KR20060060074A - Annular evaporation source and its wire fixing device - Google Patents

Abstract

The present invention relates to an annular evaporation source for the deposition process of a large-area organic thin film device and a heat ray fixation device thereof. In depositing on a large-area substrate, it is possible to form a thin film layer with a uniform thickness over a large area without rotating a large substrate, to prevent frequent refilling of organic materials due to the increase in the use of organic materials, and to use different evaporation sources. To improve mass production of large-area organic thin film devices by providing a method of simultaneously depositing materials in one chamber and a method of installing and fixing a heating wire that transmits uniform heat to the crucible. Hot-wire fixing device for fixing annular heating wire and supporting that hot wire fixing device The invention relates to a hot wire fixing device supporting device, a housing enclosing these engraving crucibles and devices, a flooring device, and an insulating cover for maintaining a temperature in the engraving crucible and a height adjusting leg supporting an annular evaporation source assembled from a flange.

Evaporation source, crucible

Description

Ring-type source for OLED vapor deposition and device for fixing a heat wire in ring-type source}

1 is a perspective view showing an embodiment of the annular evaporation source of the present invention and its hot wire fixing device

Figure 2 is a cross-sectional view of the A-A cross section of an embodiment of the annular evaporation source covered with the heat insulation cover of the present invention and its hot wire fixing device

Figure 3 is a perspective view showing the top and bottom of the piece hot wire fixing device constituting the hot wire fixing device of the present invention.

Figure 4 is a perspective view and a cross-sectional view showing a state in which the heating wire is installed on the piece hot wire fixing device constituting the hot wire fixing device of the present invention.

5 is a perspective view showing a heat ray fixing device support device of the present invention

Figure 6 is a perspective view showing a state in which the hot wire fixing device and the hot wire fixing device support device is coupled to fix the hot wire of the present invention

7 is a perspective view showing a housing of the annular evaporation source of the present invention;

8 is a sectional view showing a bottom device of the annular evaporation source of the present invention and a sectional view taken along the line B-B.

Figure 9 is a perspective view and a cross-sectional view showing a heat insulating cover covering the top of the annular evaporation source of the present invention

Figure 10 is a perspective view showing the height adjustment leg of the annular evaporation source of the present invention

<Description of the code | symbol about the main part of drawing>

1: heating wire 2: organic material

3: hot wire upper ring 4: hot wire lower ring

10: inner housing 11: inner housing inner wall

12: inner housing outer wall 13: inner support protrusion

14: inner housing water pipe portion 15: inner housing water pipe

20: internal hot wire fixing device base 21: hot wire fixing device base

22: lower part of the heat fixing device support device 23: connection support

24: support for hot wire fixing device 25: support space

26: inner wall of the support device 27: outer wall of the support device

30: internal hot wire fixing device 31: upper piece hot wire fixing device

32: lower piece hot wire fixing device 33: hot wire through hole

34: protrusion 35: heated wire support

36: hot wire fixing groove

40: sculpture crucible 41: cover

42: spout 43: inner wall of sculpture

44: engraving crucible outer wall 45: thermocouple insertion groove

50: external hot wire fixing device 60: external hot wire fixing device

70: outer housing 71: outer housing inner wall

72: outer housing outer wall 73: outer support protrusion

74: outer housing water pipe portion 75: external housing water pipe

80: floor apparatus 81: crucible base support groove

82: crucible base 83: inner frame

84: outer edge 85: inner tube hole

86: external water pipe hole 87: thermocouple inlet hole

88: connection thread tab 89: power cable entry hole

90: insulation cover 91: insulation cover hole

92: Clasp

100: height adjustment leg 101: upper tab bolt

102: upper leg 103: lower leg

104: lower tap bolt 105: screw tap hole

106: captive screw 107: graduation

The low molecular organic EL thin film heats a crucible containing a low molecular organic material by applying a current to a heating wire wound around the crucible, and the heat transferred to the crucible increases the temperature of the organic material in the crucible, and as the temperature of the organic material increases, The crucible in the form of and is formed in a way that is deposited on the substrate a lot, this time consisting of a crucible, a heating wire, a housing, etc. is called an evaporation source, and most have been using a point evaporation source or a linear evaporation source.

In the case of the point evaporation source, since the organic material is deposited on the substrate, a thin film is formed in the portion close to the point evaporation source and a thin film is formed in the distant substrate so that the thin film is not made uniform, so the point evaporation source is installed far from the center of the substrate. And rotate the substrate. In this case, however, the size of the deposition chamber is increased, the substrate must be rotated while holding the substrate, and the microparticles generated by the rotation adversely affect the organic thin film and the uniformity of the thin film is not obtained as desired. In addition, the larger the substrate, the worse these problems become.

The linear evaporation source is designed to increase the size of the deposition chamber or to rotate the substrate in such a way that the evaporation source is fixed and the substrate is linearly moved or the substrate is fixed and the evaporation source is linearly reciprocated to deposit gaseous organic materials from the linear evaporation source onto the substrate. It eliminates the problems such as, but organic materials are deposited at the center of the substrate, and both ends of the substrate are relatively less deposited, so the uniformity of the thin film cannot be secured. I can't.

As described above, the conventional evaporation sources have a problem of uniformity of the thickness of the organic EL thin film and microparticles generated by the rotation or linear motion of the substrate. In the case of producing large area organic EL substrates, it is not easy to rotate or linearly move large substrates, and the use of organic materials increases, so the capacity to contain organic materials should be increased. The present invention is used for a variety of substrates from small area substrates to large area substrates in a fixed state without the rotation or linear motion of the substrate to heat the organic material contained in the crucible and the evaporation source to form an organic EL thin film of uniform thickness It is to provide a heating wire fixing device for fixing the heating wire at regular intervals so that even heat is transferred to the organic material.

Referring to Figure 1 showing an embodiment of the present invention will be described in detail the configuration of the present invention. There are four height adjustment legs 100 are fitted in the bottom and the bottom device 80 to raise the crucible crucible 40 on the top to have an annular or regular polygonal shape, the inner edge 83 of the bottom device 80 There are housings 10 and 70 in which the inner housing 10 rises and the outer housing 70 rises on the outer border 84, and a heating wire as shown in FIG. 6 in the space between the inner housing 10 and the outer housing 70. Heat wire fixing device (30, 60) and the installation of the heating wire fixing device support device (20, 50) (2) is installed, the heating wire is fixed to the support protrusions (13, 73) of the housing (10, 70) There is a fixing device (30, 60) and its supporting device (20, 50), and there is a sculpture crucible (40) inserted into the space between the two is a view showing a cross section of AA of FIG. 2.

Referring to FIG. 2, the engraving crucible 40 containing the organic material 2 has an insertion groove 45 into which a thermocouple used for measuring the temperature of the engraving crucible 40 can be inserted, and the organic material 2 is disposed on the upper portion thereof. There is a cover 41 having a blower outlet 42 so that it can be heated to exit the crucible in a gaseous state. The cover 41 is cut at an angle as shown in FIG. 2 and the outlet 42 is directed out of the housing at a vertical and constant angle, and the outlet 42 of each of the crucibles 40 is annular when viewed from above the annular evaporation source. The organic gas ejected from each of the outlet passages 42 is evenly deposited on the large-area substrate to form a thin film having a uniform thickness. A plurality of piece crucibles 40 are placed on the crucible pedestal 82 of the floor apparatus 80.

An embodiment of the annular evaporation source is as follows, depending on the number of organic materials used simultaneously to form the organic EL thin film in one deposition chamber.

(1) In the case of using one organic material 2, in this case, the organic EL thin film is deposited on a substrate by heating the same organic material 2 in all the crucibles 40.

(2) If two organic materials (2) are used, one of which is a high-dose host organic material and one of low-dip dopant organic material, in this case all crucible crucibles 40 A multi-point evaporation source having a multi-nozzle type crucible containing a host organic material and containing a dopant organic material is installed at the inner center of the annular evaporation source to simultaneously deposit the host organic material and the dopant organic material on the substrate.

(3) When two host organic materials are used, in this case half of the crucibles 40 contain one host organic material and the other half contain the other host organic material. If so, different host organic materials are alternately contained in adjacent crucible crucibles 40 to contain different organic materials so that they are symmetrical to each other. Since the evaporation temperature of the two heating wires (1) using the two heating wires (1) to be installed according to the crucible (40) carving.

(4) In the case of using two host organic materials and one dopant organic material, in this case, two host organic materials are put in the smelting crucibles 40 in the same manner as in the above (3) and placed in the center of the annular evaporation source. A multi-point evaporation source containing a dopant is installed to deposit three organic materials (2) at the same time.

(5) In addition, if the host organic material or the dopant organic material is to be added, in this case, the host organic materials are divided into the crucibles 40 so that the symmetry of each organic material is maintained and the dopant organic material is annular. Further evaporation sources are added to the evaporation source for deposition.

Another embodiment of the annular evaporation source is as follows, depending on the size of the organic EL substrate.

(1) In the case of the initial research level, in this case, various experiments are conducted to find conditions for obtaining a high quality organic EL thin film. Therefore, only one piece crucible 40 of the annular evaporation source contains organic matter (2). Since the circular evaporation source is symmetrical, the conditions found in the experiments are useful.

(2) When the organic EL substrate is small (200x200mm, 370x470mm), in this case, the outlet 42 of the cover 41 of the fragment crucible 40 of the annular evaporation source is adjusted and the organic material 2 is symmetrical in half of the fragment crucibles. It is then deposited to make a small organic EL substrate.

(3) When the organic EL substrate is large (500x600mm, 730x920mm), in this case, depositing the organic material (2) in all the crucible crucible 40 to make a large organic EL substrate.

FIG. 3 shows the engraving hot wire fixing devices 30 and 60, and FIG. 4 is a view showing a state in which the engraving hot wire fixing devices 30 and 60 and the heating wire 1 are coupled to each other. The upper piece hot wire fixing device 31, the lower piece hot wire fixing device 32, is composed of a hot wire support (35). The upper and lower piece hot wire fixing devices 31 and 32 have the same structure, and the hot wire through-hole 33 through which the hot wire loops 3 and 4 penetrates is elongated at a predetermined depth in the long axis direction and perpendicular to the long axis. Thus, a space into which the heating wire support 35 can be inserted is formed to have the same width as the width between the heating wire 1 and the adjacent heating wire 1. 4, the hot wire 1 passes through the hot wire through hole 33 of the lower piece hot wire fixing device 32, and ascends to the hot wire through hole 33 of the upper piece hot wire fixing device 31, and the heated wire ( The hot wire support 35 is inserted into the upper ring 3 of 1) so that the upper ring 3 of the hot wire 1 is fixed to the hot wire fixing groove 36 and the lower ring 4 of the hot wire 1 is fixed. It can be seen hanging on the protrusion 34 of the lower piece hot wire fixing device. This method of fixing the heating wire 1 causes the heating wires 1 to be arranged at regular intervals and the heat from the heated heating wire 1 is evenly transmitted to the carving crucibles 40 so that the specific portion of the carving crucible 40 is removed. The temperature is high or low to prevent the asymmetrical distribution of organic gas jets to form an organic EL thin film having a uniform thickness on the substrate.

FIG. 5 shows a hot wire fixing device supporting device 20 and 50 for supporting a piece hot wire fixing device, wherein the hot wire fixing device support device 20 and 50 has an annular or regular polygonal shape to which a piece of hot wire fixing device can be inserted and fixed. The spaces 25 are formed and have a two-layer structure connected to the connecting support 23 at the upper and lower portions. The upper piece hot wire fixing device 31 is inserted in the upper part of the hot wire fixing device support device 20 and 50, and the lower piece hot wire fixing device 32 is inserted in the lower part of the hot wire fixing device support device 24. Supported. In the actual installation, after installing the internal hot wire fixing device support device 20 in the inner housing 10, insert each piece of hot wire fixing device (31, 32) into the internal hot wire fixing device support device 20 and heat wire (1) Install in pieces hot wire fixing device 31, 32 in the same manner as described above. The outer housing 70 also installs the heating wire 1, the external heating wire fixing device 60 and the heating wire fixing device support device 50 in the same manner. The inner housing 10 and the outer housing 70 are installed on the bottom device 80 and the culling crucibles 40 are inserted into the space between the two housings 10 and 70 to form an annular evaporation source. 6 shows a combination of the hot wire 1, the hot wire fixing device 30 and the hot wire fixing device support device 20. The hot wire fixing device (30, 60) and the hot wire fixing device support device (20, 50) prevents deformation due to thermal deformation of the hot wire (1) or external impact that may occur during crucible installation or organic material recharge. The shape of is kept constant so that the temperature distribution in the crucible is not changed so that an organic EL thin film layer having a uniform thickness is formed continuously, and the heating wire 1 is protected to use the annular evaporation source for a long time.

7 shows a structure of the housings 10 and 70, the housings 10 and 70 have an inner housing 10 and an outer housing 70, and both have similar structures. The inner housing 10 has an inner support protrusion 13 protruding from the outer wall 12 so that the hot wire fixing device support device 20 descends and is caught, and a water pipe 15 is located below the inner wall 11. The height of 14 is lower than the height of the inner housing 10 to take the form of a step. The water pipes 14 and 74 quickly cool the heated housings 10 and 70 when recharging the organic material 2 after the deposition process or when the deposition equipment is opened for other reasons, so that the work can be performed smoothly. The height of the water pipe parts 14 and 74 is lower than the height of the housings 10 and 70 so that the temperature of the upper portion of the housings 10 and 70 is higher than the temperature of the lower portion so that the organic substance 2 gas from the jet port 42 This is to prevent the growth by depositing on the housing (10, 70). The outer housing 70 also has a diameter larger than that of the inner housing 10 and the positions of the outer support protrusion 73 and the water pipe 74 are different from those of the inner housing 10. The water pipes 15 and 75 may be formed in a double spiral or straight lines along the periphery of the housings 10 and 70 and are alternately connected up and down.

As shown in FIG. 8, the floor apparatus 80 has edges 83 and 84 on which the inner housing 10 and the outer housing 70 are placed, and the crucible pedestal support grooves 81 are provided in the crucible pedestal 82. ) Is inserted, and there are water pipe holes 85 and 86 in which the external water pipe is connected to the water pipes 15 and 75 of the housing, and a thermocouple inlet capable of introducing a thermocouple for measuring the temperature of each engraving crucible 40. There are holes 87, there is a power cable entry hole 89 for supplying current to the heating wire, and there is a connection screw tab 88 into which the height adjusting leg 100 can be fitted. The crucible pedestal 82 has a "L" lying on its back so that the crucible is fixed in the annular evaporation source and the heated crucible is in direct contact with the floor so that heat is not lost. In addition, by adjusting and changing the height of the crucible base 82, it is possible to use a crucible having a different capacity. For example, to increase the height of the crucible base 82 and use a small crucible crucible 40 or a crucible This is a case where the height of the pedestal 82 is lowered, and a crucible crucible 40 having a large size and a large capacity is used.

FIG. 9 is a perspective view and a cross-sectional view of the heat insulating cover 90. The heat insulating cover 90 prevents radiant heat of the heating wire 1 from being transferred to the upper substrate or mask, while maintaining the temperature of the upper portion of the annular evaporation source at a high temperature. The organic material (2) gas from) is prevented from growing by being deposited on the evaporation source and protecting the heat inside the crucible so that the organic material (1) gas is constantly ejected. In addition, by installing a side heat reflector (not shown) outside the heating wire (1) on the left and right of the crucible (40) and installing a bottom heat reflector (not shown) between the hot wire fixing device support device and the floor device (80) It is possible to reflect the radiant heat of the crucible 40 to protect the heat inside the crucible.

10 is a perspective view of the height adjustment leg 100, the upper leg 102 has an upper screw tap bolt 101 is connected to the connecting screw tab 88 of the floor device and the lower leg 103 is a lower screw It has a tap bolt 104 and is connected to the flange. Since the upper leg 102 is hollow, the lower leg 103 is inserted into the lower leg 103 and the tightening screw 106 is tightened to the threaded tap hole 105 on the side. The lower leg 103 has a scale 107 to easily adjust the height of the annular evaporation source.

The present invention relates to an annular evaporation source used as an evaporation source from the fabrication of a small area organic EL substrate to the production of a large area organic EL substrate, and a hot wire fixing device, wherein the spouts 42 of the cover 41 of the sculptural crucible 40 are provided. By adjusting the angle and the method of using the engraving crucible (40) to improve the uniformity of the thickness of the organic EL thin film deposited without rotation of the substrate in small area organic EL production and large area organic EL production as well as the initial research purpose The invention is effective to reduce the emission of fine particles and to increase the use rate of the organic material (2)

Claims (20)

A plurality of sculpting crucibles gathered together to form an annular or regular polygonal shape, a plurality of sculpting wire fixing devices which are installed on both walls of the combined sculpting crucibles and fixed with heating wires, With hot or cold-shaped heat sink fixing devices, annular inner and outer housings surrounding them to secure these assembled devices, floor devices supporting these devices, thermal coverings covering the upper part of the housing, and height-adjusting legs. Annular evaporation source and its heating wire fixing device 2. The annular evaporation source and the hot wire fixing device according to claim 1, wherein the hot wire is dually arranged along both walls of the engraving crucibles having an annular or regular polygonal shape and inserted into and fixed to the hot wire fixing device. According to claim 1 or 2, wherein the upper piece hot wire fixing device is located on the upper part of the wall of the crucible crucible, the elongated hexahedron shape has a hot wire through hole in the lower part of the long axis has a predetermined width and a predetermined depth along the center. In the upper part, a plurality of hot wire receiving spaces of rectangular parallelepipeds are formed at regular intervals in a direction perpendicular to the major axis, so that a plurality of protrusions are formed and connected to a lower portion of the hot wire through hole. The hot wire fixing device according to claim 1 or 2, wherein the lower piece hot wire fixing device is located at the middle or the bottom of the wall of the crucible and has the same shape as the top piece hot wire fixing device but is installed upside down. The heating wire of claim 3, wherein the plurality of heating wire supporters have a rectangular parallelepiped shape and are positioned in a plurality of insertion spaces between the protrusions of the upper piece hot wire fixing device, and the heating wire fixing grooves having a round groove shape are horizontally dug on the upper side. Fixture According to claim 1 and 2, wherein the lower ring of the heating wire is hooked to the projection of each lower piece hot wire fixing device, the upper ring of the hot wire is caught in the hot wire fixing groove of the heating wire support of each upper piece hot wire fixing device. Heat wire lock According to claim 1, wherein the heating wire holding device is installed on both walls of the engraving crucibles, each of the heating wire holding device has a top and bottom of annular or regular polygonal shape and the top and bottom of the connection support of the rectangular shape Hot wire fixing device support device, characterized in that a plurality of support spaces are formed to be connected to each other and to contain pieces of hot wire fixing device. According to claim 1 and 7, wherein the upper and lower portions of the heat fixing device support device is of the same structure, but the structure of the lower side upside down, the upper support space is a plurality of heating wires connected to both walls and the bottom of both walls It is formed as a support base support and both walls have a minimum height that can be fixed to the heating base support The annular evaporation source according to claim 1, wherein the housing has a double annular structure and a plurality of support protrusions are formed at a predetermined height along a wall forming an internal space between the dual structures. 10. The annular evaporation source according to claim 1 or 9, wherein water pipes are formed on the inner wall of the inner housing and the outer wall of the outer housing to be lower than the height of the jet of the crucible or the height of the housing. The water pipe of claim 1, 9, and 10, wherein the water pipe formed in the water pipe portion of the housing has an inlet port and an outlet port, and has a double spiral structure or a plurality of pipes formed vertically and alternately connected from above and below. Annular evaporation source 2. The apparatus of claim 1, wherein the flooring device has a rim supporting the two housings inside and outside in a donut shape, the water pipe hole in the rim, and the crucible base being fitted on the bottom outside the rim. Annular evaporation source, characterized in that there are a plurality of holes and a power cable entry hole into which the thermal conduction band for temperature measurement is inserted, and a connection screw tab is formed on the bottom surface 13. The annular evaporation source according to claim 12, wherein the crucible pedestal has an "L" shape and is inserted into the pedestal support groove of the floor apparatus, and the crucible having a different capacity can be exchanged by adjusting the height of the pedestal. 14. The lower leg according to claim 1 or 13, wherein the height adjusting leg is composed of an upper leg and a lower leg, and the hollow upper leg has an upper tab bolt to be connected to the connection screw tab of the floor device and the lower leg is connected to the flange. Annular evaporation source characterized by having a tap bolt 15. The method according to claim 1, 13, or 14, wherein the lower leg of the height-adjusting leg holding the scale is inserted into the upper leg and fastens the height of the evaporation source by inserting a fastening screw into a screw tap hole formed in the upper leg. Annular evaporation source The method of claim 1, wherein the insulating cover has clasps at both ends and is bent in the shape of a cover of the carving crucible, and has the same or larger hole at the ejection outlet location, and the carving crucible and the heating wire, and the inner housing and the outer housing, respectively. An annular evaporation source characterized by covering the fixing devices The annular evaporation source according to claim 1, wherein the side heat reflection plate is located outside the heating wires on the left and right of the carving crucible, and the bottom heat reflection plate is positioned between the heat wire fixing device support device and the floor device. The cyclic evaporation source according to claim 1, wherein the amount of evaporated organic matter is controlled by controlling the number of pieces of the crucible. The cyclic evaporation source according to claim 1, wherein when two or more kinds of organic materials to be deposited in the same chamber are alternately contained in the crucibles, different organic materials are evaporated. 20. The method according to claim 1 and 19, wherein in order to evaporate different organic materials by alternating to the crucibles, to prepare the heating wire of each organic material and installed in the heating wire fixing device of the sculpture crucible containing the corresponding organic material Annular evaporation source

Images