may be fixedly installed in the chamber irrespective of the position if it is possible to measure the horizontal (Y-axis) gap of the bogie.

According to the sixth embodiment of the present invention, as the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface and the second guide driving magnet opposing surface are attached to both sides of the bogie, and the first guide driving magnet opposing surface And a first guide driving magnet and a second guide driving magnet spaced apart from each other at a position facing the second guide driving magnet opposing surface; As the floating means and the propulsion means, a floating propulsion magnet opposing surface is attached to both sides of the bottom of the trolley, and the floating propulsion magnet is disposed at a position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed on both sides of the upper surface of the bogie to measure the vertical floating direction (Z-axis) gap of the bogie, and a first guide for measuring the horizontal guide direction (Y-axis) gap of the bogie. A second gap sensor disposed adjacent to an upper portion of the propulsion magnet or the second guide propulsion magnet, and a third gap sensor disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y-axis) gap of the tray module; Characterized in that consisting of.

In the sixth embodiment, the first gap sensor can be fixedly installed in the chamber regardless of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position of the upper or lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of position if it can measure the horizontal (Y-axis) gap of the bogie.

According to the seventh embodiment of the present invention, as the horizontal guide means, first and second guide magnet opposing surfaces are attached to both sides of the trolley, and the first and second guide magnets opposing surfaces face each other. And a second guide magnet; As the floating means and the propulsion means, a floating propulsion magnet opposing surface is attached to both sides of the bottom of the trolley, and the floating propulsion magnet is disposed at a position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed on both sides of the upper surface of the bogie to measure the vertical floating direction (Z-axis) gap of the bogie, and a first guide for measuring the horizontal guide direction (Y-axis) gap of the bogie. A second gap sensor disposed adjacent the upper portion of the magnet or the second guide magnet, and a third gap sensor disposed adjacent to one end of the tray module to measure the horizontal guide direction (Y-axis) gap of the tray module. It is characterized by.

In the seventh embodiment, the first gap sensor can be fixedly installed in the chamber irrespective of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position of the upper or lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of position if it can measure the horizontal (Y-axis) gap of the bogie.

According to the eighth embodiment of the present invention, as the floating means, a pair of first sub-boxes facing surfaces are attached to both side ends of the upper surface of the trolley and at the position facing the first sub-boxes facing surface. The magnets are spaced apart; The horizontal guiding means, wherein first and second guide magnet opposing surfaces are attached to both sides of the trolley, and the first and second guide magnets are disposed at positions facing the first and second guide magnet opposing surfaces; As the propulsion means, a floating propulsion magnet opposing surface is attached to both sides of the bottom of the bogie, and a floating propulsion magnet is disposed at a position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed adjacent to an upper portion of the first auxiliary box to measure a vertical floating direction (Z axis) gap of the bogie, and a horizontal guide direction (Y axis) gap of the bogie. A second gap sensor disposed adjacent the upper portion of the first guide magnet or the second guide magnet, and a third gap disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y-axis) gap of the tray module; It is characterized by consisting of a sensor.

In an eighth embodiment, the first gap sensor can be fixedly installed in the chamber regardless of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position, such as the upper side or the lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of position if it can measure the horizontal (Y-axis) gap of the bogie.

According to the ninth embodiment of the present invention, as the floating means, a pair of first sub-boxes facing surfaces are attached to both side ends of the upper surface of the trolley and at the position facing the first sub-boxes facing surface. The magnets are spaced apart; The horizontal guide means and the propulsion means, the first guide driving magnet opposing surface and the second guide driving magnet opposing surface is attached to both sides of the bogie, facing the first guide driving magnet opposing surface and the second guide driving magnet opposing surface The first guide driving magnet and the second guide driving magnet are spaced apart from each other in the viewing position; As the propulsion means, a floating propulsion magnet opposing surface is attached to both sides of the bottom of the bogie, and a floating propulsion magnet is disposed at a position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed adjacent to an upper portion of the first auxiliary box to measure a vertical floating direction (Z axis) gap of the bogie, and a horizontal guide direction (Y axis) gap of the bogie. A second gap sensor disposed adjacent to an upper portion of the first guide propulsion or second guide propulsion magnet, and a third disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y-axis) gap of the tray module; It is characterized by consisting of a gap sensor.

In the ninth embodiment, the first gap sensor can be fixedly installed in the chamber irrespective of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position, such as the upper side or the lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of the position if the horizontal gap (Y axis) of the bogie can be measured.

According to the tenth embodiment of the present invention, as the above-mentioned floating means, a pair of first sub-boxes facing surfaces and second sub-boxes facing surfaces are attached to both side ends of the upper and lower surfaces of the bogie, and the first sub-box facing surfaces and The first sub-box and the second sub-box are spaced apart from each other at a position facing the second sub-box opposing face; The horizontal guiding means, wherein first and second guide magnet opposing surfaces are attached to both sides of the trolley, and the first and second guide magnets are disposed at positions facing the first and second guide magnet opposing surfaces; As the propulsion means, the floating propulsion magnet opposing surface is attached to the center of the bottom surface of the bogie, and the floating propulsion magnet is disposed at the position facing the floating propulsion magnet opposing surface; The gap measuring means includes a first gap sensor disposed adjacent to an upper portion of the first auxiliary box to measure a vertical floating direction (Z axis) gap of the bogie, and a horizontal guide direction (Y axis) gap of the bogie. A second gap sensor disposed adjacent the upper portion of the first guide magnet or the second guide magnet, and a third gap disposed adjacent to one end of the tray module to measure a horizontal guide direction (Y-axis) gap of the tray module; It is characterized by consisting of a sensor.

In the tenth embodiment, the first gap sensor can be fixedly installed in the chamber regardless of the position if it can measure the vertical (Z-axis) gap of the bogie regardless of the position of the upper or lower side of the bogie, The second gap sensor may also be fixedly installed in the chamber regardless of position if it can measure the horizontal (Y-axis) gap of the bogie.

The eleventh to twenty-second embodiments of the present invention is a structure in which the positions of the trolley and the tray module are upside down, and a tray module including a substrate is vertically erected at the bottom of the trolley to provide a structure that is suspended like a hanger. The configurations for lifting, guiding and pushing are configured the same as or similar to those of the first to tenth embodiments described above.

The twenty-third to thirtieth embodiments of the present invention are to provide a structure in which a tray module including a substrate is laid horizontally and mounted on a bottom surface of a trolley. The configuration is the same as or similar to the tenth embodiment.

On the other hand, in each embodiment, a position sensor is disposed at the bottom of the trolley as position measuring means for measuring the propulsion direction position of the trolley, which position sensor is spaced apart from the scale fixed to the bottom of the trolley and facing the scale. The linear encoder may be configured, and preferably, the linear encoder 18 is fixedly arranged at a predetermined interval in the chamber in the pushing direction (X axis).

Through the above-mentioned means for solving the problems, the present invention provides the following effects.

According to the present invention, the lifting means for floating the trolley in the floating direction (Z-axis direction), the horizontal guide means for guiding the trolley in the horizontal guide direction (Y-axis direction), and the propulsion direction of the trolley (X-axis direction). Propulsion means for propelling or assisting injuries; gap measurement means for measuring gaps in the bogie and tray modules (Z axis), horizontal guide direction (Y axis), and propulsion of the bogie and tray modules. By using position measuring means for measuring the position in the direction (X-axis direction), the trolley applied to the process equipment of the display and semiconductor manufacturing process can be easily driven by constant speed, horizontal guidance and propulsion by an in-line method.

That is, by using the magnetic levitation method that guides or propagates or rotates the object by the magnetic force generated by the electromagnet or permanent magnet, the bogie mounted on the board vertically and horizontally can be guided and propagated in a constant speed by the in-line method. .

Accordingly, it is possible to solve the dust and vibration problems in the vacuum chamber in the process equipment of the display or semiconductor field, and to control the stage position with high precision, thereby improving the production efficiency of the in-line deposition process equipment.

In addition, it is possible to maintain a state of no outgassing while enduring high vacuum, including various components (such as electromagnets and permanent magnets, molding of frames, stator coils, etc.) for magnetic levitation of the present invention in a vacuum in a vacuum chamber, As a result, the deposition process of coating a thin film on the substrate while smoothly guiding and pushing the trolley at a constant speed by the in-line method can be performed smoothly.

1A and 1B are front and side views of a non-contact magnetic levitation stage according to a first embodiment of the present invention;
2 is a front view of a non-contact magnetic levitation stage according to a second embodiment of the present invention;
3 is a front view of a non-contact magnetic levitation stage according to a third embodiment of the present invention;
4 is a front view of a non-contact magnetic levitation stage according to a fourth embodiment of the present invention;
5 is a front view of a non-contact magnetic levitation stage according to a fifth embodiment of the present invention;
6 is a front view of a non-contact magnetic levitation stage according to a sixth embodiment of the present invention;
7 is a front view of a non-contact magnetic levitation stage according to a seventh embodiment of the present invention;
8 is a front view of a contactless magnetic levitation stage according to an eighth embodiment of the present invention;
9 is a front view of a non-contact magnetic levitation stage according to a ninth embodiment of the present invention;
10 is a front view of a non-contact magnetic levitation stage according to a tenth embodiment of the present invention;
11 to 20 are front views each showing the eleventh to twentieth embodiments of the present invention,
21 to 30 are each a front view showing a twenty-first to thirtieth embodiment of the present invention,
31 is a schematic diagram showing an electromagnet form that can be used in each embodiment of the present invention;
32 is a schematic diagram illustrating a mover form that may be used in each embodiment of the present invention;
33 is a schematic diagram illustrating stator shapes that may be used in each embodiment of the present invention.
Figure 34 is a schematic diagram showing a combination of electromagnets and permanent magnets that can be used in each embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In order to help the understanding of the present invention, in each drawing, orange and yellow represent guide propulsion magnets and floating propulsion magnets, red color represent guide propulsion magnet opposing surfaces or floating propulsion magnet opposing surfaces, and gray are injured magnets or guide magnets. Note that blue indicates a floating magnet opposing face or guide magnet opposing face, light green color indicates a gap measuring means, and purple indicates a position measuring means.

First Embodiment

1A is a front view of a non-contact magnetic levitation stage for substrate transfer according to the first embodiment of the present invention, and FIG. 1B is a side view thereof.

The non-contact magnetic levitation stage for transporting a substrate according to the first embodiment is for transporting a tray module in which a flat substrate to which a thin film is coated is vertically mounted and fixed, and the tray module 12 is attached to a fixing means (not shown). It basically includes a cart 10 of a predetermined area mounted vertically.

At this time, the mask 14 for applying a predetermined pattern to the substrate fixed to the tray module 12 is fixed and maintained at a predetermined distance from the substrate by fixing means (not shown).

As a means for floating the trolley 10 in a non-contact manner along the vertical floating direction (Z-axis), a pair of first sub-box stone opposing surfaces 23 and a second injured portion at both ends of the upper and lower surfaces of the trolley 10. The magnet opposing surface 24 is attached, and the first sub-box 21 and the second sub-box 22 are located at positions facing the first sub-box opposing surface 23 and the second sub-box opposing surface 24, respectively. ) Is attached to the vacuum chamber and spaced apart.

In this case, the first and second sub-magnets 21 and 22 are adopted as electromagnets in which the core and the coil are combined, or in the combination of the coil and the core and the permanent magnet (see FIG. 34). The secondary box facing surfaces 23 and 24 are adopted as metal plates (for example, steel plates) as magnetic materials.

More specifically, the first and second sub-magnets 21 and 22 are formed of a coil 26 and a magnetic core 28 having a U or E shape and having a circular or rectangular cross section as shown in FIG. 31. It may be adopted as a configured electromagnet or a magnet in the form of a permanent magnet and a coil, and fixed to a support (not shown) in a vacuum chamber for depositing a deposition material on a substrate.

In addition, the first and second auxiliary box opposing surfaces 23 and 24 are attached to and fixed to the upper and lower surfaces of the trolley 10 as a magnetic material (for example, a flat steel plate).

As a means for guiding the trolley 10 in a non-contact manner along a horizontal guide direction (Y-axis), both sides of the trolley 10 have a first guide driving magnet facing surface 33 and a second guide driving magnet facing surface 34. The first guide propulsion magnet 31 and the second guide propulsion magnet 32 are respectively positioned at positions facing the first guide propulsion magnet opposing surface 33 and the second guide propulsion magnet opposing surface 34. Spaced apart.

At this time, the first and second guide propulsion magnets (31, 32) is a stator 36, as shown in the accompanying Figure 33 is adopted as being made of a three-phase coil of a circular or square cross-section without a core, the first And the second guide propulsion magnet opposing surfaces 33 and 34 are manufactured by overlapping permanent magnets having a rectangular cross section as shown in FIG. 32 attached as the movable element 37 to increase the magnetic flux density between the stator 36. It is designed to have a Halbach array.

Therefore, the first and second guide driving magnets 31 and 32, which are the stators 36, and the first and second guide driving magnet opposing surfaces 33 and 34, which are the movable elements 37, are like a kind of linear motor. Suction force or repulsive force is generated repeatedly, and serves to adjust the position of the trolley 10 in the horizontal guide direction (Y axis) and the propulsion direction (X axis) by the control of the guide propulsion controller (not shown).

On the other hand, the guide magnet opposing surface 42 is attached to the upper end of the tray module 12 is fixed to the substrate, the guide magnet 41 is spaced apart on both sides.

According to the present invention, the first gap sensor 25 for measuring the vertical floating direction (Z-axis) gap of the trolley 10 is adjacent to the outside of the first secondary box 21 or the second secondary box 22. The second gap sensor 35 for measuring the horizontal guide direction (Y-axis) gap of the trolley 10 is adjacent to an upper portion of the first guide driving magnet 31 or the second guide driving magnet 32. In addition, a third gap sensor 43 for measuring the horizontal guide direction (Y axis) gap of the tray module 12 is disposed adjacent to the bottom of the guide magnet 41.

Preferably, the first gap sensor 25, the second gap sensor 35 and the third gap sensor 43 are fixedly installed at regular intervals along the X-axis direction in the vacuum chamber (not shown), more preferably. Preferably, the first gap sensor 25 may be fixedly installed in a chamber (not shown) regardless of the position if the vertical gap (Z axis) of the bogie can be measured regardless of the position of the bogie or the top of the bogie. In addition, the second gap sensor 35 may also be fixedly installed in a chamber (not shown) regardless of position if the horizontal gap (Y axis) of the bogie can be measured.

Since the lower end of the tray module 12 is fixed on the trolley 10 and the upper end is erected vertically, horizontal guide direction (Y-axis) control of the upper end of the tray module 12 to which the substrate is fixed is also necessary. Accordingly, the guide magnet opposing surface 42 is attached to the upper end of the tray module 12, the guide magnet 41 is spaced apart on both sides thereof.

At this time, the guide magnet 41 is also adopted as an electromagnet composed of the coil 26 and the magnetic core 28 is fixed to the inner wall of the vacuum chamber (not shown), the guide magnet opposing surface 42 is a metal plate (eg, magnetic) For example, a steel plate) and attached to the upper end of the tray module 12.

The position sensor 16 for measuring the position in the propulsion direction (X axis) of the trolley 10 is disposed adjacent to the bottom of the trolley 10. Preferably, the position sensor 16 is located on the bottom of the trolley. It is composed of a scale 17 to be attached and a linear encoder 18 spaced apart from the position facing the scale 17, the position sensor 16 configured in this way can be installed in the upper and lower or left and right positions of the trolley 10. Of course, preferably, the linear encoder 18 is fixedly arranged at a predetermined interval in the chamber in the pushing direction (X axis).

More specifically, the scale 17 of the position sensor 16 is fixedly attached to the trolley 10 in the form of a long strip like a thin tape, and the linear encoder 18 is disposed at regular intervals with the scale 17 facing each other. While being fixed to a vacuum chamber (not shown) for the deposition process, and as the trolley 10 moves, the scale 17 passes through the linear encoder 18 while maintaining a constant gap, and at the same time the linear encoder ( 18) can measure the position in the propulsion direction (X axis) of the trolley 10.

The non-contact magnetic levitation stage apparatus according to the first embodiment of the present invention having such a configuration is installed in a high vacuum deposition chamber, and a deposition material for depositing a thin film on a substrate fixed to the tray module 12 is irradiated. The moving speed of (10) and the deposition process should be controlled to be well correlated in time with each other.

FIG. 1B is a side view of the non-contact magnetic levitation stage for substrate transfer according to the first embodiment of the present invention.

The first and second sub-magnets 21 and 22 as described above, and the first and second guide propulsion magnets 31 and 32 are formed in a vacuum chamber (not shown) for forming a thin film of a deposition material on a substrate. It is fixedly installed at regular intervals, and the first to third gap sensors 25, 35, and 43 are also disposed between the floating magnets or the guide propulsion magnets and fixedly installed in the vertical and horizontal directions at regular intervals at any position in the vacuum chamber. Can be.

In addition, the first and second sub-box opposing surfaces 23 and 24 are attached to the upper and bottom portions of the trolley 10 in two rows, and the first and second guide propulsion magnet opposing surfaces 33 and 34 are disposed. The left and right sides of the trolley | bogie 10 are attached and arranged in one row, respectively.

In addition, the guide magnet 41 is also fixedly installed in the vacuum chamber at regular intervals, the guide magnet opposing surface 42 is attached to the upper end of the tray module 12 mounted on the bogie 10 is fixed to the bogie 10 and Will move together.

In addition, the linear encoder 18 of the configuration of the position sensor 16 is installed at a predetermined position of the bottom of the vacuum chamber at a predetermined interval, the scale 17 installed in the bogie 10 is facing the linear encoder 18. It is attached to the bottom of the bogie 10 at a predetermined position and moves with the bogie 10 so that the bogie 10 always measures the position value of the bogie accurately even in any position of the propulsion direction (X axis). can do.

Here, the operation flow of the non-contact magnetic levitation stage for transporting the substrate according to the first embodiment of the present invention will be described.

First, when a current is applied to the first and second sub-magnets 21 and 22, that is, the electromagnet composed of the coil 26 and the magnetic core 28, the first and second sub-magnets 21 and 22 are magnetic materials. It acts as a suction force on the first and second sub-magnet facing surfaces (23, 24) adopted.

Therefore, due to the suction force of the first and second sub-boxes 21 and 22, the bogie 10 to which the first and second sub-boxes opposing surfaces 23 and 24 are attached rises in the vertical floating direction (Z axis). In this case, the gap between the first sub-box 21 and the first sub-box opposing surface 23 and the gap between the second sub-box 22 and the second sub-box opposing surface 24 are the first gap sensors 25. ) And the gap between the first sub-box 21 and the first sub-box opposing surface 23 and the second sub-box 22 under the control of a floating controller (not shown) based on the measured gap information. ) And the second sub-magnet facing surface 24 can be controlled to a constant value.

At the same time, when the current is applied to the first and second guide propulsion magnets 31 and 32, that is, the stator 36 without a core and consisting of a three-phase coil, a permanent magnet having a Halbach array is formed. With respect to the movable mover 37, the suction force or the repulsive force is applied.

Therefore, between the stator 36 adopted as the first and second guide propulsion magnets 31 and 32 and the mover 37 adopted as the first and second guide propulsion magnet opposing surfaces 33 and 34. At the same time as the suction force or the repulsive force is generated, the driving in the horizontal guide direction (Y axis) and the propulsion in the horizontal direction (Y axis) with respect to the trolley 10 are performed by the control of the guide propulsion controller (not shown).

That is, the trolley 10 is guided in the horizontal guide direction (Y-axis) by the first and second guide propulsion magnets 31 and 32 under the control of the guide propulsion controller, so that the propulsion position does not move out of position. In other words, the meaning of being guided in the horizontal guide direction (Y-axis direction) means that the bogie 10 is positioned in the center between the first and second guide propulsion magnet opposing surfaces 33 and 34. It is controlled by the (not shown), and at the same time the bogie 10 is pushed in the propulsion direction (X axis).

At this time, in order to control the horizontal guide direction (Y-axis) of the trolley 10, three-phase current is supplied to the first and first guide propulsion magnets 31 and 32, that is, the stator 36 by a controller (not shown). The generated three-phase current creates a rotating magnetic field, and the rotating magnetic field is electrically separated into the d-axis and the q-axis, so that there is a phase difference of 90 degrees between the d-axis and the q-axis, and can be independently controlled. The d-axis is guided and the q-axis is responsible for propulsion.

In addition, the gap between the stator 36 and the mover 37 is measured by the second gap sensor 35, and d-axis the gap between the stator and the mover in the controller based on the information of the second gap sensor. It can be maintained at regular intervals by controlling the current.

As such, the first and second sub-magnets 21 and 22, the first and second sub-magnet facing surfaces 23 and 24 corresponding thereto, and the first and second guide propulsion magnets 31, 32) and the corresponding first and second sub-magnet facing surfaces 33 and 34 enable high-precision flotation guidance and propulsion, which is very useful for deposition equipment requiring micro-level precision such as OLED. It is possible to apply, and to solve the dust and vibration problem in the vacuum chamber in the process equipment of the display or semiconductor field, and to control the stage position with high precision, thereby greatly improving the production efficiency.

Second Embodiment

2 is a front view illustrating a non-contact magnetic levitation stage for substrate transfer according to a second embodiment of the present invention.

The non-contact magnetic levitation stage for substrate transfer according to the second embodiment has the same configuration as that of the first embodiment, but includes a second secondary box opposing face 34 attached to the bottom of the trolley 10 and the second secondary box It is characterized in that it has a simpler configuration in which the second secondary box 32 fixed to the vacuum chamber while facing the opposing surface 34 is excluded.

Therefore, when a current is applied to the first sub-magnet 21, that is, the electromagnet composed of the coil 26 and the magnetic core 28, the first sub-magnet 21 is the first sub-magnet facing surface (adopted as a magnetic material) 23) acts as a suction force, so that the trolley 10 can be easily floated in the vertical floating direction (Z axis) only by the first sub-box 21 and the first main box opposing surface 23.

As in the first embodiment, the trolley 10 is guided in the horizontal guide direction (Y-axis) by the first and second guide propulsion magnets 31 and 32 under the control of the guide propulsion controller, without leaving the position. Maintaining the position for propulsion, that is, the meaning of being guided in the horizontal guide direction (Y-axis direction) means that the bogie 10 is located at the center between the first and second guide propulsion magnet opposing surfaces 33 and 34. Means that it is controlled by the guide propulsion controller (not shown), and at the same time the bogie 10 is propelled in the propulsion direction (X axis).

Third Embodiment

3 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to a third embodiment of the present invention.

The non-contact magnetic levitation stage for transferring a substrate according to the third embodiment has the same configuration as the first embodiment, but a pair of injuries instead of the second sub-magnet facing surface 24 attached to both bottom surfaces of the trolley 10. The propulsion magnet opposing surface 52 is attached, and a pair of floating propulsion magnets 51 are fixed in the vacuum chamber facing the opposing propulsion magnet opposing surface 52.

The floating propulsion magnet 51 is adopted as a stator 36 such as the first and second guide propulsion magnets 31 and 32 without a core and made of a three-phase coil having a circular or square cross section, and the floating propulsion magnet. The opposing surface 52 is formed by overlapping permanent magnets having a rectangular cross section as the movable element 37, like the first and second guide driving magnet opposing surfaces 33 and 34, and the magnetic flux density between the stator 36 and the opposing surface 52. It is adopted to have a Halbach array that can raise.

Therefore, the injury generating force of the first sub-box 21 is responsible for only a part of the total weight of the bogie 10, the rest of the weight is to be responsible for the floating propulsion magnet 51, the structure of the third embodiment Advantages are to share the lifting force by the first sub-magnet 21 and the floating propulsion magnet 51 to reduce the burden of each other, in particular to increase the propulsion force in addition to the first and second guide propulsion magnets (31,32) By adding a function of the floating propulsion magnet (51) can increase the propulsion force of the cart 10 more significantly.

That is, the first and second guide propulsion magnets 31 and 32 generate the guiding force in the horizontal guide direction (Y axis) and the propulsion force in the propulsion direction (X axis), and at the same time by the floating propulsion magnet 51. Since the floating force (Z-axis direction) and the driving force (X-axis direction) are generated, the driving force of the trolley 10 can be further increased.

Fourth Embodiment

4 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the fourth embodiment of the present invention.

The non-contact magnetic levitation stage for substrate transfer according to the fourth embodiment has the same configuration as that of the third embodiment, but instead of the first and second guide driving magnet opposing surfaces 33 and 34 attached to both sides of the trolley 10. The first and second guide magnets facing surfaces 63 and 64 are attached to the first and second guide magnets facing surfaces 63 and 64, and the first and second guide magnets 61 and 62 in a vacuum chamber facing each other. ) Is fixed.

The first and second guide magnets 61 and 62 are adopted as the electromagnets in which the core and the coil are combined, as in the first sub-magnet 21, or the combination of the coil and the core and the permanent magnet. The second guide magnet opposing faces 63 and 64 are adopted as metal plates (for example, steel plates) as magnetic bodies, like the first sub-magnet facing faces 23.

Accordingly, the first and second guide magnet opposing surfaces 63 and 64 and the first and second guide magnet opposing surfaces 63 and 64 attached to both sides of the trolley 10 face each other. By adopting the guide magnets (61, 62), there is an advantage to increase the stability of the bogie in the horizontal guide direction (Y axis), the propulsion of the bogie is the floating force (Z-axis direction only with the floating propulsion magnet 51) ) And thrust force (X-axis direction) are generated.

Fifth Embodiment

5 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the fifth embodiment of the present invention.

The non-contact magnetic levitation stage for substrate transfer according to the fifth embodiment has the same configuration as the fourth embodiment, but has a pair of floating propulsion magnet opposing surfaces 52 attached to both sides thereof from the bottom of the trolley 10 and the like. It is characterized by using only one pair of opposing floating propulsion magnet 51, preferably one floating prop opposing surface 52 is attached to the center of the bottom surface of the trolley 10, the vacuum facing this One floating propulsion magnet 51 is attached to the bottom of the chamber.

Thus, by using two columns of floating propulsion magnets and their opposing surfaces as one row, it is possible to provide an advantage of minimizing the force disturbance due to the difference in the driving force that can occur in the left and right two rows of propulsion motor.

Sixth Embodiment

6 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the sixth embodiment of the present invention.

The non-contact magnetic levitation stage for substrate transfer according to the sixth embodiment has the same configuration as that of the third embodiment, but faces the pair of first sub-seat stone facing surfaces 24 attached to both sides of the upper surface of the trolley 10. It is characterized by having a simplified configuration by excluding the pair of first sub-magnets 21 mounted in the vacuum chamber.

Therefore, the floating and propulsion are simultaneously performed by the floating force (Z-axis direction) and the propulsion force (X-axis direction) generated by the pair of floating propulsion magnets 51 which are disposed at the bottom of the trolley 10 and are fixed to the vacuum chamber. At the same time, the horizontal guidance and propulsion control of the trolley 10 is performed by the guide force (Y axis direction) and the propulsion force (X axis direction) generated by the first and second guide propulsion magnets 31 and 32. Will be done.

Seventh Embodiment

7 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the seventh embodiment of the present invention.

The non-contact magnetic levitation stage for transporting a substrate according to the seventh embodiment has the same configuration as the sixth embodiment, but instead of the first and second guide driving magnet opposing surfaces 33 and 34 attached to both sides of the trolley 10. The first and second guide magnet opposing surfaces 63 and 64, which are magnetic bodies (for example, steel plates), are attached to the first and second guide propulsion magnets 31 and 32, respectively. The first and second guide magnets 61 and 62 are adopted as an electromagnet having a combination of cores and coils in a vacuum chamber facing the guide magnet opposing surfaces 63 and 64, or a combination of coils, cores and permanent magnets. There is a characteristic in the fixed point.

Accordingly, by replacing the first and second guide propulsion magnets 31 and 32 with the first and second guide magnets 61 and 62, the effect of further increasing the positional stability in the horizontal guide direction (Y-axis direction) of the trolley is increased. In this case, the injury and propulsion may be made by a pair of floating propulsion magnet opposing surface 52 attached to both sides of the bottom surface of the bogie 10 and the floating propulsion magnet 51 fixed in the vacuum chamber.

Eighth Embodiment

8 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to an eighth embodiment of the present invention.

The non-contact magnetic levitation stage for transporting a substrate according to the eighth embodiment has the same configuration as the fourth embodiment, but has a floating magnet opposing surface attached to both sides of the upper surface of the bogie 10 and a floating magnet facing the vacuum chamber. Is characterized by the application of

That is, as shown in Fig. 32 to which the first sub-box magnet opposing surface 23 attached to both upper surfaces of the trolley 10 as the movable element 37 is adopted to be manufactured by superimposing a permanent magnet having a rectangular cross section, The first auxiliary box 21 which faces the vacuum chamber and is attached to the vacuum chamber is characterized in that it is simply made of a magnetic material (for example, steel plate), thereby removing a part of the floating force of the floating propulsion magnet 51. The 1st box 21 can be in charge.

More specifically, the first sub box 21 is made of a magnetic material (for example, iron plate) as a stator, and the first sub box opposing surface 23 attached to the trolley as the opposing face is a permanent magnet. By itself, a suction force is generated to injure the trolley 10, thereby providing an effect of reducing the floating force burden of the floating propulsion magnet 51 disposed at the bottom of the trolley 10.

Example 9

9 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the ninth embodiment of the present invention.

The non-contact magnetic levitation stage for substrate transfer according to the ninth embodiment has the same configuration as that of the eighth embodiment, and is a means for guiding the trolley 10 in a non-contact manner along the horizontal guide direction (Y axis). 10, the first guide propulsion magnet opposing surface 33 and the second guide propulsion magnet opposing surface 34 are attached to both sides of the first and second guide magnet opposing surfaces 63 and 64, In the position facing the magnet opposing surface 33 and the second guide propulsion magnet 34, the first guide propulsion magnet 31 and the second guide propulsion instead of the first and second guide magnets 61 and 62, respectively. The magnet 32 is characterized in that it is spaced apart in the vacuum chamber.

Thus, according to the ninth embodiment, by replacing the first and second guide magnets (61, 62) of the eighth embodiment with the first and second guide propulsion magnets (31, 32), in addition to the floating propulsion magnet (51) Since the first and second guide driving magnets 31 and 32 generate more driving force including guide force for the balance, the driving force for the balance can be further increased.

Embodiment 10

10 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to the tenth embodiment of the present invention.

The non-contact magnetic levitation stage for transporting a substrate according to the tenth embodiment has the same configuration as that of the fifth embodiment, but the second secondary box 22 and the second secondary box opposing surface, as in the first embodiment, on both sides of the bottom of the trolley. (24) is further applied.

In the tenth embodiment of the present invention, one floating propulsion magnet opposing surface 52 is attached to the bottom of the trolley 10 as in the fifth embodiment, and one floating propulsion magnet 51 facing each other is provided one by one. Although only the use points and the remaining configurations are the same, in the tenth embodiment, the second sub-box 22 and the second sub-box opposing surface 24, which are the same as the first embodiment, are further applied to both bottom surfaces of the trolley. There is this.

This tenth embodiment controls the floating (Z-axis direction) and the horizontal guide direction (Y-axis direction) of the trolley with the most stable electromagnet, but the propulsion of the trolley (X-axis direction) is one floating propulsion magnet (51). That is, the Halbach which can increase the magnetic flux density between the stator 36 and the stator 36 of the three-phase coil without a core and one floating propeller 섣 opposing surface 52, that is, a permanent magnet, can be increased. It is made by a mover 37 fabricated to have a Halbach array.

Eleventh to Nineteenth Embodiments

11 to 19 are front views illustrating a non-contact magnetic levitation stage for substrate transfer according to the eleventh to nineteenth embodiments of the present invention.

The eleventh embodiment is the first embodiment, the twelfth embodiment is the second embodiment, the thirteenth embodiment is the third embodiment, the fourteenth embodiment is the fourth embodiment, and the fifteenth embodiment is the first embodiment. The sixth embodiment and the sixteenth embodiment are the seventh embodiment, the seventeenth embodiment, the eighth embodiment, the eighteenth embodiment, the ninth embodiment, the nineteenth embodiment, and the tenth embodiment, respectively. The configurations for lifting, guiding and propelling 10 are the same, and are characterized by a structure in which only the positions of the trolley 10 and the tray module 12 are reversed up and down.

That is, the structure of the trolley 10 on the upper side of the vacuum chamber (not shown) is also applicable to a structure in which the tray module is propelled together with the trolley by hanging on the trolley as if it is a hanger type. And since the operation is as described above, a detailed description thereof will be omitted.

Example 20

20 is a front view illustrating a non-contact magnetic levitation stage for transporting a substrate according to a twentieth embodiment of the present invention.

The twentieth embodiment of the present invention is constructed similarly to the sixteenth embodiment, and is characterized in that the positions of the floating propulsion magnet opposing surface 52 and the floating propulsion magnet 51 are changed.

That is, in the sixteenth embodiment, the positions of the surface of the floating propulsion magnet 52 and the surface of the floating propulsion magnet 51 are configured on both sides of the bottom surface of the bogie 10. It is characteristic in that it is comprised on both sides of the upper surface of).

More specifically, the floating propulsion magnet opposing surface 52, which is manufactured by superimposing a permanent magnet and manufactured to have a Halbach array that can increase the magnetic flux density between the stator 36 and the bogie 10, The floating propulsion magnet 51, which is attached to both sides of the upper surface and has no core, has a circular or rectangular three-phase coil or a linear shape consisting of a three-phase coil and a core, is fixed to the upper end of the vacuum chamber, thereby providing a counter-floating magnet opposing surface ( 52) and the floating propulsion magnet 51 can simultaneously obtain the floating force (Z-axis direction) and the driving force (X-axis direction) of the trolley 10, the horizontal guide direction (Y-axis direction) is the first and second The guide magnets 61 and 62 and the first and second guide magnet opposing surfaces 63 and 64 are in charge.

Example 21

21 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to a twenty-first embodiment of the present invention.

The twenty-first embodiment has the same configuration as the twentieth embodiment, characterized in that the floating propulsion magnet 51 and the floating propulsion facing surface 52 are configured in one row at the center of the upper surface of the trolley 10 in one row. Simple implementations can offer simple advantages in structure.

Example 22

22 is a front view showing a non-contact magnetic levitation stage for substrate transfer according to a twenty-second embodiment of the present invention.

The twenty-second embodiment of the present invention is configured similarly to the sixteenth embodiment, and constitutes a floating magnet and a floating magnet opposing surface capable of providing floating stability of the bogie 10 only at the central portion of the upper surface of the bogie 10. On the other hand, the floating magnet opposing surface attached to the trolley 10 and the floating magnet opposite to this are mounted to the vacuum chamber, as described in the eighth embodiment.

That is, the first sub-box facing surface 23 attached to the center of the upper surface of the trolley 10 is adopted as the mover 37, as shown in Fig. 32, which is manufactured by superimposing a permanent magnet having a rectangular cross section. The first auxiliary box 21 which is attached to the upper side of the vacuum chamber facing the opposite side is characterized in that it is simply made of a magnetic material (for example, a steel plate), and thus, part of the floating force of the floating propulsion magnet 51. The first secondary box 21 can be in charge.

Therefore, since the first sub box 21 is made of a magnetic body (for example, an iron plate) as a stator, and the first sub box opposing surface 23 attached to the trolley as the opposing face becomes a permanent magnet, As the suction force is generated to cause the trolley 10 to rise, thereby providing an effect of reducing the burden of the floating force other than the propulsion force in charge of the floating propulsion magnet 51 disposed at the bottom of the trolley 10.

Twenty-third to thirtieth embodiments

23 to 30 are front views illustrating a non-contact magnetic levitation stage for transferring substrates according to a twenty-third to thirtieth embodiment of the present invention.

The twenty-third embodiment is the first embodiment, the twenty-fourth embodiment is the second embodiment, the twenty-fifth embodiment is the third embodiment, the twenty-sixth embodiment is the fourth embodiment, and the twenty-seventh embodiment is the second embodiment. The sixth embodiment and the twenty-eighth embodiment are the sixteenth embodiment, the twenty-ninth embodiment are the seventeenth embodiment, and the thirtieth embodiment are the eighteenth embodiment, respectively. The configurations are the same, and only the tray module 12 is laid down in a horizontal state rather than vertically, but is characterized by a structure in which the tray module 12 is laid in a horizontal state and fixed in a horizontal state.

That is, the tray module 12, the substrate mounted on the tray module 12, and the mask 14 adjacent to the substrate and spaced apart by the fixing means (not shown) are horizontally disposed below the trolley 10. It is characterized by being arranged so that it is applicable when the size of the substrate is small.

On the other hand, when the substrate size increases, it is advantageous to vertically erect the mask, and thus, it is preferable to use a method of vertically erecting a tray module including the mask as in the first to twenty-second embodiments.

Thus, even in the structure in which the tray module 12, the substrate mounted on the tray module 12, and the mask 14 adjacent to the substrate and spaced apart by the fixing means (not shown) are arranged horizontally on the bogie, the bogie 10 Since the control operation for the horizontal guide direction (Y-axis direction), floating direction (Z-axis direction), and propulsion direction (X-axis direction) of the above is made as described in the first to twenty-second embodiments, the detailed description thereof Will be omitted.

10: Bogies
12: tray module
14: Mask
16: position sensor
17: scale
18: linear encoder
21: First Division Box
22: second part box
23: first side box facing surface
24: second secondary box facing surface
25: first gap sensor
26: Coil
28: magnetic core
31: The first guide promotion magnet
32: 2nd guide promotion magnet
33: facing the first guide driving magnet
34: facing the second guide driving magnet
35: second gap sensor
36: stator
37: mover
41: guide magnet
42: opposing magnet face
43: third gap sensor
51: floating propulsion magnet
52: opposing face of floating propulsion magnet
61: first guide magnet
62: second guide magnet
63: facing the first guide magnet
64: facing the second guide magnet

Claims (45)

In the non-contact magnetic levitation stage apparatus for transporting a substrate, comprising a trolley 10 having a predetermined area and a tray module 12 mounted on the trolley 10 to mount a substrate.
Floating means selectively arranged to float the bogie in the floating direction (Z-axis direction) on the top or bottom, top and bottom of the bogie 10;
Horizontal guiding means arranged on both sides of the trolley 10 for guiding in the horizontal guiding direction (Y-axis direction) of the trolley;
Propulsion means selectively mounted on the top or bottom, top and bottom, side surfaces of the trolley 10 for propulsion of the trolley in the propulsion direction (X-axis direction) or for assisting injuries;
Gap measuring means for measuring the floating direction (Z axis) gap and the horizontal guide direction (Y axis) gap of the trolley 10 and the tray module 12 and the propulsion direction of the trolley 10 and the tray module 12. (X-axis) position measuring means for measuring the position;
Non-contact magnetic levitation stage apparatus for substrate transfer, comprising a.
The method according to claim 1,
As the floating means, a pair of first auxiliary box opposing surfaces 23 and a second auxiliary box opposing surface 24 are attached to both side ends of the upper and lower surfaces of the trolley 10, and at the same time, the first auxiliary box opposing surface 23 is attached. ) And the second sub-box stone 21 and the second sub-box 22 are spaced apart at positions facing the second sub-box opposing surface 24, respectively.
As the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface 33 and the second guide driving magnet opposing surface 34 are attached to both side surfaces of the trolley 10 and the first guide driving magnet opposing surface ( 33) and the first guide propulsion magnet 31 and the second guide propulsion magnet 32 are spaced apart from each other at a position facing the opposite surface 34 of the second guide propulsion magnet,
The gap measuring means includes a first gap sensor 25 disposed adjacent to an outer side of the first sub box 21 or the second sub box 22 in order to measure the vertical floating direction (Z-axis) gap of the trolley 10. And a second gap sensor 35 disposed adjacent to an upper portion of the first guide propulsion magnet 31 or the second guide propulsion magnet 32 to measure a horizontal guide direction (Y axis) gap of the trolley 10. And a third gap sensor 43 disposed adjacent to one end of the tray module 12 to measure a horizontal guide direction (Y axis) gap of the tray module 12, and each gap sensor is driven. A non-contact magnetic levitation stage apparatus for transporting a substrate, wherein the substrate is fixedly arranged at a predetermined interval in the chamber in the X direction.
The method according to claim 2,
The first and second sub-magnets 21 and 22 are adopted as electromagnets in which a core and a coil are combined, or are used as electromagnets composed of a coil 26 and a magnetic core 28, or magnets having a permanent magnet and a coil. And the first and second sub-box opposing surfaces (23, 24) are adopted as a magnetic plate as a magnetic plate.
The method according to claim 2,
The first and second guide driving magnets 31 and 32 are adopted as a stator 36 as a three-phase coil without a core, and the first and second guide driving magnet opposing surfaces 33 and 34 are movable members ( 37) A non-contact magnetic levitation stage device for transporting substrates, which is manufactured by superimposing permanent magnets and has a Halbach array that can increase magnetic flux density between stators 36. .
The method according to claim 1 or 2,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
The method according to claim 1,
As the floating means, a pair of first secondary box opposing surfaces 23 is attached to both side ends of the upper surface of the trolley 10 and at the position facing the first secondary box opposing surface 23, the first secondary box 21 are spaced apart,
As the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface 33 and the second guide driving magnet opposing surface 34 are attached to both side surfaces of the trolley 10 and the first guide driving magnet opposing surface ( 33) and the first guide propulsion magnet 31 and the second guide propulsion magnet 32 are spaced apart from each other at a position facing the opposite surface 34 of the second guide propulsion magnet,
The gap measuring means includes a first gap sensor 25 disposed adjacent to an outer side of the first sub box 21 or the second sub box 22 in order to measure the vertical floating direction (Z-axis) gap of the trolley 10. And a second gap sensor 35 disposed adjacent to an upper portion of the first guide propulsion magnet 31 or the second guide propulsion magnet 32 to measure a horizontal guide direction (Y axis) gap of the trolley 10. And a third gap sensor 43 disposed adjacent to one end of the tray module 12 to measure a horizontal guide direction (Y axis) gap of the tray module 12. Contactless magnetic levitation stage device.
The method of claim 6,
The first sub-magnet 21 is adopted as an electromagnet in which the core and the coil are combined, or is adopted as an electromagnet composed of the coil 26 and the magnetic core 28 or a magnet in the form of a permanent magnet and a coil. Non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that the one side box facing surface 23 is adopted as a magnetic plate as a magnetic material.
The method of claim 6,
The first and second guide driving magnets 31 and 32 are adopted as a stator 36 as a three-phase coil without a core, and the first and second guide driving magnet opposing surfaces 33 and 34 are movable members ( 37) A non-contact magnetic levitation stage device for transporting substrates, which is manufactured by superimposing permanent magnets and has a Halbach array that can increase magnetic flux density between stators 36. .
The method according to claim 1 or 6,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
The method according to claim 1,
As the floating means, a pair of first secondary box opposing surfaces 23 is attached to both side ends of the upper surface of the trolley 10 and at the position facing the first secondary box opposing surface 23, the first secondary box 21 are spaced apart,
As the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface 33 and the second guide driving magnet opposing surface 34 are attached to both side surfaces of the trolley 10 and the first guide driving magnet opposing surface ( 33) and the first guide propulsion magnet 31 and the second guide propulsion magnet 32 are spaced apart from each other at a position facing the opposite surface 34 of the second guide propulsion magnet,
As the propulsion means, the floating propulsion magnet opposing surface 52 is further attached to both sides of the bottom of the trolley 10, and the floating propulsion magnet 51 is further disposed at a position facing the floating propulsion magnet opposing surface 52,
The gap measuring means includes a first gap sensor 25 disposed adjacent to the outside of the first auxiliary box 21 to measure the vertical floating direction (Z-axis) gap of the bogie 10 and the bogie 10. A second gap sensor 35 disposed adjacent to an upper portion of the first guide driving magnet 31 or the second guide driving magnet 32 to measure a horizontal guide direction (Y-axis) gap, and the tray module 12 Non-contact magnetic levitation stage device for substrate transfer, characterized in that consisting of a third gap sensor 43 adjacent to one end of the tray module 12 for measuring the horizontal guide direction (Y-axis) gap.
The method of claim 10,
The first sub-magnet 21 is adopted as an electromagnet in which the core and the coil are combined, or is adopted as an electromagnet composed of the coil 26 and the magnetic core 28 or a magnet in the form of a permanent magnet and a coil. Non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that the one side box facing surface 23 is adopted as a magnetic plate as a magnetic material.
The method of claim 10,
The first and second guide driving magnets 31 and 32 are adopted as a stator 36 as a three-phase coil without a core, and the first and second guide driving magnet opposing surfaces 33 and 34 are movable members ( 37) A non-contact magnetic levitation stage device for transporting substrates, which is manufactured by superimposing permanent magnets and has a Halbach array that can increase magnetic flux density between stators 36. .
The method according to claim 1 or 10,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
The method of claim 10,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the floating means, a pair of first secondary box opposing surfaces 23 is attached to both side ends of the upper surface of the trolley 10 and at the position facing the first secondary box opposing surface 23, the first secondary box 21 are spaced apart,
As the horizontal guide means, the first and second guide magnet opposing surfaces 63 and 64 are attached to both sides of the trolley 10 and face the first and second guide magnet opposing surfaces 63 and 64. The first and second guide magnets 61 and 62 are disposed in the
As the propulsion means, the floating propulsion magnet opposing surface 52 is further attached to both bottom surfaces or the bottom center of the trolley 10, and the floating propulsion magnet 51 is further positioned at a position facing the floating propulsion magnet opposing surface 52. Will be placed,
The gap measuring means includes a first gap sensor 25 disposed adjacent to the outside of the first auxiliary box 21 to measure the vertical floating direction (Z-axis) gap of the bogie 10 and the bogie 10. A second gap sensor 35 disposed adjacent to an upper portion of the first guide magnet 61 or the second guide magnet 62 to measure a horizontal guide direction (Y-axis) gap; A non-contact magnetic levitation stage apparatus for transporting a substrate, comprising a third gap sensor (43) disposed adjacent to one end of the tray module (12) to measure the guiding direction (Y-axis) gap.
16. The method of claim 15,
The first sub-magnet 21 is adopted as an electromagnet in which the core and the coil are combined, or is adopted as an electromagnet composed of the coil 26 and the magnetic core 28 or a magnet in the form of a permanent magnet and a coil. Non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that the one side box facing surface 23 is adopted as a magnetic plate as a magnetic material.
16. The method of claim 15,
The first and second guide magnets 61 and 62 are adopted as an electromagnet in which a core and a coil are combined, or a combination of a coil, a core and a permanent magnet, and a first and second guide magnet opposing surfaces 63 and 62. 64) A non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that it is adopted as a magnetic plate as a magnetic material.
The method according to claim 1 or 15,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
The method of claim 10,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface 33 and the second guide driving magnet opposing surface 34 are attached to both side surfaces of the trolley 10 and the first guide driving magnet opposing surface ( 33) and the first guide propulsion magnet 31 and the second guide propulsion magnet 32 are spaced apart from each other at a position facing the opposing face 34 of the second guide propulsion magnet,
As the floating means and the propulsion means, the floating propulsion magnet opposing surface 52 is attached to both sides of the bottom of the trolley 10, and the floating propulsion magnet 51 is disposed at a position facing the floating propulsion magnet opposing surface 52. ,
The gap measuring means includes a first gap sensor 25 disposed on both sides of an upper surface of the bogie in order to measure a gap in the vertical floating direction (Z-axis) of the bogie 10, and a horizontal guide direction of the bogie 10 (Y-axis). ) The second gap sensor 35 disposed adjacent to the first guide propulsion magnet 31 or the second guide propulsion magnet 32 to measure a gap; and the horizontal guide direction Y of the tray module 12. Axis) A non-contact magnetic levitation stage apparatus for substrate transfer, comprising a third gap sensor (43) disposed adjacent to one end of the tray module (12) to measure the gap.
The method of claim 20,
The first and second guide driving magnets 31 and 32 are adopted as a stator 36 as a three-phase coil without a core, and the first and second guide driving magnet opposing surfaces 33 and 34 are movable members ( 37) A non-contact magnetic levitation stage device for transporting substrates, which is manufactured by superimposing permanent magnets and has a Halbach array that can increase magnetic flux density between stators 36. .
The method according to claim 1 or 20,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
The method of claim 20,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the horizontal guide means, the first and second guide magnet opposing surfaces 63 and 64 are attached to both sides of the trolley 10 and face the first and second guide magnet opposing surfaces 63 and 64. First and second guide magnets 61 and 62 are arranged in the
As the floating means and the propulsion means, the floating propulsion magnet opposing surface 52 is attached to both sides of the bottom of the trolley 10, and the floating propulsion magnet 51 is disposed at a position facing the floating propulsion magnet opposing surface 52. ,
The gap measuring means includes a first gap sensor 25 disposed on both sides of an upper surface of the bogie in order to measure a gap in the vertical floating direction (Z-axis) of the bogie 10, and a horizontal guide direction of the bogie 10 (Y-axis). A second gap sensor 35 disposed adjacent to an upper portion of the first guide magnet 61 or the second guide magnet 62 to measure a gap; and a horizontal guide direction (Y axis) of the tray module 12. Non-contact magnetic levitation stage device for substrate transfer, characterized in that consisting of a third gap sensor (43) disposed adjacent one end of the tray module (12) to measure the gap.
27. The method of claim 24,
The first and second guide magnets 61 and 62 are adopted as an electromagnet in which a core and a coil are combined, or a combination of a coil, a core and a permanent magnet, and a first and second guide magnet opposing surfaces 63 and 62. 64) A non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that it is adopted as a magnetic plate as a magnetic material.
The method according to claim 1 or 24,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
27. The method of claim 24,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the floating means, a pair of first secondary box opposing surfaces 23 is attached to both side ends of the upper surface of the trolley 10 and at the position facing the first secondary box opposing surface 23, the first secondary box 21 are spaced apart,
As the horizontal guide means, the first and second guide magnet opposing surfaces 63 and 64 are attached to both sides of the trolley 10 and face the first and second guide magnet opposing surfaces 63 and 64. The first and second guide magnets 61 and 62 are disposed in the
As the propulsion means, the floating propulsion magnet opposing surface 52 is attached to both sides of the bottom of the trolley 10, and the floating propulsion magnet 51 is disposed at a position facing the floating propulsion magnet opposing surface 52,
The gap measuring means includes a first gap sensor 25 disposed adjacent to an upper portion of the first auxiliary box 21 to measure a vertical floating direction (Z-axis) gap of the bogie 10 and the bogie 10. A second gap sensor 35 disposed adjacent to an upper portion of the first guide magnet 61 or the second guide magnet 62 to measure a horizontal guide direction (Y-axis) gap; A non-contact magnetic levitation stage apparatus for transporting a substrate, comprising a third gap sensor (43) disposed adjacent to one end of the tray module (12) to measure the guiding direction (Y-axis) gap.
29. The method of claim 28,
The first sub-magnet 21 is formed by superimposing a rectangular permanent magnet, and the first sub-magnet facing surface 23 is adopted as a magnetic plate as a magnetic plate. .
29. The method of claim 28,
The first and second guide magnets 61 and 62 are adopted as an electromagnet in which a core and a coil are combined, or a combination of a coil, a core and a permanent magnet, and a first and second guide magnet opposing surfaces 63 and 62. 64) A non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that it is adopted as a magnetic plate as a magnetic material.
The method according to claim 1 or 28,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
29. The method of claim 28,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the floating means, a pair of first secondary box opposing surfaces 23 is attached to both side ends of the upper surface of the trolley 10 and at the position facing the first secondary box opposing surface 23, the first secondary box 21 are spaced apart,
As the horizontal direction guide means and the propulsion means, the first guide driving magnet opposing surface 33 and the second guide driving magnet opposing surface 34 are attached to both side surfaces of the trolley 10 and the first guide driving magnet opposing surface ( 33) and the first guide propulsion magnet 31 and the second guide propulsion magnet 32 are spaced apart from each other at a position facing the opposite surface 34 of the second guide propulsion magnet,
As the propulsion means, the floating propulsion magnet opposing surface 52 is attached to both sides of the bottom of the trolley 10, and the floating propulsion magnet 51 is disposed at a position facing the floating propulsion magnet opposing surface 52,
The gap measuring means includes a first gap sensor 25 disposed adjacent to an upper portion of the first auxiliary box 21 to measure a vertical floating direction (Z-axis) gap of the bogie 10 and the bogie 10. The second gap sensor 35 disposed adjacent to the upper portion of the first guide propulsion 31 or the second guide propulsion magnet 32 to measure the horizontal guide direction (Y-axis) gap, and the tray module 12 of the Non-contact magnetic levitation stage device for substrate transfer, characterized in that consisting of a third gap sensor (43) disposed adjacent to one end of the tray module (12) to measure the horizontal guide direction (Y-axis) gap.
34. The method of claim 33,
The first sub-magnet 21 is formed by superimposing a rectangular permanent magnet, and the first sub-magnet facing surface 23 is adopted as a magnetic plate as a magnetic plate. .
34. The method of claim 33,
The first and second guide driving magnets 31 and 32 are adopted as a stator 36 as a three-phase coil without a core, and the first and second guide driving magnet opposing surfaces 33 and 34 are movable members ( 37) A non-contact magnetic levitation stage device for transporting substrates, which is manufactured by superimposing permanent magnets and has a Halbach array that can increase magnetic flux density between stators 36. .
The method according to claim 1 or 33,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
34. The method of claim 33,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
As the floating means, a pair of first auxiliary box opposing surfaces 23 and a second auxiliary box opposing surface 24 are attached to both side ends of the upper and lower surfaces of the trolley 10, and at the same time, the first auxiliary box opposing surface 23 is attached. ) And the second sub-box stone 21 and the second sub-box 22 are spaced apart at positions facing the second sub-box opposing surface 24, respectively.
As the horizontal guide means, the first and second guide magnet opposing surfaces 63 and 64 are attached to both sides of the trolley 10 and face the first and second guide magnet opposing surfaces 63 and 64. The first and second guide magnets 61 and 62 are disposed in the
As the propulsion means, the floating propulsion magnet opposing surface 52 is attached to the center of the bottom surface of the trolley 10, the floating propulsion magnet 51 is disposed at the position facing the floating propulsion magnet opposing surface 52,
The gap measuring means includes a first gap sensor 25 disposed adjacent to an upper portion of the first auxiliary box 21 to measure a vertical floating direction (Z-axis) gap of the bogie 10 and the bogie 10. A second gap sensor 35 disposed adjacent to an upper portion of the first guide magnet 61 or the second guide magnet 62 to measure a horizontal guide direction (Y-axis) gap; A non-contact magnetic levitation stage apparatus for transporting a substrate, comprising a third gap sensor (43) disposed adjacent to one end of the tray module (12) to measure the guiding direction (Y-axis) gap.
42. The method of claim 38,
The first and second sub-magnets 21 and 22 are adopted as electromagnets in which a core and a coil are combined, or are used as electromagnets composed of a coil 26 and a magnetic core 28, or magnets having a permanent magnet and a coil. And the first and second sub-box opposing surfaces (23, 24) are adopted as a magnetic plate as a magnetic plate.
42. The method of claim 38,
The first and second guide magnets 61 and 62 are adopted as an electromagnet in which a core and a coil are combined, or a combination of a coil, a core and a permanent magnet, and a first and second guide magnet opposing surfaces 63 and 62. 64) A non-contact magnetic levitation stage apparatus for transporting a substrate, characterized in that it is adopted as a magnetic plate as a magnetic material.
The method according to claim 1 or 38,
At the bottom of the trolley 10, a position sensor 16 for measuring the propulsion direction position of the trolley as a position measuring means is disposed, the position sensor 16 having a scale 17 fixed to the bottom of the trolley 10; And a linear encoder 18 spaced apart from each other at a position facing the scale 17, wherein the linear encoder 18 is fixedly disposed at a predetermined interval in the chamber in a pushing direction (X axis). Non-contact magnetic levitation stage device.
42. The method of claim 38,
The floating propulsion magnet 51 is adopted as a three-phase coil without a core, and the floating propulsion magnet opposing surface 52 is a mover 37 that is manufactured by superimposing a permanent magnet having a rectangular cross section and having a stator 36. Non-contact magnetic levitation stage device for substrate transfer, characterized in that it was adopted to have a Halbach array that can increase the magnetic flux density between the) and ().
The method according to claim 1,
The tray module 12 to which the substrate is fixed is vertically fixed to the top or bottom surface of the trolley 10, and is a means for horizontally guiding the vertically mounted tray module 12. Guide magnet opposing surface 42 is attached to the end portion, the guide magnet 41 is a non-contact magnetic levitation stage device for substrate transfer, characterized in that spaced apart disposed on both sides.
The method of claim 43,
The guide magnet 41 is adopted as an electromagnet in which the core and the coil are combined, or is used as an electromagnet composed of the coil 26 and the magnetic core 28 or as a magnet in the form of a permanent magnet and a coil. A non-contact magnetic levitation stage apparatus for transporting a substrate, wherein the opposing surface 42 is adopted as a magnetic plate as a magnetic material.
The method according to claim 1,
Non-contact magnetic levitation stage device for substrate transfer, characterized in that the tray module (12), the substrate is fixed to the upper surface or the bottom surface of the trolley (10) is laid flat in a horizontal state.

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