KR19990059984A - Manufacturing apparatus of liquid crystal display device - Google Patents

Abstract

In the preliminary dryer in which the alignment film-coated substrate is placed in parallel with the hot plate and heated to evaporate the solvent of the alignment film, the deionizer is placed in parallel with the hot plate while being placed in the same plane as the vertical edge of the hot plate. At this time, nitrogen gas is injected in the deionizer within an angle of -10 ° to 40 ° in a direction parallel to the hot plate.

In the preliminary dryer having such a constitution, nitrogen injected from the deionizer does not directly reach the substrate and is present as an airflow to deionize, thereby preventing staining of dry stains on the substrate and effectively suppressing static electricity.

Description

Manufacturing apparatus of liquid crystal display device

The present invention relates to a method for forming an alignment film of a liquid crystal display device.

The liquid crystal display device is largely manufactured through a transistor process, a color filter process, and a liquid crystal process.

Among them, the liquid crystal process is performed in the order of assembling the upper and lower substrates and injecting the liquid crystal through an alignment film forming process, a rubbing process, and a post-rubbing cleaning process. In the conventional simple matrix type liquid crystal display device, polyamic acid ( polyamic acid), but as thin-film transistors are used as driving devices, polyimide systems that are insensitive to temperature have been used instead of polyamic acid, which requires high temperatures, and now printability, adhesion, afterimage, optical Low temperature polyamic acid is used, which is excellent in terms of defective rate due to leaks and pinholes. A general method of forming an alignment layer is as follows.

First, the polyamic acid solution is applied onto the washed substrate of the liquid crystal display, and then prebaked to evaporate the solvent. At this time, the drying method of the preliminary dryer may be a hot plate method or a chamber method. In general, preliminary drying is performed at about 40 to 70 ° C. while gradually increasing the temperature in order to flatten the alignment film. Next, the pre-dried film is hard bake to form a stable polyimide film, and then a rubbing process is performed.

In the above method, the alignment film is printed by contacting the printing plate, which is a resin plate, with the substrate. In such a printing method and a drying method in a hot plate of the preliminary dryer, the substrate is susceptible to static electricity, resulting in streaks of the printing process. However, dry stains may occur during the preliminary drying process, resulting in poor alignment of the liquid crystal and poor quality of the thin film transistor due to static electricity.

Therefore, in order to suppress the generation of static electricity, a deionizer is attached to a device for printing an alignment layer and a pre-dryer. In general, the deionizer discharges nitrogen molecules toward a substrate to deionize the substrate. Suppress

Injecting nitrogen molecules directly to the substrate increases the effect of suppressing static electricity of the substrate, but the pre-drying of the substrate becomes non-uniform, so that the uniform staining technique has a great effect on the generation of dry stains. Incidence increases

An object of the present invention is to provide a method for forming an alignment film that can reduce dry spots.

1 is a perspective view showing a pre-drying unit according to an embodiment of the present invention.

In order to solve this problem, the present invention forms a deionizer injecting nitrogen molecules in a predrying process in parallel with the substrate. In addition, the injection angle of nitrogen injected in parallel with the substrate is in the range of -10 ° to -45 °.

Then, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the embodiments.

FIG. 1 is a perspective view illustrating a predrying unit according to an embodiment of the present invention, and a method of spraying a deionizer in a predrying process will be described with reference to FIG. 1.

The hot plate 100 is formed in the preliminary dryer. The substrate is placed in parallel on the hot plate 100, wherein an air layer is formed between the hot plate 100 and the substrate. Place the deionizer on the same plane as the longitudinal edges of each hot plate, parallel to the hot plate. In the deionizer, nitrogen is injected parallel to the substrate, with the spray angle set at an angle in the range of -10 ° to -45 °.

Nitrogen injected in such a direction is formed by a flowing air stream which does not directly contact the substrate, and the substrate is deionized by the air stream, so that dry spots generated during deionization can be suppressed.

As mentioned above, deionization of the alignment film by the flowing air stream rather than by direct nitrogen injection occurs, thereby optimizing the static suppression effect and maximizing uniform predrying of the alignment film.

Claims (4)

A hot plate for evaporating the solvent of the alignment film applied by the applicator, Preliminary dryer comprising a deionizer formed in parallel with the hot plate. In claim 1, The deionizer is a pre-dryer formed on the same plane as the vertical edge of the hot plate. In claim 2, The deionizer is a pre-dryer for injecting nitrogen parallel to the hot plate. In claim 3, The nitrogen is a pre-dryer is injected in an angle of -10 ° to 40 °.