KR100856687B1 - 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해도금방법 - Google Patents
유전체로 사용한 소재에 전도체 물질을 형성하는 무전해도금방법 Download PDFInfo
- Publication number
- KR100856687B1 KR100856687B1 KR1020070122725A KR20070122725A KR100856687B1 KR 100856687 B1 KR100856687 B1 KR 100856687B1 KR 1020070122725 A KR1020070122725 A KR 1020070122725A KR 20070122725 A KR20070122725 A KR 20070122725A KR 100856687 B1 KR100856687 B1 KR 100856687B1
- Authority
- KR
- South Korea
- Prior art keywords
- electroless
- plating
- water
- chemical
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 239000000463 material Substances 0.000 title claims abstract description 35
- 238000007772 electroless plating Methods 0.000 title claims abstract description 25
- 239000004020 conductor Substances 0.000 title claims abstract description 10
- 239000003989 dielectric material Substances 0.000 title claims description 3
- 238000007747 plating Methods 0.000 claims abstract description 81
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052802 copper Inorganic materials 0.000 claims abstract description 40
- 239000010949 copper Substances 0.000 claims abstract description 40
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 38
- 230000008569 process Effects 0.000 claims abstract description 27
- 239000003054 catalyst Substances 0.000 claims abstract description 23
- 230000004913 activation Effects 0.000 claims abstract description 19
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 19
- 238000007789 sealing Methods 0.000 claims abstract description 11
- 238000005406 washing Methods 0.000 claims abstract description 6
- 238000005238 degreasing Methods 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 37
- 239000000126 substance Substances 0.000 claims description 36
- 239000000243 solution Substances 0.000 claims description 18
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 13
- 239000010931 gold Substances 0.000 claims description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 10
- 238000006555 catalytic reaction Methods 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000009713 electroplating Methods 0.000 claims description 7
- 238000001556 precipitation Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 2
- 238000006467 substitution reaction Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000003213 activating effect Effects 0.000 claims 2
- 239000012459 cleaning agent Substances 0.000 claims 1
- 238000007598 dipping method Methods 0.000 claims 1
- 238000002791 soaking Methods 0.000 claims 1
- 238000004506 ultrasonic cleaning Methods 0.000 claims 1
- 238000005246 galvanizing Methods 0.000 abstract 1
- -1 Polybutylene terephthalate Polymers 0.000 description 14
- 239000003381 stabilizer Substances 0.000 description 11
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 238000003756 stirring Methods 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000004743 Polypropylene Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920001155 polypropylene Polymers 0.000 description 5
- 239000003814 drug Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000003287 bathing Methods 0.000 description 3
- 239000002738 chelating agent Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 229940079593 drug Drugs 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000010907 mechanical stirring Methods 0.000 description 3
- 239000008399 tap water Substances 0.000 description 3
- 235000020679 tap water Nutrition 0.000 description 3
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000000908 ammonium hydroxide Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 150000002343 gold Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- 230000009965 odorless effect Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- VDMJCVUEUHKGOY-JXMROGBWSA-N (1e)-4-fluoro-n-hydroxybenzenecarboximidoyl chloride Chemical compound O\N=C(\Cl)C1=CC=C(F)C=C1 VDMJCVUEUHKGOY-JXMROGBWSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 1
- 239000005695 Ammonium acetate Substances 0.000 description 1
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- 239000001099 ammonium carbonate Substances 0.000 description 1
- 235000012501 ammonium carbonate Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 229910000366 copper(II) sulfate Inorganic materials 0.000 description 1
- QKSIFUGZHOUETI-UHFFFAOYSA-N copper;azane Chemical compound N.N.N.N.[Cu+2] QKSIFUGZHOUETI-UHFFFAOYSA-N 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000010411 electrocatalyst Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- LIPFKVGOHKSCHI-UHFFFAOYSA-N formic acid Chemical compound OC=O.OC=O.OC=O.OC=O.OC=O LIPFKVGOHKSCHI-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- NRTDAKURTMLAFN-UHFFFAOYSA-N potassium;gold(3+);tetracyanide Chemical compound [K+].[Au+3].N#[C-].N#[C-].N#[C-].N#[C-] NRTDAKURTMLAFN-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 150000003555 thioacetals Chemical class 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
- C23C18/1666—Ultrasonics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76874—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroless plating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
| 항목 | 촉매반응 촉진제 |
| pH (20℃) | 1 이하 |
| 비중 (20℃) | 27 (건욕시 13) |
| 외관 | 무색의 액체 |
| 냄새 | 없음 |
| P.N의 유무 | P:없음 N:없음 |
| COD (건욕시) | 0 ppm |
| 킬레이트제의 유무 | 없음 |
| 항목 | 제 1 무전해 동도금 약품 (DJ-CU-A) | 제 2 무전해 동도금 약품 (DJ-CU-B) | 제 3 무전해 동도금 약품 (DJ-CU-C) | 제 4 무전해 동도금 약품 (DJ-CU-안정제) |
| pH(20℃) | 8.2~3.5 | 11.0~12.0 | 약 알칼리성 | 13.7~13.9 |
| 비중(20℃) | 1.120~1.130 | 1.050~1.080 | 1.364~1.384 | 1.03~1.05 |
| 외관 | 진청색 액체 | 무색~황갈색 액체 | 무색~담황색 액체 | 무색 액체 |
| 냄새 | 포르말린 냄새 | 약한 냄새 | 무취 | 무취 |
| P.N의 유무 | P:없음 N:있음 | P:없음 N:있음 | P:없음 N:있음 | P:없음 N:있음 |
| COD(건욕시) | 3.3~3.6mg/ℓ | 0mg/ℓ | 0mg/ℓ | 0mg/ℓ |
| 킬레이트제의 유무 | 없음 | 없음 | 없음 | 없음 |
| 항목 | 제 1 무전해 니켈도금 약품 (DJ-NI-A) | 제 2 무전해 니켈도금 약품 (DJ-NI-B) |
| pH(20℃) | 1.3~1.7 | 9.5~9.9 |
| 비중(20℃) | 1.246~1.266 | 1.110~1.130 |
| 외관 | 짙은 녹색 액체 | 무색~옅은 황색 액체 |
| 냄새 | 유기산 냄새 | 암모니아 냄새 |
| P.N의 유무 | P:없음 N:없음 | P:있음 N:있음 |
| COD(건욕액) | 840mg/ℓ | 12200mg/ℓ |
| 킬레이트제의 유무 | 있음 | 있음 |
| 항목 | 규격 | 분석방법 |
| 외관 | 우유빛 액체 | 육안검사 |
| 비중 | 0.994±0.03 | 비중계 |
| pH | 2.16±0.2 | pH meter |
Claims (5)
- 전처리 공정, 무전해 도금 공정, 후처리 공정, 세척 및 건조 공정을 포함하며,여기에서, 상기 전처리 공정은 초음파 탈지 단계, 활성화 단계, 제 1 촉매 활성화 단계, 제 2 촉매 활성화 단계를 포함하며,이때, 상기 초음파 탈지 단계에서는 PBT/PET 소재에 LDS(Laser Direct Structuring) 가공을 실시한 피도금물을 5~30중량% 농도의 초음파 세척제 수용액인 온도 40~50℃의 처리액에서 30초 내지 2분 동안 침지하였다가 수세하며,상기 활성화 단계에서는 상기 피도금물을 순수 60~65중량부에 촉매반응 촉진제 35~40중량부가 혼합된 pH 1이하, 온도 20~30℃의 처리액에서 10~15분 동안 침지하였다가 수세하며,상기 제 1 촉매 활성화 단계에서는 상기 피도금물을 순수 960~970㎖/ℓ에 무전해 도금용 촉매부여제 20~30㎖/ℓ 및 37중량% 염산 5~15㎖/ℓ가 혼합된 온도 20~30℃의 처리액에서 1~10분 동안 침지하였다가 수세하며,상기 제 2 촉매 활성화 단계에서는 상기 피도금물을 순수 850~950㎖/ℓ에 화학동 반응촉진제 50~150㎖/ℓ가 혼합된 20~40℃ 온도의 처리액에서 2~10분 동안 침치하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 1항에 있어서,상기 무전해 도금 공정은 무전해 동도금 단계, 제 3 촉매 활성화 단계, 무전해 니켈도금 단계, 무전해 금도금 단계를 포함하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 1항에 있어서,상기 후처리 공정은 봉공처리 단계인 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 2항에 있어서,상기 무전해 동도금 단계에서는 상기 피도금물을 저속도 금욕 또는 고속도 금욕에 따른 방법으로 처리하며,이때, 상기 저속도 금욕은 상기 피도금물을 순수 또는 이온교환수 850~870㎖/ℓ에 제 1 무전해 동도금 약품 50~70㎖/ℓ, 제 2 무전해 동도금 약품 50~70㎖/ℓ, 제 3 무전해 동도금 약품 20~25㎖/ℓ 및 제 4 무전해 동도금 약품 0.1~0.2㎖/ℓ를 차례로 첨가하여 제조한 온도 43~46℃인 처리액에 0.4~0.6㎛/5~10분의 석출속도로 침지하였다가 수세하는 것이고,상기 고속도 금욕은 상기 피도금물을 순수 또는 이온교환수 820~840㎖/ℓ에 제 1 무전해 동도금 약품 70~90㎖/ℓ, 제 2 무전해 동도금 약품 55~75㎖/ℓ, 제 3 무전해 동도금 약품 20~30㎖/ℓ 및 제 4 무전해 동도금 약품 0.1~0.2㎖/ℓ를 차례 로 첨가하여 제조한 온도 45~48℃인 처리액에 1.0~1.3㎛/10~15분의 석출속도로 침지하였다가 수세하는 것이며,상기 제 3 촉매 활성화 단계에서는 상기 피도금물을 순수 960~970㎖/ℓ에 무전해 도금용 촉매부여제 20~30㎖/ℓ 및 37중량% 염산 5~15㎖/ℓ가 혼합된 20~30℃ 온도의 처리액에서 1~10분 동안 침치하였다가 수세하며,상기 무전해 니켈도금 단계에서는 상기 피도금물을 순수 또는 이온교환수 740~770㎖/ℓ에 제 1 무전해 니켈도금 약품 40~70㎖/ℓ 및 제 2 무전해 니켈도금 약품 180~210㎖/ℓ를 혼합하여 제조한 온도 40~80℃, pH 5.0~7.0, 금속 니켈농도 5.0~6.0g/ℓ인 처리액에 침지하였다가 수세하며,상기 무전해 금도금 단계에서는 상기 피도금물을 순수 또는 이온교환수 850~950㎖/ℓ에 치환 금도금 약품 80~120㎖/ℓ 및 시안화금칼륨 2.5~3.3g/ℓ를 혼합하여 제조한 온도 90~92℃, pH 4.3~4.7인 처리액에 0.06~0.09㎛/10분의 치환속도로 처리하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 3항에 있어서,상기 봉공처리 단계는 상기 피도금물을 10~30중량% 농도의 침적식 봉공처리제 수용액인 온도 25~60℃의 처리액에서 5~20초 동안 침지하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101167569B1 (ko) | 2012-01-13 | 2012-08-09 | 동진P&I산업(주) | 무전해 동 스트라이크 공정을 갖는 무전해 도금방법 |
| KR101167570B1 (ko) | 2012-01-13 | 2012-08-09 | 동진P&I산업(주) | 무전해 도금방법 |
| KR101167568B1 (ko) | 2012-01-13 | 2012-08-23 | 동진P&I산업(주) | 클리너 공정을 갖는 무전해 도금방법 |
| CN105019221A (zh) * | 2014-08-20 | 2015-11-04 | 太仓市璜泾太华化纤助剂厂 | 一种提高化纤白度的化纤助剂 |
| KR20200110887A (ko) | 2019-03-18 | 2020-09-28 | 주식회사 엠에스씨 | 자동차 lds 전장 부품용 무전해 중성-중온 니켈도금액 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101167569B1 (ko) | 2012-01-13 | 2012-08-09 | 동진P&I산업(주) | 무전해 동 스트라이크 공정을 갖는 무전해 도금방법 |
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| KR101167568B1 (ko) | 2012-01-13 | 2012-08-23 | 동진P&I산업(주) | 클리너 공정을 갖는 무전해 도금방법 |
| CN105019221A (zh) * | 2014-08-20 | 2015-11-04 | 太仓市璜泾太华化纤助剂厂 | 一种提高化纤白度的化纤助剂 |
| KR20200110887A (ko) | 2019-03-18 | 2020-09-28 | 주식회사 엠에스씨 | 자동차 lds 전장 부품용 무전해 중성-중온 니켈도금액 |
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