JPS63232938A - Polishing method - Google Patents

Abstract

PURPOSE:To make stock removal easily measurable and also a form error eliminable on the basis of measurand, by installing a presser member, pressing a tapelike abrasive member to a workpiece, and also a work quantity measuring device, removing this abrasive member and setting it down to a probe. CONSTITUTION:In this device, there is provided with a nose 38 which presses a lap tape 39 to a polishing surface of a work 1 at constant pressure and polishes it, and the nose 38 is constituted so as to use it as a probe for a work quantity measuring device after removing the lap tape 39. In consequence, the polishing device is usable for the work quantity measuring device in common whereby the work 1 is measurable in an inexpensive manner. And, any problem on setting slippage will not be caused there, and after measurement, corrective polishing can be done on the basis of measured data at once, thus machining time is sharply reducible. In addition, full automation ranging from measurement to corrective machining comes possible, and thereby operating work is sharply reduced as well, so that manufacturing cost is also reducible.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a polishing apparatus, and more particularly to a polishing apparatus having a partial correction polishing function and a processing amount measuring function, which can also be used as a measuring device.

[Conventional technology] In order to process a workpiece such as a lens into the designed surface shape with high precision and obtain a smooth optical mirror surface, the surface created by grinding etc. is finished by uniform polishing. After shape measurement, a partial correction polishing process is required to polish the surface while removing local shape errors based on the measurement results. A conventional device used for this partial correction polishing process is shown in FIG.

In this figure, 1 is a rotating work such as a lens, 2 is a felt attached to the tip of a spindle 4 rotated by a drive motor 3, the spindle 4 is supported by a bracket 5 via a ball bearing, and the bracket 5 is It is attached to a slide @6 that is movable in the direction of the workpiece 1.

In the conventional apparatus, with the above configuration, the felt 2 coated with an abrasive material is pressed against the rotated work 1, and the felt 2 is rotated by the drive motor 3 to partially correct and polish the work 1.

[Problems to be Solved by the Invention] However, in the conventional device as described above, since ball bearings are used to support the spindle 4, highly accurate rotation cannot be obtained, and as a result, the swinging of the felt 2 ( rotational shake)
There is a problem in that the area that contacts the processing surface of the workpiece 1 becomes larger, making it difficult to locally polish a minute area. Furthermore, since the portion of the felt 2 that contacts the workpiece 1 is always at the same position, there is a problem that the abrasive material applied to the felt 2 causes clogging and the amount of polishing of the workpiece 1 is unstable. In addition to the above-mentioned felt, Bakelite and cast iron are used as tools, and as abrasives, paste-like diamond + grease or a mixture of diamond oil (or water), etc. are used. However, there is a problem in that the amount of polishing cannot be maintained constant because the abrasive materials are floating abrasive grains.

In view of the above-mentioned problems, the present invention makes it possible to easily measure the amount of polishing to be performed on a minute part of a workpiece, and to accurately and stably correct local shape errors based on the measured amount. The purpose of the present invention is to provide a polishing device that can remove

Means for Solving Problem E] In order to achieve the above object, the present invention provides a pressing member with a convex tip that presses a tape-shaped abrasive member against the processing surface of a workpiece at a constant pressure to polish the surface, and a tape-shaped abrasive member The present invention is characterized by comprising a machining amount measuring means that uses the press member as a probe to measure a machined surface in a state where the member is removed from the press member.

[Function] In the present invention, the tape-shaped abrasive member is removed from a pressing member that polishes the processed surface of a workpiece by pressing it at a constant pressure, and the pressing member is used as a measuring element of a processing amount measuring means. Since the polishing device can be used as a processing amount measurement device, it is possible to measure the workpiece easily and inexpensively, and there is no problem of setting deviation, and after measurement, correction polishing can be performed immediately based on the measured data. This allows for a significant reduction in processing time. Furthermore, since it is possible to fully automate everything from measurement to correction processing, operational work is significantly reduced and manufacturing costs can be reduced.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

A. Overall Structure of Polishing Apparatus FIGS. 1 and 2 show the overall structure of an embodiment of a polishing apparatus to which the present invention is applied. In FIG. 1 showing the overall appearance of the device from the front, IO is a surface plate, 11 is a turning table fixed on the surface plate and can be rotated horizontally, and 12 is a turning table 11.
The rotation of the turning table 11 is transmitted through a small diameter gear 14 that meshes with the large diameter gear 13 fixed above the gear 12, and an encoder (hereinafter referred to as the turning angle) that reads the rotation angle of the turning table 11 (hereinafter referred to as the turning angle). Angle detector), 15 is a bracket that fixes the encoder 13 on the surface plate IO. 16 is an origin switch for detecting the origin of the turning angle of the turning table 11, and 17 is a support for fixing the origin switch 1B on the surface plate IO.

18 is a base on the work side fixed to the rotary gear 12 of the turning table 11; 19 is a linear guardrail fixed to the base 18; 20 is a slider mounted on the linear guardrail 19 and capable of sliding on the linear guardrail 19; 21
2 is a spindle mounted on a slider 20, and 22 is a work drive motor that rotates a work l attached to the tip of the spindle 21 via the spindle 21. 23 is a work feed handle for moving the slider 20 to align the center of curvature of the work 1 with the center of rotation of the turning table 11; 24 is a locking screw for stopping the movement of the slider 20;

25 is a base on the tool side fixed to the surface plate 10, 26 is a linear guardrail fixed to the base 25, 27 is a slider mounted on the linear guardrail 26, and 28 is a slider 2
7 is a feed screw that slides linearly in the horizontal direction; 29 is a handle attached to the feed screw 28; 30 is a bearing that supports the feed screw 28 on the base 25; 31 is a bearing box fixed to the slider 27; is an air slide shaft that is supported by a bearing box 31 and slides in the horizontal direction; 33 is a slide @32
It is a weight that applies weight to. The weight 33 is fixed to a pin 34 protruding from the end of the slide 32, attached to the lower end of a wire 36 wound around a pulley 35 attached to the bearing box 31, and is attached to the slide shaft 33 by its own weight.
2 in the direction of the workpiece 1 with a constant pressure. 37
is a lock that stops the movement of the slider 27.

38 is a tool (hereinafter referred to as a nose) with a spherical tip that is attached to the tip of the slide lll1l132 and presses the wrap tape 39 against the workpiece 1. The abrasive material is uniformly applied to one surface of the wrap tape 39 on the workpiece side. The fine protrusions remaining on the surface of the workpiece 1 are scraped off with a uniform abrasive material by the movement of the tape 39, and polished to a mirror finish. An abrasive supply device 40 supplies the wrap tape 39 between the workpiece 1 and the nose 38, and has a supply reel 41 for sending out the tape and a take-up reel 42 for winding the tape.

Next, in Figure 2 showing the overall appearance of the device from above,
43 is a turning table drive motor that turns the turning table 11, 44 is a feed screw that slides the slider 27, and a handle 29 is attached to this feed screw 44. 45 is a bearing that supports the feed screw 44. 46 is a one-digit scale mounted on the base 25; 47 is an origin switch that detects the origin of the scale 46; 48 is a slide shaft drive motor that slides the slide shaft 32; 49
5 is a motor bracket fixed to the bearing box 31, 50 is a feed screw, and 51 is a stopper attached to the feed screw 50.

In the above configuration, the work 1 is available in various sizes and can be freely attached to and detached from the spindle 21. When starting work, the worker (operator) turns the handle 23 on the right side of the figure, reads the value on the scale 46, moves the slider 20 to a position that matches the size of the workpiece 1, tightens the lock screw 24, and locks the slider. Fix 20 movements. Next, the worker
9 to slide the slider 27 until the nose 38 attached to the abrasive supply device (tape feed device) 40 comes close to the workpiece 1, and then fix the slider 27 with the lock screw 37.

Next, when the operator presses down a start button (not shown), the drive motor 48 starts, rotates the feed screw 50, and slides the slide 11iIb32 in the direction of the workpiece 1. At this time, by using an aerostatic bearing as the bearing box 31, the running (movement) of the slide shaft 32 can be controlled with high precision. In this way, the nose 38 attached to the abrasive supply device 40 fixed to the slide shaft 32 is brought into contact with the workpiece 1 with the wrap tape 39 interposed therebetween. At this time, the abrasive coated surface of the wrap tape 39 hits the work l.

Further, since the weight 33 acts on the slide @32, the nose 38 is pressed against the workpiece 1 with a constant pressure.

Next, the drive motor 22 is started to rotate the workpiece 1, and at the same time, the drive motor (described later) runs the lap tape 39 under tension in a substantially vertical upward direction along the curved surface of the tip of the nose 38, thereby polishing the lap tape 39. Depending on the material, only the part where the tip of the nose 38 and the workpiece l/J) are in contact is polished.

At this time, the amount of polishing with the lap tape 39 depends on the force with which the nose 38 presses the workpiece 1, the pressurizing time, the rotational speed of the workpiece 1, the running speed of the lap tape 39, and the lap tape 39.
varies depending on the type of abrasive applied. The force F exerted by the nose 38 on the workpiece 1 is the weight W of the weight 33.
It can be adjusted by Further, by changing the speed of the drive motor 43, the pressurizing time T during which the nose 38 is in contact with a certain angle of the workpiece 1 via the wrap tape 39 can be adjusted. Further, in order to partially polish the workpiece 1, the drive motor 43 is driven to rotate the rotary table 11 at a relatively high speed until the nose 38 touches the part of the workpiece 1 to be polished (swivel angle). The turning angle at this time is read by the encoder 13. Further, by using an aerostatic bearing for the bearing of the turning table 11, highly accurate rotation control can be obtained.

B. Structure of Abrasive Supply Device FIGS. 3 to 8 show an abrasive supply device 4 to which the present invention is applied.
3 is a front view, FIG. 4 is a right side view, FIG. 5 is a plan view, FIG. 6 is a cross section taken along line A-A in FIG. 3, and FIG. 3 and FIG. 8 show a section C--C in FIG. 3.

In FIG. 3, reference numerals 55 to 60 indicate guide rollers, and the wrap tape 39 supplied from the supply reel 41 is wound and fed in this order around the guide rollers 55 to 60 and a rotationally driven rubber ring 61, and finally is wound. It is wound up with a take-up ream 42.

Guide rollers 55, 56, 58.60 are rollers d+55a
, 56a, 58a, and 60a, the guide roller 57 is rotatably fixed to the bracket 62 via the arm 6.
3, it is supported movably around a support shaft 64 by its own weight from the position indicated by the solid line in this figure to the position indicated by the broken line in this figure,
The range of upward and downward movement is restricted by upper and lower stoppers 65°66. The wrap tape 39 is on the supply reel 4
1 or when it comes off the guide roller etc., the tension of the wrap tape 39 decreases and the guide roller 57 immediately descends due to its own weight.
8.

69 is a tension roller that applies appropriate tension to the wrap tape 39, 70 is a tension arm that supports the tension roller 69, 71 is a bow 1 long spring that extends the tension arm 70, and 72 is a spring that allows the tension arm 70 to rotate freely. A support shaft 73 is a spring support shaft of the tension spring 71. The tension arm 70 is biased by the tension spring 71 and presses the tension roller 69 against the rubber ring 61.
Appropriate tension is applied to the wrap tape 39 running between the tension roller 69 and the rubber ring 61.

74 is a sleeve that prevents the wrap tape 39 from coming off the nose 38; the wrap tape 39 passes through the inside of the sleeve 74, turns over at the tip of the nose 38, and passes through the inside of the sleeve 74 again to the guide roller 59. go, 7
5 is a belt that transmits rotational force to the take-up reel 42.

Next, in FIG. 4, 76 is a reel drive motor that drives the take-up reel 42 and the rubber ring 61, 77a and 77b are a pair of bevel gears that transmit the rotation of the drive motor 76 to the pulley shaft 78, and 79a and 79b are pulleys. I[[178 bearing, the above-mentioned rubber ring 61 is fixed to the pulley shaft 78. 80 is a pulley shaft on the driven side, and belt 75
Drive side pulley through! The driving force is transmitted from 1ih78. 81 is a bearing of the pulley shaft 80, 82 is a retaining ring of the pulley 1Plh80, 83 is a thrust washer provided on both sides of the take-up reel 42, and 84 is a take-up reel 42.
85 is a presser washer for the take-up reel 42, 86 is a compression spring, and 87 is a press screw that fixes the take-up reel 42 to the pulley shaft 80 via the compression spring 8G.

In FIG. 5, 88 is a support shaft of the supply reel 42, which is fixed to the bracket 62. Members 89 to 93 are used for attaching and detaching the supply reel 42, and 89 is a thrust washer, 90 is a bearing, 91 is a presser washer, 92 is a compression spring, and 93 is a presser screw.

FIG. 6 shows the structure near the arm 63, where 94 is a bearing provided on the roller shaft 57a of the guide roller 57, and 95 is a retaining ring that prevents the guide roller 57 from falling off. A groove portion (guide groove) 57b for guiding the wrap tape 39 is formed on the surface. A bearing 96 rotatably supports the arm 63 to which the kite roller 57 is attached, and is attached to the support f1h64 and prevented from slipping off by a retaining ring 97.

FIG. 7 shows the structure near the tension arm 70, where 98 is a retaining ring attached to the support shaft 72, 99 is a compression spring attached to the tension arm 70, 100 is a retaining ring of the compression spring 99, and 101 is a tension ring. Colo 69 retaining ring,
102 is a stop pin for the tension roller 69, and 103 is a stopper shaft.

Further, FIG. 8 shows the structure in the vicinity of the guide roller 60. Here, 104 is a bearing of the guide roller 60, 105 is a retaining ring, and the guide roller 60 is rotatably fixed to the bracket 62 by the roller shaft 60a. A groove portion (guide groove) 60b for guiding the wrap tape 39 is provided on the circumferential surface of the guide roller 6θ.
is formed. Other fixed guide rollers 55, 56, 58, 59 shown in FIG. 3 also have substantially the same structure as the guide roller 60 shown in FIG. 8.

As shown in FIGS. 3 and 4, the abrasive supply device (tape feeding device) 40 has its bracket 82 attached to the slide east 1132, and moves together with the nose 38 by the slide of the slide φ city 32. The wrap tape 39 wound around the supply reel 42 is wrapped around the guide rollers 55, 56, 5.
7.58, tip of nose 38, guide roller 59.6
0, and the rubber fi attached to the pulley shaft 78
It is sandwiched between the roller 61 and the tension roller 69, and is wound around the rotating winding wheel 14.

At this time, the pulley @78 is rotated by the drive motor 76 via gears 77a and 78b, causing the rubber ring 61 to rotate. The rotational speed of the drive motor 76 can be changed arbitrarily, thereby making it possible to vary the running speed of the wrap tape 39.

When the pulley @78 rotates, the pulley shaft 80 rotates via the belt 75, and the rotated pulley shaft 80 rotates the take-up reel 41 by the frictional force of the thrust washer 83. The friction force of the thrust washer 83 is
The friction force of the thrust washer 83 is generated by the biasing force of the compression spring 80 bent by the retaining screw 87.

The wrap tape 39 wound on the take-up reel 41 gradually increases its winding diameter, and the winding speed becomes faster than the speed of the tape running on the rubber ring 61.
The pulley shaft 80 and the winding wheel 41 are configured to slide through a thrust washer 83, so that the running speed of the wrap tape 39 is always kept constant. Further, the force with which the tension roller 69 presses against the rubber ring 61 is exerted by a tension spring 71, and the pressing force can be changed by changing the position of the hole in the tension arm 70 on which the tension spring 71 is hooked.

As will be described later, a tape guide groove is cut into the nose 3B to prevent the lap tape 39 from coming off, and the tip of the nose 38 is shaped into a spherical shape to enable polishing of minute parts of the workpiece 1. Therefore, it matches workpiece 1 at a point. Further, a cylindrical sleeve 74 is fitted around the outer periphery of the nose 38, and the wrap tape 39 is fed between the upper and lower grooves of the sleeve 74 and the nose 38, so that the wrap tape 39 does not come off the nose 38.

Further, the guide roller 57 is attached to the arm 63 and supported by the tension of the wrap tape 39.

The wrap tape 39 that has been wound around the supply reel 42 is wound up by the take-up reel 41 as described above, and finally the wrap tape 39 comes off the supply reel 42 and the tension of the wrap tape 39 decreases, so that the guide It becomes impossible to support the rollers 57, and the guide rollers 57 descend toward the lower end. Immediately after the guide roller 57 is lowered, the microswitch 67 is activated, stopping the drive motor 76 and stopping the running of the wrap tape 39.

On the other hand, as shown in FIG. 5, the supply reel 42 is braked by the frictional force of the thrust washer 89, applying tension to the wrap tape 39. Thrust washer 8
The frictional force 9 is applied by adjusting the presser foot 93 to deflect the compression spring 92. If the tension roller 69 is kept pressed against the rubber ring 61 when the abrasive supply device 40 is stored for a long period of time, the rubber ring 61 will deform and the running of the wrap tape 39 will become unstable during processing. Insert the stopper shaft 103 into the hole drilled in the bracket 62 and fix the tension roller 69.
9 is separated from the rubber ring 61 (see Figure 7).
.

C. Structure of Nose (Processing Tool) FIGS. 9 to 18 show examples of the structure of the nose 38 according to the embodiment of the present invention.

Figure 9 is a longitudinal section of the nose 38 portion during polishing, 1θ
The drawings show a cross section taken along line XX in FIG. 9, FIG. 11 shows a longitudinal section of only the nose 38, and FIG. 12 shows its right side. Figures 9 to 12
In the figure, 38a is a tape guide groove of the nose 38 formed along the running direction of the wrap tape 39, and 38b is a spherical portion (convex curved surface) at the tip of the nose 38. Also,
A cylindrical sleeve 74 is fitted at the groove 38a of the nose 38 to cover the groove 38a. wrap tape 3
9 is guided by the guide roller 58 and enters between the groove 38a on the lower side of the nose 38 and the sleeve 74, passes through the exposed spherical tip 38b of the nose 38, and enters the groove 3 on the upper side of the nose 38.
8a and the sleeve 74 again, and the guide roller 59
guided by. In this manner, since the sleeve 74 covers the groove portion 38a, the wrap tape 39 is accurately guided and does not come off. Further, the tip portion 38 of the nose 38
Since b is spherical, it makes contact with the workpiece 1 at a point, making it possible to polish a minute portion of the workpiece 1.

The shape of the tip of the nose 38 is required to have high shape accuracy in order to apply pressure to the correct processing amount J, and in particular, in the embodiment of the present invention, highly accurate sphericity is required. However, in the integrally shaped nose 38 as shown in FIGS. 9 to 12, it is difficult to process the spherical surface of the tip portion 3flb, and it is difficult to obtain a highly accurate spherical surface.

13 to 18 show an embodiment in which a separate steel ball 106 is attached to the tip of the nose 38 to obtain a highly accurate spherical surface. Steel balls 106 having the required high sphericity are easily available, and commercially available steel balls (eg, bearing balls) can also be used. This steel ball 106 is fixedly attached to the tip of the nose body 38c using an adhesive or the like, and tape guide grooves 106a are formed on the upper and lower surfaces of the nose body 38 and the steel ball 106. When the workpiece 1 has a large amount of machining, the amount of polishing is increased by using a steel ball 106 with a relatively large diameter as shown in the embodiments shown in FIGS. 13 to 16, and when the amount of machining is small, such as a small diameter workpiece For this purpose, it is preferable to use a steel ball 106 having a relatively small diameter as shown in FIGS. 17 and 18.

D. Processing principle 19 to 21 show the processing principle of the embodiment of the present invention.

As shown in FIG. 19, with the surface of the lap tape 39 coated with the abrasive material facing the workpiece 1, press the tip of the nose 38 against the part of the workpiece L to be polished with the lap tape 39 sandwiched between the workpieces 1 and 1. When the wrap tape 39 is rotated in the clockwise direction of the arrow and the wrap tape 39 is run upward, the part of the workpiece 1 that the nose 38 hits is polished. Since the abrasive material on the lap tape 39 can be applied uniformly, the problem of conventional floating abrasive grains does not occur, and the amount of polishing can be kept constant. In addition, new abrasive material is always supplied to the workpiece 1 during polishing by the running of the lap tape 39, so clogging of the abrasive material does not occur, and the machined surface is always polished with an ideal cutting edge, so the polishing The amount is stabilized and a highly accurate mirror finish can be obtained. In addition, since the tool (nose) 38 itself is not rotated, there is no problem caused by rotational wobbling of the tool, and since the tip of the nose 38 is made into a true spherical surface, the nose 38 is attached to the workpiece 1.
8 hits the spot, allowing for highly accurate local polishing in extremely small areas. Furthermore, since the constant pressure with which the nose 38 is pressed against the workpiece 1 is adjusted by the weight 33, the workpiece 1 can be polished with the optimum machining pressure, and the amount of machining can be stabilized.

Here, the amount of polishing performed by the lap tape 39 is:
As mentioned above, it is determined by the rotational speed of the workpiece 1, the traveling speed of the wrap tape 39, the type of abrasive applied to the wrap tape 39, and the pressing force and pressurizing time with which the nose 38 is pressed against the workpiece 1.

Therefore, as shown in FIG. 20, the workpiece 1 is rotated at a constant speed of v2, and the wrap tape 39 is rotated at a speed of V2.

If the nose 38 travels at a constant speed, the pressing force F applied to the work l by the nose 38 is adjusted to a constant pressure by the weight 33, and the type of abrasive material in the wrap tape 20 is constant, then the nose 38
It can be seen that by adjusting and controlling the pressurizing time for pressing the workpiece 1 against the workpiece 1, it is possible to appropriately control the polishing surface and obtain highly accurate mirror polishing. However, the minute protrusions 107 on the workpiece 1 generally vary in size, and their positions also vary as shown in FIG. Move the workpiece 1 to the measured position and place the nose 38
It is necessary to press the protrusion 107 and increase or decrease the pressing time depending on the size of the protrusion 107. This movement of the workpiece 1 is achieved by controlling the rotation angle of the rotation table 11 with the drive motor 43, and the pressurizing time is controlled by the rotation angle of the rotation table 11.
This is achieved by variable control of the rotation speed of the Furthermore, it has been confirmed through experiments that the amount of machining described above and the rotation speed are in an inversely proportional relationship.

E. Configuration of control device FIG. 22 shows an example of a circuit configuration of a control system according to an embodiment of the present invention.

In this figure, reference numeral 110 denotes a control computer, which controls processing according to the present invention according to the control procedure shown in FIG. 23, which is stored in advance in a memory 111. 112
is a workpiece ΦlI + motor driver (drive circuit) that drives and controls the drive motor 22 that rotates the workpiece 1, 113
114 is a tape feed motor driver that drives and controls the drive motor 76 that feeds the wrap tape 39; 114 is a nose feed motor driver that drives and controls the drive motor 48 that feeds the nose 38 via the slide shaft 32; these motor drivers 112 to 114; controls the rotation of the corresponding motor in accordance with a command signal (control signal) from the control computer LLO. 115 is a rotation axis angle detector which inputs the output from the encoder 13 that detects the rotation angle of the rotation table 1 and sends rotation axis angle data to the control computer 110; 116 rotates (swivels) the rotation table 11; This is a pivot shaft motor driver that controls the drive motor 43 to cause the rotation.

Reference numeral 117 denotes a cannibal program manual unit that manually generates a cannibal program as described below, which is supplied from the main computer 118, and the cannibal program is composed of combined data of the rotation angle and rotation speed of the rotation table IT. 119 is an FDF driver that drives and controls a floppy disk (FD) 120;

Next, an example of the control operation of the embodiment of the present invention will be described with reference to the flowchart of FIG.

First, before partially modifying the workpiece 1, the control computer 110 inputs a correction program (cannibal program) from the cannibal program input section 117 and stores it in a predetermined area of the memory 111 (step S1). Next, the operator turns the handle 29 to align the center of curvature of the workpiece 1 with the turning table 1.
When the control computer 110 confirms this coincidence (step S2), the control computer 110 issues a command to the rotation axis motor driver 116 based on the correction program stored in the memory 111. The drive motor 43 is activated and the turning table 11 is turned to the part to be corrected on the workpiece 1 (step 53).

Next, the control computer 110 issues a command to the work shaft motor driver 112 to operate the drive motor 22,
While rotating the workpiece 1, a command is issued to the tape feed motor driver 113 to operate the drive motor 76 to run the wrap tape 39 (step S4).

Next, the control computer 110 issues a command to the nose feed motor driver 114 to operate the drive motor 48, and stops the nose 38 against the workpiece 1 with the wrap tape 39 sandwiched therebetween (step S5). Subsequently, the control computer LLO adjusts the rotation axis motor driver 1 based on the modification program stored in the memory 111.
16 to operate the motor 43, and transmit the rotation angle data from the encoder 13 to the rotation angle detector 115.
(step 56).

Next, the control computer 110 outputs the rotation speed corresponding to the detected rotation angle to the rotation axis motor driver 116 based on the correction program stored in the memory 111, and controls the rotation speed of the motor 43 (step S7). )
. The control operations in steps S6 and 57 described above are sequentially repeated until the detected value of the encoder 13 reaches the predetermined end angle stored in the correction program, and the detected turning angle detected by the encoder 13 reaches the predetermined end angle described above. (Step S8), the control computer 110 issues a command to the nose feed motor driver 114 to operate the 1 drive motor 48 to separate the wrap tape 39 from the workpiece 1 (Step S9), and the workpiece φ small motor driver 11
2 and the tape feed motor driver 113 to stop the single drive motors 22 and 76, and the correction polishing of one portion is completed (step S10).

When all of the correction program data is not completed, that is, when other parts of the work 1 are also to be corrected and polished, the process returns to step S3 described above and the processes from step S3 to SIO are repeated until the correction program is completed (step Sll). .

F. Structure of processing amount measuring means By providing a non-contact measuring device to the apparatus according to the embodiment of the present invention shown in FIG. 1, processing amount measuring means (
The 24th point is that it can be easily used (shared) as a device).
As shown in the figure.

In FIG. 24, reference numeral 121 denotes a non-contact measuring device, and for example, a general non-contact measuring device such as a non-contact electric micrometer such as Magnescale, a laser range finder, an optical scale, etc. can be used. The mounting position of this non-contact measuring device 121 is on the slide shaft 32 which is displaced integrally with the nose 38.
It may be placed at any position as long as the displacement of can be measured, for example, it may be placed behind the slide shaft 32 as shown in this figure. 1
22 is a position-adjustable stand that fixes the non-contact measuring device 121 at a mounting position, and 123 is a measuring meter that can amplify and display the output signal of the non-contact measuring device 121. After the measurement data of the non-contact measuring device 121 is amplified, it is converted into a digital signal and sent to the control computer 110 in FIG. 22 for processing. Other components are the same as those in the embodiment shown in FIG. 1, so detailed explanation thereof will be omitted.

In the above configuration, before processing the workpiece (workpiece) 1, the lap tape (tape-like abrasive member) 39 is pressed to perform grinding and grinding.
The wrap tape 39 is removed from the above-mentioned nose (pressing member) 38 to be polished, and the nose 38 is brought into direct contact with the workpiece 1 as a probe of a processing amount measuring means.

After bringing the nose 38 into direct contact with the workpiece 1, the turning angle of the turning table 11 is set to the original position, the bearing box 31 is fixed with the lock screw 37, and the turning table 11 is rotated.

In this way, if the workpiece 1 is rotated after the nose 38 is brought into direct contact with the workpiece 1, the nose 38 will rotate the workpiece 1 at a constant pressure via the slide shaft 32 due to the pressing force of the weight 33.
As shown in Fig. 25, the workpiece 1
The slide φ+h132 to which the nose 38 is attached is also simultaneously displaced integrally with the nose 38.

The displacement of this slide shaft 32 is measured at a predetermined pitch by a non-contact measuring device 121 and outputted to the control computer 110. The control computer 110 uses the measurement data of the measuring device 121 and the rotation table 11 obtained from the encoder 13.
After temporarily storing the turning angle data in the memory 111,
work! The difference (error) from the design data (ideal value) is calculated, and correction data consisting of the correction machining amount and its machining position is created.

In particular, in this embodiment, the slide shaft 32 is supported by an air bearing in the bearing box 31, an appropriate constant contact pressure is applied by the weight 33, and the tip of the nose 38 is formed into a spherical shape for point contact. , has extremely good followability and can form fine irregularities on the surface of the workpiece 1. Furthermore, in this embodiment, since the pressing member, which is a tool, can also be used as a measuring element, there is no need to use an expensive dedicated measuring device, and problems caused by setting adjustment of the workpiece 1 (setting deviation) can be avoided. This has the advantage that this does not occur, and corrective grinding and polishing can be performed immediately after measurement, resulting in a significant reduction in processing time. Furthermore, since it is possible to fully automate everything from measurement to correction processing, operational work is significantly reduced, and manufacturing costs can be reduced.

G. Structure of Machining Data Creation Means FIG. 26 shows an example of the construction of a machining data creation means for creating machining data (correction program) provided to the partial correction polishing apparatus as shown in FIG. In this figure, 131 is a measuring device that outputs an error curve (data) from measurement data and an ideal curve (data) to be described later; 132 is a floppy disk (FD) that provides the ideal curve to the measuring device 131;
133 is an automatic programmer that outputs machining data from an error curve from the measuring device 131 and a cutting amount curve (data) to be described later; 134 is a floppy disk that provides the cutting amount curve to the automatic programmer 133; 135 is an automatic programmer 1;
This is a processing machine as shown in FIG. 1, which manually inputs the processing data obtained from 33 as a correction program and performs a partial correction polishing process.

The measuring device 131 includes a displacement measuring means such as the non-contact electric micrometer 121 shown in FIG. 24, and an arithmetic control means such as the control computer or main computer 118 shown in FIG. In accordance with the processing procedure as shown in FIG. 29 stored in advance in a storage means such as the above, the measurement value of the work l shown by the turning angle θ and the deviation from the spherical surface of the work 1 as shown in FIG. 27(A),
The ideal curve (
Based on the deviation γ from the design curve), an error curve expressed using the γ-θ method as shown in FIG. 27(B) is calculated and output.

The automatic programmer 133 includes arithmetic control means such as the main computer 118 shown in FIG.
31 and the error curve as shown in FIG.
From the cutting amount curve as shown in Figure 7 (C), the 30th
Processing data as shown in FIG. 27(D) is output according to the processing procedure shown in the figure.

FIG. 27(C) shows a cutting amount curve representing the relationship between the turning angle θ and the cutting amount when the turning table 11 is turned at a constant speed. When the turning angle θ is close to zero (origin), the nose 3B is located near the center of the rotating workpiece 1, and the turning angle θ
As the rotation speed increases, the nose 38 moves relatively toward the outer circumferential direction of the work l, so the circumferential speed of the rotating work 1 decreases at the center, and if the rotation speed is constant, the rotation angle θ increases. Figure 27 (C) shows that the amount of processing decreases accordingly.
) is shown. Also, the amount of cutting decreases as the rotation speed increases, and increases as the rotation speed decreases, so see Figure 27 (C).
As shown by the broken line curve, the cutting amount is inversely proportional to the turning speed.

Therefore, the automatic programmer 133 compares the error curve and the cutting amount curve at a predetermined pitch (at the same turning angle), and calculates the turning speed for each turning angle during partial correction machining. For example, in a certain turning μjOI, the error is 5 μm and the turning speed is constant V.

Assuming that the amount of cutting is 1 μm, it is thought that the parts to be machined during machining are randomly scattered on the workpiece 1, so the machining data given to the machining machine 135 is as shown in FIG. This is an instruction to turn at a turning speed calculated between turning angles.

The processing machine 135 manually inputs the processing data as a correction program and performs a partial correction polishing process on the workpiece 1 according to the control procedure shown in FIG. 31 or the control procedure shown in FIG. 23 described above.

Next, an example of the operation of the measuring device +31 described above will be described in detail with reference to the flowchart of FIG.

As shown in FIG. 24 above, a non-contact measuring device (for example,
A non-contact electric micrometer) 121 is placed behind the slide shaft 32, the workpiece 1 is attached to the spindle 21,
By operating the handle 29, align the center of curvature of the work l with the center of rotation of the turning table II, remove the wrap tape 39 from the nose 38, move the nose 38 closer to the work 1 by operating the handle 29, and lock the bearing box 31 with the lock nut. Fix it at 37. Further, the weight 33 is selected to provide an appropriate contact pressure. After completing the above preparation work, the operator presses a measurement start button on the operation desk (not shown). By pressing this button, the control procedure shown in FIG. 29 is started.

First, in response to a measurement start instruction, the control computer 11
0 is the drive motor 4 via the rotation axis motor driver 116.
3 and set the rotation angle of the rotation table 11 to the origin O°. This origin position is detected by the origin switch 16 (see FIG. 1) (step 521).

Next, the control computer 110 starts the drive motor 48 via the nose feed motor driver 114 to advance the slide @ 32 and move the nose (hereinafter referred to as a contactor).
38 and workpiece 1 are brought into direct contact (step 522)
. Subsequently, the control computer 110 controls the slide shaft 32.
Set the current position to zero (step 523), output drive number 43 to the rotation axis motor driver 116 to rotate the rotation table 11 and the gear 12 of the table at a constant speed (step 524), and set the constant pitch angle (swivel The non-contact measuring device 121 measures the position of the slide shaft 32 for each angle).
From step 5, manually store it in the memory 111 in sequence.
25), the processes of steps S24 and S25 are repeated until the end angle of the turning table 11 is reached (step 526). The rotation angle of the rotation table 111 is detected by the encoder 13.

As a result, data of a measured value curve as shown in FIG. 27(A) is stored in the memory 111. When the detected rotation angle reaches the predetermined end angle of the rotation table 111, the control computer 110 starts the nose feed motor driver 1.
14 to reversely rotate the drive motor 48, thereby retracting the slide @32 and separating the contactor 38 from the workpiece 1 (step 527), and then the memory 1
The error value γ (θ) is calculated by subtracting the ideal curve (ideal value data) D2 of the floppy disk 132 from the above-mentioned measurement data DI stored in 11. (Step 528), and the calculation results are sequentially written to the floppy disk 112 as an error curve (data) (Step 529).

Next, an example of the operation of the automatic programmer 133 described above will be described in detail with reference to the flowchart in FIG.

First, the control computer 110 (or the main computer 118) reads an error curve (measurement data) from the floppy disk 112 via the FD driver 119, and stores it in the memory 111. Also, the cutting curve (cutting amount data) is read from the floppy disk 113,
The data is stored in the memory 111 (step 531).

Next, the above-mentioned cutting amount data (cutting curve) and measurement data (
Calculate the cutting time for each rotation angle from the error curve (step 532), calculate the rotation speed for each corresponding rotation angle from the reciprocal of the calculated cutting time (step 533), and save the calculation results to the floppy disk 120 as machining data. Store (step 534).

FIG. 31 shows an example of the operation of the processing machine 135 described above, but since it is almost the same as the control procedure shown in FIG. 23 described above, detailed explanation thereof will be omitted.

In the above-described embodiment of the present invention, when removing the protruding portion of the machined surface of the workpiece 1 by grinding and polishing, the speed V of the lap tape 39 is kept constant and the amount of polishing ( Although the speed V2 of the workpiece 1 (in this example, the turning speed) is controlled in inverse proportion to the amount of grinding (grinding amount), the present invention is not limited to this. The speed V may be controlled in proportion to the amount of polishing (amount of grinding), or both controls may be combined.

Structure of the H2 processing pressure stage In the embodiment of the present invention, a weight 33 is used as a means for applying processing pressure in the direction of the workpiece to the tool of the polishing apparatus equipped with the abrasive supply device, as shown in FIGS. 1 and 2. As shown in FIG.
The slide shaft 3 is statically supported by the static pressure air bearing 1.
A constant pressing force is applied to the re-nose (tool) 38 by the weight of the weight 33 via a wire 36 whose one end is connected to the re-nose (tool) 38. In this way, since the machining pressure is applied by the weight 33, there is no change in the machining pressure due to movement of the slide shaft 32. In addition, since the slide I+h 32 is supported by static pressure, the nose 38 can be scraped smoothly.
Trace the shape of the polished surface. Also, wrap tape 3
Since the pressing force of the workpiece 9 on the workpiece 1 is always constant, stable polishing can be performed.

Furthermore, as shown in FIG. 24, even when used as a polishing amount measuring means, extremely highly accurate measurement data can be obtained for the same reason as described above using the pressurizing means.

It goes without saying that the present invention can also be applied to a grinding device.

[Effects of the Invention] As explained above, according to the present invention, the tape-shaped abrasive member is removed from the pressing member that presses the tape-shaped abrasive member against the processing surface of the workpiece at a constant pressure to polish the surface of the workpiece, and the pressing member Since it is used as the measuring point of the processing amount measuring means, the polishing device can be shared as the processing amount measurement device, and the workpiece can be easily measured on the door side. There is also no problem of setting deviation, and the measurement is easy. After that, corrective polishing can be performed immediately based on the measured data, resulting in a significant reduction in processing time. Furthermore, since it is possible to fully automate everything from measurement to correction processing, operational work is significantly reduced and manufacturing costs can be reduced.

[Brief explanation of drawings]

FIG. 1 is a front view showing an example of the overall configuration of a polishing device to which the present invention is applied, FIG. 2 is a plan view thereof, and FIG. 3 is a front view showing an example of the overall configuration of the abrasive supply device of FIG. 1. , Figure 4 is its right side view, Figure 5 is its front view, Figure 6 is a sectional view taken along the 8-in section line in Figure 3, and Figure 7 is along the B-8 section line in Figure 3. 8 is a sectional view along the line C-C in FIG. 3, and FIG. 9 is a sectional view along the nose (
Fig. 1O is a longitudinal cross-sectional view showing an example of the configuration of the polishing tool (abrasive tool), Fig. 1O is a cross-sectional view taken along the line
Fig. 1 is a vertical sectional view showing the configuration of only the nose in Fig. 9, Fig. 12 is a right side view of the nose in Fig. 11, Fig. 13 is a longitudinal sectional view showing another embodiment of the nose, and Fig. 14. is a right side view of the nose in FIG. 13, FIG. 15 is a vertical sectional view showing a modified example of the nose, FIG. 16 is a right side view of the nose in FIG. 15, and FIG. 17 is a further modified example of the nose. FIG. 18 is a right side view of the nose in FIG. 17, FIG. 19 is a perspective view of main parts showing the processing principle of the embodiment of the present invention, and FIG. 20 is the processing principle of the embodiment of the present invention. The schematic shown in FIG. 21 is a sectional view taken along the Y-Y cutting line in FIG. 19, FIG. 22 is a block diagram showing an example of the circuit configuration of the control system according to the embodiment of the present invention, and FIG. 23 is a processing diagram of the embodiment of the present invention. FIG. 24 is a front view showing the configuration of the embodiment of the present invention when the polishing device is also used as a polishing amount measuring means, and FIG. 25 is a flowchart showing an example of the control operation when
4 is a horizontal sectional view showing the nose portion during measurement, FIG. 26 is a block diagram showing the configuration of the processing data creation system according to the embodiment of the present invention, and FIGS. 27(A) to (D) are shown in FIG. 28 is an explanatory diagram showing a specific example of the processed data in FIG. 26; FIG. 29 is a flowchart showing an example of the operation of the measuring instrument in FIG. 26; 30. FIG. 31 is a flowchart showing an example of the operation of the automatic programmer shown in FIG. 26, FIG. 31 is a flowchart showing an example of the operation of the processing machine shown in FIG. 26, and FIG. 32 is a front view of main parts showing the configuration of the conventional device. DESCRIPTION OF SYMBOLS 1... Workpiece, 11... Turning table, 13... Encoder, 16... Origin switch, 20... Slider, 21... Spindle, 22... Work drive motor, 23... Handle, 24... Lock screw, 27... Slider, 28... Feed screw, 29... Handle, 30... Bearing box, 32... Slide shaft, 33... Weight, 37 ... lock screw, 38 ... nose (contact), 39 ... wrap tape, 40 ... abrasive supply device, 41 ... supply reel, 42 ... take-up reel, 43 ...・Swivel table drive motor, 46...Scale, 47...Origin switch, 48...Slide shaft drive motor, 55-60...Guide roller, 61...Rubber ring, 63...Arm, 67... Micro switch, 69... Tension roller, 70... Tension arm, 76... Reel drive motor, 83... Thrust washer, 89... Thrust washer, 106... Steel ball, 110...Control computer, 111...Memory, 112-114.118...Motor driver, +17
. . . Canadian program input section, 121 . . . Non-contact measuring device, 131 . . . Measuring device, 133 . Ron 8, Su, 'S 1 To 1'S+S List 1, Figure 13 Figure 14 Figure 17 Figure 18 The power of the work rotation is great, and now the power is 0 work original king! Pass 4 perspective view T9 Figure 9 (Ichigo Itari's power loe
Figure 8 Automatic programmer addition]-Machine Figure 31

Claims (1)

[Scope of Claims] 1) A pressing member having a convex tip for pressing a tape-shaped abrasive member against the processing surface of a workpiece at a constant pressure to polish the surface of the workpiece; A polishing apparatus comprising a processing amount measuring means that uses a pressing member as a measuring element for measuring the processing surface. 2) In the apparatus according to claim 1, the processing amount measuring means measures the displacement of the pressing member that directly contacts the processing surface of the workpiece at a predetermined speed by means of a driving means at a predetermined rotation pitch. a non-contact type or contact type displacement measuring device that detects each time, the detected output value of the displacement measuring device, an ideal value of the pre-machined surface prepared in advance, and a turning angle of the workpiece. 1. A polishing device comprising: calculation means for calculating the amount of polishing to be performed and the position of polishing.