KR20120131704A - Multi axis Manufacturing Machine of Silicon - Google Patents

Abstract

The present invention is a work table on which two silicon substrates are mounted in parallel; A Y-axis drive unit which controls the worktable in the front-rear direction of the front of the main body of the machine; A headstock in which two spindles for simultaneously processing two silicon substrates on the work table are installed in parallel; Z-axis driving unit for controlling the feedstock in the vertical direction of the front of the main machine body; And an X-axis driving unit configured to transfer control of the main shaft including the Z-axis driving unit to the left and right directions of the front surface of the machine body.

Description

CNC multi-axis manufacturing machine {Multi axis Manufacturing Machine of Silicon}

The present invention relates to a CNC real multi-axis machining machine, and more particularly to a CNC silicon multi-axis machining machine equipped with a four-axis spindle capable of high-precision high-speed machining.

Generally, the silicon processing machine refers to a device used for hole processing of a tempered glass (hereinafter referred to as silicon) product used as a window of a mobile communication device.

Currently, the basic equipment used for silicon processing is general general machining center or tapping machine. Due to the inherent characteristics of these machines, these machines are manufactured for tapping purposes such as molds and engines. It is not suitable for fine drills of 0.4 pie or less, such as optimum equipment or silicon processing, for products that require maximum cutting amount to reduce machining time or require quick tapping.

In the silicon processing machine, the most important factor is to minimize vibration and increase mass productivity. Wafer drill processing, which takes up the majority of the processing, requires more than 40 hours to produce a single product. If a drill breakage occurs during processing, it immediately leads to failure and enormous financial loss.

Due to their characteristics, these machines use servo spindles to shorten the acceleration / deceleration time and maintain the spindle's low torque and high torque, which causes vibrations during feed and spindle rotation, which leads to premature wear of the drill and tool breakage. There was a problem that made it difficult to predict the tool's regular life.

This, the tool life uncertainty increases the defective rate of the product and had a problem in the regular production plan in production.

In particular, in the silicon processing, which takes two days or more to produce a single product, there is a problem that the existing single-axis processing method has a lot of limitations in improving productivity.

An object of the present invention for solving the problems of the prior art is to configure the workbench to simultaneously process the spindle and two silicon substrates are mounted with two spindles to improve productivity, shortening the setting time and of the processing tool In order to prevent premature failure, the present invention provides a CNC silicon multi-axis machine that is configured to have an automatic measuring device and an automatic tool changer.

An object of the present invention is a work table on which two silicon substrates are mounted in parallel; A Y-axis drive unit which controls the worktable in the front-rear direction of the front of the main body of the machine; A headstock in which two spindles for simultaneously processing two silicon substrates on the work table are installed in parallel; Z-axis driving unit for controlling the feedstock in the vertical direction of the front of the main machine body; And it can be achieved through a CNC silicon multi-axis processing machine comprising a; X-axis drive unit for controlling the transfer of the main shaft including the Z-axis drive unit in the left and right direction of the front of the machine body.

According to the present invention having the configuration as described above, by configuring the worktable to simultaneously process the spindle and the two silicon substrates on which the two spindles are mounted, the productivity is improved, as well as through the automatic measuring device and tool changer In addition to shortening the setting time, it is possible to prevent premature breakage of the machining tool, and furthermore, it has the effect of satisfying the needs of consumers at a minimum cost.

In addition, the present invention can maintain a constant size of the processing hole of the silicon product and a constant interval of the processing hole, and has the effect of improving the vertical straightness of the hole and chipping (chipping) performance.

1 is a front view showing the external appearance of a CNC silicon multi-axis processing machine according to an embodiment of the present invention.
Figure 2 is a front sectional view showing the internal structure of the CNC silicon multi-axis processing machine according to an embodiment of the present invention.
Figure 3 is a plan view showing the internal structure of a CNC silicon multi-axis processing machine according to an embodiment of the present invention.
Figure 4 is a side view showing the internal structure of a CNC silicon multi-axis processing machine according to an embodiment of the present invention.
Figure 5 is a front sectional view for explaining the structure of the tool changer of the CNC silicon multi-axis processing machine according to an embodiment of the present invention.
6 is a plan view showing the structure of the tool changer of FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a front view showing the external appearance of a CNC silicon multi-axis processing machine according to an embodiment of the present invention, the machine of the present invention, the upper work space of the machine main body 110 is sealed and opened using the door 111. By doing so, safety accidents at work are prevented. At this time, one side of the door 111 is provided with a control unit 113 that can set or control the working conditions of the processing machine.

Figure 2 is a front sectional view showing the internal structure of the CNC silicon multi-axis processing machine according to an embodiment of the present invention, Figure 3 is a plan view showing the internal structure of the CNC silicon multi-axis processing machine according to an embodiment of the present invention, 4 is a side view showing the internal structure of a CNC silicon multi-axis processing machine according to an embodiment of the present invention.

Looking at the overall configuration of the CNC silicon multi-axis processing machine according to an embodiment of the present invention, the work table 120 is mounted on two silicon substrate 101 in parallel, and the work table 120 before and after the front of the machine main body 110 Y-axis drive unit 130 to control the transfer in the direction and the main spindle that is installed in parallel with the two spindles (141, 143) for simultaneously processing the two silicon substrates 101 on the work table 120 140, a main shaft 140 including the Z-axis driving unit 150 and the Z-axis driving unit 150 for controlling the transfer of the main shaft 140 in the vertical direction of the front surface of the machine main body 110 The X-axis drive unit 160 for feeding control in the left-right direction of the front of the main body 110 and the main shaft (140) is installed in a state capable of moving forward and backward to replace and automatically process the machining tools of each of the spindles (141) (143). It consists of a tool changer 170 to be supplied.

In describing in detail each component constituting the present invention, first, the working table 120 will be described.

The worktable 120 is composed of a fixed stage 121 and a servo stage 123. The fixed stage 121 is a stage having a fixed position, in order to set the processing center of the silicon substrate 101 to be mounted. The Y-axis driver 130 and the X-axis driver 160 are used.

On the other hand, the servo stage 123 is a stage that is installed on one side of the fixed stage 121 is a variable position, the processing center of the silicon substrate 101 mounted on the servo stage 123 is on the fixed stage 121 It is set from the set processing center of the silicon substrate 101 mounted on the starting point.

In this case, when the servo stage 123 moves the Y-axis drive unit 130 and the X-axis drive unit 160, since the preset origin of the fixed stage 121 is changed, the servo stage 123 is separately installed under the servo stage 123. By setting the micro coordinates in the left and right and the front and rear directions using the U / V axis drive device 125, the processing center of the silicon substrate 101 is set.

Here, when the Y-axis drive unit 130 is described, the work table 120 is to be controlled to be transported in the front-rear direction of the front of the machine main body 110, and the work surface 120 and the machine main body 110 are Y-axis linear. The guide 135 is installed in a state in which slide movement is possible, and the Y-axis servo motor 131 is installed at the rear of the main body of the machine 110, and transmits the rotational power of the Y-axis servo motor 131. The receiving Y-axis ball screw 133 is screw-coupled with the worktable 120 side, so that the worktable 120 moves forward and backward in association with the forward / reverse rotation of the Y-axis servomotor 131.

In addition, when the spindle head 140 is described, two spindles 141 and 143 are installed in parallel to simultaneously process two silicon substrates 101 mounted on the work table 120. The work table base 145 is provided opposite to each other in a state in which the slides can be mutually moved in the vertical direction.

At this time, the separation distance between the first spins 141 and the second spins 143 may be 300 ~ 700MM.

In addition, a Z axis driver 150 is installed between the main shaft 140 and the main shaft base 145, and the Z axis driver 150 is Z between the main shaft 140 and the main shaft base 145. The shaft linear guide 155 is installed in a state in which the slide movement is possible, and the Z-axis servo motor 151 is installed above the main shaft base 145, and the Z-axis servo motor 151 rotates. The Z-axis ball screw 153 receiving the power is screwed to the spindle head 140 side so that the spindle head 140 moves up and down in conjunction with the forward / reverse rotation of the Z-axis servomotor 151.

An X-axis driving unit 160 is installed to transfer the main shaft 140 including the Z-axis driving unit 150 to the left and right directions of the front surface of the machine main body 110.

The X-axis drive unit 160 is installed between the main shaft base 145 and the machine main body 110 in a state in which slide movement is possible by the X-axis linear guide 165, and on one side of the machine main body 110 The X-axis servo motor 161 is installed, the X-axis ball screw 163 receiving the rotational power of the X-axis servo motor 161 is screwed to the main shaft base 145 side, X-axis servo motor The main shaft base 145 is moved left and right in association with the forward / reverse rotation of the 161.

At this time, the rear of the headstock 140 is installed with a tool changer 170 to exchange and automatically supply the machining tools of each of the spindles (141, 143).

The tool changer 170 includes a tool mounting part 171 on which a plurality of processing tools are mounted, and an actuator part 175 which moves forward and backward to position the tool mounting part 171 in front of the spindles 141 and 143. It consists of.

The tool mounting portion 171 is configured to mount two or more processing tools as shown in FIGS. 5 and 6.

5 is a front sectional view for explaining the structure of the tool changer of the CNC silicon multi-axis processing machine according to an embodiment of the present invention, Figure 6 is a plan view showing the structure of the tool changer of FIG. The figure shows an example in which three holders 173 are provided to mount three processing tools.

Each holder 173 may be manufactured in the form of tongs capable of electronic clutch or hydraulic operation.

In addition, the actuator unit 175 may use a hydraulic device including an electromagnetic clutch, a cylinder, and a piston.

In the tool changer 170 having the above-described configuration, when the silicon substrate 101 is directly processed using a fine drill of 0.4 pi or less, bending of the processing tool T (for example, a drill) occurs, resulting in eccentricity of the hole and As it is installed to prevent the breakage of the drill, the center work is performed by using a processing tool T having a different size step by step. To this end, at least two or more machining tools are preferably replaced automatically, and the present invention shows an example of mounting up to four machining tools through the drawings.

Hereinafter, the processing process of the present invention according to the above configuration will be described.

As a first step, the height of all the processing tools to be used in the work is set to the same height using a height measuring instrument.

Next, as a second step, the silicon substrate is processed to have a tolerance of 10 μm or less in a certain form required for processing.

Next, as a third step, the silicon substrate required for processing is mounted on a fixed stage.

Next, in step 4, the measuring device is mounted on the first spindle.

Next, in step 5, the silicon substrate is automatically measured using a measuring device and the machining center point is found.

Next, in step 6, after inserting a tool suitable for machining in the first spindle 141, the Z-axis driving unit 150 is moved up / down to set the work origin for the depth.

Next, as a seventh step, the silicon substrate is mounted on the servo stage.

Next, in step 8, the measuring device is mounted on the second spindles 143.

Next, in step 9, the X axis driver 160 and the Y axis driver 130 are fixed, and then the U / V axis driver 125 is automatically driven using a measuring device to process the center point of the second silicon substrate. Find it.

Next, in step 10, after inserting a machining tool suitable for machining into the second spindle 143, the Z-axis is transferred up and down to set the work origin for depth.

The CNC silicon multi-axis processing machine according to the present invention as described above, by mounting the U / V-axis drive device 125, it is possible to significantly shorten the setting time of the operator.

As described above, the U / V-axis driving apparatus 125 may be automatically driven by mounting a linear guide, a ball screw and a servomotor in the U-axis (left and right) direction and the V-axis (front and rear) direction, respectively.

Such a U / V axis drive device 125 is self-controllable by the CNC controller, and the operator can move the desired axis using a portable pulse generator.

In addition, the processing machine of the present invention, after mounting the automatic measuring device to the spindle 141, 143, and sets the two axes using a control program, by measuring the outline of the silicon substrate to find the machining center point, It is possible to read the position value in real time, which makes precise and quick setting work.

In this case, after the automatic measuring device and the manual indicator are mounted on the spindles 141 and 143, the rotation of the spindles 141 and 143 should be fixed to measure the silicon substrate.

If shaking of the measuring device occurs, it is impossible to measure precisely at a certain position.

Therefore, in the present invention, by applying a pneumatic pressure of 1 ~ 2BAR to the spindle 141, 143 at the time of automatic measuring device and indicator measurement, the rotation of the spindle 141 (143) is suppressed arbitrarily to prevent the occurrence of vibration have.

At this time, if the air pressure applied to the spindles 141 and 143 exceeds 5 to 5.5 BAR, since the tool is detached, the tool is not detached while applying the minimum air pressure of 1 to 2 BAR while suppressing the rotation of the spindle. It is desirable to avoid.

The present invention having the above-described configuration and work process is equipped with a high frequency spindle suitable for silicon drill work, and by using a spindle that can be equipped with a small tool to realize low vibration, thereby minimizing vibration during rotation. In the case of the hole that needs to maintain a certain size, it realizes run out (geometric tolerance generated during rotation) within 0 ~ 3㎛ during rotation to prevent early wear of the drill, prevention of hole eccentricity, and prevention of drill breakage. The present invention through this it is possible to improve the wear rate of the drill more than 30%.

CNC silicon multi-axis processing machine according to an embodiment of the present invention having the configuration as described above is a dedicated machine for silicon processing, by configuring the worktable to simultaneously process the spindle and the two silicon substrates on which two spindles are mounted, productivity In addition to these improvements, automatic measuring devices and tool changers can reduce set-up time and prevent premature breakage of machining tools, furthermore satisfying consumer needs with minimal cost.

According to the present invention, it is possible to maintain a constant size of the processing hole of the silicon product and a constant interval of the processing hole, and has the advantage that the vertical straightness and chipping performance of the hole is improved.

101; silicone substrate
110; machine body
120; work table
121; fixed stage
123; servo stage
125; U / V axis drive
130; Y axis drive unit
131; Y-axis servo motor
133 Y-axis ball screw
135 Y-axis linear guide
140; headstock
141; first spindle
143; second spindle
145; headstock base
150; Z axis drive unit
151; Z axis servomotor
153 Z axis ball screw
Z-axis linear guide
160; X axis drive unit
161 X axis servo motor
163 X axis ball screw
165; X axis linear guide
170; tool change device
171; tool mounting portion
173; holder
175; actuator section

Claims (9)

A work table 120 on which two silicon substrates 101 are mounted in parallel;
Y-axis drive unit 130 for controlling the transfer of the worktable 120 in the front and rear direction of the front of the machine main body 110;
A headstock 140 in which two spindles 141 and 143 for simultaneously processing two silicon substrates 101 on the work table 120 are installed in parallel;
Z-axis driving unit 150 for controlling the feedstock shaft 140 in the vertical direction of the front of the machine main body 110; And
An X-axis driving unit 160 for controlling the transfer of the headstock 140 including the Z-axis driving unit 150 to the left and right directions of the front surface of the machine main body 110;
CNC silicon multi-axis processing machine comprising a.
The method of claim 1,
The work table 120, the fixed stage 121 on which the silicon substrate 101 is mounted and
CNC silicon multi-axis processing machine, characterized in that consisting of a servo stage 123 is installed in parallel on one side of the fixed stage 121 is installed so that the coordinates on the plane is variable.
The method of claim 2,
CNC silicon, characterized in that the U / V-axis drive unit 125 is installed below the servo stage 123, and the micro coordinates in the left and right and front and rear directions are set using the U / V-axis drive unit 125. Multi-axis processing machine.
The method of claim 1,
The Y-axis drive unit 130 is provided between the worktable 120 and the machine main body 110 in a state where slide movement is possible by the Y-axis linear guide 135, and Y is located behind the machine main body 110. The axis servo motor 131 is installed, and the Y axis ball screw 133, which receives the rotational power of the Y axis servo motor 131, is screw-coupled with the worktable 120 side, such that the Y axis servo motor 131 is provided. CNC silicon multi-axis processing machine, characterized in that the worktable 120 is moved forward and backward in conjunction with the forward / reverse rotation of the.
The method of claim 1,
The spindle head 140 is provided with two spindles 141 and 143 in parallel for simultaneously machining the two silicon substrates 101 mounted on the work table 120, and are mutually supported in the vertical direction. CNC silicon multi-axis processing machine, characterized in that the installation is opposed to the worktable base (145) in a movable state.
The method of claim 1,
The Z-axis driving unit 150 is installed between the main shaft base 140 and the main shaft base 145 in a state where the slide can be moved by the Z-axis linear guide 155, the main shaft base 145 The Z-axis servo motor 151 is installed on the upper portion, the Z-axis ball screw 153 receiving the rotational power of the Z-axis servo motor 151 is screwed to the main shaft 140 side Z-axis servo motor CNC silicon multi-axis processing machine, characterized in that the main shaft 140 to move up and down in conjunction with the forward / reverse rotation of (151).
The method of claim 1,
The X-axis drive unit 160 is installed between the main shaft base 145 and the machine main body 110 in a state where the slide movement is possible by the X-axis linear guide 165, one side of the machine main body 110 X-axis servo motor 161 is installed in the X-axis servo screw 163, the X-axis ball screw 163 receiving the rotational power of the X-axis servo motor 161 is screwed to the main shaft base 145 side, X-axis servo CNC silicon multi-axis processing machine, characterized in that the headstock base 145 is moved left and right in conjunction with the forward / reverse rotation of the motor (161).
The method of claim 1,
CNC silicon multi-axis processing machine, characterized in that installed in the state capable of forward and rearward tool exchange device 170 to exchange and automatically supply the machining tools of each of the spindle (141) (143) in the rear of the headstock (140).
9. The method of claim 8,
The tool changer 170 includes a tool mounting part 171 on which a plurality of processing tools are mounted, and an actuator part 175 which moves forward and backward to position the tool mounting part 171 in front of the spindles 141 and 143. CNC silicon multi-axis processing machine, characterized in that consisting of.

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