KR19980073499A - Fe-based amorphous soft magnetic material and manufacturing method thereof - Google Patents
Fe-based amorphous soft magnetic material and manufacturing method thereof Download PDFInfo
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Abstract
본 발명은 Fe 계 비정질 연자성재료 및 그 제조방법에 관한 것으로, 기존의 Fe-Zr-B 계 연자성 비정질합금에 Fe 에 고용되지 않는 비고용 원소를 강제적으로 합금화시킨 후 이를 열처리하여 Fe 분자와 비고용 원자를 상분리시키므로써 미세한 클러스터를 비정질 기지에 균일하게 분산시킬 수 있게 하여 기존의 비정질 재료들의 특성을 월등히 능가하는 고투자율, 저자왜, 저보자력 및 고전기저항 특성을 가짐으로써 기존의 고주파 대역에서 사용하던 값비싼 Co 계 연자성합금을 대량생산 및 생산자동화에도 적합하고 연성이 풍부한 Fe 계 연자성합금으로 대체할 수 있도록 한 것이다.The present invention relates to an Fe-based amorphous soft magnetic material and a method of manufacturing the same, and more particularly to a Fe-Zr-B soft magnetic amorphous alloy which forcibly alloys a non- By separating the non-solid-state atoms, fine clusters can be uniformly dispersed in an amorphous matrix. By thus having high permeability, authorsity, low coercive force and high resistance characteristics, which exceed the properties of existing amorphous materials, And it is possible to substitute the expensive Co-based soft magnetic alloy which is used with the Fe soft magnetic alloy which is suitable for mass production and production automation and is rich in ductility.
Description
본 발명은 Fe 계 비정질 연자성재료 및 그 제조방법에 관한 것으로, 기존의 Fe -Zr-B 계 연자성 비정질합금에 Fe 에 고용되지 않는 비고용 원소를 강제적으로 합금화시킨 후 이를 열처리하여 Fe 분자와 비고용 원자를 상분리시키므로써 미세한 클러스터를 비정질 기지에 균일하게 분산시킬 수 있게 하여 전·자기적 특성을 향상시킨 Fe 계 비정질 연자성재료 및 그 제조방법에 관한 것이다.The present invention relates to an Fe-based amorphous soft magnetic material and a method of manufacturing the same, and more particularly, to a method of forging an Fe-Zr-B soft magnetic amorphous alloy by forcibly alloying non- The present invention relates to an Fe-based amorphous soft magnetic material and a method for manufacturing the same, wherein the fine magnetic clusters are uniformly dispersed in an amorphous matrix by phase separation of non-solid atoms.
변압기나 전기·전자기기의 부품 속재로 사용되는 자성재료는 없어서는 안될 중요한 소재중의 하나이다.Magnetic materials used as transformers and components of electric and electronic devices are one of the indispensable materials.
이런 소재들 중 금속 자성재료나 페라이트와 같은 세라믹 자성재료가 가장 널리 사용되고 있으나, 그 용도에 따라서 각기 다른 특성을 가진 자성재료가 요구되고 있다.Among these materials, metal magnetic materials and ceramic magnetic materials such as ferrite are the most widely used, but magnetic materials having different characteristics are required depending on the use thereof.
최근의 첨단 전기·전자기기들은 점점 소형, 경량화 되어 가는 추세이고, 이를 위해서는 기기의 전체 부피 중 40% 정도를 점유하는 전원을 소형화 시켜야 함은 두말할 필요도 없다.It is needless to say that recent advanced electric and electronic devices are becoming increasingly smaller and lighter, and in order to achieve this, it is necessary to miniaturize a power source occupying about 40% of the total volume of the device.
전원의 소형화를 위해서는 전원의 작동 주파수를 고주파화하는 것이 필요하며, 이는 결국 전원에 사용되는 자성재료들을 고주파에서도 안정되게 사용할 수 있도록 하는 것이 필요하다.In order to downsize the power source, it is necessary to make the operating frequency of the power source high-frequency, and it is necessary to make the magnetic materials used in the power source stable in high frequencies.
기기에 사용되는 자성재료의 가장 중요한 특성은 손실(loss)특성이다. 금속은 고주파대역에서는 표피효과에 의한 손실이 증가하는 경향을 가지고 있기 때문에 자성재료로 사용하는데 많은 어려움을 가지고 있다.The most important characteristic of the magnetic material used in the device is the loss characteristic. Metal has a great difficulty in using as a magnetic material because it tends to increase the loss due to the skin effect in the high frequency band.
표피효과란 도체에 직류를 흘리면 전류는 변화없이 도체안을 통하지만, 교류를 흘리면 중심부일 수록 주위의 자속변화가 많기 때문에 그 변화에 의한 역기전력이 크게되어 전류가 흐르기 어렵게 되는 현상으로, 주파수가 높을수록 현저하며 거의 전류가 표면으로만 흐르기 때문에 실효적으로는 단면적이 줄어든 것처럼 되어 저항이 증가하게 된다.When the direct current flows through the conductor, the current flows through the conductor without change. However, when the AC flows, the change of the magnetic flux around the center becomes larger as the AC flows. As a result, the back electromotive force due to the change becomes large, Since the current flows almost only on the surface, the resistance is increased as the cross-sectional area is effectively reduced.
이런 이유로 인해 지금까지는 수백 Khz 대역에서는 세라믹 자성재료인 페라이트(Ferrite)를 많이 사용해 왔다.For this reason, ferrite (ceramic), a ceramic magnetic material, has been widely used in the hundreds of Khz bands.
그 이유는 페라이트가 전기를 통하지 않는 절연체이기 때문에 와전류손실(Eddy current loss)이 발생하지 않기 때문이었다.This is because the eddy current loss does not occur because ferrite is an insulator that does not conduct electricity.
그러나, 페라이트는 자속밀도값이 매우 낮기 때문에 출력이 떨어져 이를 높히기 위해서는 크기가 커져야 한다는 단점을 가지고 있어 기기의 소형화 측면에서는 한계를 가지고 있는 문제점이 있었다.However, since ferrite has a very low magnetic flux density, it has a disadvantage in that it has a disadvantage in that it needs to have a large size in order to increase the output thereof.
상기의 문제점을 보강하고 비교적 높은 주파수 대역에서도 사용할 수 있는 재료로서 비정질 연자성재료(Armorphous soft-magnetic material)가 요즘들어 크게 주목받고 있다.An amorphous soft-magnetic material has attracted much attention as a material that can reinforce the above problems and can be used in a relatively high frequency band.
비정질 연자성재료의 제조방법으로는 여러 가지 방법이 있으나, 현재 가장 실용화된 것이 초당 백만 ℃ 정도로 액체를 고체화시키는 액체급냉법이다.There are various methods for producing the amorphous soft magnetic material, but the most practical one at present is the liquid quenching method which solidifies the liquid at about 1 million degrees Celsius per second.
이 방법으로 얇은 리본형태의 박판을 만든 후 이를 와인딩하므로써 토로이달 코어 등의 비정질 연자성재료를 제조할 수 있게 된다.In this method, a thin ribbon-like thin plate is formed and then wound to make an amorphous soft magnetic material such as a toroidal core.
또한, 종래의 비정질 연자성합금의 제조방법으로는 크게 비정질 단상의 미세조직을 이용하는 방법과, 비정질합금을 결정화시켜 석출한 초미세결정립을 이용하는 방법의 두 가지 방법이 있다.There are two conventional methods for producing an amorphous soft magnetic alloy, namely, a method using an amorphous single phase microstructure and a method using an ultra fine grain deposited by crystallizing an amorphous alloy.
비정질 단상의 미세조직을 이용하는 방법은 상기의 액체급냉법에 의해 비정질 리본을 제조한 후 이를 적정온도에서 열처리 하므로써 액체급냉법에 의한 급냉시 도입된 잔류응력을 제거시켜 주는 방법으로, 열처리방법에는 응력완화를 시켜줌과 동시에 자기도메인의 배열을 목적하는 방향으로 정렬시켜 주기 위하여 열처리중 외부에서 자장을 걸어주는 자장중 열처리방법과 자장을 인가하여 주지 않는 무자장중 열처리방법이 있다.The method using the amorphous single phase microstructure is a method of removing the residual stress introduced during the quenching by the liquid quenching method by preparing the amorphous ribbon by the liquid quenching method and then heat-treating the amorphous ribbon at an appropriate temperature. A magnetic field heat treatment method which applies a magnetic field from the outside during the heat treatment and a heat treatment method which does not apply a magnetic field in order to align the alignment of the magnetic domain in a desired direction.
초미세결정립을 이용하는 방법은 Fe-Cu-Nb-Si-B 계에서 적용되는 방법으로, 액체냉각법 등에 의해 제조된 비정질 리본을 결정화 온도 이상의 온도에서 열처리하여 10~20nm 정도 크기의 미세한 bcc 격자구조의 α-Fe 상을 다량 석출시켜 제조하는 방법이다.The method using ultrafine grains is a method applied to the Fe-Cu-Nb-Si-B system. The amorphous ribbon produced by the liquid cooling method or the like is heat-treated at a temperature higher than the crystallization temperature to form a fine bcc lattice structure and a large amount of an α-Fe phase is precipitated.
그러나, 상기의 비정질 단상의 미세조직을 이용하여 제조한 것의 경우에는 풍부한 연성은 가지나 자기적 특성면에서 개선의 여지가 많으며, 초미세결정립을 이용하여 제조한 것의 경우에는 시료 전체의 약 80% 이상이 결정질이며 나머지 20% 정도 가량은 비정질 상태로 결정립 계면에 남아있음으로 인하여 재료 자체가 대단히 취약해지기 때문에 제품의 대량 생산시 생산라인의 자동화에 문제가 있으며, 완성품 제조후에도 취급에 매우 많은 주의가 필요할 뿐만 아니라 투자율면에서도 좀더 개선을 요하는 등의 문제점을 가지고 있다.However, in the case of using the microstructure of the amorphous single phase, there is a lot of room for improvement in terms of rich ductility and magnetic properties, and in the case of using ultrafine grains, about 80% or more And the remaining 20% remains in the crystalline interface due to the amorphous state. As a result, the material itself becomes very fragile, so there is a problem in the automation of the production line in mass production of the product. Not only is it necessary but also requires further improvement in the investment rate.
또한, 중요한 점은 소재의 가격경쟁력이다. 현재 연자성재료로서 사용되고 있는 재료는 크게 Fe 계와 Co 계 비정질합금이 사용되고 있다.Also, an important point is price competitiveness of materials. Currently, Fe and Co-based amorphous alloys are widely used as soft magnetic materials.
Fe 계 비정질합금의 경우에는 고포화 자속밀도 특성과 상용주파수 대역에서의 저손실 특성을 가지고 있으며, Co 계 비정질합금의 경우는 고투자율 특성과 고주파수 대역에서의 저손실 특성을 가지고 있다.Fe amorphous alloys have a high saturation magnetic flux density and low loss characteristics in a commercial frequency band. In the case of a Co-based amorphous alloy, it has a high permeability characteristic and a low loss characteristic in a high frequency band.
그러므로, 저주파수 대역에서는 Fe 계 비정질합금이, 고주파수 대역에서는 Co 계 비정질합금이 주로 사용되고 있는 실정이다.Therefore, the Fe-based amorphous alloy is mainly used in the low-frequency band and the Co-based amorphous alloy is used in the high-frequency band.
위에서 언급한 바와 같이, 최근의 전기·전자기기의 소형화에 부응하기 위해서는 그것을 구동하는 전원내의 자성재료, 예컨대 트랜스포머(Transformer), 리액터(Reactor) 등의 자성부품을 소형화 해야 한다.As described above, in order to meet the recent miniaturization of electric and electronic devices, magnetic parts such as a transformer and a reactor must be downsized in a power source for driving the electric parts.
즉, 전파용 노이즈필터 등의 소형화, 고주파화의 경향에 따라 고포화 자속밀도 특성을 나타내며, 주파수 특성이 우수한 고투자율재료의 필요성은 날로 높아지고 있다.That is, the need for a high permeability material having high saturation magnetic flux density characteristics and excellent frequency characteristics has been increasing with the tendency of miniaturization and high frequency of the noise filter for radio wave and the like.
이와 같은 조건을 만족하는 비정질합금 재료로는 Fe 계 보다는 Co 계가 더 유리하다. 그 이유는 상기한 바와 같이 Co 계 비정질합금은 고투자율 특성과 고주파수 대역에서의 저손실 특성을 가지고 있기 때문이다.As the amorphous alloy material satisfying such conditions, the Co-based material is more advantageous than the Fe-based material. This is because the Co-based amorphous alloy has a high permeability characteristic and a low loss characteristic in a high frequency band as described above.
즉, Co 계의 경우는 페라이트에 비해 고포화 자화값을 가지고, 자연공명 주파수가 페라이트계 재료보다 높기 때문에 우수한 고투자율 재료로서 유리하고, 비저항이 퍼멀로이와 전기강판에 비해 2~3배 높기 때문에 와전류손실이 적어 고주파영역에서도 적은 철손(wire loss)을 기대할 수 있기 때문이다.In other words, the Co-based material has a higher saturation magnetization value than that of ferrite and has a higher natural resonance frequency than the ferrite-based material. Therefore, it is advantageous as a high-permeability material and the resistivity is 2 to 3 times higher than permalloy and electric steel sheet. It is possible to expect low wire loss even in the high frequency range.
그러나, Co 원소는 Fe 원소보다 가격이 50배 정도 비쌀 뿐만 아니라 세계적으로 그 매장량이 매우 적어 원료 수급에 많은 제약이 있었기 때문에 Co 계 비정질합금의 응용범위를 확장시키는 데에는 많은 문제점을 가지고 있다.However, since Co elements are 50 times more expensive than Fe elements and their reserves are very small worldwide, there are many limitations on the supply and demand of raw materials. Therefore, there are many problems in expanding the application range of Co-based amorphous alloys.
본 발명은 상기와 같은 제반 문제점을 해결하기 위하여 창출된 것으로, Co 계 연자성합금을 대량생산 및 생산자동화에 적합하고 연성이 풍부한 Fe 계 연자성합금으로 대체하기 위해 기존의 Fe-Zr-B 계 연자성 비정질합금에 Fe 에 고용되지 않는 비고용 원소를 모합금 제조시 강제적으로 합금화시킨 후 이를 열처리하여 Fe 원자와 비고용 원자를 상분리시켜 2~3nm 크기의 미세한 클러스터구조를 비정질 기지내에 균일하게 분산시킨 미세구조를 가지게끔 하므로써 자기적 특성이 향상된 Fe 계 비정질 연자성재료 및 그 제조방법을 제공함을 그 목적으로 한다.The present invention has been made to solve the above problems and it is an object of the present invention to provide a Fe-Zr-B alloy which is suitable for mass production and production automation of a Co-based soft magnetic alloy, A non-solid element which is not solved in Fe in a soft magnetic amorphous alloy is forcibly alloyed in the production of a parent alloy and then heat-treated to be phase-separated between Fe atom and non-solid atom to uniformly disperse a fine cluster structure of 2 to 3 nm in an amorphous matrix The present invention also provides an Fe-based amorphous magnetically soft material having improved magnetic properties by having a microstructure formed thereon.
도 1 은 본 발명의 비정질 연자성합금의 열처리 온도에 따른 보자력 특성 변화를 나타낸 그래프1 is a graph showing changes in the coercive force characteristics of the amorphous soft magnetic alloy according to the heat treatment temperature of the present invention
도 2 는 본 발명의 비정질 연자성합금의 열처리 온도에 따른 포화자속밀도의 변화를 나타낸 그래프2 is a graph showing the change of the saturation magnetic flux density according to the heat treatment temperature of the amorphous soft magnetic alloy of the present invention
도 3 은 본 발명의 비정질 연자성합금의 주파수 1kHz에서의 초투자율의 열처리 온도에 따른 변화를 나타낸 그래프3 is a graph showing changes in the initial permeability at a frequency of 1 kHz with the annealing temperature of the amorphous soft magnetic alloy of the present invention
도 4 는 본 발명의 비정질 연자성합금의 열처리 온도에 따른 자왜의 변화를 나타낸 그래프4 is a graph showing changes in magnetization according to the heat treatment temperature of the amorphous soft magnetic alloy of the present invention
도 5 는 본 발명의 비정질 연자성합금의 열처리 온도에 따른 전기저항의 변화를 나타낸 그래프5 is a graph showing the change in electrical resistance of the amorphous soft magnetic alloy according to the heat treatment temperature of the present invention
도 6 은 본 발명의 비정질 연자성합금과, 다른 연자성합금의 주파수에 따른 손실의 특성을 비교한 그래프FIG. 6 is a graph comparing the characteristics of the loss of the amorphous soft magnetic alloy of the present invention and other soft magnetic alloys according to frequency
이하, 본 발명의 실시예 및 그 작용효과를 첨부 도면을 참조하여 설명한다.Best Mode for Carrying Out the Invention Hereinafter, embodiments of the present invention and effects thereof will be described with reference to the accompanying drawings.
우선, 본 발명의 제조방법을 알아보면, Fe 계 비정질합금 조성에 첨가원소로 비고용 원소를 적절량 첨가하여 용해한 액체를 급냉시켜 비정질리본을 제조한 후, 상기 비정질 리본 제조시 도입된 잔류응력을 제거시키기 위하여 적절한 온도에서 열처리하여 나노-사이즈의 클러스터 입자를 비정질 기지내에 균일하게 형성시킨 미세조직의 연자성재료를 얻어 고주파 대역에서도 사용할 수 있는 Fe 계 비정질 연자성재료를 제조할 수 있게 되는 것이다.First, the manufacturing method of the present invention will be described. The amorphous ribbon is prepared by adding a proper amount of non-solid element as an additive element to the Fe-based amorphous alloy composition to quench the dissolved liquid, Annealed at an appropriate temperature to obtain a soft magnetic material having a microstructure in which nano-sized cluster particles are uniformly formed in an amorphous matrix, thereby obtaining an Fe-based amorphous soft magnetic material which can be used in a high frequency band.
이때, 비고용 원소는 비정질리본을 열처리하여 결정화시킬 때 Fe 원자들을 배척하여 나노-사이즈의 클러스터의 형성을 용이하게 해준다.At this time, the non-solid element facilitates the formation of nano-sized clusters by rejecting Fe atoms when crystallizing the amorphous ribbon by heat treatment.
상기에서, 비정질 리본의 제조방법으로는 기존에 실시되어 오는 급냉방법들을 적용할 수 있으며, 대표적인 것으로는 액체급냉법을 적용하여 금속용해시 비고용 원소를 최대한 금속용탕에 혼입시킨 액체를 초당 백만 ℃ 정도의 속도로 급냉시켜 비고용 원소의 고용을 최대한 촉진시킨다.As a method of manufacturing the amorphous ribbon, conventional quenching methods can be applied. Typically, a liquid quenching method is applied to a liquid in which a non-solid element is mixed with a metal melt as much as possible at a melting point of 1 million degrees Celsius To accelerate the employment of non-employment elements to the maximum extent possible.
또한, 상기의 열처리 과정은 비정질리본 제조시 도입된 잔류응력을 제거시켜 주기 위한 목적도 포함되어 있으며, 그 방법에는 응력완화를 시켜줌과 동시에 자기도메인의 배열을 목적하는 방향으로 정렬시켜 주기 위하여 열처리중 외부에서 자장을 걸어주는 자장중 열처리방법과 자장을 인가하여 주지 않는 무자장중 열처리방법을 부가하여 적용할 수 있다.In addition, the above-mentioned heat treatment process also includes the purpose of removing the residual stress introduced during the production of the amorphous ribbon. In this method, stress relaxation is performed and the alignment of the magnetic domains is aligned in a desired direction. It is possible to apply the heat treatment method among the magnetic field which applies the magnetic field from the outside and the heat treatment method without the magnetic field.
상기와 같이, 금속용해시 비고용 원소를 최대한 금속용탕에 혼입시킨 용해 액체를 급냉시켜 비고용 원소의 고용을 최대한 촉진시킨 후 열처리하여 Fe 원소와 상분리 현상을 일으키도록 하여 미세한 클러스터상을 석출시키게 되면 결국, 수 nm 크기의 클러스터 미세구조를 가진 비정질 연자성재료를 제조할 수 있게 되는 것이다.As described above, when dissolving the metal, the dissolving liquid in which the non-solid element is mixed with the metal melt as much as possible is rapidly quenched to promote the solidification of the non-solid element to a maximum extent, followed by heat treatment to induce a phase separation phenomenon with the Fe element, As a result, an amorphous soft magnetic material having a cluster microstructure of several nm in size can be manufactured.
상기와 같은 방법에 의해 제조된 Fe 계 비정질 연자성재료는 다음과 같은 특성을 갖는다.The Fe-based amorphous soft magnetic material produced by the above method has the following characteristics.
첫째는, Fe 계 비정질 연자성재료를 제 2상으로 미세하고 균일하게 비정질 매트릭스(matrix)에 분산시키므로써 소재의 전기적 저항을 증가시키므로써 자성체의 와전류손실(Eddy current loss)을 감소시킬 수 있게 되며, 둘째는 비정질 연자성재료의 강자성영역(ferro-magnetic domain)의 크기가 현저히 감소하여 이 또한 와전류손실을 감소시킬 수 있으며, 셋째는 Fe 계 비정질 합금의 특성상 원래는 자왜(magnetostriction)가 매우 크기 때문에 고주파 영역에서는 투자율이 급속히 감소하고 손실이 증가하나, 수 nm 크기의 클러스터를 미세하게 분산시키므로써 자왜(magnetostriction)가 거의 0에 가까운 값으로 감소하여 보자력이 크게 감소하고, 대단히 높은 투자율 특성을 나타내므로 우수한 연자기적 특성을 가지게 된다. 우수한 연자기적특성이란 기본적으로 보자력이 낮으면 낮을수록, 투자율이 높으면 높을수록 좋다.Firstly, since the Fe-based amorphous soft magnetic material is finely and uniformly dispersed into the second phase in an amorphous matrix, the electrical resistance of the material is increased, and the eddy current loss of the magnetic body can be reduced Secondly, the magnitude of the ferro-magnetic domain of the amorphous soft magnetic material is significantly reduced, which can also reduce the eddy current loss. Thirdly, due to the nature of the Fe-based amorphous alloy, In the high-frequency region, the permeability is rapidly decreased and the loss is increased. However, since the cluster of several nm is finely dispersed, the magnetostriction is reduced to a value close to zero to greatly decrease the coercive force and exhibit a very high permeability characteristic Excellent soft magnetic characteristics are obtained. The superior soft magnetic properties are basically the lower the coercive force is, and the higher the permeability, the better.
넷째는 기지가 비정질 상태로 존재하기 때문에 소재의 연성이 대단히 풍부하여 파손확률이 낮아 대량생산에 의한 자동화가 가능한 등의 특성을 가진다.Fourth, since the base is in an amorphous state, the ductility of the material is very abundant and the probability of breakage is low, so that automation by mass production is possible.
[실시예][Example]
이하, 실시예를 통해 본 발명을 보다 구체적으로 설명하고자 한다.Hereinafter, the present invention will be described more specifically by way of examples.
본 실시예에서는 Fe 계 비정질합금으로는 Fe-Zr-B 계열을 사용하였으며, 비고용원소로는 Ag를 사용하였다.In this embodiment, Fe-Zr-B series is used as the Fe amorphous alloy, and Ag is used as the non-solid element.
먼저, Fe-Zr-B계 비정질 합금조성에 첨가원소로 비고용 원소인 Ag를 적절량 첨가한 용해액을 액체급냉법(Melt Spinning)을 이용하여 비정질리본을 제조한 후 열처리하여 원하는 미세조직의 재료를 얻어 고주파대역에서도 사용할 수 있는 Fe 계 비정질 합금을 제조할 수 있도록 함을 그 기본으로 하며, 각 원소의 조성범위는First, an amorphous ribbon is prepared by using a liquid quenching method and a heat treatment is performed by adding a suitable amount of Ag, which is a non-solid element, as an additive element to the Fe-Zr-B based amorphous alloy composition, Based alloy that can be used in a high-frequency band to obtain an Fe-based amorphous alloy, and the composition range of each element is
Fe : 80~90 (%)Fe: 80 to 90 (%)
Zr : 3~10 (%)Zr: 3 to 10 (%)
B : 3~10 (%)B: 3 to 10 (%)
Ag : 0.1~1 (%)Ag: 0.1 to 1 (%)
정도로 한다..
이러한 각각의 조성범위는 실험결과에 따라 그 조성범위가 결정된 것으로, 우선, Fe 원소를 80% 이하로 하면 합금내부에 함유된 자성원소의 양이 너무 적어 큰 포화자속밀도를 얻을 수 없는데, 이는 자성재료의 포화자속밀도는 자기모멘트를 가진 원소의 양에 대개 의존하기 때문이다.When the Fe element is 80% or less, the amount of the magnetic element contained in the alloy is too small to obtain a large saturation magnetic flux density. This is because the magnetism This is because the saturation magnetic flux density of the material usually depends on the amount of the element having magnetic moment.
또한, 상기 Fe 원소가 90 % 이상인 경우는 액체급냉시 비정질을 잘 형성시켜 주는 원소(이하 비정질형성 원소라고 함)를 일정량 첨가하여야만 원활히 비정질이 얻어지는데 Fe를 90% 이상 첨가하면 비정질형성원소의 부족으로 비정질 상을 얻기 어렵게 된다.When the Fe element is 90% or more, a certain amount of an element that forms amorphous well during quenching of the liquid (hereinafter referred to as an amorphous forming element) is smoothly obtained. When Fe is added by 90% or more, It becomes difficult to obtain an amorphous phase.
Zr 성분의 경우는 그 적정량이 3~10% 정도가 적절하며, 그 조성범위를 벗어나는 경우 자기적 특성이 열화하는 경향이 있다.In the case of the Zr component, an appropriate amount of the Zr component is suitably about 3 to 10%, and when the composition is out of the range, the magnetic properties tend to deteriorate.
B 원소의 경우 비정질형성 원소중에 대표적인 원소로서 그 적절량은 3~10% 정도가 적당하며, 이 원소를 적당량 첨가하면 비정질상의 형성을 촉진시키나, 너무 많이 넣게 되면 오히려 제2상(예를 들어 Fe2B등의 금속간화합물)의 형성을 촉진시켜 비정질 리본이 취약해지며, 자기적 성질에도 좋은 영향을 미치지 못한다.In the case of element B, a suitable amount of the amorphous forming element is suitably about 3 to 10% as an element representative of the amorphous forming element. Addition of an appropriate amount of this element promotes the formation of amorphous phase, but if too much is added, 2 B, and the like), thereby weakening the amorphous ribbon and not affecting the magnetic properties.
첨가원소인 비고용 원소 Ag 는 0.1~1% 범위내에서 양질의 비정질리본이 형성되었으나, 1% 이상의 Ag 는 비정질리본 제조시 첨가가 불가능하였다.Good quality amorphous ribbons were formed in the range of 0.1 ~ 1% of the non-solid element Ag as an additive element, but 1% or more of Ag was not added in the production of the amorphous ribbon.
상기와 같은 점을 토대로 하여 제조한 Fe 계 비정질 연자성재료 중의 일부인 Fe87.3Zr5.9B6.5Ag0.3합금에 대한 것을 일실시예로 설명하고자 한다.The Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 alloy, which is a part of the Fe-based amorphous soft magnetic material prepared on the basis of the above-mentioned points, will be described as an embodiment.
그 제조방법은 상기한 원소비율(Fe:87.3%, Zr:5.9%, B:6.5%, Ag:0.3%)로 Fe-Zr-B-Ag 모합금을 약 30g Ar 분위기에서 아크용해하여 제조하고, 여기서 얻은 모합금의 일부 약 5g 정도를 Ar 분위기 중에서 단롤 급속냉각장치(Single Roll Melt Spinning)를 이용하여 폭 2mm, 두께 30㎛ 의 비정질 리본을 제작하였다. 이 리본을 열처리온도 200~600℃에서 1시간 진공중 열처리한 후 노냉하여 Fe87.3Zr5.9B6.5Ag0.3의 비정질 연자성재료를 제조하였다.The Fe-Zr-B-Ag parent alloy was prepared by arc melting the Fe-Zr-B-Ag parent alloy in an Ar atmosphere in the above-mentioned element ratio (Fe: 87.3%, Zr: 5.9%, B: 6.5%, Ag: 0.3% An amorphous ribbon having a width of 2 mm and a thickness of 30 탆 was prepared by using a single roll melt spinning apparatus in an Ar atmosphere in an amount of about 5 g of the mother alloy obtained here. The ribbon was annealed at 200 ~ 600 ℃ for 1 hour under vacuum and then furnace cooled to prepare amorphous soft magnetic material of Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 .
상기와 같은 방법에 의해 제조된 Fe87.3Zr5.9B6.5Ag0.3비정질 연자성재료의 특성을 첨부 도면을 참조하여 알아보면, 도 1은 Fe87.3Zr5.9B6.5Ag0.3합금의 열처리온도에 따른 보자력(Hc)의 변화를 나타낸 것으로, 열처리온도 400℃에서 약 15 mOe 정도로 기존의 Fe-Zr-B 계열보다 매우 작은, 즉, 매우 우수한 보자력 특성을 얻을 수 있음을 알 수 있다.The characteristics of the Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 amorphous soft magnetic material prepared by the above method are shown in the accompanying drawings. FIG. 1 is a graph showing the coercive force (Mn) of the Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 alloy according to the heat treatment temperature H c ), which is much smaller than that of the existing Fe-Zr-B series, that is, excellent coercive force characteristics can be obtained at a heat treatment temperature of about 400 ° C. and about 15 mOe.
이것은, 스즈키 등이 보고한 Fe89Zr7B4합금[K. Suzuki, N. Kataoka, A. Inoue, A. Makino, T. Masumoto ; Materials Transactions JIM, Vol. 31, No. 8 (1990), pp. 743 to 746]의 보자력 93 mOe 보다 매우 작은 값이다.This is because the Fe 89 Zr 7 B 4 alloy reported by Suzuki et al. [K. Suzuki, N. Kataoka, A. Inoue, A. Makino, T. Masumoto; Materials Transactions JIM, Vol. 31, No. 8 (1990), pp. 743 to 746] is much smaller than the coercive force of 93 mOe.
도 2 는 Fe87.3Zr5.9B6.5Ag0.3열처리온도에 따른 외부의 외부인가자장 10 Oe에서의 자속밀도(B10)의 변화를 나타낸 것으로, 열처리 온도가 증가함에 따라 자속밀도는 서서히 증가하나, 400℃ 이상에서는 급격히 증가함을 알 수 있다. 완전히 결정화가 이루어진 열처리 온도 600℃ 에서는 1.2 T 의 자속 밀도가 얻어졌다.FIG. 2 shows changes in magnetic flux density (B 10 ) at an external applied magnetic field of 10 Oe according to the annealing temperature of Fe 87.3 Zr 5.9 B 6.5 Ag 0.3. As the annealing temperature increases, the magnetic flux density gradually increases, Lt; RTI ID = 0.0 > C, < / RTI > A magnetic flux density of 1.2 T was obtained at the heat treatment temperature of 600 ° C, which was completely crystallized.
도 3 은 Fe87.3Zr5.9B6.5Ag0.3합금의 주파수 1kHz, 3 mOe 하에서의 초투자율(μi)의 열처리온도에 따른 변화를 나타낸 것으로, 열처리 온도 400℃ 까지는 급격히 증가하나, 이 이상의 온도에서는 다시 급격히 감소하는 거동을 보이며, 열처리 온도 400℃에서 최대값 287,000이 얻어졌다.FIG. 3 shows changes in the initial permeability (μi) of the Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 alloy at a frequency of 1 kHz and 3 mOe according to the annealing temperature. The annealing temperature sharply increases up to 400 ° C., And a maximum value of 287,000 was obtained at a heat treatment temperature of 400 ° C.
여기서 주목해야 할 것은 열처리 온도 400℃ 에서의 투자율 최대값은 기존의 다른 재료보다 월등히 우수하다는 것이다. 이것은 위에서 언급한 스즈키 등이 보고한 Fe89Zr7B4합금의 값 15,000(=μe) 과 비교해 보아도 약 19배 이상으로 대단히 높은 값임을 알 수 있다.It should be noted that the maximum permeability at a heat treatment temperature of 400 ° C is far superior to that of other conventional materials. It can be seen that this value is about 19 times higher than the value of 15,900 (= μe) of the Fe 89 Zr 7 B 4 alloy reported by Suzuki et al. Mentioned above.
즉, 이것은 지금까지 Fe 계 비정질 재료가 저투자율 재료로 그 응용범위가 저주파수 영역에 국한되어온 단점을 극복 고주파 대역에서도 사용될 수 있음을 의미하는 것으로, 지금까지 고주파 대역의 비정질 재료로 사용되어 온 값비싸고 매장량이 적은 Co를 대체할 수 있는 매우 획기적인 것이라 할 수 있다.In other words, this means that the Fe-based amorphous material can be used in a high frequency band to overcome the disadvantage that the application range of the Fe-based amorphous material is restricted to the low-frequency region, and thus the value that has been used as the high- It can be said that it is a breakthrough that can replace Co with a small amount of reserves.
도 4 는 상기한 바와 같은 초고투자율 특성을 나타내는 원인을 알아보기 위해 투자율 특성과 밀접한 관계가 있는 자왜특성(λs)을 조사한 것으로, 급냉(As-quenching)한 상태의 재료에서 양의 자왜(Magnetostriction)를 나타낸 후 열처리 온도가 증가함에 따라 350℃ 까지 변화가 서서히 감소하다가 열처리 온도 400℃에서 급격히 감소하여 일단 최저값을 나타낸 후, 다시 증가 열처리 온도 500℃ 까지 증가하여 최대값을 나타낸다. 열처리온도 550℃에서는 다시 급격히 감소하여 음의 자왜값을 나타내고 600℃에서 자왜값이 다시 증가하였다.FIG. 4 is a graph showing the magneto-resistive property (λ s ) closely related to the magnetic permeability characteristic in order to investigate the cause of the ultra high permeability characteristic as described above. In the as-quenched material, ), And then gradually decreased to 350 ° C. as the heat treatment temperature was increased. After the heat treatment temperature was reduced to 400 ° C., the temperature was decreased to 500 ° C. and then increased to 500 ° C. At the annealing temperature of 550 ℃, it decreased sharply again to show the negative jerk value and the jerk value again at 600 ℃.
도면으로부터 0 의 자왜는 열처리 온도 약 540℃ 부근에서 얻어짐을 알 수 있고, 고투자율특성이 얻어진 열처리온도 400℃의 경우 자왜가 약 1.89×10-6이라는 매우 낮은 값이 얻어졌다. 이는 자왜가 작으면 작을수록 높은 투자율특성을 보유하기 때문에 본 발명의 고투자율 특성은 낮은 자왜특성으로부터 기인함을 알 수 있는 것이다.From the figure, it can be seen that a magnetostriction of 0 was obtained at a heat treatment temperature of about 540 ° C. and a very low value of about 1.89 × 10 -6 at a heat treatment temperature of 400 ° C. at which a high permeability characteristic was obtained was obtained. It can be seen that the smaller the magnitude of the magnetostriction is, the higher the permeability characteristic is, and the higher permeability characteristic of the present invention is attributed to the lower magnetostriction property.
도 5 는 Fe87.3Zr5.9B6.5Ag0.3합금의 열처리 온도에 따른 전기저항의 변화를 나타낸 것으로, 전기저항은 물질의 미세조직에 따라 가장 민감하게 변화하는 물성중의 하나이기 때문에 본 발명의 미세구조를 파악하는데 매우 유용한 방법이다.FIG. 5 is a graph showing the change in electrical resistance of the Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 alloy according to the heat treatment temperature. Since the electrical resistance is one of the most sensitive properties depending on the microstructure of the material, It is a very useful method to identify
급냉(As-quenching)한 상태에서 1.23 μΩm의 비저항을 나타내고, 열처리 온도 350℃ 까지는 다소 감소하였다가 열처리 온도 400℃까지 급격히 증가하여 1.36 μΩm로 최고값에 도달한 후 다시 열처리 온도가 증가함에 따라 감소하는 거동을 보이고 있다.In the as-quenching state, the resistivity was 1.23 μΩm. The resistivity decreased slightly to 350 ° C. and then increased sharply to 400 ° C., reaching a maximum value of 1.36 μΩm, and then decreased as the annealing temperature increased .
400℃ 에서의 전기비저항값은 종래의 Fe-Zr-B 계 비정질합금[T.K. KIM, S. Ishio, M. Takahashi : Proc. 4th Inter. Conf. on Rapidly Quenched Metals, Vol.2 (edited by T. Masumoto and K. Suzuki,The Japan Institute of Metals, Sendai, Japan, 1982, p. 1323)]과 비교할 때 대단히 높은 것으로, 고전기저항을 나타냄을 알 수 있고 이는 와전류손실은 재료의 전기저항이 높으면 높을수록 감소하는 경향이 있기 때문에 고주파영역에서 와전류손실을 줄일 수 있게 되는 것이다.The electrical resistivity values at 400 ° C are the same as those of the conventional Fe-Zr-B amorphous alloy [T.K. KIM, S. Ishio, M. Takahashi: Proc. 4th Inter. Conf. , which is very high when compared with the on Rapidly Quenched Metals, Vol.2 (edited by T. Masumoto and K. Suzuki, The Japan Institute of Metals, Sendai, Japan, 1982, p. 1323) This is because the eddy current loss tends to decrease with an increase in the electric resistance of the material, thereby reducing the eddy current loss in the high frequency range.
여기서, 주목해야 할 것은 열처리 온도 400℃에서 비저항이 급격히 증가한다는 사실이다. 이런 미세조직 하에서도 비저항이 급격히 증가한다는 사실은 X-선 실험결과 열처리 온도 400℃ 에서는 아직 비정질 상태를 유지하고 있었기 때문에 이 때의 미세조직이 비정질상인 기지에 α-Fe 상을 주성분으로 하는 아주 미세한 클러스터가 형성 분산되어 있는 조직이라는 사실을 반영하고 있다.Here, it should be noted that the resistivity increases sharply at a heat treatment temperature of 400 ° C. The fact that the resistivity increases sharply under these microstructures shows that the amorphous state of the microstructure at the heat treatment temperature of 400 ° C is still very fine It reflects the fact that clusters are formed and dispersed.
이러한 사실들은 매우 의미깊은 것으로, 지금까지의 비정질 재료 연구는 제 2 상의 클러스터를 형성시키지 않은 비정질단상을 목적으로 한 것과, 급냉(As-quenching)한 상태에서 비정질 상을 생성시켜 이를 결정화 온도에서 장시간 열처리하여 미세결정립을 석출시키는 것과는 달리 비정질상 기지에 미세한 클러스터를 형성시키는 새로운 연구의 장을 제시했다는 점이다.These facts are very meaningful. Researches on amorphous materials so far have aimed at the amorphous single phase in which the clusters of the second phase are not formed, and those in which the amorphous phase is generated in a state of As-quenching, Unlike the precipitation of fine grains by heat treatment, a new research field is proposed to form fine clusters in the amorphous phase matrix.
도 6 은 Fe87.3Zr5.9B6.5Ag0.3합금 중 400℃에서 열처리한 시료의 주파수에 따른 손실특성을 정리한 것으로, 비교를 위해서 현재 고주파용 비정질 재료로 널리 사용되고 있는 Co69Fe3.8Si12.9B10.5Cr3.8과 비교하여 나타내었다.FIG. 6 shows loss characteristics of Fe 87.3 Zr 5.9 B 6.5 Ag 0.3 alloy according to frequency of a sample annealed at 400 ° C. For comparison, Co 69 Fe 3.8 Si 12.9 B 10.5, which is widely used as a high frequency amorphous material, Cr 3.8 .
도면에서 알 수 있듯이, Co 계 비정질 합금과 비교하여도 거의 손색이 없는 손실특성을 보여주고 있다.As can be seen from the figure, the loss characteristic exhibits almost no difference compared with the Co-based amorphous alloy.
주파수 100 kHz 에서 Co 계와 본 발명은 각각 40 W/kg 과 50 W/kg 의 손실값이 얻어졌으며, 이는 본 발명이 충분히 Co 계 비정질 재료를 대체할 수 있음을 보여주고 있다.At the frequency of 100 kHz, the loss values of the Co system and the present invention were respectively 40 W / kg and 50 W / kg, which shows that the present invention can sufficiently replace the Co-based amorphous material.
또한, 한가지 특이할 만한 사항은 열처리 온도 400 ℃ 에서는 열처리 한 후에도 180°밴딩(bending)이 가능한 연성이 풍부한 재료로 판정되어, 기존의 비정질재료들이 열처리한 후 취약해지는 단점을 극복 제품의 제조공정상, 제품의 취급상에도 난점이 없어 대량생산 및 자동생산에도 매우 유리한 특징을 가지고 있다.In addition, one particular characteristic is that the material is rich in ductility capable of bending at 180 ° after heat treatment at a heat treatment temperature of 400 ° C, which overcomes the disadvantage that existing amorphous materials become vulnerable after heat treatment. There is no difficulty in the handling of the product, and it is very advantageous for mass production and automatic production.
상기와 같은 본 발명에 의해 얻을 수 있는 효과는 기존의 비정질 재료들의 특성을 월등히 능가하는 고투자율, 저자왜, 저보자력 및 고전기저항 특성을 가지고 있기 때문에 고주파 대역에서도 낮은 저손실 특성이 기대되며, 응용분야의 주파수 대역이 저주파수 대역에서 수백 kHz 의 고주파 대역까지의 코어재료(과포화 코어, 쵸크코어, 노이즈 필터, 변압기 등)로서 사용될 수 있을 뿐만 아니라 기존의 비정질재료들이 열처리한 후 취약해지는 단점을 극복 제품의 제조공정상, 제품의 취급상에도 난점이 없어 대량생산 및 자동생산에도 매우 유리한 등의 매우 유용한 효과가 있다.The effect obtained by the present invention as described above is expected to have a low loss property even in a high frequency band because it has a high permeability, authorsity, low coercive force, and high electric resistance characteristics which far exceed the characteristics of existing amorphous materials. Can be used as a core material (supersaturated core, choke core, noise filter, transformer, and the like) from a low frequency band to a high frequency band of several hundreds of kHz as well as overcoming the disadvantage that conventional amorphous materials become vulnerable after heat treatment. There is no difficulty in the manufacturing process and the handling of the product, which is very advantageous for mass production and automatic production.
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| KR20180081685A (en) | 2018-07-03 | 2018-07-17 | 한양대학교 에리카산학협력단 | Fe based soft magnetic alloy and magnetic materials comprising the same |
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| KR101309516B1 (en) * | 2012-03-30 | 2013-10-14 | 서울대학교산학협력단 | Preparation method for magnetic metallic glass nano-powder |
| CN102832120A (en) * | 2012-09-07 | 2012-12-19 | 天津大学 | Method for applying prestress on nanometer device surface |
| CN109702157B (en) * | 2019-02-28 | 2021-03-16 | 江苏集萃安泰创明先进能源材料研究院有限公司 | Amorphous alloy density regulating and controlling method |
| CN109797352B (en) * | 2019-02-28 | 2020-05-19 | 江苏集萃安泰创明先进能源材料研究院有限公司 | Method for regulating and controlling average atomic cluster size of amorphous alloy |
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| KR20180081685A (en) | 2018-07-03 | 2018-07-17 | 한양대학교 에리카산학협력단 | Fe based soft magnetic alloy and magnetic materials comprising the same |
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