KR20030002582A - Metal sealing check valve - Google Patents
Metal sealing check valve Download PDFInfo
- Publication number
- KR20030002582A KR20030002582A KR1020010038248A KR20010038248A KR20030002582A KR 20030002582 A KR20030002582 A KR 20030002582A KR 1020010038248 A KR1020010038248 A KR 1020010038248A KR 20010038248 A KR20010038248 A KR 20010038248A KR 20030002582 A KR20030002582 A KR 20030002582A
- Authority
- KR
- South Korea
- Prior art keywords
- check valve
- head
- poppet
- parallel
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 229910052751 metal Inorganic materials 0.000 title description 3
- 239000002184 metal Substances 0.000 title description 3
- 238000007789 sealing Methods 0.000 title 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 8
- 239000011651 chromium Substances 0.000 claims abstract description 8
- 230000007797 corrosion Effects 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 7
- 230000003746 surface roughness Effects 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 238000005299 abrasion Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 244000145845 chattering Species 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/021—Check valves with guided rigid valve members the valve member being a movable body around which the medium flows when the valve is open
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0209—Check valves or pivoted valves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Check Valves (AREA)
Abstract
본 발명은 체크밸브에 관하여, F패럴(2) 및 B패럴(3)을 수납한 너트(1), 헤드결속구(4)를 통하여 상기 너트(1)에 결착되는 헤드부(5), 스프링(8)의 탄력에 의해 전,후 운동을 하므로서 상기 헤드부(5)의 후단과 접촉 혹은 분리되는 포핏(7) 및 이들을 외부에서 수납하면서 상기 헤드부(5)와 나사 결합되는 몸체부(10)로 구성된 체크밸브에 있어서, 상기 헤드부(5)의 후단과 포핏(7)이 맞닿는 접촉면(11)을 가공함에 있어 가공시 발생하는 가공 변질층이나 오일, 칩 잔류물, 소재 자체의 결함인 비금속 개재물 등을 원천적으로 제거하고 안정된 크롬피막을 형성하여 내마모성을 향상시키면서 뛰어난 표면조도에 의한 표면장력 현상으로 기밀성을 유지하고 밀착성 및 내열·내압강도를 개선한 고내식성의 체크밸브에 관한 것이다.The present invention relates to a check valve, a nut (1) accommodating the F parallel (2) and the B parallel (3), a head portion (5), which is fastened to the nut (1) through the head fastener (4), a spring The poppet 7 which is contacted or separated from the rear end of the head part 5 by the elasticity of the head 8 and the body part 10 which is screwed with the head part 5 while receiving them from the outside. ) Is a check valve composed of), which is a defect in processing deterioration layer, oil, chip residue, material itself which occurs during processing in processing the contact surface 11 where the rear end of the head portion 5 and the poppet 7 abut. The present invention relates to a high corrosion resistance check valve that removes non-metallic inclusions, forms a stable chromium film, improves abrasion resistance, maintains airtightness by surface tension due to excellent surface roughness, and improves adhesion and heat resistance and pressure resistance.
Description
본 발명은 체크밸브에 관한 것으로, 좀더 상세하게 설명하면, F패럴 및 B패럴을 수납한 너트, 헤드결속구를 통하여 상기 너트에 결착되는 헤드부, 스프링의 탄력에 의해 전,후 운동을 하므로서 상기 헤드부의 후단과 접촉 혹은 분리되는 포핏 및 이들을 외부에서 수납하면서 상기 헤드부와 나사 결합되는 몸체부로 구성된 체크밸브에 있어서, 상기 헤드부의 후단과 포핏이 맞닿는 접촉면을 가공함에 있어 가공시 발생하는 가공 변질층이나 오일, 칩 잔류물, 소재 자체의 결함인 비금속 개재물 등을 원천적으로 제거하고 안정된 크롬피막을 형성하여 내마모성을 향상시키면서 뛰어난 표면조도에 의한 표면장력 현상으로 기밀성을 유지하고 밀착성 및 내열·내압강도를 개선한 고내식성의 체크밸브에 관한 것이다.The present invention relates to a check valve, and in more detail, the nut containing the F and B parallel, the head portion is fastened to the nut through the head fastener, the front and rear movement by the elasticity of the spring A check valve composed of a poppet contacting or separating with a rear end of a head and a body part screwed to the head while accommodating them from the outside, wherein the altered layer formed during processing in processing the contact surface where the rear end of the head comes into contact with the poppet It removes oil, chip residue, and non-metallic inclusions, which are defects of the material itself, and forms a stable chromium film to improve abrasion resistance while maintaining airtightness with surface tension due to excellent surface roughness, and improving adhesion and heat and pressure resistance. An improved high corrosion resistance check valve.
일반적으로 체크밸브는 유체를 일 방향으로만 이동시키도록 유로가 구성된 밸브로서, 유체의 압력에 따라 스프링의 장력으로 인하여 유체를 일정한 방향으로 이동시키고 역류를 방지하고 있다.In general, the check valve is a valve configured to move the fluid in only one direction, and moves the fluid in a constant direction and prevents backflow due to the tension of the spring in accordance with the pressure of the fluid.
예를 들면, 반도체 생산공정에서 핵심장비인 CVD 등에는 순도 99.999999 이상의 불소나 염소계열의 가스를 사용하여 세정 등을 하게 되는데, 이때 초순도 가스를 제어하는 체크밸브는 고 청정성을 유지할 수 있는 소재로 이루어져야 하고 초정밀 가공방법에 의해 생산되어야 하기에 최첨단 부품소재 가공기술을 필요로 한다.For example, CVD, which is a key equipment in the semiconductor production process, uses fluorine or chlorine-based gas with a purity of 99.999999 or higher. At this time, a check valve that controls ultra-pure gas is a material that can maintain high cleanliness. It needs to be made and manufactured by ultra-precision machining methods, so it requires cutting-edge component processing technology.
또한, 불소나 염소계열의 가스는 부식성이 강한 특성을 갖고 있고, 이러한 부식성은 고온에서 보다 강한 특성을 나타내게 된다.In addition, fluorine or chlorine-based gas has a strong corrosive property, and such a corrosive property is stronger at high temperatures.
따라서, 이러한 유체를 제어할 수 있는 장치는 내부식성 및 내마모성이 뛰어나야 하지만 현재 주로 사용되고 있는 PTFE 및 폴리머류의 제품들은 내부식성은 뛰어나지만 고온·고압에서는 취약해지는 단점이 있기에 고압의 유체나 기체를 제어하는데 어려움이 많다.Therefore, the device capable of controlling such a fluid should be excellent in corrosion resistance and abrasion resistance, but the products of PTFE and polymers which are currently used are excellent in corrosion resistance but weak at high temperature and high pressure. There is a lot of difficulty.
한편, 공개실용신안공보 제1998-22956호(1998. 7. 25)에는 플런저에 밀착되는 실리콘링에 외륜으로 지지되는 판막 및 판막에 유량분산구멍을 설치한 체크밸브가 개시되어 있다.On the other hand, Korean Utility Model Publication No. 1998-22956 (July 25, 1998) discloses a check valve in which a valve and a flow rate distribution hole are provided in a valve supported by an outer ring on a silicon ring in close contact with a plunger.
도3 및 도4는 상기 공개실용신안공보에 개시된 체크밸브의 분해 사시도와 조립 단면도를 각각 나타내고 있다.3 and 4 show an exploded perspective view and an assembled sectional view of the check valve disclosed in the above-mentioned Utility Model Publication.
도면에서, 상기 체크밸브는, 유량 주입관(22') 및 배출관(23'), 그리고 홈(24)에 결합되는 스프링크립(25)을 각각 구비하고, 상하로 분리되도록 원통형 하우징(22)(23)내에 스프링(26)으로 가압되는 플런저(27) 및 이 플런저(27)의 개폐면에 대응되는 실리콘링(21)을 구비하며, 이 실리콘링(21)의 중심유로를 조성하는 내륜(28) 및 판막으로 지지되는 외륜(29)으로 구성되어 있다.In the figure, the check valve, each having a flow rate injection pipe 22 'and discharge pipe 23' and a spring creep 25 coupled to the groove 24, the cylindrical housing 22 ( 23 is provided with a plunger 27 pressurized by a spring 26 and a silicon ring 21 corresponding to the opening and closing surface of the plunger 27, and an inner ring 28 forming a central flow path of the silicon ring 21. And outer ring 29 supported by the valve.
즉, 일반적인 체크밸브의 구조에, 중심유로를 조성하는 내륜(28) 및 판막으로 지지되는 외륜(29)을 갖는 실리콘링(21)을 삽입하므로서, 밸브의 개폐동작이 정확하게 이루어 지고, 유체의 정압 발생시 또는 정압이 부압으로 바뀔 때 실리콘링(21)의 채터링 및 소음발생을 방지하고 있다.That is, by inserting the silicon ring 21 having the inner ring 28 forming the central flow path and the outer ring 29 supported by the valve into the structure of the general check valve, the opening and closing operation of the valve is made accurate and the static pressure of the fluid At the time of occurrence or when the positive pressure changes to negative pressure, the chattering and noise generation of the silicon ring 21 are prevented.
그러나, 이러한 구조는 소정의 실리콘링(21)을 삽입하므로서 밸브의 개폐 정확도와 소음발생의 문제는 어느 정도 개선되었다고 할 수 있으나, 다른 패킹부재와 같이, 사용이 계속됨에 따라 상기 실리콘링(21)이 점차 마모되고, 결국은 플런저(27)와 유량 주입관(22')이 맞닿아 그 사이로 누수가 발생하여 역류를 방지하고자 하는 체크밸브의 역할을 수행할 수 없게 된다.However, this structure can be said that the problem of opening and closing accuracy and noise generation of the valve by inserting a predetermined silicon ring 21 to some extent, but, like other packing members, the silicon ring 21 as the use continues. This gradually wears out, and eventually, the plunger 27 and the flow inlet pipe 22 ′ come into contact with each other and leaks occur between the plungers 27 and the flow of the check valve to prevent backflow.
따라서, 본 발명에서는 상기 종래의 문제점을 개선하고자 하는 것으로, 본 발명의 목적은, F패럴 및 B패럴을 수납한 너트, 헤드결속구를 통하여 상기 너트에 결착되는 헤드부, 스프링의 탄력에 의해 전,후 운동을 하므로서 상기 헤드부의 후단과 접촉 혹은 분리되는 포핏 및 이들을 외부에서 수납하면서 상기 헤드부와 나사 결합되는 몸체부로 구성된 체크밸브에 있어서, 상기 헤드부의 후단과 포핏이 맞닿는 접촉면을 가공함에 있어 가공시 발생하는 가공 변질층이나 오일, 칩 잔류물, 소재 자체의 결함인 비금속 개재물 등을 원천적으로 제거하고 안정된 크롬피막을 형성하여 내마모성을 향상시키면서 뛰어난 표면조도에 의한 표면장력 현상으로 기밀성을 유지하고 밀착성 및 내열·내압강도를 개선한 고내식성의 체크밸브를 제공하는데 있다.Therefore, the present invention is to improve the conventional problems, the object of the present invention, the nut is accommodated by the elasticity of the spring, the head which is bound to the nut through the head, fastening the F-parallel and B-parallel, the head fastener. In the check valve consisting of a poppet which is in contact with or separated from the rear end of the head portion during the post-movement, and a body portion that is screwed to the head portion while storing them externally, the processing in processing the contact surface that the rear end and the poppet abuts the head portion It removes the deterioration layer, oil, chip residue, and non-metallic inclusions, which are defects in the material itself, and forms a stable chromium film to improve wear resistance while maintaining airtightness and adhesion by surface tension due to excellent surface roughness. And high corrosion resistance check valves with improved heat and pressure resistance.
도1은 본 발명의 체크밸브의 분해 사시도1 is an exploded perspective view of a check valve of the present invention
도2는 본 발명의 체크밸브의 조립 단면도Figure 2 is an assembled sectional view of the check valve of the present invention
도3은 종래 체크밸브의 1예의 분해 사시도Figure 3 is an exploded perspective view of one example of a conventional check valve
도4는 도3의 조립 단면도4 is an assembly cross-sectional view of FIG.
※ 도면중의 주요 부분에 대한 부호의 설명※ Explanation of code about main part in drawing
1 : 너트 2 : F패럴 3 : B패럴1 Nut 2 F Parallel 3 B Parallel
4 : 헤드결속구 5 : 헤드부 6 : 헤드나사부4 head binding port 5 head portion 6 head screw portion
7 : 포핏 8 : 스프링 9 : 몸체나사부7 poppet 8 spring 9 body thread
10 : 몸체부 11 : 접촉면 12 : 몸체결속구10 body portion 11 contact surface 12 body binding port
이하, 첨부한 도면을 통해 본 발명의 구성을 좀더 상세히 설명한다.Hereinafter, the configuration of the present invention through the accompanying drawings in more detail.
도1은 본 발명의 체크밸브의 분해 사시도이다.1 is an exploded perspective view of a check valve of the present invention.
도면에서, 너트(1)는 F패럴(2) 및 B패럴(3)을 수납하고, 여기에 헤드결속구(4)를 통하여 헤드나사부(6)를 갖는 헤드부(5)가 결착된다.In the figure, the nut 1 houses the F-parallel 2 and the B-parallel 3, to which the head portion 5 having the head screw portion 6 is attached via the head fastener 4.
그리고, 그 외곽으로는 모체나사부(9)를 갖춘 몸체부(10)가 상기 헤드부(5)의 헤드나사부(6)와 나사 결합되어 일체화되고, 그 내부로는, 유로 내에서 전,후 운동을 하게 되는 포핏(7)과 이 포핏(7)의 운동을 유도하는 스프링(8)이 내장되어 있다.Then, the outer body portion 10 having the mother screw portion 9 is integrally screwed with the head screw portion 6 of the head portion 5, and the inside and the front, rear movement in the flow path The poppet (7) and the spring (8) for inducing the movement of the poppet (7) is built.
도면중 미설명부호 12는 외부와 결속이 가능한 몸체결속구이다.In the drawings, reference numeral 12 denotes a body fastener that can be engaged with the outside.
도2는 본 발명의 체크밸브의 조립 단면도로서, 유체가 A에서 B로 흐르는 경우, 유체는 우선 너트(1), F패럴(2) 및 B패럴(3)의 내부를 통과하여 헤드부(5)의 내부로 흐른 다음, 포핏(7)을 가압하게 된다.Fig. 2 is an assembled cross sectional view of the check valve of the present invention, in which when the fluid flows from A to B, the fluid first passes through the inside of the nut 1, the F parallel 2 and the B parallel 3, and thus the head 5 ) And then presses the poppet (7).
그렇게 되면, 상기 포핏(7)을 지탱하고 있는 스프링(8)이 수축되게 되고, 따라서 접촉면(11)이 열리고 이를 통하여 유체가 B방향으로 흘러 나가게 된다.This causes the spring 8 holding the poppet 7 to contract, thus opening the contact surface 11 through which the fluid flows in the B direction.
그 다음, 유체의 이송을 중단할 때는 수축된 스프링(8)이 이완되면서 포핏(7)이 다시 헤드부(5)의 후단과 접촉 고정되므로서 유체의 역류를 방지하게 되는 것이다.Then, when the transfer of the fluid is stopped, the retracted spring 8 is relaxed while the poppet 7 is again fixed in contact with the rear end of the head 5 to prevent the back flow of the fluid.
여기서, 본 발명의 체크밸브는 상기 접촉면(11)을 가공하는 것이 특징으로, 가공시 발생하는 가공 변질층이나 오일, 칩 잔류물, 소재 자체의 결함인 비금속 개재물 등을 원천적으로 제거하고 안정된 크롬피막을 형성하여 내마모성을 향상시키면서 뛰어난 표면조도에 의한 표면장력 현상으로 기밀성을 유지하고 밀착성 및 내열·내압강도를 개선하고 있다.Here, the check valve of the present invention is characterized in that the processing of the contact surface 11, and removes the processing deterioration layer, oil, chip residue, non-metallic inclusions, such as defects in the material itself generated during processing, and stable chromium coating While improving the wear resistance by maintaining the surface tension phenomenon by the excellent surface roughness to maintain the airtightness, and improve the adhesion and heat resistance and pressure resistance.
즉, 헤드부(5)의 후단과 포핏(7)이 맞닿는 접촉면(11)을 크롬피막을 형성하는 전해처리를 하므로써, 내부식성 및 내마모성이 우수하고, 금속 소재간의 밀착성에 의한 기밀작용으로 고온에서도 매우 안정적인 유체조절 능력을 갖게 된다. 이때, 가공면은 원소재의 물성에 비해 100배 이상의 내구성을 갖추게 된다.That is, the electrolytic treatment for forming the chromium film on the contact surface 11 where the rear end of the head portion 5 and the poppet 7 abuts is excellent in corrosion resistance and abrasion resistance, and the airtight action due to the adhesion between the metal materials enables high temperature. Very stable fluid control. At this time, the processed surface is 100 times more durable than the physical properties of the raw material.
이와 같이 크롬피막을 형성하는 전해처리를 하게 되면 표면의 조도가 Rmax 0.1까지도 가공이 가능하기에 두 금속간의 접촉면은 표면장력 현상에 의해 완벽한 밀폐성과 기밀성이 보장되며, 기존의 실리콘이나 고무패킹, 혹은 기타 밀봉재에 비해 성능이 우수하고 실용적인 체크밸브를 형성할 수 있게 된다.In this way, the electrolytic treatment to form the chromium film enables the surface roughness to be processed up to Rmax 0.1, so that the contact surface between the two metals is completely sealed and airtight due to the surface tension phenomenon. It is possible to form a check valve that is superior in performance to other seals and is practical.
이와 같이 본 발명은 금속접촉면에 크롬피막이 형성되고 균질한 표면조도가 유지되는 특수한 가공 기술을 적용하므로써, 기존의 패킹이나 밀봉재에 비해 내구성을 개선함은 물론, 표면장력 현상으로 기밀성을 확보하면서 밀착성 및 내열·내압강도를 개선한 고내식성의 체크밸브로서 유체 및 기체를 제어하는 각종 밸브에의 이용 및 응용이 가능하다 하겠다.As described above, the present invention applies a special processing technology in which a chromium film is formed on the metal contact surface and maintains a uniform surface roughness, thereby improving the durability compared to the existing packing or sealing material, as well as securing the airtightness by the surface tension phenomenon, As a high corrosion resistance check valve with improved heat and pressure resistance, it can be used and applied to various valves for controlling fluid and gas.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010038248A KR20030002582A (en) | 2001-06-29 | 2001-06-29 | Metal sealing check valve |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010038248A KR20030002582A (en) | 2001-06-29 | 2001-06-29 | Metal sealing check valve |
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|---|---|
| KR20030002582A true KR20030002582A (en) | 2003-01-09 |
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|---|---|---|---|
| KR1020010038248A Ceased KR20030002582A (en) | 2001-06-29 | 2001-06-29 | Metal sealing check valve |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920006544A (en) * | 1990-09-04 | 1992-04-27 | 시미다 마고또 | Anode for chromium plating, a manufacturing method thereof, and a chromium plating electrolysis method using a chromium plating electrolysis apparatus and an anode |
| JPH06300150A (en) * | 1993-02-18 | 1994-10-28 | Miyano:Kk | Pipe fitting with valve, check valve and check valve structure |
| KR200161210Y1 (en) * | 1996-10-30 | 1999-11-15 | 신상욱 | Check valve |
| KR20010012119A (en) * | 1997-04-26 | 2001-02-15 | 마싸 앤 피네간 | Valve metal compositions and method |
| KR100380925B1 (en) * | 1998-01-23 | 2003-04-21 | 마츠시타 덴끼 산교 가부시키가이샤 | Metal electrode material, capacitor using metal electrode material, and method of manufacture |
-
2001
- 2001-06-29 KR KR1020010038248A patent/KR20030002582A/en not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920006544A (en) * | 1990-09-04 | 1992-04-27 | 시미다 마고또 | Anode for chromium plating, a manufacturing method thereof, and a chromium plating electrolysis method using a chromium plating electrolysis apparatus and an anode |
| JPH06300150A (en) * | 1993-02-18 | 1994-10-28 | Miyano:Kk | Pipe fitting with valve, check valve and check valve structure |
| KR200161210Y1 (en) * | 1996-10-30 | 1999-11-15 | 신상욱 | Check valve |
| KR20010012119A (en) * | 1997-04-26 | 2001-02-15 | 마싸 앤 피네간 | Valve metal compositions and method |
| KR100380925B1 (en) * | 1998-01-23 | 2003-04-21 | 마츠시타 덴끼 산교 가부시키가이샤 | Metal electrode material, capacitor using metal electrode material, and method of manufacture |
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