KR20030052589A - Apparatus for processing waste gas - Google Patents

Abstract

Disclosed is a waste gas treatment apparatus including a heating chamber for heating waste gas to modify chemical properties, and a cooling unit communicating with the heating chamber to cool the purified gas generated from the heating chamber to collect and condensate liquid components contained in the purified gas. . Therefore, there is an advantage in that corrosion of the pipe or the exhaust duct can be prevented by removing a liquid component such as water contained in the exhaust gas discharged from the liquid separator.

Description

Apparatus for processing waste gas

The present invention relates to a waste gas treatment apparatus, and more particularly, by installing a cooling unit at a rear end of a heating chamber or a wet treatment apparatus to remove liquid components such as moisture contained in the purified exhaust gas to prevent corrosion of the exhaust duct. It relates to a waste gas treatment device that can be.

In addition, the present invention relates to a waste gas treatment apparatus that can effectively reduce the amount of waste water discharged by applying a mist nozzle made of water spray in the form of mist to the wet treatment unit.

Semiconductor devices are manufactured through various manufacturing processes such as oxidation, etching, deposition, and photo processes, and these processes are supplied with toxic chemicals and chemical gases. For example, chemical gases such as silane, ammonia, nitric oxide, arsine, pocipine, diboron, boron or trichloride are used.

These chemical gases are so toxic that if they are used in the process and released into the atmosphere, they can have a fatal effect on the human body, cause a fire due to spontaneous ignition or cause environmental problems.

Waste gas used in such a semiconductor manufacturing process should be purified and recycled or discharged, and has been disclosed by the present applicant as a "waste gas treatment device" in patent application No. 2000-64198 (October 31, 2000).

However, according to such a conventional waste gas treatment apparatus, there are various problems.

First, a large amount of water is contained in the final discharged gas, and when introduced into the exhaust duct in this state, condensation may occur and the exhaust duct may be corroded. Moreover, the moisture generated by the condensation and the untreated hydrofluoric acid combine to cause fatal effects on the piping and the exhaust duct.

In addition, by applying a general injection method for the water treatment of waste gas, there is a problem that the amount of waste water is excessively large and the corrosive gas passes through the dust collection efficiency.

Accordingly, it is an object of the present invention to provide a waste gas treatment apparatus capable of preventing corrosion in the exhaust duct.

Another object of the present invention is to provide a waste gas treatment apparatus capable of minimizing and evacuating moisture contained in the purified exhaust gas.

Still another object of the present invention is to provide a waste gas treatment apparatus that can improve the dust collection efficiency of the corrosive gas in the waste gas and reduce the amount of waste water.

Other objects and features of the present invention will become more apparent through the preferred embodiments of the present invention described below.

1 is a block diagram showing a waste gas treatment apparatus according to an embodiment of the present invention.

2 is a block diagram showing a waste gas treatment apparatus according to another embodiment of the present invention.

3 is an embodiment of a cooling unit applied to the present invention.

4 is another embodiment of a cooling unit applied to the present invention.

5 is another embodiment of a cooling unit applied to the present invention.

6 is another embodiment of a cooling unit applied to the present invention.

7 is one embodiment of a liquid separation / cooling unit applied to the present invention.

8 is another embodiment of a liquid separation / cooling unit applied to the present invention.

9 is another embodiment of a liquid separation / cooling unit applied to the present invention.

10 is a block diagram showing a liquid separation / cooling unit installed in multiple stages.

According to one aspect of the invention, the heating chamber for heating the waste gas to modify the chemical properties, the cooling unit in communication with the heating chamber to cool the purified gas generated from the heating chamber to collect the liquid components contained in the purified gas condensation Disclosed is a waste gas treating apparatus comprising a.

According to another aspect of the present invention, a heating chamber for heating a mixed gas mixed with waste gas, an inert gas and air to modify the chemical properties, a wet processing unit in communication with the heating chamber to treat and purify the dust generated in the heating chamber by water, Disclosed is a waste gas treating apparatus including a cooling unit cooling a purified gas generated from a wet treatment unit to collect and condense a liquid component contained in the purified gas.

According to another aspect of the present invention, a wet treatment unit for heating a mixed gas mixed with waste gas, inert gas and air to modify chemical properties by communicating with a heating chamber, and treating and purifying dust generated in the heating chamber by water treatment. And a liquid separation / cooling unit for separating the liquid component contained in the purified gas by buffering the flow rate of the purified gas discharged from the wet processing unit, and cooling the purified gas to collect and condensate the liquid component contained in the purified gas. A waste gas treatment apparatus is disclosed.

The cooling unit includes a cooling pipe installed to surround the pipe through which the refinery gas passes, and the cooling pipe is directly connected to the cooling tank to circulate the coolant, or connected to the cooler to exchange heat with other cooling pipes directly connected to the cooling tank. Coolant is circulated through.

In addition, the cooling unit may include a cooling pipe installed inside the pipe through which the purified gas passes.

Further, preferably the cooling unit is connected to the chiller so that the coolant can be circulated between the chiller and the cooling unit.

The liquid separation / cooling unit according to the embodiment of the present invention is a cyclone-type liquid separator in which purified gas is introduced from the side and discharged to the upper portion, is installed in the liquid separator, and is arranged coaxially with the inner tube and the inner tube to the inner side. It consists of an outer tube to form a closed space between the tube and the cooling water includes a cooling module circulated through the closed space.

According to another embodiment, the liquid separation / cooling unit is a cyclone type liquid separator in which purified gas is introduced from the side and discharged to the upper portion, and a cover is formed on the outer front side of the body of the liquid separator so that a cover is formed to form a sealed space and the cooling water. It includes a cooling module circulated through the closed space.

In addition, according to another embodiment, the liquid separation / cooling unit is installed in the cyclone-type liquid separator and the liquid separator in which the purified gas is introduced from the side and discharged to the upper portion, and is arranged coaxially with the inner tube and the inner tube. And an outer tube that forms a sealed space between the inner tube and the cover is formed to be sealed at a predetermined interval on the outer front surface of the body of the first cooling module and the liquid separator in which the coolant is circulated through the sealed space. It comprises a second cooling module constituting the space and the coolant is circulated through the closed space.

Further, in another embodiment, the liquid separation / cooling unit includes a cyclone-type liquid separator in which purified gas is introduced from the side and discharged to the upper portion, a compressed air supply pipe for supplying compressed air to the body and the body, and hot air for discharging hot air. It includes a vortex tube (vortex tube) consisting of a discharge pipe and a cooling air discharge pipe for discharging the cooling air, and one end is in communication with the cooling air discharge pipe of the vortex tube, the cooling coil is installed inside the liquid separator so that the other end is open.

Preferably, the liquid separator / cooling unit is installed in multiple stages and can substantially increase the passage distance by communicating via a trap.

Preferably, the wet treatment unit may purify the dust generated in the heating chamber by water treatment, and a mist nozzle for spraying water particles having a predetermined size or less in a mist form may be applied.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a waste gas treatment apparatus according to an embodiment of the present invention.

As shown, the heating chamber 20 heats combustible waste gas such as hydrogen or argon generated in a semiconductor manufacturing process, for example, an ion milling process, to modify chemical properties.

The cooling unit 10 according to the present invention communicates with the heating chamber 20 to cool the purified gas generated from the heating chamber 20 to collect and condense the liquid component contained in the purified gas.

The liquid component partially generated in the heating chamber 20 and the liquid component condensed in the cooling unit 10 are collected in the drain tank 30.

In this way, the liquid gas is collected and the purified gas removed is discharged so that no condensation is generated in the exhaust duct and the exhaust pipe, so that the exhaust duct or the exhaust pipe may not be corroded.

2 is a block diagram showing a waste gas treatment apparatus according to another embodiment of the present invention.

In the heating chamber 20, the mixed gas mixed with the waste gas, the inert gas and the air is heated to modify chemical properties to remove toxic and flammable substances.

When the waste gas generated in the manufacturing process such as oxidation, etching, deposition, and photo process is heated, dust is generated and the like is treated by the water treatment unit 40 connected to the heating chamber 20 to remove dust and the like.

Since water spray plays a very important role in dust collection efficiency and waste gas treatment, it is necessary to increase the contact area with waste gas for water treatment of waste gas. In the present invention, by applying the mist nozzle of the direct pressurization method to the wet treatment unit to generate water particles having a diameter of 50 microns or less, the contact area can be increased to greatly reduce the amount of use, for example, to discharge wastewater at about several hundred cc per minute. Can be minimized

The cooling unit 10 communicates with the wet processing unit 40 to cool the purified gas generated from the wet processing unit 20 to collect and condense the liquid component contained in the purified gas.

The liquid component partially generated in the heating chamber 20, the liquid component mixed with the dust in the wet processing unit 40 and the condensed liquid component in the cooling unit 10 are collected into the drain tank 30.

Hereinafter, a cooling unit applied to the present invention will be described in detail.

Referring to FIG. 3, the cooling unit 10 includes a cooling pipe 12 installed to surround a pipe communicating with the heating chamber 20 or the wet processing unit 40 from the outside.

Cooling water is circulated in the cooling pipe 12, in order to supply the cooling water, the cooling pipe 12 may be connected to a suitable cooling water supply device or to a chiller or the like.

In addition, as shown in FIG. 4, the cooling pipe 12 may be connected to the heat exchanger 15 to allow the cooling water to circulate through heat exchange with another cooling pipe 16 directly connected to a cooling tank (not shown). have.

Referring to FIG. 5, the cooling unit 10 includes a cooling pipe 12 installed inside the pipe communicating with the heating chamber 20 or the wet processing unit 40.

Also in this manner, as described above, the cooling pipe 12 is directly connected to the cooling tank to circulate the cooling water, or as shown in FIG. 6, by connecting the cooling pipe 12 to the heat exchanger 15. Cooling water may be circulated through heat exchange with another cooling pipe 16 directly connected to a cooling tank (not shown).

Waste gas treatment apparatus according to another embodiment of the present invention is to buffer the flow rate of the purified gas discharged from the wet treatment unit 40 to separate the liquid component contained in the purified gas, and to cool the purified gas contained in the purified gas And a liquid separation / cooling unit 100 for collecting and condensing the liquid component.

Referring to FIG. 7, the liquid separation / cooling unit 100 according to an embodiment includes a cyclone-type liquid separator 110 through which purified gas is introduced from a side and discharged to an upper portion thereof. And an inner tube 140 and an outer tube 120 arranged coaxially with the inner tube to form an enclosed space 130 between the inner tube and the enclosed space 130 of the cooling water. It includes a cooling module circulated through.

The liquid separator 110 is preferably composed of a buffer having a cross-sectional area and a capacity large enough to reduce the flow rate of the incoming gas, and is preferably configured to have an eccentric inlet so as to obtain a cyclone effect in order to purify the gas more effectively. .

Conical drain portion 116 and the cylindrical body is configured to have an integral shape in order to reduce the flow rate of the gas to be introduced while obtaining a cyclone effect to the liquid component contained in the gas, the heating chamber 20 on the side wall of the body Or an inlet 112 through which the gas is introduced in combination with the wet processing unit 40, and an outlet 114 is formed in the upper part so as to communicate with the inside of the inner tube 140.

Referring to FIG. 8, the liquid separation / cooling unit 100 according to another embodiment includes a cyclone-type liquid separator 110 in which purified gas is introduced from a side and discharged upward, and an outer side of a body of the liquid separator 110. The cover 150 is formed at a predetermined interval on the front surface to form a sealed space 155 therebetween, and includes a cooling module in which the coolant is circulated through the sealed space 155.

Therefore, since the inner front surface of the liquid separator 110 is cooled by the cooling water, the cooling area can be increased to more effectively collect and condense the liquid component in the purified gas.

Meanwhile, a combination of the embodiments according to FIGS. 7 and 8 combines the first cooling module having a double pipe structure in which cooling water is circulated therebetween, and a cover is formed on the outer front surface of the body of the liquid separator so that a cover is formed at a predetermined interval. And a second cooling module in which the cooling water is circulated through the sealed space.

Referring to FIG. 9, another liquid separation / cooling unit is shown in another embodiment.

According to this embodiment, in the cyclone-type liquid separator 110, the purified gas is drawn in from the side and discharged to the top, the cooling unit is a body 210, compressed air supply pipe 250 for supplying compressed air to the body, hot A vortex tube (200) consisting of a hot air discharge pipe 230 for discharging air and a cooling air discharge pipe 220 for discharging cooling air (vortex tube; 200), and one end is in communication with the cooling air discharge pipe 220 of the vortex tube, the other end It includes a cooling coil 240 installed inside the liquid separator 110 to be opened.

Referring to FIG. 10, the liquid separator / cooling unit is installed in multiple stages and substantially increases the passage distance by communicating through a trap 300 such as a U-trap. By increasing the passage distance in this way there is an advantage that can collect more liquid components before being discharged into the exhaust duct.

Hereinafter, the operation of the waste gas treatment apparatus of the present invention having the above structure will be described.

First, the waste gas may be mixed with an inert gas and air to be supplied to the heating chamber 20 or only the waste gas itself may be supplied to the heating chamber 20 because the types and characteristics of the waste gas generated according to the manufacturing process are different. . The waste gas can be provided to the heating chamber after being premixed in the manifold with the inert gas and air. The heating chamber 20 converts the chemical propensity by heating the introduced waste gas.

The gas discharged from the heating chamber 20 may or may not include dust, such as powder, depending on the type of waste gas, and if it contains dust, it is connected to the cooling unit 10 via the wet processing unit 40. do.

The purified gas through this process is cooled in the cooling unit 10, and as a result, liquid components such as moisture contained in the purified gas are collected and condensed. The condensed liquid component is collected in the drain tank 30.

In this way, by removing the liquid component such as moisture contained in the exhaust gas, it is possible to prevent corrosion of the pipe, exhaust duct and the like.

Meanwhile, according to another embodiment of the present invention, the purified gas is introduced into the liquid separation / cooling unit 100 so that the heavy mass liquid component contained in the waste gas is drained downward due to the instantaneous decrease in flow rate. In addition, the gas purified by the various cooling units configured in the liquid separator 110 is cooled, and the liquid component contained therein is collected and condensed inside the liquid separator 110.

In addition, it is possible to increase the trapping effect of the water by substantially increasing the passing distance of the purified gas using a U-trap or the like.

Accordingly, the exhaust gas discharged from the exhaust duct contains little moisture, so that corrosion does not occur in the exhaust duct and the piping.

Although the above has been described with reference to the preferred embodiment of the present invention, various modifications are possible at the level of those skilled in the art.

As described above, according to the present invention, a cooling unit is installed at the rear end of the heating chamber or the wet processing unit to remove liquid components such as moisture contained in the exhaust gas discharged from the heating chamber or the wet processing unit. There is an advantage that can prevent the corrosion.

In addition, when the dust generated in the heating chamber is purified in the wet treatment unit, by spraying fine water particles by the mist nozzle can improve the dust collection efficiency, there is an advantage that can reduce the amount of waste water generated thereby.

Further, by effectively collecting liquid components such as water contained in the exhaust gas purified by the cooling units installed in multiple stages, there is an effect that the exhaust gas finally discharged contains little moisture or the like.

Claims (16)

A heating chamber for heating the waste gas to modify the chemical properties; And a cooling unit communicating with the heating chamber to cool the purified gas generated from the heated chamber to collect and condense the liquid component contained in the purified gas. A heating chamber for heating the mixed gas in which the waste gas, the inert gas, and the air are mixed to modify the chemical properties; A wet treatment unit communicating with the heating chamber and treating and refining the dust generated in the heating chamber; And a cooling unit for cooling the purified gas generated from the wet treatment unit to collect and condense the liquid components contained in the purified gas. The waste gas treating apparatus according to claim 1 or 2, wherein the cooling unit includes a cooling pipe installed to surround a pipe through which the purified gas passes from the outside. The waste gas treating apparatus of claim 3, wherein the cooling pipe is directly connected to a cooling tank to circulate the cooling water. The waste gas treating apparatus of claim 3, wherein the cooling pipe is connected to a cooler to circulate the cooling water through heat exchange with another cooling pipe directly connected to the cooling tank. The waste gas treating apparatus according to claim 1 or 2, wherein the cooling unit includes a cooling pipe installed inside the pipe through which the purified gas passes. The waste gas treating apparatus of claim 6, wherein the cooling pipe is directly connected to a cooling tank to circulate the cooling water. The waste gas treating apparatus of claim 6, wherein the cooling pipe is connected to a cooler to circulate the cooling water through heat exchange with another cooling pipe directly connected to the cooling tank. The waste gas treating apparatus of claim 1 or 2, wherein the cooling unit is connected to a chiller so that cooling water is circulated between the chiller and the cooling unit. A heating chamber for heating the mixed gas in which the waste gas, the inert gas, and the air are mixed to modify the chemical properties; A wet treatment unit communicating with the heating chamber and treating and refining the dust generated in the heating chamber; The liquid separation / cooling unit for separating the liquid component contained in the purified gas by buffering the flow rate of the purified gas discharged from the wet processing unit, and cooling the purified gas to collect and condensate the liquid component contained in the purified gas. Waste gas processing apparatus comprising. The method of claim 10, wherein the liquid separation / cooling unit A cyclone-type liquid separator in which the purified gas is drawn in from the side and discharged to the upper portion; Installed inside the liquid separator, the inner tube and the outer tube arranged coaxially with the inner tube to form a closed space between the inner tube, the cooling water is circulated through the closed space Waste gas treatment device comprising a module. The method of claim 10, wherein the liquid separation / cooling unit A cyclone-type liquid separator in which the purified gas is drawn in from the side and discharged to the upper portion; Cover is formed on the outer front surface of the body of the liquid separator to form a closed space to form a sealed space and the cooling gas treatment device including a cooling module circulated through the sealed space. The method of claim 10, wherein the liquid separation / cooling unit A cyclone-type liquid separator in which the purified gas is drawn in from the side and discharged to the upper portion; It is installed in the liquid separator, the inner tube and the outer tube which is arranged coaxially with the inner tube to form a closed space between the inner tube, the cooling water is circulated through the closed space 1 cooling module; And A cover is formed on the outer front surface of the body of the liquid separator to form a closed space to form a sealed space and the second gas cooling device comprising a cooling module circulated through the sealed space. The method of claim 10, wherein the liquid separation / cooling unit A cyclone-type liquid separator in which the purified gas is drawn in from the side and discharged to the upper portion; A vortex tube comprising a body, a compressed air supply pipe for supplying compressed air to the body, a hot air discharge pipe for discharging hot air, and a cooling air discharge pipe for discharging cooling air; And a cooling coil having one end communicating with the cooling air discharge tube of the vortex tube and installed inside the liquid separator so that the other end thereof is opened. The waste gas treatment apparatus according to claim 10, wherein the liquid separator / cooling unit is installed in multiple stages and substantially increases a passage distance by communicating through a trap. A heating chamber for heating the mixed gas in which the waste gas, the inert gas, and the air are mixed to modify the chemical properties; A wet treatment unit communicating with the heating chamber to purify the dust generated in the heating chamber by water treatment, and applying a mist nozzle for spraying water particles having a predetermined size or less in a mist form; And a cooling unit for cooling the purified gas generated from the wet treatment unit to collect and condense the liquid components contained in the purified gas.