KR20060009560A - Nanoparticle Charging Method - Google Patents
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- KR20060009560A KR20060009560A KR1020040058193A KR20040058193A KR20060009560A KR 20060009560 A KR20060009560 A KR 20060009560A KR 1020040058193 A KR1020040058193 A KR 1020040058193A KR 20040058193 A KR20040058193 A KR 20040058193A KR 20060009560 A KR20060009560 A KR 20060009560A
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Abstract
본 발명은 나노입자를 수득방법 및 크기에 관계없이 고가로 대전시키는 방법에 관한 것으로, 나노입자를 증기화된 용매와 혼합하고, 반응 온도를 낮추어 나노입자 표면에 용매를 응축시킨 후, 용매가 응축된 나노입자를 대전시킨 다음, 용매를 증발시키는 본 발명의 방법에 의하면, 본래의 입자 크기를 유지하면서도 전하의 손실없이 고가로 대전된 나노입자를 얻을 수 있다.The present invention relates to a method of charging the nanoparticles at high cost regardless of the method of obtaining and size, and the nanoparticles are mixed with the vaporized solvent, the reaction temperature is lowered to condense the solvent on the surface of the nanoparticles, the solvent is condensed According to the method of the present invention by charging the charged nanoparticles and then evaporating the solvent, it is possible to obtain expensive charged nanoparticles without losing charge while maintaining the original particle size.
Description
도 1은 방사성 원소를 이용한 종래의 양극 대전 방법을 나타내는 모식도이고,1 is a schematic diagram showing a conventional positive electrode charging method using a radioactive element,
도 2는 연 X-선을 이용한 종래의 대전 방법을 나타내는 모식도이고,2 is a schematic diagram showing a conventional charging method using soft X -rays,
도 3은 코로나 방전을 이용한 종래의 대전 방법을 나타내는 모식도이고,3 is a schematic diagram showing a conventional charging method using a corona discharge,
도 4는 본 발명에 따른 나노입자의 대전 과정을 나타내는 모식도이고,4 is a schematic diagram showing a charging process of the nanoparticles according to the present invention,
도 5는 본 발명에서 사용되는 혼합형 입경 증대기(mixing-type particle magnifier)를 나타내는 개략도이고,Figure 5 is a schematic diagram showing a mixing-type particle magnifier used in the present invention,
도 6은 본 발명에 따라 나노입자를 대전시키고, 대전된 나노입자를 하전값을 확인하기 위한 시스템의 개략도이며,6 is a schematic diagram of a system for charging nanoparticles and for checking charged values of charged nanoparticles in accordance with the present invention;
도 7a 및 7b는 각각 본 발명에 따라 고가로 대전된 나노입자의 전기 이동도 분포 및 입자 크기 분포 변화를 나타내는 그래프이다.7A and 7B are graphs showing changes in the electrical mobility distribution and particle size distribution of nanoparticles charged at high cost according to the present invention, respectively.
<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>
10: 이송기체 (질소) 20: 유량계 10: transfer gas (nitrogen) 20: flow meter
30: 혼합형 입경 증대기 40: 스캔형 입자 크기 분포 측정기30: mixed particle size increaser 40: scan type particle size distribution measuring instrument
50: 코로나 대전기 60: 히터50: corona charger 60: heater
70: 이송 기체 80: 나노 미분형 정전 분급기70: transfer gas 80: nano fine type electrostatic classifier
90: 응축핵 계수기 100: 파라데이컵 전하량계 90: condensation nucleus counter 100: Faraday cup charge meter
본 발명은 나노입자를 대전시키는 방법에 관한 것으로서, 구체적으로 나노입자의 표면에서 용매의 응축 및 증발 과정을 거치게 함으로써 나노입자를 크기에 관계없이 고가로 대전시키는 방법에 관한 것이다.The present invention relates to a method for charging nanoparticles, and more particularly, to a method for charging a nanoparticle at an expensive regardless of size by undergoing a condensation and evaporation process of a solvent on the surface of the nanoparticle.
최근 들어 양전자 소자, 차세대 광전자 소자 등의 제조를 위해 나노미터 크기로 금속 나노입자를 패턴 증착하려는 시도들이 많이 이루어지고 있는데, 이 과정에서 나노입자의 대전은 원하는 위치에 입자를 부착함에 있어 매우 중요하며, 특히 고가로 대전된 나노입자에 대한 요구가 증대되고 있다.Recently, many attempts have been made to pattern-deposit metal nanoparticles to nanometer size for the manufacture of positron devices, next-generation optoelectronic devices, etc. In this process, charging of nanoparticles is very important in attaching particles to desired positions. In particular, there is an increasing demand for expensively charged nanoparticles.
나노입자의 형성, 증착 또는 계측시에 입자를 제어하는데 이용되는 에어로졸 나노입자의 대전은 주로 주위 이온과의 상호작용을 통해 이루어지며, 이온의 극성에 따라 크게 양극 대전과 단극 대전으로 나눌 수 있다. 또한, 방사성 물질, 자외선 또는 연 X-선, 코로나 방전 등을 이용한 대전 방법이 주로 사용되고 있다.Charging of the aerosol nanoparticles used to control the particles during formation, deposition, or measurement of the nanoparticles is mainly performed through interaction with surrounding ions, and can be classified into positive and negative pole charges depending on the polarity of the ions. In addition, a charging method using a radioactive material, ultraviolet or soft X -rays, corona discharge, or the like is mainly used.
예를 들어, 도 1에 나타낸, 방사성 원소(Am-241, Kr-85, Po-210 등)를 이용한 양극 대전 방법은 에어로졸 입자가 방사성 원소 주위를 통과하면서 이온화되어 10% 정도의 입자가 양극대전되는 것이다. 그러나, 이 방법은 크기가 50 nm 이하인 나노 입자의 경우 ±2가 이상으로 대전시키기 어려운 단점이 있다.For example, in the positive electrode charging method using radioactive elements (Am-241, Kr-85, Po-210, etc.) shown in FIG. 1, the aerosol particles are ionized while passing around the radioactive element, and about 10% of the particles are positively charged. Will be. However, this method has a disadvantage in that it is difficult to charge more than ± 2 in the case of nanoparticles having a size of 50 nm or less.
한편, 도 2에 나타낸, 연 X-선을 이용한 대전 방법의 경우에는, 고농도의 이온 분위기에서 에어로졸 입자를 대전시킴으로써 방사성 원소를 사용할 경우보다 단시간 동안에 입자를 양극평형상태(bipolar equilibrium State)로 도달시킬 수 있고 ±1가 대전율을 증가시킬 수 있는 장점은 있으나, 이 방법 역시 고가로 대전된 나노 입자를 얻기는 어렵다.On the other hand, in the case of the charging method using the soft X -ray shown in FIG. 2, the aerosol particles are charged in a high concentration of ionic atmosphere to reach the particles in the bipolar equilibrium state for a shorter time than in the case of using the radioactive element. Although there is an advantage that ± 1 can increase the charging rate, it is also difficult to obtain expensively charged nanoparticles.
또한, 도 3에 나타낸 코로나 방전 방법은 중심 와이어에 직류 고전압을 가하고 구멍이 뚫린 판에 접지를 하면 코로나 방전이 일어나면서 고농도의 단극 이온이 발생하여 입자를 단극으로 대전시키는 것으로, 충분한 이온 분위기가 형성되어 방사성 원소를 사용할 경우보다 효율적으로 입자를 대전시키는 것이 가능하다. 그러나, 50 nm 이하의 나노입자의 경우에는 역시 ±2가 이상으로 대전시키기 어렵다.In addition, in the corona discharge method shown in FIG. 3, when a DC high voltage is applied to the center wire and grounded to a plate having a hole, a corona discharge occurs and a high concentration of monopolar ions is generated to charge particles to a single pole, thereby forming a sufficient ion atmosphere. This makes it possible to charge the particles more efficiently than when using radioactive elements. However, in the case of nanoparticles of 50 nm or less, it is also difficult to charge more than ± 2.
이상과 같은 종래의 대전 방법들은 크기가 작아지면 대전율이 급격이 감소하는 특성 때문에 고가로 대전된 나노 입자를 얻는 것이 불가능하다.In the conventional charging methods as described above, it is impossible to obtain expensively charged nanoparticles because the charging rate decreases rapidly as the size decreases.
따라서, 본 발명의 목적은 나노입자를 입자 크기에 관계없이 용이하게 고가로 대전시킬 수 있는 방법을 제공하기 위한 것이다.
Accordingly, it is an object of the present invention to provide a method that can easily charge the nanoparticles regardless of the particle size and expensive.
상기 목적을 달성하기 위하여 본 발명에서는, 나노입자를 증기화된 용매와 혼합하고, 반응 온도를 낮추어 나노입자 표면에 용매를 응축시킨 후, 용매가 응축된 나노입자를 대전시킨 다음, 용매를 증발시키는 것을 포함하는, 나노입자의 대전 방법을 제공한다.In order to achieve the above object, in the present invention, the nanoparticles are mixed with a vaporized solvent, the reaction temperature is lowered to condense the solvent on the surface of the nanoparticles, the solvent is charged with the nanoparticles condensed, and then the solvent is evaporated. It provides a method of charging the nanoparticles, including.
이하 도면을 참조로 하여 본 발명을 보다 상세히 설명한다.Hereinafter, the present invention will be described in more detail with reference to the drawings.
본 발명에 따른 나노입자의 대전 방법은 기존의 나노입자 대전 방법들의 문제점을 해결하기 위해, 나노입자를 표면에 용매가 응축된 상태에서 대전시킨 후 응축된 용매를 증발시켜 제거하는 것을 특징으로 한다.The nanoparticle charging method according to the present invention is characterized by removing the condensed solvent by evaporation after charging the nanoparticles in a state where the solvent is condensed on the surface in order to solve the problems of the conventional nanoparticle charging methods.
본 발명에 따른 나노입자의 대전 과정은 도 4에 개략적으로 나타나 있으며, 구체적으로, (1) 다양한 상태의 나노입자를 증기화된 용매와 혼합하는 단계; (2) 반응 온도를 낮추어 나노입자 표면에 용매를 응축시키는 단계; (3) 용매가 표면에 응축된 상태의 나노입자를 대전시키는 단계; (4) 나노입자 표면에 응축되어 있는 용매를 증발시켜 제거하는 단계를 포함한다.The charging process of the nanoparticles according to the present invention is schematically illustrated in FIG. 4, specifically, (1) mixing nanoparticles of various states with a vaporized solvent; (2) lowering the reaction temperature to condense the solvent on the nanoparticle surface; (3) charging the nanoparticles with the solvent condensed on the surface; (4) evaporating and removing the solvent condensed on the surface of the nanoparticles.
본 발명에서, 나노입자는 수득방법 및 크기에 관계없이 사용될 수 있다.In the present invention, nanoparticles can be used regardless of the method of obtaining and the size.
본 발명에서, 용매로는 응축효율이 좋아 입자의 성장에 유리하고, 증발이 용이하며 인체에 무해한 알콜계 화합물이 사용될 수 있다. 예컨대, 약 120℃에서 증발시켜 40℃에서 응축시켰을 때 입자의 성장효율이 좋은 에틸렌 글리콜이나, 약 35℃에서 증발시켜 10℃에서 응축시켰을 때 입자의 성장효율이 좋은 부탄올이 바람직하게 사용될 수 있다.In the present invention, as the solvent, an alcohol compound having good condensation efficiency, which is advantageous for the growth of particles, and which is easy to evaporate and harmless to human body can be used. For example, ethylene glycol having good particle growth efficiency when evaporated at about 120 ° C. and condensed at 40 ° C., butanol having good particle growth efficiency when evaporated at about 35 ° C. and condensed at 10 ° C. may be preferably used.
본 발명에 따르면, 용매는 예컨대 도 5에 도시된 혼합형 입경 증대기의 가열부에서 증기화된 후 질소와 같은 이송 기체에 의해 이동하여 나노입자와 혼합된다. 이때, 용매의 증기화 온도는 용매의 화학적 성질에 따라 달라질 수 있다.According to the present invention, the solvent is vaporized in the heating section of the mixed particle diameter enhancer shown in FIG. 5, for example, and then moved by a conveying gas such as nitrogen and mixed with the nanoparticles. At this time, the vaporization temperature of the solvent may vary depending on the chemical properties of the solvent.
다음, 나노입자와 증기화된 용매의 혼합물은 증대기의 응축부를 통과하게 되며, 응축부의 온도를 낮추는 경우 나노입자의 표면에 증기화된 용매가 응축된다. 이때, 용매의 응축 온도는 용매의 화학적 성질에 따라 달라질 수 있다.Next, the mixture of the nanoparticles and the vaporized solvent passes through the condenser of the intensifier, and when the temperature of the condenser is lowered, the vaporized solvent condenses on the surface of the nanoparticles. At this time, the condensation temperature of the solvent may vary depending on the chemical properties of the solvent.
표면에 용매가 응축되어 있는 상태의 나노입자는 통상적인 대전기, 예컨대 코로나 대전기, 방사선을 이용한 양극 대전기, 연X-선 대전기 등을 통과하여 대전될 수 있다. 이때, 응축된 용매로 둘러싸인 입자는 전체 크기의 증가로 인해 본래의 입자 크기 상태에서 대전시키는 경우보다 고가로 대전된다.Nanoparticles in a state where the solvent is condensed on the surface may be charged through a conventional charger, such as a corona charger, a cathode charger using radiation, a soft X-ray charger, and the like. At this time, the particles surrounded by the condensed solvent are charged more expensively than the charging in the original particle size state due to the increase in the total size.
대전된 상태의 입자를 히터 등의 가열수단을 사용하여 건조시키는 경우 나노입자 표면에 응축되어 있던 용매가 증발하게 되며, 나노입자는 본래의 나노미터 크기로 복구되면서 전하의 손실없이 고가로 대전된 상태를 유지할 수 있다. When the charged particles are dried using a heating means such as a heater, the solvent condensed on the surface of the nanoparticles is evaporated, and the nanoparticles are restored to their original nanometer size while being charged at high cost without loss of charge. Can be maintained.
이와 같이, 본 발명에 따르면 크기가 매우 작은 나노입자에 대해서도 기존의 다양한 대전방법을 이용하여 손쉽게 고가로 대전시킬 수 있다.As such, according to the present invention, even nanoparticles having a very small size can be easily charged at a high cost using various conventional charging methods.
이하, 본 발명을 하기 실시예에 의거하여 좀더 상세하게 설명하고자 한다. 단, 하기 실시예는 본 발명을 예시하기 위한 것일 뿐 한정하지는 않는다. Hereinafter, the present invention will be described in more detail based on the following examples. However, the following examples are not intended to limit the invention only.
실시예 1Example 1
본 발명에 따른 나노입자의 대전 공정은 도 6에 도시된 시스템을 이용하여 수행될 수 있다. 먼저, 스캔형 정전 입자크기 측정기(40)를 통해 약 27 nm로 측정된 단분산 상태의 구형 금 나노입자를 1.5 slm (standard liter per minute; ℓ/min)의 유량으로 용매와의 접촉을 위한 혼합형 입경 증대기(30)의 혼합부에 도입 하였다. 한편, 에틸렌 글리콜을 증대기(30)의 가열부에서 120℃로 가열하여 증기화시킨 후, 유량계(20)을 통해 유입된 0.352 slm의 질소 가스를 이용하여 혼합부로 이동시켰다. 나노입자와 에틸렌 글리콜의 혼합물은 질소 가스에 의해 증대기(30)의 응축부로 이동하였으며, 이때 응축부의 온도를 40℃로 낮추어 에틸렌 글리콜을 응축시켰다. 응축된 에틸렌 글리콜을 포함하는 나노입자를 코로나 대전기(50)를 통과시킨 후 히터(60)를 통과시켜 에틸렌 글리콜을 증발시켰다. 용매가 증발된 상태의 나노입자에 대한 전기이동도를 측정하기 위해 질소 가스(70)를 이용하여 나노 미분형 정전분급기(nano differential mobility analyzer)(80) 및 파라데이컵 전하량계(faradaycup elecrometer)(100)에 통과시켜 배출하였으며, 증발된 용매는 응축핵 계수기(90)에서 다시 응축시켜 배출하였다. 다음, 배출된 나노 입자의 크기를 다시 스캔형 입자 크기분포 측정기(40)로 측정하였다.The charging process of the nanoparticles according to the present invention can be performed using the system shown in FIG. First, the mixed type for contacting the solvent with the monodisperse spherical gold nanoparticles measured at about 27 nm through a scan type electrostatic
비교예 1Comparative Example 1
27 nm로 측정된 단분산 상태의 구형 나노입자를 혼합형 입경 증대기를 통과시키지 않은 채 바로 코로나 대전기로 대전시키는 것을 제외하고는 실시예 1과 동일한 공정을 수행하였다.The same process as in Example 1 was performed except that the monodispersed spherical nanoparticles measured at 27 nm were charged directly with a corona charger without passing through the mixed particle diameter enhancer.
상기 실시예 1 및 비교예 1에 따라 처리한 나노입자의 전기이동도를 도 7a에 도시하였으며, 그 결과로부터 본 발명의 실시예 1에 따라 대전된 나노입자의 전기 이동도는 0.118 ㎠/Vs로서, 비교예 1(0.002 ㎠/Vs)에 비해 약 60배 증가하였음을 알 수 있다. 즉, 본 발명에 따라 대전처리된 나노입자는 큰 전기이동도를 갖는 것으로부터 상당히 고가로 대전되어 있음을 알 수 있다. The mobility of the nanoparticles treated according to Example 1 and Comparative Example 1 is shown in FIG. 7A, and as a result, the electrical mobility of the nanoparticles charged according to Example 1 of the present invention is 0.118 cm 2 / Vs. , Compared with Comparative Example 1 (0.002 cm 2 / Vs) can be seen that about 60 times increased. That is, it can be seen that the nanoparticles charged according to the present invention are charged at a considerably expensive price from those having a large degree of electrophoretic mobility.
한편, 실시예 1에 따라 처리된 후의 입자 크기를 도 7b에 도시하였으며, 그 결과로부터 본 발명에 따른 대전 공정을 거친 나노입자의 크기분포도는 본래의 입자 크기분포도와 같이 일정하게 유지되어 있음을 알 수 있다.On the other hand, the particle size after the treatment according to Example 1 is shown in Figure 7b, the results show that the size distribution of the nanoparticles subjected to the charging process according to the present invention is kept constant as the original particle size distribution Can be.
본 발명에 따른 대전 방법에 의하면, 입자 크기가 매우 작은 나노 입자에 대해서도 1가 대전이 한계였던 것을 극복하여 고가의 대전이 가능하며, 고가로 대전된 나노입자는 적절한 전기적 힘에 쉽게 반응하므로 용이하게 제어되어 양전자 소자, 차세대 광전자 소자 등의 제조에 유용하게 사용될 수 있다.According to the charging method according to the present invention, expensive charging is possible by overcoming the limitation of monovalent charging even for nanoparticles having a very small particle size, and the expensively charged nanoparticles are easily reacted to an appropriate electrical force. It can be controlled and usefully used in the manufacture of positron devices, next-generation optoelectronic devices, and the like.
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