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KR20060039779A - Signal Tower of Semiconductor Manufacturing Equipment - Google Patents

Signal Tower of Semiconductor Manufacturing Equipment Download PDF

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Publication number
KR20060039779A
KR20060039779A KR1020040088997A KR20040088997A KR20060039779A KR 20060039779 A KR20060039779 A KR 20060039779A KR 1020040088997 A KR1020040088997 A KR 1020040088997A KR 20040088997 A KR20040088997 A KR 20040088997A KR 20060039779 A KR20060039779 A KR 20060039779A
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South Korea
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semiconductor manufacturing
lamp
manufacturing equipment
signal tower
manufacturing facility
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Korean (ko)
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함규환
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삼성전자주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/60—Means structurally associated with the lamp for indicating defects or previous use
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

본 발명은 반도체 제조설비의 시그널 타워에 관한 것으로, 반도체 제조설비에 이상이 감지되어 정지되었음을 나타내는 에러램프와, 반도체 제조설비가 정상적으로 작동됨을 나타내는 런램프와, 반도체 제조설비가 정상적으로 작동되나 작업이 실시하고 있지 않음을 나타내는 아이들램프와, 반도체 제조설비가 초기 단계로 복귀중임을 나타내는 홀드램프가 마련되는 것을 특징으로 한다. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a signal tower of a semiconductor manufacturing facility, comprising: an error lamp indicating that an abnormality has been detected in the semiconductor manufacturing facility and a stop lamp, a run lamp indicating that the semiconductor manufacturing facility is normally operated, and the semiconductor manufacturing facility is normally operated but performed. And an idle lamp indicating no operation and a hold lamp indicating that the semiconductor manufacturing equipment is returning to an initial stage.

이에 따라, 반도체 제조설비가 공정을 진행하기 위하여 초기화 단계이후에 반도체 제조설비의 상태를 관리자가 시각적으로 인식할 수 있어 관리자가 반도체 제조설비를 조작하여 공정을 진행시킴으로 반도체 제조설비의 작동효율을 향상시킬 수 있는 효과가 있다.
Accordingly, the manager can visually recognize the state of the semiconductor manufacturing equipment after the initialization step in order for the semiconductor manufacturing equipment to proceed with the process, thereby improving the operating efficiency of the semiconductor manufacturing equipment by operating the semiconductor manufacturing equipment. It can be effected.

반도체, 제조설비, 시그널타워Semiconductor, manufacturing equipment, signal tower

Description

반도체 제조설비의 시그널 타워{Signal tower of semiconductor product device} Signal tower of semiconductor manufacturing equipment             

도 1은 종래 기술에 따른 반도체 제조설비의 시그널 타워를 나타낸 부분확대사시도.1 is a partially enlarged perspective view showing a signal tower of a semiconductor manufacturing apparatus according to the prior art.

도 2는 본 발명에 따른 반도체 제조설비의 시그널 타워를 나타낸 부분확대사시도.Figure 2 is a partially enlarged perspective view showing a signal tower of the semiconductor manufacturing equipment according to the present invention.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

1 : 반도체 제조설비 20 : 시그널 타워1: semiconductor manufacturing equipment 20: signal tower

22 : 브래킷 24 : 지지프레임22: bracket 24: support frame

26a : 에러램프 26b : 런램프26a: error lamp 26b: run lamp

26c : 아이들램프 26d : 홀드램프
26c: Idle lamp 26d: Hold lamp

본 발명은 반도체 제조설비에 관한 것으로, 보다 상세하게는 반도체 제조설 비에 마련되는 시그널 타워를 개선하여, 경보상황이 발생된 반도체 제조설비의 상태를 관리자가 시각적으로 쉽게 구분시킬 수 있도록 한 반도체 제조설비의 시그널 타워에 관한 것이다.The present invention relates to a semiconductor manufacturing facility, and more particularly, to improving a signal tower provided in a semiconductor manufacturing facility, a semiconductor manufacturing system in which a manager can visually easily distinguish a state of a semiconductor manufacturing facility in which an alarm situation occurs. It is about the signal tower of a facility.

통상, 반도체 소자를 제조하기 위하여 확산설비, 증착설비, 이온주입설비 및 식각설비 등이 생산라인에 이용되고 있으며, 각 공정설비들은 필요에 의하여 생산라인에서 여러 대가 제한된 장소에 설치되어 있다.Generally, diffusion equipment, deposition equipment, ion implantation equipment, and etching equipment are used in the production line to manufacture semiconductor devices, and each process equipment is installed in a place where a limited number of production lines are limited.

이들 공정설비들은 작업관리자의 조작에 따라 정해진 공정을 진행하며, 그 공정은 세팅된 바 파라미터에 의하여 수행되며, 특정 공정이 완료된 반도체 소자는 다음 공정설비로 이송되어서 후속되는 공정을 수행하도록 되어 있다.These process facilities perform a predetermined process according to the operation of the work manager, and the process is performed by a parameter set as a bar, and the semiconductor device having a specific process is transferred to the next process facility to perform a subsequent process.

그리고, 이들 각 공정설비에는 공정이 비정상적으로 수행되거나 구성요소의 결함이 발생되는 등의 상황을 감지하기 위하여 진단기능이 내장되어 있으며, 진단기능에 의하여 공정 수행 중에 비정상적인 공정수행 또는 구성요소의 결함 등이 체크된다. In addition, each of these process facilities has a built-in diagnostic function for detecting a situation in which the process is abnormally performed or a component defect occurs. The diagnostic function includes abnormal process performance or component defects during the process. Is checked.

만약, 설비 이상이나 공정 이상이 체크되면 이상이 발생된 설비나 공정라인에 설치된 시그널 타워가 점등하여 이상 상태를 관리자에게 알리도록 마련되어 있다. If the equipment abnormality or process abnormality is checked, the signal tower installed in the equipment or process line in which the abnormality is generated turns on to notify the manager of the abnormal state.

도 1은 종래 기술에 따른 반도체 제조설비의 시그널 타워를 나타낸 사시도이다. 1 is a perspective view showing a signal tower of a semiconductor manufacturing apparatus according to the prior art.

도시한 바와 같이 반도체 제조설비(1)의 전방 또는 상측에는 반도체 제조설비(1)의 작동 상태를 시각적으로 나타내는 시그널 타워(signal tower:10)가 마련되 며, 이러한 시그널 타워(10)는 반도체 제조설비(1)의 작동상태를 나타내는 다수의 램프(16a, 16b 16c)와, 램프(16a, 16b 16c)를 지지하는 지지프레임(14)과, 지지프레임(14)을 반도체 제조설비(1)에 일측에 고정하는 브래킷(12)으로 구성되어 있다.As shown, a signal tower (10) is provided at the front or the upper side of the semiconductor manufacturing equipment 1 to visually indicate the operating state of the semiconductor manufacturing equipment 1, and the signal tower 10 is a semiconductor manufacturing equipment. The plurality of lamps 16a and 16b 16c representing the operating state of the facility 1, the support frame 14 supporting the lamps 16a and 16b 16c, and the support frame 14 are attached to the semiconductor manufacturing facility 1. It is comprised by the bracket 12 fixed to one side.

여기서, 각 램프(16a, 16b 16c)는 반도체 제조설비(1)에 이상이 감지되어 정지되었음을 나타내는 에러램프(error lamp:16a)와, 반도체 제조설비(1)가 정상적으로 작동됨을 나타내는 런램프(run lamp:16b)와, 반도체 제조설비(1)가 정상적으로 작동되나 작업이 실시하고 있지 않음을 나타내는 아이들램프(idle lamp:16c)가 마련되며, 통산적으로 에러램프(16a)는 적색, 런램프(16a)는 녹색, 아이들램프(16c)는 황색의 램프로 구성된다.Here, each of the lamps 16a and 16b 16c includes an error lamp (16a) indicating that the semiconductor manufacturing facility (1) has been detected and stopped, and a run lamp (run) indicating that the semiconductor manufacturing facility (1) operates normally. lamp: 16b) and an idle lamp: 16c indicating that the semiconductor manufacturing equipment 1 is operating normally but not performing work are provided. In general, the error lamp 16a is red, a run lamp ( 16a) is green and the idle lamp 16c is composed of a yellow lamp.

이러한, 시그널 타워(10)가 구비된 반도체 제조설비(1)에서 반도체 제조공정에 이상이 발생할 경우에는 시그널 타워(10)의 에러램프(16a)가 점등되고, 관리자는 시그널 타워(10)의 에러램프(16a)의 점등상태를 시각적으로 인식하여 반도체 제조설비(1)에 조치를 취하게 된다.When an error occurs in the semiconductor manufacturing process in the semiconductor manufacturing equipment 1 equipped with the signal tower 10, the error lamp 16a of the signal tower 10 is turned on, and the manager is an error of the signal tower 10. The state of lighting of the lamp 16a is visually recognized to take action on the semiconductor manufacturing equipment 1.

그리고, 통상적으로 고정 이상이 발생하여 관리자가 조치를 취한 반도체 제조설비(1)는 반도체 제조설비(1)가 공정을 진행하기 위한 초기화 단계로 복귀한 다음 관리자의 조작에 의해 공정이 진행되도록 설정되어 있다. In addition, the semiconductor manufacturing equipment 1 in which a fixed abnormality occurs and the administrator takes action is set to return to the initialization stage for the semiconductor manufacturing equipment 1 to proceed with the process and then the process proceeds by the operation of the manager. have.

그러나, 상술한 바와 같은 시그널 타워(10)에서는 관리자가 반도체 제조설비(1)의 에러사항을 조치한 다음 반도체 제조설비(1)가 초기 단계로 복귀하는 것을 나타내는 별도의 램프가 마련되어 있지 않아 반도체 제조설비(1)가 초기화되는 시간(약 30~60분)동안 관리자가 다른 일을 하거나, 다른 업무로 인하여 반도체 제조 설비(1)의 초기화 후의 조작을 잊어버리고 실행하지 않아 반도체 제조설비(1)가 초기화 단계에서 장시간 멈춰있는 일이 빈번하게 발생하여 반도체 제조설비(1)의 작동효율이 떨어지는 문제점이 있었다.
However, in the signal tower 10 as described above, there is no separate lamp indicating that the manager has corrected an error in the semiconductor manufacturing equipment 1 and then the semiconductor manufacturing equipment 1 returns to an initial stage. During the time (approximately 30 to 60 minutes) when the facility 1 is initialized, the manager does other work or due to other tasks, the semiconductor manufacturing facility 1 is not executed because the operation after the initialization of the semiconductor manufacturing facility 1 is forgotten and not executed. There has been a problem that the operation efficiency of the semiconductor manufacturing equipment 1 decreases due to frequent stops occurring for a long time in the initialization stage.

본 발명은 상기와 같은 문제점을 해결하기 위하여 안출된 것으로, 반도체 제조설비의 작동상태를 나타내는 시그널 타워를 개선하여 반도체 제조설비가 공정의 진행을 위하여 초기화되는 동안의 상태를 나타낼 수 있도록 한 반도체 제조설비의 시그널 타워를 제공함에 그 목적이 있다.
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and improves the signal tower indicating the operating state of the semiconductor manufacturing equipment, so that the semiconductor manufacturing equipment can represent the state while the semiconductor manufacturing equipment is initialized for the progress of the process. Its purpose is to provide a signal tower.

상기의 목적을 달성하기 위한 본 발명에 따른 반도체 제조설비의 시그널 타워는, 반도체 제조설비와, 상기 반도체 제조설비의 외측에 상기 반도체 제조설비의 작동 상태를 시각적으로 나타내는 시그널 타워에 있어서, 상기 시그널 타워는, 상기 반도체 제조설비에 이상이 감지되어 정지되었음을 나타내는 에러램프와, 상기 반도체 제조설비가 정상적으로 작동됨을 나타내는 런램프와, 상기 반도체 제조설비가 정상적으로 작동되나 작업이 실시하고 있지 않음을 나타내는 아이들램프와, 상기 반도체 제조설비가 초기 단계로 복귀중임을 나타내는 홀드램프가 마련되는 것을 특징으로 한다. The signal tower of the semiconductor manufacturing equipment according to the present invention for achieving the above object, the signal tower in the signal manufacturing equipment and a signal tower that visually shows the operating state of the semiconductor manufacturing equipment on the outside of the semiconductor manufacturing equipment, An error lamp indicating that the semiconductor manufacturing equipment is detected and stopped, a run lamp indicating that the semiconductor manufacturing equipment is operating normally, an idle lamp indicating that the semiconductor manufacturing equipment is operating normally but not performing work; And a hold lamp indicating that the semiconductor manufacturing equipment is returning to an initial stage.

또한, 상기 에러램프는 적색의 램프로 마련되고, 상기 런램프는 녹색의 램프 로 마련되며, 상기 아이들램프는 황색의 램프로 마련되고, 상기 홀드램프는 청색의 램프로 마련되는 것이 바람직하다. In addition, the error lamp is provided with a red lamp, the run lamp is provided with a green lamp, the idle lamp is provided with a yellow lamp, and the hold lamp is preferably provided with a blue lamp.

이하, 첨부된 도면을 참조하여 본 발명에 따른 반도체 제조설비의 시그널 타워를 상세히 설명한다. Hereinafter, a signal tower of a semiconductor manufacturing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

본 발명을 설명함에 있어서, 정의되는 용어들은 본 발명에서의 기능을 고려하여 정의 내려진 것으로, 이는 당 분야에 종사하는 기술자의 의도 또는 관례 등에 따라 달라질 수 있으므로, 본 발명의 기술적 구성요소를 한정하는 의미로 이해되어서는 아니 될 것이다.In the description of the present invention, terms defined are defined in consideration of functions in the present invention, which may vary according to the intention or custom of a person skilled in the art, and thus, limit the technical components of the present invention. It should not be understood as.

도 2는 본 발명에 따른 반도체 제조설비의 시그널 타워를 나타낸 부분확대사시도이다.2 is a partially enlarged perspective view illustrating a signal tower of a semiconductor manufacturing apparatus according to the present invention.

도시한 바와 같이 본 발명에 따른 반도체 제조설비의 시그널 타워는 반도체 제조설비(1)의 전방 또는 상측에는 반도체 제조설비(1)의 작동 상태를 시각적으로 나타내는 시그널 타워(signal tower:20)가 마련되며, 이러한 시그널 타워(20)는 반도체 제조설비(1)의 작동상태를 나타내는 다수의 램프(26a, 26b, 26c, 26d)와, 램프(26a, 26b, 26c, 26d)를 지지하는 지지프레임(24)과, 지지프레임(24)을 반도체 제조설비(1)에 일측에 고정하는 브래킷(22)으로 구성되어 있다.As shown, the signal tower of the semiconductor manufacturing equipment according to the present invention is provided with a signal tower (signal tower: 20) that visually indicates the operating state of the semiconductor manufacturing equipment (1) in front or above the semiconductor manufacturing equipment (1) The signal tower 20 includes a plurality of lamps 26a, 26b, 26c, and 26d indicating operating states of the semiconductor manufacturing facility 1, and a support frame 24 for supporting the lamps 26a, 26b, 26c and 26d. ) And a bracket 22 for fixing the support frame 24 to the semiconductor manufacturing equipment 1 on one side.

여기서, 각 램프(26a, 26b, 26c, 26d)는 반도체 제조설비(1)에 이상이 감지되어 정지되었음을 나타내는 에러램프(error lamp:26a)와, 반도체 제조설비(1)가 정상적으로 작동됨을 나타내는 런램프(run lamp:26b)와, 반도체 제조설비(1)가 정상적으로 작동되나 작업이 실시하고 있지 않음을 나타내는 아이들램프(idle lamp:26c)와, 반도체 제조설비(1)가 초기 단계로 복귀중임을 나타내는 홀드램프(hold lamp:26d)가 마련된다.Here, each of the lamps 26a, 26b, 26c, and 26d includes an error lamp 26a indicating that the semiconductor manufacturing facility 1 is detected and stopped, and a run indicating that the semiconductor manufacturing facility 1 is normally operated. Run lamp 26b, an idle lamp 26c indicating that the semiconductor manufacturing equipment 1 is operating normally but not performing, and the semiconductor manufacturing equipment 1 is returning to an initial stage. A hold lamp 26d indicating is provided.

여기서, 에러램프(26a)는 적색, 런램프(26b)는 녹색, 아이들램프(26c)는 황색, 홀드램프(26d)는 청색의 램프로 구성된다.Here, the error lamp 26a is composed of red, the run lamp 26b is green, the idle lamp 26c is yellow, and the hold lamp 26d is blue.

이에 따라, 본 발명에 따른 반도체 제조설비의 시그널 타워의 작동을 실시예를 통하여 상세히 설명한다. Accordingly, the operation of the signal tower of the semiconductor manufacturing equipment according to the present invention will be described in detail through the embodiment.

상술한 바와 같이, 본 발명에 따른 반도체 제조장비의 시그널 타워는, 반도체 제조설비(1)가 정상적으로 작동될 경우에는 시그널 타워(20)의 런램프(26b)가 점등된 상태를 유지하며, 반도체 제조설비(1)가 정상적으로 작동중이나 반도체 제조공정을 실시하고 있지 않을 경우에는 아이들램프(26c)가 점등된 상태를 유지하며, 반도체 제조설비(1)가 반도체 제조공정 중에 에러를 발생하였을 경우에는 에러램프(26a)가 점등된다.As described above, in the signal tower of the semiconductor manufacturing equipment according to the present invention, when the semiconductor manufacturing equipment 1 is normally operated, the run lamp 26b of the signal tower 20 is turned on, and semiconductor manufacturing is performed. When the equipment 1 is operating normally or the semiconductor manufacturing process is not performed, the idle lamp 26c remains lit. When the semiconductor manufacturing equipment 1 generates an error during the semiconductor manufacturing process, the error lamp is maintained. (26a) lights up.

또한, 상술한 에러램프(26a)가 점등되었을 경우에는 관리자가 이를 시각적으로 인식하게 되며 관리자는 반도체 제조설비(1)의 에러사항을 조치하며, 관리자의 조치 이후에는 반도체 제조설비(1)가 초기화 단계를 진행하는 홀드램프(26d)가 점등된다. In addition, when the above-described error lamp 26a is turned on, the manager visually recognizes the error, and the manager measures an error of the semiconductor manufacturing equipment 1, and after the administrator's action, the semiconductor manufacturing equipment 1 is initialized. The hold lamp 26d which proceeds with the step is turned on.

이에 홀드램프(26d)가 점등되어 반도체 제조설비(1)가 초기화 단계를 진행하는 데는 약간의 시간(30~60분)이 소요되며, 관리자가 조치를 취한 반도체 제조설비(1) 이외의 다른 제조설비의 에러사항을 조치하거나, 다른 업무를 진행하더라도 조치를 취한 반도체 제조설비(1)의 시그널 타워(20)의 홀드램프(26d)가 점등되어 있 으므로 쉽게 시각적으로 인식할 수 있어, 관리자가 반도체 제조설비(1)를 조작하여 공정을 진행시킬 수 있다. As the hold lamp 26d is turned on, it takes some time (30 to 60 minutes) for the semiconductor manufacturing equipment 1 to proceed with the initialization step. The hold lamp 26d of the signal tower 20 of the semiconductor manufacturing equipment 1 which has taken measures even if the equipment has corrected an error or performed other tasks can be easily visually recognized. The manufacturing facility 1 can be operated to advance the process.

이상에서 살펴본 바와 같이 본 발명의 바람직한 실시예에 대해 상세히 기술되었지만, 본 발명이 속하는 기술분야에 있어서 통상의 지식을 가진 사람이라면, 첨부된 청구 범위에 정의된 본 발명의 정신 및 범위를 벗어나지 않으면서 본 발명을 여러 가지로 변형하여 실시할 수 있을 것이다. 따라서 본 발명의 앞으로의 실시예들의 변경은 본 발명의 기술을 벗어날 수 없을 것이다.
Although described in detail with respect to preferred embodiments of the present invention as described above, those of ordinary skill in the art, without departing from the spirit and scope of the invention as defined in the appended claims Various modifications may be made to the invention. Therefore, changes in the future embodiments of the present invention will not be able to escape the technology of the present invention.

이상에서 살펴본 바와 같이, 본 발명에 따른 반도체 제조설비의 시그널 타워에 따르면, 반도체 제조설비의 작동상태를 나타내는 시그널 타워를 개선하여 반도체 제조설비가 공정의 진행을 위하여 초기화되는 동안의 상태를 나타낼 수 있도록 한 홀드램프를 마련함으로써, 반도체 제조설비가 공정을 진행하기 위하여 초기화 단계이후에 반도체 제조설비의 상태를 관리자가 시각적으로 인식할 수 있어 관리자가 반도체 제조설비를 조작하여 공정을 진행시킴으로 반도체 제조설비의 작동효율을 향상시킬 수 있는 효과가 있다. As described above, according to the signal tower of the semiconductor manufacturing equipment according to the present invention, by improving the signal tower indicating the operating state of the semiconductor manufacturing equipment so that the semiconductor manufacturing equipment can indicate the state during the initialization for the progress of the process By providing a hold lamp, the semiconductor manufacturing equipment can visually recognize the state of the semiconductor manufacturing equipment after the initializing step in order for the semiconductor manufacturing equipment to proceed with the process. There is an effect to improve the operating efficiency.

Claims (2)

반도체 제조설비와, 상기 반도체 제조설비의 외측에 상기 반도체 제조설비의 작동 상태를 시각적으로 나타내는 시그널 타워에 있어서, 상기 시그널 타워는, A signal tower which visually shows an operating state of a semiconductor manufacturing facility and a semiconductor manufacturing facility on the outside of the semiconductor manufacturing facility, wherein the signal tower comprises: 상기 반도체 제조설비에 이상이 감지되어 정지되었음을 나타내는 에러램프와, 상기 반도체 제조설비가 정상적으로 작동됨을 나타내는 런램프와, 상기 반도체 제조설비가 정상적으로 작동되나 작업이 실시하고 있지 않음을 나타내는 아이들램프와, 상기 반도체 제조설비가 초기 단계로 복귀중임을 나타내는 홀드램프가 마련되는 것을 특징으로 하는 반도체 제조설비의 시그널 타워.An error lamp indicating that the semiconductor manufacturing facility is stopped by detecting an abnormality, a run lamp indicating that the semiconductor manufacturing facility is normally operated, an idle lamp indicating that the semiconductor manufacturing facility is normally operated but no work is being performed, and A signal tower of a semiconductor manufacturing facility, characterized in that a hold lamp is provided indicating that the semiconductor manufacturing facility is returning to an initial stage. 제 1항에 있어서,The method of claim 1, 상기 에러램프는 적색의 램프로 마련되고, 상기 런램프는 녹색의 램프로 마련되며, 상기 아이들램프는 황색의 램프로 마련되고, 상기 홀드램프는 청색의 램프로 마련되는 것을 특징으로 하는 반도체 제조설비의 시그널 타워.The error lamp is provided with a red lamp, the run lamp is provided with a green lamp, the idle lamp is provided with a yellow lamp, and the hold lamp is provided with a blue lamp. Signal tower.
KR1020040088997A 2004-11-03 2004-11-03 Signal Tower of Semiconductor Manufacturing Equipment Withdrawn KR20060039779A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008153337A1 (en) * 2007-06-13 2008-12-18 Myung Jin Lee Signal tower and integration system using the same
KR101418495B1 (en) * 2013-03-08 2014-07-14 김선희 Heat Sink Type Signal Tower Lamp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008153337A1 (en) * 2007-06-13 2008-12-18 Myung Jin Lee Signal tower and integration system using the same
KR101418495B1 (en) * 2013-03-08 2014-07-14 김선희 Heat Sink Type Signal Tower Lamp

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