KR20060090095A - Integrated alarm system and how to deal with it - Google Patents

Abstract

The present invention relates to an integrated alarm system corresponding to multiple channels and a processing method thereof. The integrated alarm system of the present invention is provided as a tower and integrated and centralized. The tower type includes at least one tower type warning light and an LED display indicating a power lamp. The integrated type includes a tower type and a high box type control unit at the top, and the high box type control unit includes a switch for switching, an LED display unit, and an operation position display unit. And the voice alarm explosion-proof type is provided with a power lamp. Therefore, according to the present invention, by receiving the external contact input signal using a plurality of relays to propagate the situation through the voice alarm and warning lights selected for each zone, through this, in response to the real-time propagation, recognition and measures to configure the human and material Minimize damage.

Manufacturing equipment, integrated alarm system, voice alarm, tower lamp, multi-channel

Description

INTEGRATED WARNING SYSTEM AND PROCESSING METHOD OF THE SAME}

1 is a perspective view showing the configuration of a tower lamp type alarm system according to an embodiment of the present invention;

2 is a perspective view showing the configuration of an integrated alarm system according to another embodiment of the present invention;

3 is a circuit diagram showing the configuration of the integrated alarm system shown in FIG.

4A to 4B are circuit diagrams showing the configuration of the signal input unit shown in Fig. 2;

5 is a circuit diagram showing a configuration of a display unit shown in FIG. 2; And

6 is a flowchart showing the operation procedure of the integrated alarm system according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

10: tower integrated alarm system

20: integrated alarm system

102, 202, 202a, 202b: external contact

104, 204, 204a: signal input section

106, 206, 206a, 206b: Voice alarm unit

108: LED display unit

The present invention relates to an integrated alarm system, and more particularly, to an integrated voice alarm system and a processing method thereof for providing voice information for real-time emergency response in a semiconductor manufacturing facility having a plurality of processing devices.

The manufacturing process for producing a product in a manufacturing facility is performed through various processes. For example, a semiconductor manufacturing process processes a variety of processes, such as diffusion, deposition, etching and exposure to manufacture a semiconductor device. These various processes are carried out independently or interoperably and step by step at processing apparatuses located along the production line, i.e. at individual process facilities.

Since semiconductor manufacturing is performed by such a series of processes, a problem occurs such that an error occurs in some manufacturing equipment during the semiconductor manufacturing process, causing the system to crash. If this happens, the wafer being processed must be discarded, or the equipment may be damaged, or the equipment may be shut down until the damage is repaired, resulting in disruption to production resulting in significant economic losses and lowering overall yield. Cause.

Therefore, it is necessary to find and prevent an error factor in advance through continuous inspection and control of a manufacturing facility, and secondly, it is necessary to correctly diagnose the cause and take an appropriate response once an error occurs.

A manufacturing facility including a plurality of processing devices each provided in a spaced manufacturing area, for example, a semiconductor manufacturing facility detects in real time the leakage of gas detectors, physical properties, chemicals, etc. and alerts the worker of the situation. Equipped with a system. However, these alarm systems are monitored and alarmed by alarm alarms for each of the processing devices, and the identification is mixed by a single alarm sound, a single warning light or alarm of a single facility, and a warning lamp mixed, thus making it difficult to recognize, thus propagating the situation. Lack of response systems such as awareness, recognition and action.

For example, voice alarms are commonly used, but they have a one-to-one configuration, no one-to-many or many-to-one channel-selected technology, no multi-channel identification, and also a power supply for tower lamps. This is difficult.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and to provide an integrated voice alarm system and a processing method thereof for real-time emergency response of a semiconductor manufacturing facility having a plurality of processing devices.

According to an aspect of the present invention for achieving the above object, an integrated alarm system for a manufacturing facility having a plurality of processing devices comprises: a plurality of sensing units each corresponding to the processing devices; A signal input unit which receives an operating state of each of the processing devices from the sensing units; A plurality of alarm units for outputting a voice message for each channel in correspondence with the processing devices; And a controller configured to output the voice message to the alarm units corresponding to the processing apparatuses when an abnormality occurs in at least one of the processing apparatuses from the signal input unit.

In this aspect, the alarm unit further includes a display unit for displaying the presence or absence of abnormality of the processing devices for each of the multiple channels. The display unit may further include a power display unit that displays power for each of the multiple channels.

According to another aspect of the present invention for achieving the above object, a method of processing an integrated alarm system including a plurality of processing devices: if an error occurs in at least one of the processing devices, whether the external input relay is contact wiring; Determining; Determining a position of a processing device in which an abnormality occurs when the relay is turned on; Operating the alarm if the abnormal location is a single area; If the abnormally generated position is an overlapping area, lighting a warning light, outputting a voice alarm sound, or lighting a light emitting diode display in response to an operation of the corresponding alarm device; And determining whether the external input relay is contact wired.

In this aspect, the processing method further comprises the step of flashing the flashing light, stopping the output of the voice alarm sound, or flashing the light emitting diode display if the external input relay is not connected.

Therefore, according to the present invention, by receiving the external contact input signal using a plurality of relays to propagate the situation through the voice alarm and warning lights selected for each zone, through this, in response to the real-time propagation, recognition and measures to configure the human and material Minimize damage.

DETAILED DESCRIPTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the configuration of a tower lamp type alarm system according to an embodiment of the present invention.

Referring to FIG. 1, the tower lamp type alarm system is provided in the form of a one-stage to multi-stage tower type (2 to 10) warning lights 14, each of which tower lamp type alarm system is the operation of the processing devices, respectively. A warning lamp 14 for indicating the status and a power lamp 12 for checking the individual power supply are provided.

2 is a perspective view showing the configuration of an integrated alarm system integrated according to another embodiment of the present invention.

Referring to FIG. 2, the integrated alarm system 20 includes an upper tower 24, a high box switching LED display 28, an operation position display 30, and a switching switch 26. The upper tower 24 is provided with LEDs 22 for power indication.

The integrated alarm system 100 is integrally provided with a voice alarm (106, 206 of FIGS. 3-4), a tower lamp 24, an LED indicator 30 and a power lamp 22, 28. The tower type 2 to 10 includes at least one tower type warning light 14 and an LED display portion 12 indicating a power lamp. The integrated integrated alarm system 100 includes a tower type 24 and a high box type control unit at the top, and the high box type control unit includes a switching switch 26, an LED display unit 28, and an operation position display unit 30. Equipped. And the voice alarm explosion-proof type is provided with a power lamp.

Referring to FIG. 3, the signal input unit 104 receives power from the power supply unit 110 and receives the input signal of the external contact 102 using a plurality of relays through the voice alarm 106 and the warning lamp 108 selected for each zone. It propagates the situation and minimizes human and material damage by forming a response system such as propagation, recognition and action in real time. Adopted the function to confirm the rapid occurrence of equipment through this.

As described above, the integrated alarm system of the present invention divides multiple channels by the input unit 102 (facilities, gas detectors, relays) as shown in FIG. 3, and propagates the situation through the voice alarm 106. The system is equipped with a channel-specific LED display 108 and a service switch. In addition, as shown in Figure 1, it is provided as a tower lamp type product mounted with an LED to indicate the individual power supply. The tower lamp type alarm system 100 decompresses an externally supplied AC voltage through a transformer, obtains a square wave with a bridge diode, converts it into DC voltage (VCC), and adds a resistor (R4) at DC voltage. Activate the power lamp LED (LED13).

4A, 4B, and 5, the integrated alarm system 200, 200a, 200b of the integrated and voice alarm explosion-proof type is connected to the contacts of the external input relays 202, 202a, 202b, and in the case of external input operation. The voltage supplied from the voice alarms 206, 206a, and 206b returns to operate the voice alarm, the warning lamp, and the LED display unit (LED1 to LED4 in Fig. 5). In addition, the alarm mode is stopped by releasing the common terminal (Com) of each individual signal input unit by the service mode switch (Switch1), and the alarm is released by selecting the power supply terminal (+) and the common terminal (-) of the voice alarm. The LED display unit emits light.

The centralized alarm system selects the alarm by the signal input unit using the diode characteristic when the alarm using the external input relay contact is a multi-method. The selected alarm operation is as described above.

6 is a flowchart showing the operation procedure of the integrated alarm system according to an embodiment of the present invention.

Referring to FIG. 6, if an abnormality occurs in at least one of the plurality of processing devices in step S300, the integrated alarm system determines whether an external input relay is contact wired in step S302. When the relay is turned on, the flow advances to step S304 to determine whether the abnormally generated area is a single area or a duplicate area in order to determine the location of the processing device in which the abnormality has occurred. In the case of a single area, this procedure proceeds to step S314 to operate the corresponding alarm. In the case of a duplicate area, this procedure proceeds to step S306 to determine whether the alarm is a single operation or a selection operation.

Subsequently, in step S316, S318, or S320, the warning light is turned on, the voice alarm is sounded, or the LED display part is turned on in response to the operation of the target alarm.

The procedure then proceeds to step S302 and repeats the above procedure. At this time, if the external input relay is not connected in step S302, the process proceeds to step S322, S324 or S326 to light a warning light, stop the output of the voice alarm sound, or light up the LED display.

 As described above, by integrating the processing devices corresponding to the multiple channels, the integrated alarm system individually displays the power supply and monitors the presence or absence of abnormalities of the at least one processing devices in real time. For example, you can check the status of gas, physical properties, chemicals, etc. in real time, or establish a situation propagation and response system in the event of a fire leak.

Therefore, it is possible to differentiate the identification of the display-oriented type, and to quickly process by constructing a multi-integrated voice system through mutual interworking, thereby reducing the response time and minimizing the human and physical damage. In addition, integrated alarm systems can be implemented to provide on-the-job training, improved awareness, and lower initial investment.

Claims (5)

In an integrated alarm system for a manufacturing facility having a plurality of processing devices: A plurality of sensing units each provided corresponding to the processing apparatuses; A signal input unit which receives an operating state of each of the processing devices from the sensing units; A plurality of alarm units for outputting a voice message for each of multiple channels corresponding to the processing devices; And a controller configured to output the voice message to the alarm units corresponding to the processing apparatuses when an error occurs in at least one of the processing apparatuses from the signal input unit. The method of claim 1, The alarm unit further comprises a display unit for displaying the presence or absence of abnormality of the processing devices for each of the multiple channels. The method of claim 2, The display unit further comprises a power display unit for displaying the power for each of the multi-channel integrated alarm system. In a method of processing an integrated alarm system comprising a plurality of processing devices: Determining whether an external input relay is contact-connected when at least one of the processing devices is abnormal; Determining a position of a processing device in which an abnormality occurs when the relay is turned on; Operating the alarm if the abnormal location is a single area; If the abnormally generated position is an overlapping area, lighting a warning light, outputting a voice alarm sound, or lighting a light emitting diode display in response to an operation of the corresponding alarm device; And proceeding to determining whether the external input relay is contact wired. The method of claim 4, wherein The treatment method, And if the external input relay is not connected, flashing the warning light, stopping the output of the voice alarm sound, or flashing the light emitting diode display.

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