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KR20070079879A - Manufacturing method of black matrix for color filters - Google Patents

Manufacturing method of black matrix for color filters Download PDF

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Publication number
KR20070079879A
KR20070079879A KR1020060010922A KR20060010922A KR20070079879A KR 20070079879 A KR20070079879 A KR 20070079879A KR 1020060010922 A KR1020060010922 A KR 1020060010922A KR 20060010922 A KR20060010922 A KR 20060010922A KR 20070079879 A KR20070079879 A KR 20070079879A
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South Korea
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black matrix
ink
blocking layer
ultraviolet rays
manufacturing
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KR1020060010922A
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Korean (ko)
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김성웅
김우식
차태운
배기덕
김성진
신승주
백석순
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삼성전자주식회사
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Priority to KR1020060010922A priority Critical patent/KR20070079879A/en
Priority to US11/559,046 priority patent/US20070184363A1/en
Priority to CN2006101486455A priority patent/CN101013219B/en
Priority to JP2007010784A priority patent/JP5111870B2/en
Publication of KR20070079879A publication Critical patent/KR20070079879A/en
Ceased legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)

Abstract

컬러 필터용 블랙 매트릭스의 제조방법이 개시된다. 개시된 블랙 매트릭스의 제조방법은 투명기판의 표면에 잉크에 대한 반발력이 있는 유기물로 이루어진 차광층을 형성하는 단계, 차광층을 패터닝하여 블랙 매트릭스를 형성하는 단계, 블랙 매트릭스의 상면에 포토마스크를 형성하는 단계 및 포토마스크가 형성된 블랙 매트릭스를 가열하면서 블랙 매트릭스의 상부에 자외선을 조사하는 단계를 포함한다.A method for producing a black matrix for color filters is disclosed. According to the disclosed method of manufacturing a black matrix, forming a light blocking layer made of an organic material having a repulsive force against ink on a surface of a transparent substrate, forming a black matrix by patterning the light blocking layer, and forming a photomask on an upper surface of the black matrix. And irradiating ultraviolet rays on top of the black matrix while heating the black matrix on which the photomask is formed.

Description

컬러 필터용 블랙 매트릭스의 제조방법{Method of fabricating black matrix of color filter}Method of manufacturing black matrix for color filter {Method of fabricating black matrix of color filter}

도 1은 종래 컬러필터용 블랙 매트릭스에 충전되는 잉크가 혼색되는 현상을 도시한 도면, 1 is a view illustrating a phenomenon in which ink filled in a black matrix for a conventional color filter is mixed;

도 2는 종래 컬러필터용 블랙 매트릭스에 잉크가 완전하게 충전되지 않아 빛이 새는 현상을 도시한 도면,2 is a view illustrating a phenomenon in which light leaks because ink is not completely filled in a conventional black matrix for color filters;

도 3 및 도 4는 종래의 컬러필터용 블랙 매트릭스의 제조방법을 도시한 도면,3 and 4 are views showing a conventional method for manufacturing a black matrix for color filters,

도 5a 내지 도 5d는 본 발명의 실시예에 따른 컬러 필터용 블랙 매트릭스의 제조방법을 설명하기 위한 도면들,5a to 5d are views for explaining a method of manufacturing a black matrix for a color filter according to an embodiment of the present invention,

도 6a는 측면의 잉크 젖음성을 증대시키지 않은 블랙 매트릭스 내에 컬러 잉크를 채워서 제작한 컬러 필터의 모습을 찍은 사진, Figure 6a is a photograph taken of the color filter made by filling the color ink in the black matrix does not increase the ink wettability of the side,

도 6b는 도 6a에 도시된 컬러 필터의 단면을 프로파일한 그래프, FIG. 6B is a graph of a cross section of the color filter shown in FIG. 6A;

도 7a는 본 발명이 실시예에 따라 측면의 잉크 젖음성을 증대시킨 블랙 매트릭스 내에 컬러 잉크를 채워서 제작한 컬러 필터의 모습을 찍은 사진, Figure 7a is a photograph of the color filter produced by filling the color ink in the black matrix of the ink wettability of the side according to the embodiment of the present invention,

도 7b는 도 7a에 도시된 컬러 필터의 단면을 프로파일한 그래프.FIG. 7B is a graph of a cross section of the color filter shown in FIG. 7A. FIG.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

100...투명기판 110...차광층100 ... Transparent substrate 110 ... Shading layer

111...블랙 매트릭스 120...차단층111 black matrix 120 barrier layer

본 발명은 컬러필터용 블랙 매트릭스의 제조방법에 관한 것으로, 보다 상세하게는 휘도의 균일성을 향상시킬 수 있는 컬러필터용 블랙 매트릭스의 제조방법에 관한 것이다.The present invention relates to a method for producing a black matrix for color filters, and more particularly, to a method for producing a black matrix for color filters that can improve the uniformity of luminance.

종래에는 TV와 컴퓨터의 정보를 디스플레이하기 위해 CRT 모니터가 주로 사용되어 왔으나, 최근에는 화면의 크기가 커짐에 따라 액정 디스플레이(LCD; Liquid Crystal Display), 플라즈마 디스플레이 패널(PDP; Plasma Display Panel), 유기 EL(Elctro Luminescence), 발광 다이오드(LED; Light Emitting Diode) 및 전계방출 디스플레이(FED; Field Emission Display) 등과 같은 평판 디스플레이 장치가 사용되고 있다. 이러한 평판 디스플레이 장치 중 소비 전력이 적어 컴퓨터 모니터, 노트북 PC 등에 주로 사용되는 액정 디스플레이(LCD)가 각광을 받고 있다.Conventionally, CRT monitors have been mainly used to display information of TVs and computers, but recently, as the screen size increases, a liquid crystal display (LCD), a plasma display panel (PDP), and an organic Flat display devices such as EL (Electro Luminescence), light emitting diodes (LEDs), and field emission displays (FEDs) are used. Among such flat panel display devices, power consumption is low, and liquid crystal displays (LCDs), which are mainly used for computer monitors and notebook PCs, are in the spotlight.

일반적으로, 액정 디스플레이에는 액정층에 의하여 변조된 백색광을 통과시켜 원하는 색상의 화상을 형성하는 컬러필터가 구비되어 있다. 여기서, 상기 컬러필터는 투명 기판 상에 다수의 적색(R), 녹색(G), 청색(B) 픽셀(pixel)들이 소정 형태로 배열된 구조를 가지고 있으며, 이러한 픽셀들은 블랙 매트릭스(black matrix)에 의하여 구획되어 있다. In general, a liquid crystal display is provided with a color filter that passes through white light modulated by the liquid crystal layer to form an image of a desired color. Here, the color filter has a structure in which a plurality of red (R), green (G), and blue (B) pixels are arranged in a predetermined shape on a transparent substrate, and these pixels have a black matrix. Partitioned by

도 1은 종래 컬러필터용 블랙매트릭스에 충전되는 잉크가 혼색되는 현상을 도시한 도면이고, 도 2는 종래 컬러필터용 블랙매트릭스에 잉크가 완전하게 충전되지 않아 빛이 새는 현상을 도시한 도면이다.1 is a view illustrating a phenomenon in which ink filled in a black matrix for a conventional color filter is mixed, and FIG. 2 is a view illustrating a phenomenon in which light leaks because ink is not completely filled in a conventional black filter for a color filter.

도 1을 참조하면, 블랙 매트릭스(11)는 투명기판(10)위에 차광층을 소정 두께로 도포한 다음, 이를 베이킹(baking)하고, 이를 소정 형태로 패터닝함으로써 형성된다. Referring to FIG. 1, the black matrix 11 is formed by applying a light shielding layer on a transparent substrate 10 to a predetermined thickness, then baking the pattern and patterning the light shielding layer into a predetermined shape.

이러한 블랙 매트릭스(11)가 잉크와의 반발력이 작아 접촉각이 작은 경우에는 주변픽셀로 잉크(13)가 넘쳐서 다른 잉크(14)와 혼색이 발생된다. When the black matrix 11 has a small repulsive force with the ink and the contact angle is small, the ink 13 overflows with the surrounding pixels, and color mixture with other inks 14 occurs.

상기와 같은 문제점을 해결하기 위하여, 블랙 매트릭스(11)를 잉크와의 반발력을 크게 하여 접촉각이 커지도록 만들 필요가 있으며, 이러한 반발력을 가지는 블랙 매트릭스(21)가 도 2에 도시되어 있다.In order to solve the above problems, it is necessary to make the black matrix 11 to increase the repulsive force with the ink to increase the contact angle, and the black matrix 21 having such repulsive force is shown in FIG. 2.

도 2를 참조하면, 블랙 매트릭스(21)는 잉크와의 반발력이 크도록 만들어져 있기 때문에 잉크가 주변 픽셀로 넘쳐서 다른 잉크와 혼색되는 것을 방지할 수는 있지만, 잉크가 투명기판(20)상에 균일한 두께로 도포되지 않는 문제점이 있다.Referring to FIG. 2, since the black matrix 21 is made to have a high repulsive force with the ink, it is possible to prevent the ink from overflowing with the surrounding pixels and mixing with other inks, but the ink is uniform on the transparent substrate 20. There is a problem that is not applied to one thickness.

이에 따라, 블랙 매트릭스(21)의 측면 부근에서는 빛이 새는 현상이 발생하게 되고, 그 결과 컬러 필터의 각 픽셀로부터 나오는 광의 휘도가 불균일하게 된다.As a result, light leakage occurs in the vicinity of the side surface of the black matrix 21, and as a result, the luminance of light emitted from each pixel of the color filter becomes nonuniform.

이러한 문제점을 해결하기 위하여, 잉크를 투명기판 상에 편평하게 도포할 수 있는 방법이 도 3 내지 도 4b에 도시되어 있다. 도 3은 미국특허공보 2003-0030715호에 개시되어 있는 "Ink-jet printing method and apparatus for manufacturing color filters"를 도시한 도면이고, 도 4a 내지 도 4b는 미국특허공보 2003-0108804호에 개시되어 있는 "Ink-jet manufacturing process and device for color filters"를 도시한 도면이다.In order to solve this problem, a method of applying the ink flat on the transparent substrate is shown in Figures 3 to 4b. FIG. 3 is a view illustrating "Ink-jet printing method and apparatus for manufacturing color filters" disclosed in US Patent Publication No. 2003-0030715, and FIGS. 4A to 4B are disclosed in US Patent Publication No. 2003-0108804 FIG. Is a diagram illustrating "Ink-jet manufacturing process and device for color filters".

도 3을 참조하면, 투명기판(30)위에 블랙 매트릭스(31)를 형성한 후, 블랙 매트릭스(31)에 의하여 구획되는 픽셀에 잉크(32)를 도포한 후 에어노즐(33)을 통하여 공기를 잉크(32)에 쐬여서 잉크가 픽셀에 편평하게 도포되도록 한다.Referring to FIG. 3, after the black matrix 31 is formed on the transparent substrate 30, the ink 32 is applied to the pixels partitioned by the black matrix 31, and then air is blown through the air nozzle 33. It is soaked in ink 32 so that the ink is evenly applied to the pixels.

도 4a 및 도 4b를 참조하면, 투명기판(30)위에 프린팅프레임(41)으로 구획된 픽셀을 형성한 후 프린팅프레임(41)위에 차폐막(42)을 설치하고, 프린팅프레임(41)를 사이에 두고 전극(51)(52)을 설치한다.4A and 4B, after forming a pixel partitioned by the printing frame 41 on the transparent substrate 30, a shielding film 42 is installed on the printing frame 41, and the printing frame 41 is interposed therebetween. Electrodes 51 and 52 are provided.

잉크(60)를 픽셀에 도포한 후 전극(51)(52)에 전압(50)을 인가하여 전기장을 형성하면, 잉크가 시간이 지남에 따라 접촉각이 작아지면서 도 4b에 도시된 바와 같이 편평하게 된다.After applying the ink 60 to the pixel and applying an electric voltage 50 to the electrodes 51 and 52 to form an electric field, the ink becomes flat as shown in FIG. 4B while the contact angle decreases with time. do.

그러나, 상기와 같은 에어노즐을 통하여 공기를 잉크에 쐬여서 잉크를 픽셀에 편평하게 도포하는 방법은 잉크가 건조되기 전에 각각의 모든 픽셀을 건조 평탄화 시키기 위한 공기공급이 현실적으로 쉽지 않고 잉크의 특성에 따라 오히려 평탄화를 악화시킬 수 있는 문제가 있다.However, the method of applying the ink evenly to the pixels by pouring air into the ink through the air nozzle as described above is difficult to supply the air for flattening the dryness of each pixel before the ink is dried. Rather, there is a problem that can worsen planarization.

픽셀에 전기장을 걸어 잉크를 평탄화하는 방법은 전도성있는 잉크를 사용하여야 한다는 제약이 있어 실용화에는 한계가 있다.The method of flattening the ink by applying an electric field to the pixel has a limitation in that it has to use a conductive ink, and thus there is a limitation in practical use.

본 발명은 상기 문제점을 감안한 것으로, 잉크의 혼색을 방지하면서 휘도 (brightness)의 균일성을 향상시킬 수 있는 컬러 필터용 블랙 매트릭스의 제조방법을 제공하는데 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide a method for producing a black matrix for color filters which can improve the uniformity of brightness while preventing mixing of ink.

상기 목적을 달성하기 위하여 본 발명인 컬러필터 제조방법은 투명기판의 표면에 잉크에 대한 반발경이 있는 유기물로 이루어진 차광층을 형성하는 단계;In order to achieve the above object, the present invention provides a method of manufacturing a color filter, the method including: forming a light blocking layer made of an organic material having a repulsion diameter on ink on a surface of a transparent substrate;

상기 차광층을 패터닝하여 블랙 매트릭스를 형성하는 단계;Patterning the light blocking layer to form a black matrix;

상기 블랙 매트릭스의 상면에 포토마스크를 형성하는 단계; 및Forming a photomask on an upper surface of the black matrix; And

상기 포토마스크가 형성된 상기 블랙 매트릭스를 가열하면서 상기 블랙 매트릭스의 상부에 자외선을 조사하는 단계;를 포함한다.And irradiating ultraviolet rays on top of the black matrix while heating the black matrix on which the photomask is formed.

본 발명에 따르면, 상기 블랙 매트릭스의 측면은 자외선에 노출되어 공기중의 수분을 및 산소와 반응함으로써 표면에너지가 증가된다.According to the present invention, the side surface of the black matrix is exposed to ultraviolet rays to increase surface energy by reacting moisture in the air with oxygen.

본 발명에 따르면, 상기 블랙 매트릭스는 100℃ 이상의 온도로 가열된다.According to the invention, the black matrix is heated to a temperature of at least 100 ° C.

본 발명에 따르면, 상기 블랙 매트릭스의 상부에 자외선을 조사하는 단계 후에 상기 블랙 매트리스의 상면에 형성된 포토마스크를 제거하는 단계를 더 포함한다. According to the present invention, the method may further include removing a photomask formed on an upper surface of the black mattress after irradiating ultraviolet rays to the upper portion of the black matrix.

이하 첨부된 도면을 참조하여 본 발명에 따른 바람직한 실시예를 상세하게 설명하면 다음과 같다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 5a 내지 도 5d는 본 발명의 실시예에 따른 컬러 필터용 블랙 매트릭스의 제조방법을 설명하기 위한 도면들이다.5A to 5D are views for explaining a method of manufacturing a black matrix for a color filter according to an embodiment of the present invention.

도 5a를 참조하면, 투명 기판(100)의 표면에 소수성(hydrophobic) 유기물을 소정 두께로 도포한 다음, 이를 소프트 베이킹(soft baking)함으로써 차광층(110)을 형성한다. 여기서, 상기 투명 기판(100)으로는 일반적으로 유리 기판이 사용되지만 플라스틱기판이 사용될 수도 있다. 상기 유기물은 스핀 코팅(spin coating), 다이 코팅(die coating) 또는 딥 코팅(dip coating) 방법에 의하여 상기 투명 기판(100)의 표면에 도포될 수 있다. Referring to FIG. 5A, a light blocking layer 110 is formed by applying a hydrophobic organic material to a surface of the transparent substrate 100 to a predetermined thickness and then soft baking the same. Here, a glass substrate is generally used as the transparent substrate 100, but a plastic substrate may be used. The organic material may be applied to the surface of the transparent substrate 100 by spin coating, die coating, or dip coating.

도 5b를 참조하면, 상기 차광층(110)을 소정 형태로 패터닝함으로써 블랙 매트릭스(black matrix,111)를 형성한다. 여기서, 상기 차광층(110)이 감광성 물질로 이루어지는 경우에는 소정 패턴이 형성된 포토마스크(photo mask,미도시)를 이용하여 상기 차광층(110)을 노광 현상하게 된다. 한편, 상기 차광층(110)이 비감광성 물질로 이루어지는 경우에는 상기 차광층(110)의 표면에 포토레지스트(photoresist,미도시)를 도포하고, 이를 포토리소그라피(photolithography) 공정에 의하여 패터닝한 후, 이렇게 패터닝된 포토레지스트를 식각마스크로 이용하여 상기 차광층(110)을 식각하게 된다.Referring to FIG. 5B, a black matrix 111 is formed by patterning the light blocking layer 110 in a predetermined shape. When the light blocking layer 110 is formed of a photosensitive material, the light blocking layer 110 is exposed to light using a photo mask (not shown) having a predetermined pattern. Meanwhile, when the light blocking layer 110 is formed of a non-photosensitive material, a photoresist (not shown) is applied to the surface of the light blocking layer 110 and then patterned by a photolithography process. The light blocking layer 110 is etched using the patterned photoresist as an etching mask.

도 5c를 참조하면, 상기 블랙 매트릭스(111)의 상면에 차단층(120)을 형성한다. 상기 차단층(120)은 포토마스크(photo mask)인 것이 바람직하다.Referring to FIG. 5C, a blocking layer 120 is formed on an upper surface of the black matrix 111. The blocking layer 120 is preferably a photo mask.

도 5d를 참조하면, 상기 블랙 매트릭스(111)를 가열하면서 상기 블랙 매트릭스(111)의 상부 쪽에 자외선을 조사한다. 상기 블랙 매트릭스(111)를 가열하는 것은 상기 블랙 매트릭스(111)에 자외선만을 조사하면 상기 블랙 매트릭스(111)가 원하는 만큼 용이하게 접촉각이 변화되지 않기 때문이다. 따라서, 상기 블랙 매트릭스(111)에 자외선을 조사하면서 가열함으로써 접촉각을 용이하게 변화시킬 수 있 다. 여기서, 상기 블랙 매트릭스(111)의 가열온도는 100℃이상이면 된다.Referring to FIG. 5D, ultraviolet rays are irradiated to the upper side of the black matrix 111 while heating the black matrix 111. The black matrix 111 is heated because only the ultraviolet rays are irradiated to the black matrix 111 so that the contact angle of the black matrix 111 does not change as easily as desired. Therefore, the contact angle can be easily changed by heating the black matrix 111 while irradiating ultraviolet rays. Here, the heating temperature of the black matrix 111 may be 100 ° C or more.

상기와 같은 과정을 거치면서, 상기 블랙 매트릭스(111)의 표면 중 자외선에 노출되는 부분의 접촉각과 노출되지 않는 부분의 접촉각이 서로 달라지게 된다.Through the above process, the contact angle of the portion of the surface of the black matrix 111 exposed to ultraviolet rays and the contact angle of the portion not exposed are different from each other.

즉, 자외선에 노출되는 상기 블랙 매트릭스(111)의 측면은 공기 중의 수분 및 산소와 반응하여 표면에너지가 증가함으로써 잉크와의 반발력이 없어지고, 역으로 잉크에 대한 젖음성이 증대된다. 하지만, 상기 블랙 매트릭스(111)의 상면은 상기 차단층(120)에 의하여 자외선이 차단되어 자외선에 노출되지 않기 때문에 그대로 잉크에 대한 반발력을 유지하게 된다.That is, the side surface of the black matrix 111 exposed to ultraviolet rays reacts with moisture and oxygen in the air to increase the surface energy, so that the repulsive force with the ink is lost, and conversely, the wettability with the ink is increased. However, since the ultraviolet rays are blocked by the blocking layer 120 and are not exposed to ultraviolet rays, the upper surface of the black matrix 111 maintains a repulsive force against ink as it is.

다음에 도시된[표 1]은 자외선이 조사된 상기 블랙 매트릭스(111)의 측면의 표면에너지가 시간이 지남에 따라 변화하는 실험데이터 및 상기 블랙 매트릭스(111)의 측면의 접촉각이 물 또는 잉크에 대하여 시간이 지남에 따라 변화하는 실험데이터를 나타낸 것이다.Table 1 shows experimental data in which the surface energy of the side surface of the black matrix 111 irradiated with ultraviolet light and the contact angle of the side surface of the black matrix 111 change with water or ink. It shows experimental data that changes over time.

[표 1]TABLE 1

0초0 sec 40초40 seconds 60초60 seconds 120초120 seconds 표면에너지(mN/m)Surface energy (mN / m) 29.129.1 37.637.6 39.239.2 41.541.5 접촉각Contact angle water 89.589.5 75.875.8 73.273.2 69.569.5 잉크AInk A 29.029.0 28.228.2 26.226.2 4.04.0 잉크BInk B 25.725.7 26.226.2 25.425.4 4.04.0 잉크CInk C 25.225.2 24.224.2 21.621.6 4.04.0

[표 1]을 참조하면, 자외선이 조사된 상기 블랙 매트릭스(111)의 측면의 표면에너지는 시간이 지남에 따라 점차 증가하는 것을 알 수 있다. 또한, 자외선에 노출된 상기 블랙 매트릭스(111)의 측면의 접촉각은 물인 경우에는, 점차 작아지며, 잉크의 경우에는 그 성분에 따라 약간의 차이는 있지만 대체로 자외선이 조사 되기 전에는 20도 이상 이였는데, 자외선이 조사되면서 점차 작아져 결국에는 4도 이하로 작아지는 것을 알 수 있다.Referring to Table 1, it can be seen that the surface energy of the side surface of the black matrix 111 irradiated with ultraviolet rays gradually increases with time. In addition, the contact angle of the side surface of the black matrix 111 exposed to ultraviolet rays is gradually decreased in the case of water, and in the case of ink, although there is a slight difference depending on its composition, it was generally 20 degrees or more before the ultraviolet rays were irradiated. As it is irradiated, it gradually becomes smaller and eventually turns out to be smaller than 4 degrees.

따라서, 자외선에 노출되는 상기 블랙 매트릭스(111)의 측면은 표면에너지가 커지고, 접촉각이 작아지게 되어 잉크에 대한 반발력이 사라진다. 하지만, 상기 차단층(120)에 의하여 자외선이 차단된 상기 블랙 매트릭스(111)의 상면은 잉크에 대한 반발력을 그대로 가지고 있다.Therefore, the surface energy of the black matrix 111 exposed to ultraviolet rays increases in surface energy and the contact angle decreases, so that the repulsive force against the ink disappears. However, the upper surface of the black matrix 111 blocked by ultraviolet rays by the blocking layer 120 has a repulsive force against the ink as it is.

따라서, 상기 블랙 매트릭스(111)내에 채워지는 컬러잉크는 상기 블랙 매트릭스(111)의 상면이 가지는 잉크에 대한 반발력으로 인해 인접하는 다른 컬러잉크와 혼색되는 것이 방지되며, 상기 블랙 매트릭스(111)의 측면의 잉크에 대한 젖음성 증대로 인하여 균일한 두께로 채워질 수 있어 빛이 새는 현상을 방지할 수 있다.Therefore, the color ink filled in the black matrix 111 is prevented from being mixed with other adjacent color inks due to the repulsive force on the ink of the upper surface of the black matrix 111, and the side surface of the black matrix 111 Due to the increased wettability of the ink can be filled with a uniform thickness can prevent light leakage.

상기와 같이 본 발명에 따라 상기 블랙 매트릭스(111)의 측면이 잉크에 대한 젖음성이 증대된 결과는 다음과 같은 사진과 프로파일화한 그래프를 통하여 분명하게 확인할 수 있다.As described above, the result of the increased wettability of the side surface of the black matrix 111 according to the present invention can be clearly confirmed through the following photograph and the profiled graph.

도 6a는 측면을 잉크 젖음성 증대 처리하지 않은 블랙 매트릭스 내에 컬러 잉크를 채워서 제작한 컬러 필터의 모습을 찍은 사진이고, 도 6b는 도 6a에 도시된 컬러 필터의 단면을 프로파일한 그래프이고, 도 7a는 본 발명이 실시예에 따라 측면의 잉크 젖음성을 증대시킨 블랙 매트릭스 내에 컬러 잉크를 채워서 제작한 컬러 필터의 모습을 찍은 사진이고, 도 7b는 도 7a에 도시된 컬러 필터의 단면을 프로파일한 그래프이다.FIG. 6A is a photograph of a color filter manufactured by filling a color ink into a black matrix having no ink wettability increase treatment on its side surface, and FIG. 6B is a graph illustrating a cross-sectional profile of the color filter shown in FIG. 6A, and FIG. 7A is According to an embodiment of the present invention, a photograph of a color filter manufactured by filling a color ink into a black matrix having increased ink wettability of a side surface is shown. FIG. 7B is a graph illustrating a profile of a cross section of the color filter illustrated in FIG. 7A.

도 6a 및 도 6b를 참조하면, 잉크에 대한 반발력을 가지는 상기 블랙 매트릭스(111)내에 컬러잉크를 채우면 잉크에 대한 반발력으로 인하여 컬러잉크의 접촉각이 커지게 되고, 이 컬러잉크에 빛을 조사하면 빛이 새는 현상이 발생될 수 있는 것을 알 수 있다.6A and 6B, when the color ink is filled in the black matrix 111 having the repulsive force against the ink, the contact angle of the color ink increases due to the repulsive force against the ink. It can be seen that this leak can occur.

하지만, 도 7a 및 도 7b를 참조하면, 상기 블랙 매트릭스(111)의 측면을 자외선을 이용하여 잉크에 대한 반발력을 없애면 즉, 잉크에 대한 젖음성을 증대시키면, 상기 블랙 매트릭스(111)내에 채워지는 컬러잉크는 평편하게 채워지는 것을 알 수 있다. 이는 상기 블랙 매트릭스(111)의 측면이 접촉각이 작아지기 때문이며 이에 따라 빛이 새는 현상이 방지될 수 있다. However, referring to FIGS. 7A and 7B, when the repulsive force on the side of the black matrix 111 is removed by using ultraviolet rays, that is, when the wettability of the ink is increased, the color filled in the black matrix 111 is increased. It can be seen that the ink is filled flat. This is because the contact angle of the side of the black matrix 111 is reduced, thereby preventing light leakage.

상술한 바와 같이, 본 발명에 따른 컬러필터의 제조방법은 블랙 매트릭스의 상면은 포토마스크를 이용하여 잉크에 대한 반발력을 유지함으로써 컬러잉크의 혼색을 방지할 수 있으며, 블랙 매트릭스의 측면은 잉크에 대한 반발력을 없앰으로써 블랙 매트릭스에 의하여 구획되는 영역들 내부에 균일한 두께로 컬러잉크를 채울 수 있어 빛이 새는 현상을 방지할 수 있는 효과가 있다.As described above, in the method of manufacturing a color filter according to the present invention, the upper surface of the black matrix may prevent color mixing of the color ink by maintaining a repulsion force against the ink by using a photomask, and the side of the black matrix may be By eliminating the repulsive force it is possible to fill the color ink with a uniform thickness in the areas partitioned by the black matrix has the effect of preventing light leakage.

본 발명은 도면에 도시된 일 실시예를 참고로 하여 설명하였으나 이는 예시적인 것에 불과하며 당해 분야에서 통상의 지식을 가진 자라면 이로부터 다양한 변형 및 실시예의 변형이 가능하다는 점을 이해할 것이다. 따라서 본 발명의 진정한 기술적 보호범위는 첨부된 특허청구범위의 기술적 사상에 의해서 정해져야 할 것이다.Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary and will be understood by those of ordinary skill in the art that various modifications and variations can be made therefrom. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

Claims (5)

투명기판의 표면에 잉크에 대한 반발력이 있는 유기물로 이루어진 차광층을 형성하는 단계;Forming a light blocking layer made of an organic material having a repulsive force against ink on the surface of the transparent substrate; 상기 차광층을 패터닝하여 블랙 매트릭스를 형성하는 단계;Patterning the light blocking layer to form a black matrix; 상기 블랙 매트릭스의 상면에 차단층을 형성하는 단계; 및Forming a blocking layer on an upper surface of the black matrix; And 상기 포토마스크가 형성된 상기 블랙 매트릭스를 가열하면서 상기 블랙 매트릭스의 상부에 자외선을 조사하는 단계;를 포함하는 것을 특징으로 하는 컬러 필터용 블랙 매트릭스 제조방법.And irradiating ultraviolet rays to the upper portion of the black matrix while heating the black matrix on which the photomask is formed. 제 1항에 있어서,The method of claim 1, 상기 블랙 매트릭스의 측면은 자외선에 노출되어 공기중의 수분 및 산소와 반응함으로써 표면에너지가 증가되는 것을 특징으로 하는 컬러 필터용 블랙 매트릭스 제조방법.The side surface of the black matrix is exposed to ultraviolet rays to react with moisture and oxygen in the air surface energy increases black matrix manufacturing method characterized in that the increase. 제 1항에 있어서,The method of claim 1, 상기 블랙 매트릭스는 100℃ 이상의 온도로 가열되는 것을 특징으로 하는 컬러 필터용 블랙 매트릭스 제조방법.The black matrix is a method for producing a black matrix for color filters, characterized in that heated to a temperature of 100 ℃ or more. 제 1항에 있어서,The method of claim 1, 상기 차단층은 포토마스크인 것을 특징으로 하는 컬러 필터용 블랙 매트릭스 제조방법.The blocking layer is a black matrix manufacturing method for a color filter, characterized in that the photomask. 제 1항에 있어서,The method of claim 1, 상기 블랙 매트릭스의 상부에 자외선을 조사하는 단계 후에 상기 블랙 매트리스의 상면에 형성된 포토마스크를 제거하는 단계를 더 포함하는 것을 특징으로 하는 컬러 필터용 블랙 매트릭스 제조방법.And removing the photomask formed on the upper surface of the black mattress after the step of irradiating ultraviolet rays to the upper portion of the black matrix.
KR1020060010922A 2006-02-04 2006-02-04 Manufacturing method of black matrix for color filters Ceased KR20070079879A (en)

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CN2006101486455A CN101013219B (en) 2006-02-04 2006-11-22 Method for preparing black matrix of color filter
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CN112352306A (en) * 2018-06-27 2021-02-09 三星显示有限公司 Apparatus for manufacturing light emitting display device
CN113885246A (en) * 2020-07-03 2022-01-04 京东方科技集团股份有限公司 Black matrix structure, manufacturing method thereof, display substrate and display device
US12100689B2 (en) 2018-09-21 2024-09-24 Samsung Display Co., Ltd. Apparatus and method for manufacturing light-emitting display device

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JP2013178469A (en) * 2012-02-03 2013-09-09 Nlt Technologies Ltd Optical element
CN104090419A (en) * 2014-07-11 2014-10-08 京东方科技集团股份有限公司 Color filter, manufacturing method thereof and display device
CN111769141A (en) * 2020-06-23 2020-10-13 武汉华星光电半导体显示技术有限公司 Color filter, preparation method of color filter and display panel

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CN112352306A (en) * 2018-06-27 2021-02-09 三星显示有限公司 Apparatus for manufacturing light emitting display device
US12243953B2 (en) 2018-06-27 2025-03-04 Samsung Display Co., Ltd. Apparatus for manufacturing light-emitting display device
US12100689B2 (en) 2018-09-21 2024-09-24 Samsung Display Co., Ltd. Apparatus and method for manufacturing light-emitting display device
CN113885246A (en) * 2020-07-03 2022-01-04 京东方科技集团股份有限公司 Black matrix structure, manufacturing method thereof, display substrate and display device
US11960164B2 (en) 2020-07-03 2024-04-16 Ordos Yuansheng Optoelectronics Co., Ltd. Black matrix structure and manufacturing method therefor, display substrate, and display device

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