[go: up one dir, main page]

KR20060022769A - Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation - Google Patents

Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation Download PDF

Info

Publication number
KR20060022769A
KR20060022769A KR1020040071507A KR20040071507A KR20060022769A KR 20060022769 A KR20060022769 A KR 20060022769A KR 1020040071507 A KR1020040071507 A KR 1020040071507A KR 20040071507 A KR20040071507 A KR 20040071507A KR 20060022769 A KR20060022769 A KR 20060022769A
Authority
KR
South Korea
Prior art keywords
layer
cladding
vapor deposition
zirconium
zirconium alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020040071507A
Other languages
Korean (ko)
Inventor
박혜련
목용균
Original Assignee
박혜련
목용균
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 박혜련, 목용균 filed Critical 박혜련
Priority to KR1020040071507A priority Critical patent/KR20060022769A/en
Publication of KR20060022769A publication Critical patent/KR20060022769A/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21C—NUCLEAR REACTORS
    • G21C3/00—Reactor fuel elements and their assemblies; Selection of substances for use as reactor fuel elements
    • G21C3/02—Fuel elements
    • G21C3/04—Constructional details
    • G21C3/06—Casings; Jackets
    • G21C3/07—Casings; Jackets characterised by their material, e.g. alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C16/00—Alloys based on zirconium
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21C—NUCLEAR REACTORS
    • G21C21/00—Apparatus or processes specially adapted to the manufacture of reactors or parts thereof
    • G21C21/02—Manufacture of fuel elements or breeder elements contained in non-active casings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S376/00—Induced nuclear reactions: processes, systems, and elements
    • Y10S376/90—Particular material or material shapes for fission reactors
    • Y10S376/901—Fuel

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 우수한 내식성을 갖는 지르코늄합금 핵연료 피복관 제조에 관한 것으로, 특히 지르코늄합금 핵연료 피복관 제조에 있어서 피복관의 부식을 방지하는 특성이 우수한 Zr-N, Zr-O, Ti-N, Ta-N 층을 화학기상증착법 또는 물리증착법으로 피복관 표면에 다층으로 형성하는 것을 목적으로 한다. Zr-N 층은 내산화성과 내마모성이 뛰어나 지르코늄 피복관 표면에 형성될 때 지르코늄 피복관의 부식을 방지해 피복관의 수명을 연장시켜 준다. 그러나 기존의 지르코늄 피복관 표면에 형성한 단일층의 Zr-N은 주상의 결정구조를 지녀 입계를 통한 산소의 확산을 효과적으로 저지할 수 없어 보다 고온, 장주기의 핵연료 환경이나 수퍼크리티칼 환경에서의 사용을 기대하기 어렵다. 본 발명은 내식특성이 우수한 Zr-N, Zr-O, Ti-N, Ta-N 층을 피복관 표면에 다층으로 형성하여 상기의 문제점을 해결한다. 화학기상증착법 또는 물리증착법으로 다층의 Zr-N, Zr-O, Ti-N, Ta-N 층을 형성할 때 각 층간에 입계가 서로 어긋나게 형성하여 입계를 통한 산소의 확산을 방해하여 Zr-N, Zr-O, Ti-N, Ta-N 층 자체의 산화 및 기저의 지르코늄 합금의 산화를 지연시켜 지르코늄 피복관의 수명을 연장시키게 하는 효과가 있다.
The present invention relates to the production of a zirconium alloy fuel cladding tube having excellent corrosion resistance, and particularly in the production of zirconium alloy fuel cladding, Zr-N, Zr-O, Ti-N, Ta-N layer having excellent properties to prevent corrosion of the cladding tube It is an object to form a multilayer on the surface of a coating tube by chemical vapor deposition or physical vapor deposition. The Zr-N layer has excellent oxidation and abrasion resistance, which prevents corrosion of the zirconium cladding when formed on the surface of the zirconium cladding, thus extending the life of the cladding. However, the single layer of Zr-N formed on the surface of the existing zirconium cladding tube has a columnar crystal structure and cannot effectively prevent the diffusion of oxygen through the grain boundary. Therefore, it is not suitable for use in a high temperature, long cycle fuel environment or supercritical environment. It's hard to expect The present invention solves the above problems by forming a multi-layered Zr-N, Zr-O, Ti-N, Ta-N layer on the surface of the coating tube having excellent corrosion resistance. When forming multi-layered Zr-N, Zr-O, Ti-N, Ta-N layers by chemical vapor deposition or physical vapor deposition, grain boundaries are shifted from each other to prevent diffusion of oxygen through the grain boundaries. , Zr-O, Ti-N, Ta-N layer itself has the effect of delaying the oxidation of the underlying zirconium alloy and prolong the life of the zirconium cladding tube.

화학기상증착법, 물리증착법, 지르코늄 합금 피복관Chemical Vapor Deposition, Physical Vapor Deposition, Zirconium Alloy Cladding

Description

표면층 형성에 의한 핵연료용 내식성 지르코늄합금 피복관의 제조방법 {Method for manufacturing of the corrosion resistant zirconium alloy cladding for nuclear fuel by surface layer formation} Method for manufacturing corrosion-resistant zirconium alloy cladding for nuclear fuel by surface layer formation {Method for manufacturing of the corrosion resistant zirconium alloy cladding for nuclear fuel by surface layer formation}             

도 1은 기존의 방법에 의해 형성한 Zr-N 표면층의 구조를 도식화한 단면도이다.1 is a cross-sectional view illustrating the structure of a Zr-N surface layer formed by a conventional method.

도 2는 본 발명에 의해 형성되는 다층 Zr-N, Zr-O, Ti-N, Ta-N 제조 공정을 도식화한 일례
Figure 2 is an example of the schematic manufacturing process of multilayer Zr-N, Zr-O, Ti-N, Ta-N formed by the present invention

가압 경수로용 핵연료 피복관으로 사용되는 지르코늄합금은 약 350℃, 10-15MPa 환경에서 사용되고 있다. 이 환경 내에서 피복관은 부식되고 경수로 내에서 발생하여 떠다니는 금속 또는 산화물 조각등과의 충돌 및 지지격자 스프링과의 마찰에 의해 표면이 마모, 파손되어 핵연료를 교체해야 하는 원인이 된다. 따라서 피복관의 내산화성과 마찰강도를 증가시켜 주면 피복관의 내식성을 증가시키게 되고 이는 피복관 수명을 연장시키게 되어 핵연료 안전성을 증가시킬 수 있어서 지금보다 경제성 있는 원자력발전을 할 수 있게 된다. 기존에 피복관의 내식성을 증진시키는 방법으로는 피복관용 지르코늄 합금을 제조할 때 Nb, Sn, Fe, Cr, O 등의 합금 원소의 비를 조절하는 방법이 주로 이용되었다. 그러나 이런 합금원소를 이용하여 증진 시킬 수 있는 내식성에는 한계가 있어 고온 및 장주기로 핵연료를 사용하지 못하고 있다. 이 후 피복관 표면에 이온임플렌테이션, Zr-N 막증착등의 방법으로 내산화성과 내마모성이 있는 층을 형성하여 합금원소를 이용하여 증진 시킬 수 있는 내식성의 한계를 뛰어 넘고자 하였다. 그러나 표면에 생성시킨 새로운 층 역시 효과적으로 부식을 막을 수 있을 정도로 충분히 두껍지 않거나, 주상의 결정구조를 지니고 있어 입계를 통한 산소의 확산으로 인한 부식은 방지할 수 없다는 단점이 있다. 따라서 산소 확산이 힘든 막을 충분한 두께로 핵연료 피복관용 튜브 표면에 생성시켜 피복관의 부식을 방지시키는 공정의 개발이 필요하다.

Zirconium alloys used as nuclear fuel cladding for pressurized water reactors are used in an environment of about 350 ° C and 10-15 MPa. In this environment, the cladding is corroded and generated in the water reactor, colliding with floating metal or oxide fragments and friction with the support grid spring, causing the surface to be worn and broken, causing the nuclear fuel to be replaced. Therefore, increasing the oxidation resistance and frictional strength of the cladding tube increases the corrosion resistance of the cladding tube, which can extend the life of the cladding tube and increase the fuel safety, thus enabling more economical nuclear power generation. Conventionally, as a method of improving the corrosion resistance of the cladding tube, a method of controlling the ratio of alloying elements such as Nb, Sn, Fe, Cr, O, etc. has been mainly used when manufacturing a zirconium alloy for cladding. However, there is a limit to the corrosion resistance that can be improved by using such alloying elements, and thus, the fuel is not used at high temperature and long periods. Afterwards, we tried to overcome the limit of corrosion resistance that can be enhanced by using alloying elements by forming layers with oxidation resistance and abrasion resistance through the method of ion implantation and Zr-N film deposition on the surface of coating tube. However, the new layer formed on the surface is also not thick enough to effectively prevent corrosion, or has a columnar crystal structure, so that corrosion due to diffusion of oxygen through grain boundaries cannot be prevented. Therefore, there is a need to develop a process that prevents corrosion of the cladding by generating a film having a difficult thickness to diffuse on the surface of the nuclear cladding tube with a sufficient thickness.

본 발명은 상기와 같은 문제점을 해결하고자 고안된 것이다. 내식성이 우수한 지르코늄합금 핵연료 피복관을 제조하기 위해 지르코늄 합금 표면에 내식성이 우수한 Zr-N, Zr-O, Ti-N, Ta-N 층을 형성하는 공정을 발명하였다. 본 발명에서는 기존에 지르코늄 피복관의 내식성을 향상시키고자 피복관 표면에 형성시켰던 Zr-N 층보다 내식성이 우수한 다층의 Zr-N, Zr-O, Ti-N, Ta-N 층을 지르코늄 피복관 표 면에 형성하는 방법을 제공한다.
The present invention is designed to solve the above problems. In order to produce a zirconium alloy fuel cladding having excellent corrosion resistance, a process of forming a Zr-N, Zr-O, Ti-N, Ta-N layer having excellent corrosion resistance on the surface of a zirconium alloy was invented. In the present invention, the Zr-N, Zr-O, Ti-N, Ta-N layer of the multi-layer Zr-N layer having excellent corrosion resistance than the Zr-N layer formed on the surface of the coating tube to improve the corrosion resistance of the zirconium cladding tube on the surface of the zirconium cladding tube It provides a method of forming.

상기 목적을 달성하기 위하여 본 발명에서 얻고자 하는 Zr-N, Zr-O, Ti-N, Ta-N 층은 화학기상증착장치로는 평판형 유도결합형 플라즈마 CVD 장치, 코일형 유도결합 플라즈마 CVD 장치, ECR 플라즈마 장치에서, 물리증착장치로는 스퍼터링장치에서 형성될 수 있다. 화학증착법을 이용하여 Zr(C,N)층을 형성할 때의 Zr의 원료로는 tetrakisdiethylamidozirconium, tetrakismethylethylamidozirconium 또는 ZrCl4 중 하나가 사용되고 Ti 원료로는 TiCl4를 Ta 원료로는 pentakisdiethylaminotantalum, pentakisdimethylaminotantalum, 또는 tertbutylimidotris(diethylamido)tantalum 중 하나가 사용되며, N의 원료로 N2 또는 NH3를 사용하며, O의 원료로는 O2를 사용한다. 이 때 Zr, Ti, Ta의 공급원을 분해하기 위한 플라즈마 발생기체로 Ar, H2, N2 중의 하나 또는 한 가지 이상의 기체를 혼합하여 사용하고, Zr-N, Zr-O, Ti-N, Ta-N 층이 형성되는 기판 온도를 10-500℃, 반응 챔버내의 압력을 1-2000mTorr로 하여 플라즈마 화학기상증착법으로 Zr-N, Zr-O, Ti-N, Ta-N 을 형성하는 것을 특징으로 한다. 증착 장치는 Zr-N, Zr-O, Ti-N, Ta-N 층이 형성되는 반응 챔버, 시편의 장입 및 제거를 원활히 하고 보다 깨끗한 진공을 얻기 위한 로드락, 금속의 소스를 공급하는 버블러, 반응 기체들을 공급하는 기체 공급장치, 그리고 진공장치를 포함한다. Zr, Ti, Ta 원료는 온도를 일정 하게 유지시키고, Ar, H2, N2 중 하나 또는 그 이상의 조합 기체를 이용하여 플라즈마가 발생되고 있고 지르코늄 피복관(1)이 장입되어 있는 반응 챔버내로 그 증기를 운반한다. 각각의 원료가 플라즈마내로 주입되기 전에 서로 반응하여 원하지 않는 반응물이 생성되는 것을 방지하고자 별도의 공급라인을 이용하여 플라즈마내로 주입한다. 반응 챔버내에서는 샤워헤드를 이용하여 원료를 균일하게 분사하여준다. Zr-N, Zr-O, Ti-N, Ta-N 중 하나의 층을 지르코늄 피복관 표면에 형성시킨다. 층이 형성되는 동안에는 반응챔버내의 온도와 압력을 일정하게 유지하여 균일한 증착층이 생성되게 한다. 하나의 층(4)을 형성한 후 반응 챔버내에 시편을 그대로 두고 형성된 층의 표면을 이온 충돌방법으로 처리하여 준다. 이 때 표면에 충돌시키는 이온(5) 으로는 Ce, Y, Nb, Cr, Ni, Zr, Mo, La, Ar, H, N 중 한가지 이상으로 한다. 이온충돌 과정이 끝난 후 처음에 증착한 층(4)과 동일한 방법으로 Zr-N, Zr-O, Ti-N, Ta-N 중 하나를 두번째 층(6)으로 형성하고, 두번째 층의 표면에 이온(5)을 충돌시킨다. 원하는 두께 또는 층수만큼의 Zr-N, Zr-O, Ti-N, Ta-N 층을 형성할 때까지 층 형성, 이온 충돌 과정을 반복한다. 물리증착법으로는 스퍼터링 장치를 이용하여 Zr, Ti, Ta중 하나의 금속 타겟과 N2와 O2를 각각 N과 O의 원료로 이용하여 Zr-N, Zr-O, Ti-N, Ta-N 중 하나의 층을 형성한다. 막 형성 챔버와는 별개의 챔버를 이용하여 형성된 층의 표면에 이온충돌 처리를 하였다. 물리증착법으로도 화학증착법과 동일하게 필요로하는 층수만큼 층 형성, 이온충돌 과정을 반복하였다. 이온 충돌에 의해서 각 층간의 계면의 밀도를 높여 주고 새로 형성하는 층의 입계가 기저층의 입계와 서로 엇갈리게 형성되게하여 내식성이 향상되는 효과를 얻는다. 형성된 Zr-N, Zr-O, Ti-N, Ta-N 층의 조성을 ZrNa, ZrOb, TiNc, TaNd 형태로 나타낼 때 a,b,c,d 각각의 범위가 0.2<a,b,c,d<2.0이며 형성된 층의 총 두께는 0.1-50μm 사이의 어느 한 값이 되게 한다. 제일 마지막 층을 형성한 후의 표면도 이온충돌법으로 처리하여 치밀한 표면을 가지게 하여 내식성을 증가시킨다.
In order to achieve the above object, the Zr-N, Zr-O, Ti-N, and Ta-N layers to be obtained in the present invention are chemical vapor deposition apparatuses, such as flat type inductively coupled plasma CVD apparatuses and coiled inductively coupled plasma CVD apparatuses. In an apparatus, an ECR plasma apparatus, the physical vapor deposition apparatus may be formed in a sputtering apparatus. When the Zr (C, N) layer is formed by chemical vapor deposition, one of tetrakisdiethylamidozirconium, tetrakismethylethylamidozirconium, or ZrCl 4 is used as the raw material of Zr, TiCl 4 is used as the Ti material, pentakisdiethylaminotantalum, pentakisdimethylaminotantalum, or tertbutylimidotris (Ti) is used. One of diethylamido) tantalum is used, and N 2 or NH 3 is used as the raw material of N, and O 2 is used as the raw material of O. At this time, as a plasma generating gas for decomposing the source of Zr, Ti, Ta, one or more of Ar, H 2 , N 2 or a mixture of gases is used, and Zr-N, Zr-O, Ti-N, Ta Zr-N, Zr-O, Ti-N, Ta-N are formed by plasma chemical vapor deposition using a substrate temperature at which the -N layer is formed at 10-500 ° C. and a pressure in the reaction chamber at 1-2000 mTorr. do. The deposition apparatus includes a reaction chamber in which Zr-N, Zr-O, Ti-N, and Ta-N layers are formed, a load lock to facilitate the loading and removal of the specimen and a cleaner vacuum, and a bubbler to supply a source of metal. A gas supply for supplying the reaction gases, and a vacuum device. The Zr, Ti, and Ta raw materials are kept at a constant temperature, and plasma is generated using one or more combination gases of Ar, H 2 , and N 2 , and the vapor is introduced into the reaction chamber into which the zirconium cladding tube 1 is charged. To carry. Before each raw material is injected into the plasma, it is injected into the plasma by using a separate supply line to prevent unwanted reactants from being generated by reacting with each other. In the reaction chamber, the raw material is uniformly sprayed using the shower head. One layer of Zr-N, Zr-O, Ti-N, Ta-N is formed on the surface of the zirconium cladding tube. While the layer is formed, the temperature and pressure in the reaction chamber are kept constant to produce a uniform deposition layer. After the formation of one layer 4, the surface of the formed layer is treated with an ion bombardment method while leaving the specimen in the reaction chamber. At this time, at least one of Ce, Y, Nb, Cr, Ni, Zr, Mo, La, Ar, H and N is used as the ions 5 to impinge on the surface. After the ion collision process, one of Zr-N, Zr-O, Ti-N, and Ta-N is formed as the second layer (6) in the same manner as the first deposited layer (4). Ion 5 is collided. The layer formation and ion bombardment process is repeated until the Zr-N, Zr-O, Ti-N, and Ta-N layers of the desired thickness or number of layers are formed. As physical vapor deposition method, Zr-N, Zr-O, Ti-N, Ta-N using sputtering device using one metal target of Zr, Ti, Ta and N 2 and O 2 as raw materials of N and O, respectively To form one layer. Ion collision treatment was performed on the surface of the layer formed by using a chamber separate from the film formation chamber. In the physical vapor deposition method, the layer formation and ion bombardment processes were repeated as many layers as the chemical vapor deposition method needed. The ion collision increases the density of the interface between the layers and the grain boundaries of the newly formed layers are staggered from the grain boundaries of the base layer, thereby improving the corrosion resistance. When the composition of the formed Zr-N, Zr-O, Ti-N, Ta-N layer is represented by the form of ZrN a , ZrO b , TiN c , TaN d , the ranges of a, b, c, d are respectively 0.2 <a, b , c, d <2.0 and the total thickness of the formed layer is any value between 0.1-50 μm. The surface after forming the last layer is also treated by the ion bombardment method to have a dense surface to increase the corrosion resistance.

상기한 바와 같이 본 발명은 지르코늄 피복관 표면에 화학기상증착법 또는 물리증착법으로 내식성이 우수한 Zr-N, Zr-O, Ti-N, Ta-N 박막을 다층으로 형성하면서, 층간에 서로 어긋난 입계 구조를 지녀 산소의 확산을 효율적으로 방지해주는 구조를 지니게 함으로써, 내산화성을 증진시켜 내식성이 우수한 지르코늄 피복관을 제조 가능하게 해 주는 매우 유용한 발명이다.
As described above, the present invention forms a multi-layered Zr-N, Zr-O, Ti-N, Ta-N thin film having excellent corrosion resistance by chemical vapor deposition or physical vapor deposition on the surface of a zirconium cladding tube, and has a grain boundary structure shifted between layers. By having a structure that effectively prevents the diffusion of oxygen, it is a very useful invention that makes it possible to manufacture a zirconium clad tube excellent in corrosion resistance by improving oxidation resistance.

Claims (3)

화학기상증착법 또는 물리증착법으로 Zr-N, Zr-O, Ti-N, Ta-N 층을 하나 또는 2가지 이상으로 조합하여 2층 이상으로 피복관 표면에 형성하면서, 각각의 층을 형성한 후 이온 충돌방법으로 층의 표면을 처리한 후 다음 층을 형성하여, 각 층간의 계면의 밀도를 높여 주고 새로 형성하는 층의 입계가 기저층의 입계와 서로 엇갈리게 형성되게하는 것을 특징으로 하는 내식성이 우수한 핵연료용 지르코늄 피복관의 제조 방법One or two or more Zr-N, Zr-O, Ti-N, and Ta-N layers may be combined by chemical vapor deposition or physical vapor deposition to form two or more layers on the surface of the coating tube, and then each ion may be formed. After the surface of the layer is treated by the collision method, the next layer is formed to increase the density of the interface between each layer, and the grain boundary of the newly formed layer is formed to cross the grain boundary of the base layer. Method of manufacturing zirconium cladding 제 1항에 있어서, 상기 Zr-N, Zr-O, Ti-N, Ta-N 층의 조성을 ZrNa, ZrOb, TiNc, TaNd 형태로 나타낼 때 a,b,c,d 각각의 범위가 0.2<a,b,c,d<2.0이며, 형성된 층의 총 두께가 0.1-50μm 인 층의 제조 방법According to claim 1, wherein the composition of the Zr-N, Zr-O, Ti-N, Ta-N layer in the form of ZrN a , ZrO b , TiN c , TaN d range of a, b, c, d respectively Is 0.2 <a, b, c, d <2.0, and the total thickness of the formed layer is 0.1-50 μm. 제 1항에 있어서, 상기 Zr-N, Zr-O, Ti-N, Ta-N 층의 표면에 충돌시키는 이온은 Ce, Y, Nb, Cr, Ni, Zr, Mo, La, Ar, H, N 중 한가지 이상으로 이루어지도록 하는 것을 특징으로 하는 제조 방법The method of claim 1, wherein the ions to collide with the surface of the Zr-N, Zr-O, Ti-N, Ta-N layer is Ce, Y, Nb, Cr, Ni, Zr, Mo, La, Ar, H, Manufacturing method characterized by consisting of at least one of N
KR1020040071507A 2004-09-08 2004-09-08 Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation Withdrawn KR20060022769A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020040071507A KR20060022769A (en) 2004-09-08 2004-09-08 Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040071507A KR20060022769A (en) 2004-09-08 2004-09-08 Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation

Publications (1)

Publication Number Publication Date
KR20060022769A true KR20060022769A (en) 2006-03-13

Family

ID=37129160

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040071507A Withdrawn KR20060022769A (en) 2004-09-08 2004-09-08 Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation

Country Status (1)

Country Link
KR (1) KR20060022769A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101038106B1 (en) * 2009-04-15 2011-06-01 한국수력원자력 주식회사 Method of depositing functional multilayer thin film at low temperature on nuclear fuel cladding for high speed furnace
FR2989923A1 (en) * 2012-04-26 2013-11-01 Commissariat Energie Atomique MULTILAYER MATERIAL RESISTANT TO OXIDATION IN NUCLEAR MEDIA.
CN114438493A (en) * 2021-11-08 2022-05-06 上海核工程研究设计院有限公司 High-temperature steam corrosion resistant coating for surface of zirconium alloy cladding tube of nuclear power plant and preparation method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101038106B1 (en) * 2009-04-15 2011-06-01 한국수력원자력 주식회사 Method of depositing functional multilayer thin film at low temperature on nuclear fuel cladding for high speed furnace
FR2989923A1 (en) * 2012-04-26 2013-11-01 Commissariat Energie Atomique MULTILAYER MATERIAL RESISTANT TO OXIDATION IN NUCLEAR MEDIA.
CN114438493A (en) * 2021-11-08 2022-05-06 上海核工程研究设计院有限公司 High-temperature steam corrosion resistant coating for surface of zirconium alloy cladding tube of nuclear power plant and preparation method thereof

Similar Documents

Publication Publication Date Title
KR102610954B1 (en) Wear-resistant PVD tool coating containing TiAlN nanolayer films
US8293359B2 (en) Multilayer CVD-coating and tool with such a coating
US12437885B2 (en) Nuclear reactor component having a coating of partially metastable chromium
US12354757B2 (en) Composite nuclear component, DLI-MOCVD method for producing same, and uses for controlling oxidation/hydridation
JP6999810B2 (en) Zirconium alloy cladding tube with improved high temperature oxidation resistance and its manufacturing method
US10811146B2 (en) Method of using DLI-MOCVD to provide a nuclear reactor component with a coating of amorphous chromium carbide
CN111074224B (en) Corrosion-resistant high-entropy alloy nitride coating, and preparation method and application thereof
JP7198746B2 (en) Nuclear reactor components with metal substrates, production method by DLI-MOCVD and use for oxidation/hydrogenation
Liskiewicz et al. DLC coatings in oil and gas production
CN116604898A (en) Structure and preparation method of ceramic-metal interlocking laminate material on carbon steel surface
KR20060022769A (en) Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by surface layer formation
JP2019199647A (en) Super multilayer film
KR20060022772A (en) Method for manufacturing corrosion resistant zirconium alloy cladding tube for nuclear fuel by forming ionized multilayer Zr (C, N)
KR20060022768A (en) Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by forming multilayer Zr (C, N)
Moretti et al. Duplex treatment on AISI D2 tool steel: plasma nitriding and reactive deposition of TiN and TiAlN films via magnetron sputtering
KR102881556B1 (en) Coated molding tools for improved performance and extended life
KR20060022771A (en) Manufacturing method of corrosion resistant zirconium alloy cladding tube for nuclear fuel by forming Zr-Si-N layer
Latushkina et al. Formation of Corrosion‐Resistant Nitride Coatings Based on Ti–Al–Cr–Fe–Ni High‐Entropy Alloy
马胜利 et al. Pulsed DC plasma enhanced chemical vapor deposited TiN/Ti (C, N) multilayer coatings
Ali et al. Oxidation Behaviour of TiC/TiN Coatings Deposited by Chemical Vapor Deposition (CVD): Mechanisms, Structures, and Properties
Perekrestov et al. Regularities of structure formation and physical properties of multilayered composites based on W, Ta, Нf, Ti, Mo, Сr, Al, and С
US20250382702A1 (en) Laminate for chamber inner wall of semiconductor manufacturing apparatus
KR100791112B1 (en) High Hardness CD Multi-element Composite Membrane for Cutting Tools
TW202513167A (en) A method of anti-hydrogen embrittlement coating on the surface of large metal workpiece and manufacturing
Da Silva Multilayer TiB2/X hard coatings by sputtering deposition

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20040908

PG1501 Laying open of application
PC1202 Submission of document of withdrawal before decision of registration

Comment text: [Withdrawal of Procedure relating to Patent, etc.] Withdrawal (Abandonment)

Patent event code: PC12021R01D

Patent event date: 20061011

WITB Written withdrawal of application