KR20070053336A - Heat exchanger and superheated steam generator using it - Google Patents

Abstract

A plurality of annular flow passages 24 arranged in parallel and communicating in the circumferential direction, and a plurality of inflow openings formed in the annular flow passage 24 so that the positions of the inlet and outlet ports in the annular flow passage 24 are shifted in the circumferential direction. And the outlet, the inlet and the outlet formed in the different annular flow passages 24 and 24, and the plurality of communication pipes 25 protruding into the annular flow passage 24 to constitute the heat exchange passage 21. The fluid supply pipe 22 and the fluid discharge pipe 23 communicate with the heat exchange passage 21 to form a heat exchange device.

Description

Heat exchanger and superheated steam generator using it {HEAT EXCHANGER AND SUPERHEATED STEAM GENERATING DEVICE USING THE SAME}

The present invention relates to a heat exchanger capable of miniaturizing and reducing the cost and to significantly improving heat exchange efficiency, and a superheated steam generator using the same.

As a heat exchange device for improving heat exchange efficiency by colliding a heat transfer fluid in a heat exchange flow path, a heat exchange device as shown in Fig. 10 is known (Japanese Patent Laid-Open No. 7-294162).

However, since the heat exchanger 100 manufactures the annular flow path 118 by the pipe, it is difficult to produce a flow path having a uniform dimension, which cannot be mass-produced, and the cost increases. There was no choice but to. In addition, it may not be possible to produce a flow path having an optimal design dimension due to the limitation of the pipe size, and it is not easy to downsize the heat exchanger 100.

In addition, when the heat-transfer fluid flows into the annular tube 118 from the communication tube 119, the heat-transfer fluid collides with the heat-transfer fluid flowing in the turbulent state in the annular tube 119, and thus, the inner wall surface of the annular tube 118. There was a defect that the speed of collision was extremely lowered and the heat exchange efficiency at the time of inner wall collision was lowered.

In addition, the collision of the heat transfer fluid to the inner wall surface of the annular tube 118 is limited to inflow, and when it flows out, the collision to the inner wall surface of the annular tube 118 does not occur, and the collision to the inner wall surface of the annular tube 118 occurs. The heat exchanging action by the above acted only once on one annular tube 118. Therefore, in order to improve heat exchange efficiency, it was necessary to increase the cross-sectional area of the annular tube 118 or to increase the number of the annular tubes 118.

Moreover, in order to maximize the heat exchange efficiency at the time of a collision, the attachment angle of the communication pipe 119 with respect to the inner wall surface of the annular flow path 118, the shape of the inner wall surface of the annular flow path 118, etc. were not specifically studied.

As a use form of the heat exchange apparatus 100, when a heat transfer fluid flows into the heat exchange flow path 110 by aspirating the inside of the heat exchange flow path 110 using a blower etc., the heat transfer fluid flows in the annular tube 118. Since it flowed without colliding with the wall surface, the heat exchange efficiency of the heat exchange apparatus 100 fell significantly. For this reason, the blower must be installed immediately in front of the heat exchange passage 110.

On the other hand, as a method for generating superheated steam, as disclosed in Japanese Patent Application Laid-Open No. Hei 10-337491, the temperature of the steam is drawn by sucking hot gas from the suction port using an ejector that ejects water vapor at a supersonic speed from the nozzle. It is known to elevate.

However, according to the superheated steam generation method, high-temperature superheated steam can be obtained, but the superheated steam cannot be obtained by the properties of the hot gas, and the superheated steam of high purity is formed by mixing the gas and steam. Can not get

In particular, when various high temperature exhaust gases, flames, and the like are used, there is a defect in that ultra-high-purity superheated steam required for cleaning semiconductor wafers cannot be obtained and cannot be used for clean cleaning. In addition, it could not be used in a clean room where no flame was available.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems in the prior art, and an object thereof is to provide a heat exchanger that can be miniaturized and reduced in cost, and can significantly improve heat exchange efficiency.

It is another object of the present invention to provide a superheated steam generator that can obtain superheated steam having high flow rate and high purity by applying the heat exchanger.

In order to achieve the above object, the heat exchanger of the present invention is arranged in a parallel state, and the annular flow passages are arranged so that the positions of the plurality of annular flow passages communicating in the circumferential direction and the positions of the inlet and outlet ports in the annular flow passage are shifted in the circumferential direction. And a heat exchange passage consisting of a plurality of inlets and outlets formed in the plurality of inlets, a plurality of communication tubes communicating the inlets and the outlets formed in different annular passages, and a supply pipe and an outlet tube of the fluid communicated with the heat exchange passages. .

In order to achieve the above object, the superheated steam generator of the present invention comprises a steam supply device for supplying steam, a heating heat source for heating the steam, and the heat exchanger device for circulating water and performing heat exchange. do.

BRIEF DESCRIPTION OF THE DRAWINGS It is a longitudinal cross-sectional view which shows the principal part in one Embodiment of the heat exchange apparatus of this invention.

FIG. 2 is an exploded perspective view of main parts of the heat exchanger shown in FIG. 1. FIG.

Fig. 3 is a schematic configuration diagram in which a blower is arranged on the supply side of the heat exchange flow path, air is passed through the heat exchange flow path by the blower, and a performance test of the heat exchange device is performed.

4 is a schematic configuration diagram in which a blower is disposed on the discharge side of the heat exchange passage, air is passed through the heat exchange passage by the blower, and a performance test of the heat exchange apparatus is performed.

Fig. 5 is a performance characteristic graph and a performance comparison table based on the results of performing a performance test using the heat exchanger of the present invention and a conventional heat exchanger and the schematic configuration shown in Figs. 3 and 4.

6 is a schematic configuration diagram when the superheated steam generator of the present invention is applied to an apparatus for cleaning a semiconductor wafer or the like in a clean room.

7 is a performance characteristic graph and a performance comparison table based on the results of a performance test of the superheated steam generator of the present invention using an electric heater.

Fig. 8 is a longitudinal sectional view showing main parts of another embodiment of the heat exchanger of the present invention.

FIG. 9 is an exploded perspective view of main parts of the heat exchanger shown in FIG. 8. FIG.

10 is a perspective view of an essential part of a conventional heat exchanger.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the heat exchange apparatus of this invention and the superheated steam generator which applied it is demonstrated in detail with reference to drawings.

As shown in FIGS. 1 and 2, the heat exchanger 1 of the present invention includes a plurality of annular flow passages 24 arranged in parallel and communicating in a circumferential direction, and an inlet and an outlet of the annular flow passage. Heat exchanger comprising a plurality of inlets and outlets formed in the annular flow passage 24 and a plurality of communication tubes 25 communicating the inlets and outlets formed in different annular flow passages 24 and 24 so that their positions are shifted in the circumferential direction. The flow path 21 and the supply pipe 22 and the discharge pipe 23 of the heat transfer fluid communicated with the said heat exchange flow path 21 are comprised.

The annular flow passage 24 is configured by opposing the annular flow passage constituting members 241 and 241 having the same shape and dimensions, and bringing the end surfaces into contact with each other to perform welding or the like.

The annular flow passage constituting member 241 is composed of an annular planar portion 241a, an outer circumferential surface portion 241b, and an inner circumferential surface portion 241c, and the annular planar portion 241a has a communication hole 241d at equal intervals in the circumferential direction. ) Is perforated. The annular flow path structural member 241 is formed by pressing a metal sheet material or casting a molten metal.

When the annular flow passage structural members 241 and 241 are welded together to form the annular flow passage 24, as shown in FIG. 2, the communication hole 241d of one annular flow passage structural member 241 is formed. The communication hole 241d of the other annular flow path structural member 241 is shifted in the circumferential direction, and the annular flow path structural members 241 and 241 are fixed to each other by welding or the like.

The communicating tube 25 cut | disconnects the metal pipe material of predetermined diameter to an appropriate length, and inserts and passes through the communicating hole 241d formed in the said annular flow path structural member 241, and passes through the annular flow path structural member. In the state which protruded from the inner wall surface of the annular planar part 241a of 241, the part which the outer peripheral surface and the communication hole 241d abuts is fixed by welding etc.

Then, the annular flow passage constituting members 241 and 241 are fixed to each other to form the annular flow passage 24, and the communicating tubes 25, 25 ... In the same manner, the heat exchange flow passage 21 in which a plurality of annular flow passages 24, 24 ... as shown in FIG. 1 are arranged in parallel is formed.

Moreover, storage cylinders 26 and 26 are arrange | positioned at the both ends of the heat exchange flow path 21 which communicates with the supply pipe 22 and the discharge pipe 23 of a heat transfer fluid.

The storage container 26 is comprised by making the storage container structural members 261 and 262 oppose, making the end surface abut each other, and welding.

The reservoir constituting member 261 is composed of a circular flat portion 261a and an outer circumferential surface portion 261b, and communication holes 261c are formed in the circular flat portion 261a at equal intervals in the circumferential direction. On the other hand, the reservoir constituting member 262 is composed of a circular planar portion 262a and an outer circumferential surface portion 262b, and a communication hole 262c is formed in the center portion of the circular planar portion 262a. In addition, the reservoir constituent members 261 and 262 are formed by pressing a metal sheet material or casting a molten metal.

The fluid supply pipe 22 and the fluid discharge pipe 23 cut | disconnect the metal pipe material of predetermined diameter to an appropriate length, and are inserted into the communication hole 262c perforated by the said reservoir container member 262, and the reservoir container member ( In the state which protruded from the inner wall surface of the circular planar part 262a of 262, the part which the outer peripheral surface and the communication hole 262c abuts is fixed by welding etc.

In addition, the communication tube 25 is inserted into and communicates with the communication hole 261c formed in the reservoir constituting member 261, and protrudes from the inner wall surface of the circular flat portion 261a of the reservoir constituting member 261. The part where the outer peripheral surface and the communication hole 261c abuts is fixed by welding or the like.

As mentioned above, the heat exchange apparatus 1 of this invention is comprised by making the fluid supply pipe 22 and the fluid discharge pipe 23 communicate with the both ends of the heat exchange flow path 21 through the storage cylinders 26 and 26. As shown in FIG.

At the time of the configuration of the heat exchange device 1, the front end surface 25a of the communication tube 25 protruding from the inner wall surface of the annular planar portion 241a of the annular flow passage constituting member 241 is a fluid that passes through the communication tube 25. The inner wall surface of the annular planar part 241a of the opposing annular flow path constituting member 241 is brought close to the distance which does not reduce the flow volume of. It is preferable to set the said proximate distance to 0.1 * S / L-10 * S / L when the cross-sectional area of the communication pipe 25 is S and outer peripheral length is L. Moreover, it is preferable to arrange | position so that the center axis | shaft of the communication pipe 25 and the inner wall surface of the annular planar part 241a of the annular flow path constitution member 241 may be substantially orthogonal.

As mentioned above, the heat exchanger 1 of this invention does not comprise the annular flow path 24 by a pipe | tube, but opposes the annular flow path structural members 241 and 241 of the same shape and dimension, and performs welding etc. Therefore, the annular flow passage 24 having the correct dimensions can be easily produced by simply adjusting and combining the circumferential position of the communication hole 241d.

And if the annular flow path constituting member 241 is manufactured by press work or casting, the accurate annular flow path 24 can be manufactured easily, and the low cost annular flow path 24 can be manufactured in large quantities with the minimum number of parts. . At the same time, as shown in FIG. 1, it is easy to protrude the communicating tube 25 into the annular flow passage 24.

In addition, as shown in FIG. 1, the heat exchanger 1 of the present invention uses the inner end face 25a of the communication tube 25 as an inner wall surface of the annular flow passage 24 to a distance that does not reduce the flow rate of the heat transfer fluid. Because of the proximity to 24a-1), the incoming heat transfer fluid is hardly affected by the heat transfer fluid flowing in the turbulent flow in the annular flow passage 24, i.e., almost hits the wall surface 24a-1 without reducing the flow rate. Therefore, the heat exchange efficiency greatly increases.

In addition, as shown in FIG. 1, since the central axis of the communication tube 25 and the inner wall surface 24a of the annular flow passage 24 are arranged almost vertically, the annular flow passage 24 is the same with all the heat transfer fluids being the same. It collides with the inner wall surface 24a-1, and heat exchange efficiency can be maintained stably.

In addition, when the rear end surface 25b of the communication pipe 25 on the outlet side is close to the inner wall surface 24a-2 of the annular flow passage 24 to a distance not reducing the flow rate of the heat transfer fluid, the inner wall surface of the annular flow passage 24. Since the heat-transfer fluid impinging on (24a-1) becomes turbulent and collides with the inner wall surface 24a-2 of the annular flow passage 24 on the opposite side to exchange heat, the inner wall surfaces of both sides of one annular flow passage 24 ( Heat exchange can be performed at 24a-1 and 24a-2, and the heat exchange efficiency is further increased.

In addition, since the heat transfer fluid flowing in the annular flow passage 24 in the turbulent state is not affected by the inflow and outflow heat transfer fluid, the heat exchange efficiency at the side wall surface 24b of the annular flow passage 24 is also improved.

Since the heat transfer fluid flows from the outlet of the communication tube 25 to the next annular flow passage 24 and exhibits the same action, even a heat exchange passage 21 having the same size can heat exchange a larger amount of heat transfer fluid. . Moreover, even if there are many annular flow paths 24, the flow velocity of the heat transfer fluid is hardly reduced, and heat exchange is possible without lowering the speed of the high heat transfer fluid.

The heat exchanging apparatus 1 which has performed the above improvement can provide good heat exchange even by installing a blower on the outlet side of the heat exchanging flow passage 21 to suck the heat transfer fluid, and the use range is greatly expanded.

For example, since a large heat exchanger can efficiently exchange a large amount of fluid, it is most suitable as a heat exchanger in a heat pump type air conditioner that heat-exchanges a large volume of air.

[Performance Test of Heat Exchanger]

Next, as shown in FIG.3 and FIG.4, the heat exchange flow path 21 is arrange | positioned in the container 2 which can satisfy hot water, and heat is supplied by circulating hot water, and it supplies to the blower 4, Air was supplied, and the performance test of the heat exchange passage 21 was carried out.

The heat exchange flow path 21 used for the experiment used the thing which arrange | positioned two annular flow paths 24 of 200 mm in outside diameter, and used the blower 4 which can supply 7m <^3> / min air at all times. The gas burner 5 was used to generate hot water, and the hot water after having been deprived of heat by the heat exchange passage 21 was reheated and circulated by the pump 3 so that hot water was always supplied.

As shown in FIG. 4, in the method of installing the blower 4 on the outlet side of the heat exchange passage 21 to suck air, the conventional heat exchange passage 119 does not protrude through the annular passage 118. In 110, the sucked air did not collide with the inner wall surface of the annular flow passage 118, and sufficient performance could not be exhibited as a heat exchanger.

However, in the heat exchange passage 21 in which the communicating tube 25 of the present invention protrudes into the annular passage 24, even when air is supplied and supplied as shown in FIG. 3, even when the air is sucked as shown in FIG. 4, Good heat exchange performance can be exhibited, and the range of use is greatly widened. According to the experimental example, the heat conversion performance of 4532 Kcal / h (5.3 KW / h) can be achieved, and there is sufficient performance as a heat exchanger for home small heat pumps.

5 is a heat exchange device having the same shape, the heat exchange device 1 and the communication tube of the present invention in which the tip 25a of the communication tube 25 is brought close to the inner wall surface of the annular flow passage 24 so as not to reduce the heat transfer fluid. Performance characteristics in which the heat exchanger 100 disclosed in Japanese Patent Application Laid-Open No. 7-294162, which does not protrude 119 into the annular flow passage 118, was experimented based on the configuration as shown in FIGS. 3 and 4. Graph and performance comparison table. In the heat exchanger 100 of Unexamined-Japanese-Patent No. 7-294162, since the numerical value did not come out in the experiment shown in FIG. 4, it does not show in figure.

As the heat exchanger of the present invention, a heat exchanger 51 as shown in Figs. 8 and 9 can also be configured.

The heat exchanger 51 closely connects the plurality of annular flow passages 24 and 24 arranged in parallel to each other, and drills a communication hole serving as an inlet and an outlet between adjacent annular passages 24 and 24. The tip end surface of the communication tube 25 is fixed to the communication hole, and the communication tube 25 protrudes only in one annular flow passage 24 to form a heat exchange passage 52. The other configuration is different from the heat exchange device 1. Approximately the same form.

As the heat exchanger 51, the annular flow passage 24 is configured by bringing the annular flow passage constituent members 243 and 243 in close contact with each other in sequence, and the communication tube 25 has one end face in the communication hole of the annular flow passage structural member 243. The heat exchange flow path 52 can be significantly miniaturized since the is fixed. In addition, the number of constituent members of the heat exchange passage 52 can be greatly reduced, and the heat exchange passage 52 can also be easily configured, and the cost can be significantly reduced.

However, as shown in FIG. 8, the heat exchanger 51 does not protrude the tip end surface 25a of the communication tube 25 into the annular flow passage 24, but the inner wall surface 24a-1 of the annular flow passage 24. Not close to). Therefore, the introduced heat transfer fluid is affected by the heat transfer fluid flowing in the annular flow passage 24 in a turbulent state, and only slightly reduces the flow rate to impinge on the wall surface 24a-1. In comparison, the heat exchange efficiency decreases slightly.

By applying the heat exchanger devices 1 and 51 as described above, as shown in FIG. 6, water vapor of high velocity is supplied from the outdoor boiler to the pipe 13 to the heat exchange flow path 21 of the present invention in the clean room. By heating by the electric heater 6, the water vapor is heated at a high flow rate and the superheated water vapor 12 having a clean high temperature high flow rate is generated to clean the wafer 11 and the like requiring cleanliness used for semiconductors and the like. The superheated steam generator can be configured.

The heat exchange apparatus 1 in the superheated steam generator of the present invention comprises a heat exchange passage 21, a supply pipe 22 for supplying a heat transfer medium to it, and a discharge pipe 23 for discharging the heat transfer medium. 21 is an annular flow passage 24 and a communication tube 25. In the superheated steam generator of this embodiment, the number of the annular flow passages 24 is used.

The heat exchange passage 21 can be formed of a material that withstands a temperature of 100 ° C. or higher, for example, an STPT tube, an STB tube, an STBA tube, an SUS tube, other aluminum, copper, stainless steel, or the like.

The heat exchange flow path 21 is accommodated in the container 2, and heat efficiency is improved in the container 2 using a heat insulating material. You may shape | mold the container 2 itself with a heat insulating material, and the container 2 may be shape | molded with another material, and the surface or inner surface may be covered with a heat insulating material.

As a heat source which heats the heat exchange flow path 21, various heat generating apparatuses, such as a burner which uses petroleum, natural gas, propane, etc. as a raw material, an electric heater, are considered. In this embodiment, the electric power saving lamp heater 6 is used.

A pipe 13, which is connected to a boiler and is provided with a pressure reducing valve 9 and a flow rate adjusting valve 10, is connected to a supply pipe 22 of the heat exchange device 2.

In addition, the discharge pipe 23 of the heat exchanger 1 is in communication with the use side by the pipe 14. The temperature sensor 8 is attached to the pipe 14, and the output of the temperature sensor 8 is input to the temperature control device 7. The temperature control device 7 controls the power consumption of the lamp heater 6 according to the signal of the temperature sensor 8, and sets the temperature of the lamp heater 6 to a predetermined temperature to generate the superheated steam. To control the temperature.

The pressure is regulated by the pressure reducing valve 9 via the flow rate adjusting valve 10, and the high flow water vapor supplied is supplied to the heat exchange passage 21 through the pipe 13. Heat exchanged by the heat exchange passage 21 and the heated high-temperature superheated steam is supplied to the use side through the pipe 14.

When the flow rate of the superheated steam is required on the use side, the pressure of the steam supplied from the boiler is adjusted by the pressure reducing valve 9 attached to the pipe 13 on the inlet side, or the flow rate regulating valve 10 is opened. By adjusting the degree, an appropriate flow rate can be obtained.

When the temperature adjustment of the superheated water vapor 12 is necessary on the use side, the power consumed by the lamp heater 6 by the temperature control device 7 from the temperature sensor 8 attached to the pipe 14 on the outlet side. The temperature control of the superheated steam 12 of the high flow velocity which generate | occur | produces is adjusted.

The temperature control device 7 saves power when the signal from the temperature sensor 8 reaches the upper limit of the prescribed value, and powers on when the lower limit of the prescribed value is reached, so that a constant temperature is always maintained. It is supposed to be. Alternatively, the thyristor may be adjusted to maintain a constant voltage at all times, and may be adjusted to maintain a constant temperature at all times.

Water vapor having a high flow rate by means of a plurality of communication tubes 25 branched by sending water vapor having a high flow rate from a boiler or the like to the heat exchange passage 21 in the container 2 configured as described above and heated by the lamp heater 6 or the like. Collides with the high velocity at the inner wall surface 24a-1 of the annular flow passage 24 of the heat exchange flow passage 21. The water vapor collided at high flow rate is largely influenced by the wall surface 24a-1, and performs heat exchange efficiently.

When the communicating tube 25 is brought close to the inner wall surface 24a-1 of the annular flow passage 24 to a distance that does not reduce the flow rate of the water vapor, the introduced water vapor is hardly affected by turbulence in the annular flow passage 24, i.e., almost Since it collides with the wall surface 24a-1 without reducing the flow rate, the heat exchange efficiency is further increased.

As the inner wall surface 24a-1 of the annular flow passage 24 becomes planar, the influence of the collision surface of water vapor will reach the wide range of an inner wall surface, and heat exchange efficiency will become large.

In addition, the water vapor in the annular flow passage 24 is heat-exchanged at the inner wall surface 24a-1 of the annular flow passage 24, and then becomes turbulent and flows to the next communication tube 25. At that time, the heat-transfer fluid collides with the side wall surface 24b of the annular flow passage 24 of the heat exchanger, thereby greatly exerting the influence of the side wall surface 24b, and performs heat exchange efficiently.

Thereafter, the heat exchanged high-speed water vapor is directed to the inlet of the next communication tube 25, but the inner wall surface 24a-2 of the annular flow passage 24 to the distance not to reduce the flow rate of the water vapor through the communication tube 25 on the inlet side. When it is close to the inlet, the communication tube 25 inlet is close to the inner wall surface 24a-2 of the annular flow passage 24 on the opposite side, so that the heat transfer fluid in the annular flow passage 24 has an inner wall surface of the annular flow passage 24 on the other side ( The heat exchange is performed by colliding with 24a-2), and the thermal efficiency is further increased. As the inner wall surface 24a-2 of the annular flow passage 24 becomes flat, the effect of the collision surface of water vapor extends over a wide range of the inner wall surface, and the efficiency becomes large.

In this way, heat exchange is performed on the side wall surface 24b of the annular flow passage 24 and the inner wall surfaces 24a-1 and 24a-2 on both sides of the annular flow passage 24, so that the heat exchange efficiency greatly increases.

Since the water vapor at the inflow and outflow is hardly affected by the turbulence of the water vapor in the annular flow passage 24, and the flow velocity is hardly reduced even when the annular flow passage 24 is large, high-temperature superheated steam is generated. It becomes possible. The steam which has undergone heat exchange is sent from the inlet of the communication tube 25 to the next annular flow passage 24 to perform the same function.

[Performance Test of Superheated Steam Generator]

Next, when the performance test was performed on the superheated steam generator having the configuration as shown in FIG. 6, it was found that the performance as shown in FIG. 7 was exhibited.

When heated and supplied with steam at a temperature of 120 ° C. at a flow rate of 240 L / min, overheated steam with a flow rate of 90 m / sec or more can be generated, and overheated steam with a flow rate of 200 ° C. and a flow rate of 10 to 30 m / sec required for wafer cleaning is easy. Could be generated.

Moreover, in the degreasing test of grease adhering to the wafer, favorable washing effect was obtained only by superheated steam.

As described above, according to the superheated steam generator of the present invention, since it is installed in a clean room, even when it is necessary to miniaturize the heat exchange passage 21 and plural annular passages 24, The flow rate hardly decreases, and it is possible to continuously generate clean superheated steam 12 of high flow rate required for cleaning.

Conventionally, the semiconductor wafer is cleaned using an organic solvent such as fluorine or IPA. However, the detoxification treatment of the organic solvent after washing requires a high technology and the processing cost becomes expensive. In addition, it has become a major social problem that organic solvents adversely affect the environment.

However, according to the superheated steam generating apparatus of the present invention, high-speed clean superheated steam 12 can be generated by reheating the high-speed clean steam obtained from a boiler or the like with almost no decrease in the flow rate required for cleaning. Cleaning of the wafer 11, precision parts, and the like can be performed. Since the electric heater 6 of electric power saving can be used as a heating heat source, it is applicable also in the clean room where cleanness is calculated | required.

Further, only water vapor required for washing is required, and since organic solvents such as fluorine and IPA are not required, it is not necessary to consider post-treatment of organic solvents or the like that contaminate the environment.

In addition, when the temperature of superheated steam is 170 degreeC or more, since a to-be-cleaned material can be dried as it is from the reverse temperature characteristic of superheated steam, a drying process can be skipped. Therefore, IPA or the like used in the drying step is also unnecessary, and post-treatment such as organic solvents that pollute the environment is unnecessary.

As described above, since only water vapor that is harmless to the environment is used, the environment-friendly washing can be performed, and the washing and drying can be performed simultaneously, thereby simplifying the process and reducing the manufacturing cost. It becomes possible to plan.

In addition, the superheated steam generator according to the present invention adjusts the flow rate to about 5 to 10 m / sec by means of a pressure reducing valve, and adjusts the food (thawing, baking, thawing simultaneous firing, heating, sterilization, steaming). ), Steamed, roasted, dried) can also be applied.

Moreover, since it is applied also to high temperature drying by the reverse temperature (170 degreeC) characteristic of high temperature superheated steam, it can be applied also to drying parts, food waste, etc.

Claims (8)

A plurality of annular flow passages arranged in parallel and communicating in the circumferential direction, a plurality of inlets and outlets formed in the annular flow passage so that the positions of the inlet and outlet in the annular flow passage are shifted in the circumferential direction; And a heat exchange passage formed by a plurality of communication tubes communicating with the inlet and the outlet formed in the other annular flow passage and protruding into the annular flow passage, and a fluid supply pipe and a fluid discharge tube communicated with the heat exchange passage. The method of claim 1, Heat exchangers are arranged in both ends of the heat exchange passage. The method according to claim 1 or 2, And only one end of the communicating tube protrudes into the annular flow path. The method according to any one of claims 1 to 3, A plurality of annular flow passages arranged in a parallel state are brought into close contact with each other, and a circulation hole serving as the inlet and the outlet is formed between adjacent annular flow passages. The method according to any one of claims 1 to 4, A heat exchange device characterized in that the front end of the communication tube is brought close to the inner wall surface of the annular flow path. The method according to any one of claims 1 to 5, And a central axis of the communication tube and an inner wall surface of the annular flow passage disposed substantially vertically. The method according to any one of claims 1 to 6, The annular flow passage is formed by integrating annular flow passage constituent members having the same shape and the same dimension, and the annular flow passage constituting member is composed of an annular plane portion, an outer peripheral surface portion, and an inner peripheral surface portion. . A superheated steam generator comprising: a steam supply device for supplying steam, a heating heat source for heating steam, and a heat exchange device according to any one of claims 1 to 7, wherein the steam is circulated to perform heat exchange.

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